公开(公告)号：WO02025349A2

公开(公告)日：2002-03-28

申请号：PCT/US2001/029070

申请日：2001-09-18

IPC: B81B3/00 ,  B81C99/00 ,  G02B6/35 ,  G02B26/08 ,  G02B26/00

CPC classification number: G02B6/3572 ,  B81B3/0021 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/058 ,  B81C1/00214 ,  G02B6/3512 ,  G02B6/3556 ,  G02B6/358 ,  G02B6/3584 ,  G02B26/085 ,  G02B26/101 ,  Y10S359/90

Abstract: A multi-axis magnetically actuated device, an array of multi-axis mangetically actuated devices, and a method of fabrication of a multi-axis magnetically actuated device are disclosed. In addition, disclosed is an optical switch comprised of an array of multi-axis magnetically actuated devices and an array of ports adapted to receive an optical waveguide such as, for example, an optical fiber. The multi-axis magnetically actuated device of the invention is capable of rotational movement in two orthogonal directions. In one embodiment, the multi-axis magnetically actuated device comprises two nested rotational members, an inner rotational member nested within the outer rotational member that in turns is nested within a base member. The inner rotational member is mounted by two inner torsional flexures to the outer rotational member that in turn is mounted by two outer torsional flexures to the base member. The inner torsional flexures define an inner axis of rotation while the outer torsional flexures define an outer axis of rotation. The rotational motions of each rotational member arise in response to an interaction between a magnetic influence and a magnetic moment generated by a current passing through coils arranged adjacent to a surface of the inner rotational member. Bulk micromachining techniques enable the members to be formed from a monolithic silicon wafer and can produce a member with a smooth sruface. The smooth surface of a member may function as a reflector. In one embodiment, the inner rotational member functions as a reflector.

Abstract translation: 公开了一种多轴磁致动装置，多轴手工致动装置的阵列，以及制造多轴磁致动装置的方法。 此外，公开了一种光开关，其由多轴磁致动装置的阵列和适于接收诸如光纤的光波导的端口阵列组成。 本发明的多轴磁力驱动装置能够沿两个正交方向旋转运动。 在一个实施例中，多轴磁致动装置包括两个嵌套旋转构件，嵌套在外旋转构件内的内旋转构件，其依次嵌套在基构件内。 内部旋转构件通过两个内部扭转挠曲件安装到外部旋转构件，外部旋转构件又通过两个外部扭转挠曲件安装到基座构件。 内部扭转弯曲限定了内部旋转轴线，而外部扭转挠曲限定了外部旋转轴线。 每个旋转构件的旋转运动响应于磁力影响和由通过与内旋转构件的表面相邻布置的线圈的电流产生的磁矩之间的相互作用而产生。 散装微加工技术使得部件能够由单片硅晶片形成并且可以产生具有平滑表面的部件。 构件的光滑表面可以用作反射器。 在一个实施例中，内旋转构件用作反射器。

公开(公告)号：WO01077001A2

公开(公告)日：2001-10-18

申请号：PCT/US2001/011430

申请日：2001-04-05

IPC: B81B3/00 ,  G02B6/12 ,  G02B6/122 ,  G02B6/35 ,  G02B26/08 ,  G11B7/09 ,  H02N1/00 ,  B66F

CPC classification number: B81B3/004 ,  B81B3/0062 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2203/0136 ,  B81B2203/0307 ,  B81B2203/053 ,  B81B2203/058 ,  G02B6/122 ,  G02B6/3518 ,  G02B6/357 ,  G02B6/358 ,  G02B6/3584 ,  G02B26/0841 ,  G02B2006/12104 ,  G11B7/0927 ,  H02N1/006 ,  H02N1/008

Abstract: A microelectromechanical (MEM) apparatus (10) is disclosed which has a platform (14) that can be elevated above a substrate (12) and tilted at an arbitrary angle using a plurality of flexible members (16) which support the platform (14) and control its movement. Each flexible member (16) is further controlled by one of more MEM actuators (18) which act to bend the flexible member. The MEM actuators (18) can be electrostatic comb actuators (34) or vertical zip actuators (80) or a combination thereof. The MEM apparatus (10) can include a mirror coating (24) to form a programmable mirror for redirecting or switching one or more light beams (200) for use in a projection display. The MEM apparatus (10) with the mirror coating (24) also has applications for switching light beams between optical fibers for use in a local area fiber optic network, or for use in fiber optic telecommunications or data communications systems.

