公开(公告)号：EP1678471A2

公开(公告)日：2006-07-12

申请号：EP04816175.6

申请日：2004-08-19

Applicant: ITT MANUFACTURING ENTERPRISES, INC.

Inventor： DOBBS, Michael, E. ,  PRUITT, Jeff, D. ,  GYPSON, Matthew, L. ,  NEFF, Benjamin, R.

IPC: G01J4/04 ,  G01N21/21

CPC classification number: G01N21/21 ,  G01J3/447 ,  G01N2021/1757 ,  G01N2021/1793 ,  G01N2201/0691

Abstract: Remotely sensing a target may include generating a first beam of optical radiation that is modulated at a first frequency and polarized at a first polarization. A second beam of optical radiation that is modulated at a second frequency and polarized at a second polarization may also be generated. The first and second beams of optical radiation may be transmitted to the target. Radiation at the first polarization and radiation at the second polarization may be detected from the target using a phase sensitive technique and the first and second frequencies.

公开(公告)号：EP1026495B1

公开(公告)日：2005-06-15

申请号：EP99306533.3

申请日：1999-08-19

Applicant: J.A. WOOLLAM CO. INC.

Inventor： Hertzinger, Craig M. ,  Johs, Blaine D.

IPC: G01N21/21 ,  G02B26/08 ,  G02B27/28 ,  G01J4/00 ,  G02B5/30

CPC classification number: G01J3/447 ,  G01J4/00 ,  G01J2003/2866 ,  G01N21/211

公开(公告)号：EP1396739A1

公开(公告)日：2004-03-10

申请号：EP03016370.3

申请日：2003-07-19

Applicant: CARL ZEISS JENA GmbH

Inventor： Wolleschensky, Ralf

IPC: G02B5/30 ,  G02B27/10 ,  G02B27/28 ,  G01N21/64 ,  G01N21/47 ,  G01N15/14 ,  G02B21/06

CPC classification number: G01N15/1434 ,  G01J3/02 ,  G01J3/0224 ,  G01J3/0229 ,  G01J3/10 ,  G01J3/4406 ,  G01J3/447 ,  G01J2003/1282 ,  G01J2003/1286 ,  G01N21/6445 ,  G01N21/6458 ,  G01N2015/0065 ,  G01N2015/149 ,  G01N2015/1493 ,  G02B21/002

Abstract: Verfahrenund Anordnung zur einstellbaren Veränderung von Beleuchtungslicht und/oder Probenlicht bezüglich seiner spektralen Zusammensetzung und/oder Intensität,
wobei mit ersten Polarisationsmitteln (Pol1) eine räumliche Trennung in Strahlungsanteile unterschiedlicher Polarisation erfolgt, mit ersten Dispersionsmittel (Disp1) eine spektrale räumliche Aufspaltung mindestens eines Strahlungsanteils vorgenommen wird, der Polarisationszustand mindestens eines Teils des spektral räumlich aufgespaltenenen Strahlungsanteils verändert wird und über zweite Polarisationsmittel (Pol2) eine räumlichen Trennung und/oder Zusammenführung von Strahlungsanteilen unterschiedlicher Polarisation vorgenommen wird, wobei vorteilhaft eine räumliche Zusammenführung von bezüglich ihres Polarisationszustandes veränderten und nicht veränderten Strahlungsanteilen durch zweite Dispersionsmittel (Disp2) erfolgt.

Abstract translation: 第一偏振器（POL 1）在空间上分开并重新ausrichtet不同的偏振与入射光束的光束部分。 第一分散（DISP 1）分裂的光束部分，成由空间上分布的频谱。 该部分的偏振状态发生变化。 第二偏振器（POL 2）进行空间分离和/或具有不同的偏振梁部分的组合。 具有和不具有在偏振变化梁部分的空间组件使用第二分散取得（包括为相应的设备详细显示2.一种独立claimsoft。

公开(公告)号：EP1234164A1

公开(公告)日：2002-08-28

申请号：EP00979760.6

申请日：2000-11-28

Applicant: ECOLOTROL, INC.

