Sensor unit and total reflection prism
    201.
    发明专利
    Sensor unit and total reflection prism 有权
    传感器单元和总反射原理

    公开(公告)号:JP2007248428A

    公开(公告)日:2007-09-27

    申请号:JP2006076375

    申请日:2006-03-20

    Abstract: PROBLEM TO BE SOLVED: To provide a sensor unit for surely preventing displacement in measurement, and a total reflection prism. SOLUTION: This sensor unit 10 comprises the total reflection prism 20 formed substantially into a trapezoidal columnar shape and a flow path member 30 mounted on the prism 20. On bottom parts of both side faces of a prism body of the prism 20, engagement parts 28 are provided each formed so as to project like a step. When the sensor unit 10 is mounted on a measurement stage 52, a hold part 60 provided on a measuring instrument holds the prism 20 so as to press it on a mounting surface 52a with the respective presser members 61 caused to engage with the respective engagement parts 28. COPYRIGHT: (C)2007,JPO&INPIT

    Abstract translation: 要解决的问题:提供一种可靠地防止测量位移的传感器单元和全反射棱镜。 解决方案:该传感器单元10包括基本上形成为梯形柱状的全反射棱镜20和安装在棱镜20上的流路构件30.在棱镜20的棱镜体的两个侧面的底部, 设置接合部28,每个接合部28被形成为像台阶一样突出。 当传感器单元10安装在测量台52上时,设置在测量仪器上的保持部分60保持棱镜20,以将其按压在安装表面52a上,使各压紧构件61与相应的接合部分 28.版权所有(C)2007,JPO&INPIT

    System and method for synchronized stage movement

    公开(公告)号:US12038375B2

    公开(公告)日:2024-07-16

    申请号:US17830327

    申请日:2022-06-01

    Inventor: Peter Steinberg

    Abstract: An embodiment of a microscope system is described that comprises a sample stage configured to position a sample; and a spectrometer comprising an interferometer configure to provide a light beam to the sample stage and one or more detectors configured to detect light spectra in response to the light beam, wherein the spectrometer sends a notification to the sample stage after a scan comprising an acceptable measure of quality has been acquired from the detected light spectra at a first location, and the sample stage is further configured to count the notifications and initiate movement of the sample stage to a second location when a count value reaches a pre-determined number.

    System of measuring image of pattern in scanning type EUV mask

    公开(公告)号:US11914282B2

    公开(公告)日:2024-02-27

    申请号:US17509454

    申请日:2021-10-25

    Inventor: Donggun Lee

    Abstract: A system of measuring an image of a pattern in a scanning type EUV mask may include a high-power laser output unit including a flat mirror and a spherical mirror, which are used to focus a high-power femto-second laser on a gas cell; a coherent EUV light generating portion generating a coherent EUV light; a pin-hole, a graphene filter, and a zirconium (Zr) filter; a stage; an x-ray spherical mirror configured to focus a coherent EUV light; a zone-plate lens placed between the stage and the x-ray spherical mirror; an x-ray flat mirror placed between the zone-plate lens and the x-ray spherical mirror; an order sorting aperture (OSA) placed on the stage and configured to transmit only a first-order diffraction light of the focused coherent EUV light; and a detector portion placed on the stage.

    Raman spectroscopy method and apparatus

    公开(公告)号:US11774364B2

    公开(公告)日:2023-10-03

    申请号:US17276596

    申请日:2019-09-17

    Abstract: Apparatus and methods for acquiring a Raman spectral map of a sample including a material species. The apparatus includes: a pulsed illumination source providing pulsed illumination radiation for exciting the sample and producing scattered radiation; a microscope objective focusing the pulsed illumination radiation onto a region of the sample corresponding to a data point of the map, and collecting emitted radiation from the region; a translation stage translating the sample relative to the microscope objective in at least two directions; a spectral filter spectrally filtering the emitted radiation collected by the objective to obtain a filtered portion of radiation corresponding to a characteristic Raman spectral feature of the material species; a detector receiving the filtered portion and providing output electrical pulses indicative thereof; and readout electronics applying a time gate to the output electrical pulses to distinguish detection events corresponding to the Raman scattered radiation from events associated with photoluminescence.

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