Abstract translation: 公开了一种微机电（MEM）装置（10），其具有可以使用多个支撑平台（14）的柔性构件（16）在基板（12）上方升高并以任意角度倾斜的平台（14） 并控制其运动。 每个柔性构件（16）由更多的用于弯曲柔性构件的MEM致动器（18）进一步控制。 MEM致动器（18）可以是静电梳状致动器（34）或垂直拉链致动器（80）或其组合。 MEM装置（10）可以包括镜涂层（24），以形成用于重定向或切换用于投影显示器的一个或多个光束（200）的可编程镜。 具有镜面涂层（24）的MEM装置（10）还具有用于在用于局域光纤网络的光纤之间切换光束或用于光纤电信或数据通信系统的应用。

公开(公告)号：WO01067161A1

公开(公告)日：2001-09-13

申请号：PCT/US2001/007294

申请日：2001-03-05

IPC: B81B3/00 ,  G02B6/35 ,  G02B26/02 ,  G02B26/08

CPC classification number: B81B3/0072 ,  B81B3/0008 ,  B81B2201/045 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/3564 ,  G02B6/357 ,  G02B6/358 ,  G02B6/3584 ,  G02B26/02 ,  G02B26/0816

Abstract: An optical switch device includes a rolling shutter or membrane attached at one of its edges to a substrate near an optical port in the substrate. The rolling shutter can assume one of two states. In a first closed state, the membrane is uncoiled onto the substrate over the port such that light directed at the port impinges on the shutter. In a second open state, the membrane is rolled up away from the port such that light directed at the port impinges on the port. In one embodiment, a mirror is formed on the membrane such that when the membrane is in the closed state over the substrate, light directed at the port is reflected by the mirror. In one configuration, the optical port includes a hole or aperture such light passed through the port without interference. The device can include a latch electrode the far end of the membrane such that when it is rolled out, it can be held in position by a latching voltage applied across the latch electrode and the substrate. Slits can be formed in the membrane to keep the mirror flat by relieving strain in the membrane and to allow gases in proximity to the device to pass through the membrane as it is activated. The shutter can include dimples to minimize the area of contact between the membrane and the substrate to reduce the probability of the two sticking together. The attachment edge of the membrane can be made shorter than its width to reduce distortions in the membrane to keep the mirror flat. A raised annular rim can be provided around the port such that when the shutter is held down over the port it is pulled taut and flat over the rim. This feature is also used to maintain flatness in the mirror. The switch device can be used as part of an array of optical switches.

Abstract translation: 一种光学开关装置包括将其一个边缘附接到衬底附近的光学端口的基板的卷帘门或薄膜。 滚动快门可以采取两种状态之一。 在第一关闭状态下，膜在端口上展开到基板上，使得指向端口的光照射在快门上。 在第二打开状态下，膜从端口卷起，使得指向端口的光照射在端口上。 在一个实施例中，在膜上形成反射镜，使得当膜在衬底上处于关闭状态时，指向端口的光被反射镜反射。 在一个配置中，光学端口包括孔或孔，这样的光通过端口而不受干扰。 该装置可以包括位于膜的远端的闩锁电极，使得当其被推出时，其可以通过施加在闩锁电极和基板上的锁存电压而保持就位。 可以在膜中形成狭缝，以通过减轻膜中的应变来保持反射镜平坦，并允许邻近装置的气体在被激活时通过膜。 快门可以包括凹坑以最小化膜和基底之间的接触面积，以减少两者粘在一起的可能性。 膜的附着边缘可以比其宽度短，以减少膜中的变形，以保持镜子平坦。 可以围绕端口设置凸起的环形边缘，使得当快门被按压在端口上时，其被拉紧并在边缘上平坦。 此功能也用于保持镜子的平整度。 开关器件可用作光开关阵列的一部分。

公开(公告)号：WO01065303A1

公开(公告)日：2001-09-07

申请号：PCT/US2001/040254

申请日：2001-03-05

IPC: B81B3/00 ,  G02B6/35 ,  G02B26/02 ,  G02B26/08

CPC classification number: B81B3/0072 ,  B81B3/0008 ,  B81B2201/045 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/3564 ,  G02B6/357 ,  G02B6/358 ,  G02B6/3584 ,  G02B26/02 ,  G02B26/0816