Inventor： NOVIKOV, Valeri Alexey

IPC: G01J3/447

CPC classification number: G01J3/447 ,  G01J3/433 ,  G01N21/3504

Abstract: The present invention relates to a controlled interference polarization spectrometer for determining the concentration of a substance within a sample. The spectrometer includes first and second filters for filtering first and second portions of radiation transmitted by the sample. The filters having a number of pass bands at wavelengths corresponding to absorption peaks in the absorption spectrum of the substance to be detected, and are responsive to an applied signal to modulate the wavelengths of the pass bands in respective first and second directions. A detector detects the filtered radiation and determines the difference in the maximum and the minimum intensities of the radiation transmitted by the sample to thereby determine the concentration of the substance.

Abstract translation: 本发明涉及用于确定样品内物质浓度的受控干涉偏振光谱仪。 光谱仪包括第一和第二滤光器，用于过滤由样品透射的辐射的第一和第二部分。 这些滤光器在与待检测物质的吸收光谱中的吸收峰值相对应的波长处具有多个通带，并且响应于所施加的信号来调制各个第一和第二方向上的通带的波长。 检测器检测经过滤的辐射并确定由样品透射的辐射的最大强度和最小强度的差异，从而确定物质的浓度。

公开(公告)号：EP0737856A2

公开(公告)日：1996-10-16

申请号：EP96301670.4

申请日：1996-03-12

Applicant: J.A. WOOLLAM CO. INC.

Inventor： Green, Steven E. ,  Woollam, John A. ,  Herzinger, Craig M. ,  Ducharme, Stephen P. ,  Johs, Blaine D.

IPC: G01N21/21 ,  G01J3/447

CPC classification number: G01J4/00 ,  G01J3/447 ,  G01N21/211

Abstract: A system and method for controlling polarisation state determining parameters of a polarised beam of light in an ellipsometer or polarimeter and the like system, so that they are in ranges wherein the sensitivity, of a sample system characterising PSI and DELTA value monitoring detector (DET) used to measure changes in said polarisation state resulting from interaction with a "composite sample system," comprised of a sample system per se. (SS) and a beam polarisation state determining variable retarder, to noise and measurement errors etc. therein), is reduced. This allows determining sample system per se.
characterising PSI and DELTA values, from Composite Sample System characterising PSI and DELTA values, by compensating for the presence of components, (VR1) and/or (VR2), added to an ellipsometer or polarimeter and the like system. The arrangement also improves the ability of an ellipsometer or polarimeter and the like system fitted with components (VR1) and/or (VR2) to provide usably accurate and precise sample system characterising PSI and DELTA determining data values, wherein a sample system per se. investigating polarised beam of light is oriented at other than a Principal or Brewster Angle of Incidence thereto, the use of which Angle of Incidence would otherwise be difficult, if not impossible. The arrangement also allows determination of the "Handedness" of a polarised beam of light, and of sample system Jones or Mueller Matrix component values; and provides means for making system components (VR1) and/or (VR2) added to an ellipsometer or polarimeter and the like system, essentially end user transparent when desired, without removal thereof from said ellipsometer or polarimeter and the like system.

Abstract translation: 用于控制椭偏仪或偏振计等偏振光束的偏振态确定参数的系统和方法，使得它们处于表征PSI和DELTA值监视检测器（DET）的样本系统的灵敏度的范围内， 用于测量由与样品系统本身组成的“复合样品系统”的相互作用产生的所述极化状态的变化。 （SS）和光束偏振状态确定可变延迟器，其中的噪声和测量误差等）降低。 这允许确定样品系统本身。 通过补偿添加到椭偏仪或偏振计等的组件（VR1）和/或（VR2）的存在来表征PSI和DELTA值的复合样品系统的PSI和DELTA值的表征。 该装置还提高了配有组件（VR1）和/或（VR2）的椭偏仪或偏振计等的系统能够提供表征PSI和DELTA确定数据值的可用的精确和精确的采样系统的能力，其中采样系统本身。 调查偏振光束的方向是除了Principal或Brewster入射角之外，否则使用哪个角度的发生角度将是困难的，甚至是不可能的。 该布置还允许确定偏振光束和样本系统Jones或Mueller Matrix分量值的“Handedness”; 并且提供用于将系统组件（VR1）和/或（VR2）添加到椭偏仪或偏振计等的系统，基本上终端用户在需要时是透明的，而不从所述椭偏仪或偏振计等偏移仪中去除。

公开(公告)号：EP0427797B1

公开(公告)日：1994-09-14

申请号：EP90901537.2

申请日：1990-01-15

Applicant: BÜHLER AG ,  Bran + Lübbe GmbH

Inventor： WAGNER, Heinz ,  LABHART, Martin ,  GLAUS, Ulrich

IPC: G01B9/02 ,  G01J3/45

CPC classification number: G01J3/447 ,  G01B2290/70 ,  G01J3/4537 ,  G01J2009/0261

Abstract: A polarization interferometer comprises a light source (1), a collimator (2), a first polarization element (3), a system of double-refracting elements (4, 5, 6) and a second polarizing element (7) which polarizes the light emerging from the double-refracting element (4, 5, 6) and directs it to a photon detector (8). The double-refractive element (4, 5, 6) consists of two optical wedges (5, 6) which together constitute a right parallepiped and which are arranged so as to slide relative to each other along opposed side surfaces, and a double-refracting plate (4) with parallel faces which acts as a compensator. The optical axis of the compensator (4) makes a finite angle with those of the two wedges (5, 6) in the plane perpendicular to the light beam, the optical axes of both wedges (5, 6) being coincident. The optical axes of the two polarizers (3, 7) are mutually perpendicular or parallel and are not aligned parallel to the axes of the two wedges (5, 6) of the double-refractive element (4, 5, 6).

公开(公告)号：EP0605391A3

公开(公告)日：1994-07-27

申请号：EP94101353.4

申请日：1990-01-15

Applicant: BÜHLER AG ,  Bran + Lübbe GmbH

Inventor： Wagner, Heinz ,  Labhart, Martin ,  Glaus, Ulrich

IPC: G01J3/453 ,  G01J3/447

CPC classification number: G01J3/447 ,  G01B2290/70 ,  G01J3/4537 ,  G01J2009/0261

Abstract: Das Polarisationsinterferometer weist eine Lichtquelle (1), einen Kollimator (2), ein erstes polarisierendes Element (3), ein System von doppelbrechenden Elementen (4,5,6) und ein zweites polarisierendes Element (7) auf, welches das aus dem doppelbrechenden Element (4,5,6) austretende Licht polarisiert und einem Photonendetektor (8) zuführt. Das doppelbrechende Element (4,5,6) besteht dabei aus zwei, längs entgegengesetzter Seitenflächen gegeneinander verschiebbar angeordneten, sich zu einem Quader ergänzenden, optischen Keile (5,6) und einer als Kompensator dienenden doppelbrechenden planparallelen Platte (4). Die optische Achse des Kompensators (4) ist gegenüber derjenigen der beiden Keile (5,6) in der Ebene senkrecht zum Lichtstrahl um einen endlichen Winkel verdreht, wobei die optischen Achsen der beiden Keile (5,6) übereinstimmen. Die optischen Achsen der beiden Polarisatoren (3,7) stehen senkrecht oder parallel zueinander und sind nicht parallel zu den Achsen der beiden Keile (5,6) des doppelbrechenden Elementes (4,5,6) ausgerichtet. Ein monochromatischer Lichtstrahl (9) wird in den von der Lichtquelle (1) erzeugten parallen Lichtstrahl eingekoppelt und nach Durchquerung mindestens des doppelbrechenden Elementes (4,5,6) wieder ausgekoppelt und auf einen Photonendetektor (13) geführt.

公开(公告)号：EP0253731B1

公开(公告)日：1991-07-03

申请号：EP87401660.3

申请日：1987-07-15

Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE

Inventor： Berthoud, Thierry ,  Mauchien, Patrick ,  Vian, Alain ,  Le Provost, Pierre

IPC: G01N21/64

CPC classification number: G01N21/6402 ,  G01J3/447 ,  G01N21/73 ,  G01N2021/6417

公开(公告)号：EP0427797A1

公开(公告)日：1991-05-22

申请号：EP90901537.0

申请日：1990-01-15

Applicant: BÜHLER AG ,  Bran + Lübbe GmbH

Inventor： WAGNER, Heinz ,  LABHART, Martin ,  GLAUS, Ulrich

IPC: G01B9 ,  G01J3 ,  G01J9

CPC classification number: G01J3/447 ,  G01B2290/70 ,  G01J3/4537 ,  G01J2009/0261

Abstract: Un interféromètre polarisant comprend une source de lumière (1), un collimateur (2), un premier élément polarisant (3), un système d'éléments biréfringents (4, 5, 6) et un deuxième élément polarisant (7) qui polarise la lumière qui sort de l'élément biréfringent (4, 5, 6) et la transmet à un détecteur (8) de photons. L'élément biréfringent (4, 5, 6) comprend deux coins optiques (5, 6) mobiles l'un par rapport à l'autre le long de faces latérales opposées et qui forment ensemble un carré, ainsi qu'une plaque (4) biréfringente à faces planes et parallèles qui sert de compensateur. L'axe optique du compensateur (4) est décalé d'un angle fini par rapport à l'axe des deux coins (5, 6) sur le plan perpendiculaire au rayon de lumière, les axes optiques des deux coins (5, 6) coïncidant. Les axes optiques des deux polariseurs (3, 7) sont perpendiculaires ou parallèles l'un à l'autre et ne sont pas parallèles aux axes des deux coins (5, 6) de l'élément biréfringent (4, 5, 6).

公开(公告)号：EP0233748A3

公开(公告)日：1990-01-03

申请号：EP87301134.0

申请日：1987-02-10

Applicant: THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY

Inventor： Risk, William P. ,  Kino, Gordon S.

IPC: G02F1/01 ,  G01J9/00 ,  G01J3/00 ,  G02F1/29

CPC classification number: G02B6/29302 ,  G01J3/1256 ,  G01J3/447 ,  G01J9/00 ,  G02B6/105 ,  G02B6/2713 ,  G02B6/274 ,  G02B6/2766 ,  G02F1/0134

Abstract: An acousto-optic frequency shifter having a long interaction region is used as an optical analyzer. A variable frequency signal generator (340) is used to drive an acoustic transducer (316) to launch an acoustic wave in contact with an optical fiber (300). The acoustic frequency is varied over a known range to generate acoustic waves having known wavelengths. An optical signal having an unknown optical wavelength is introduced into one end (302) of the optical fiber (300) in a first polarization mode. The effect of the acoustic wave on the optical signal is to cause coupling of the optical signal from the first polarization mode to a second orthogonal polarization mode. The amount of the coupling is dependent upon the phase matching between the acoustic wavelength and the optical beat length. The coupling between the polarization modes is maximum when the acoustic wavelength is equal to the optical beat length. The intensity of the optical signal coupled to the second polarization mode can be measured to determine the optical wavelength corresponding to the acoustic wavelength when the maximum intensity occurs.

Abstract translation: 具有长相互作用区域的声光移频器被用作光学分析器。 可变频率信号发生器（340）用于驱动声换能器（316）以发射与光纤（300）接触的声波。 声频在已知范围内变化以产生具有已知波长的声波。 具有未知光波长的光信号以第一偏振模式被引入光纤（300）的一端（302）。 声波对光信号的影响是使来自第一偏振模式的光信号耦合到第二正交偏振模式。 耦合的量取决于声波长和光学拍子长度之间的相位匹配。 当声波长等于光拍长度时，极化模式之间的耦合是最大的。可以测量耦合到第二偏振模式的光信号的强度，以确定当出现最大强度时对应于声波的光波长 。