Abstract: An optical switch device includes a rolling shutter or membrane attached at one of its edges to a substrate near an optical port in the substrate. The rolling shutter can assume one of two states. In a first closed state, the membrane is uncoiled onto the substrate over the port such that light directed at the port impinges on the shutter. In a second open state, the membrane is rolled up away from the port such that light directed at the port impinges on the port. In one embodiment, a mirror is formed on the membrane such that when the membrane is in the closed state over the substrate, light directed at the port is reflected by the mirror. In one configuration, the optical port includes a hole or aperture such light passed through the port without interference. The device can include a latch electrode the far end of the membrane such that when it is rolled out, it can be held in position by a latching voltage applied across the latch electrode and the substrate. Slits can be formed in the membrane to keep the mirror flat by relieving strain in the membrane and to allow gases in proximity to the device to pass through the membrane as it is activated. The shutter can include dimples to minimize the area of contact between the membrane and the substrate to reduce the probability of the two sticking together. The attachment edge of the membrane can be made shorter than its whidth to reduce distortions in the membrane to keep the mirror flat. A raised annular rim can be provided around the port such that when the shutter is held down over the port it is pulled taut and flat over the rim. This feature is also used to maintain flatness in the mirror. The switch device can be used as part of an array of optical switches.

Abstract translation: 一种光学开关装置包括将其一个边缘附接到衬底附近的光学端口的基板的卷帘门或薄膜。 滚动快门可以采取两种状态之一。 在第一关闭状态下，膜在端口上展开到基板上，使得指向端口的光照射在快门上。 在第二打开状态下，膜从端口卷起，使得指向端口的光照射在端口上。 在一个实施例中，在膜上形成反射镜，使得当膜在衬底上处于关闭状态时，指向端口的光被反射镜反射。 在一个配置中，光学端口包括孔或孔，这样的光通过端口而不受干扰。 该装置可以包括位于膜的远端的闩锁电极，使得当其被推出时，其可以通过施加在闩锁电极和基板上的锁存电压而保持就位。 可以在膜中形成狭缝，以通过减轻膜中的应变来保持反射镜平坦，并允许邻近装置的气体在被激活时通过膜。 快门可以包括凹坑以最小化膜和基底之间的接触面积，以减少两者粘在一起的可能性。 可以使膜的附着边缘比其宽度短，以减小膜中的变形以保持镜子平坦。 可以围绕端口设置凸起的环形边缘，使得当快门被按压在端口上时，其被拉紧并在边缘上平坦。 此功能也用于保持镜子的平整度。 开关器件可用作光开关阵列的一部分。

公开(公告)号：WO0013210A9

公开(公告)日：2000-08-31

申请号：PCT/US9920218

申请日：1999-09-02

Applicant: XROS INC

Inventor： SLATER TIMOTHY G ,  NEUKERMANS ARMAND P

IPC: B81B3/00 ,  G01P9/04 ,  G02B6/32 ,  G02B6/35 ,  G02B6/36 ,  G02B26/08 ,  G02B26/10 ,  H04Q11/00 ,  G01C19/00 ,  G01P15/08

CPC classification number: H04Q11/0005 ,  B81B3/0051 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/058 ,  G02B6/32 ,  G02B6/327 ,  G02B6/3518 ,  G02B6/357 ,  G02B6/3584 ,  G02B26/0833 ,  G02B26/0841 ,  G02B26/085 ,  H04Q2011/003 ,  H04Q2011/0039 ,  H04Q2011/0043

Abstract: A monolithically fabricated micromachined structure couples a reference frame (56) to a dynamic plate (58). Performance of torsional oscillators or scanners benefits greatly by coupling the frame (56) to the plate (58) with folded torsional flexure hinges (96) rather than torsion bars. A folded torsion flexure hinge (96) for supporting the plate (58) from the frame (56) is made up of three basic hinge segments (102a, 102b, 102c). Each basic hinge segment (102a, 102b, 102c) has a longitudinal axis (98) which is not oriented perpendicular to the rotation axis (62) of the plate (58). An intermediaire region (104) of the folded torsional flexure hinge (96) couples together immediately adjacent ends (106) of the basic hinge segments (102a, 102b, 102c). A basic hinge segment (102b) may include a torsion sensor (108) for measuring angular rotation of the plate (58) about axis (62) with respect to the frame (56).

Abstract translation: 单片制造的微机械结构将参考框架（56）耦合到动态板（58）。 扭转振荡器或扫描仪的性能通过将框架（56）与折叠式扭转挠曲铰链（96）而不是扭转杆耦合到板（58）大大有益。 用于从框架（56）支撑板（58）的折叠式扭转挠曲铰链（96）由三个基本铰链部分（102a，102b，102c）组成。 每个基本铰链段（102a，102b，102c）具有纵向轴线（98），该纵向轴线不垂直于板（58）的旋转轴线（62）定向。 折叠的扭转挠曲铰链（96）的中间区域（104）将基本铰链节段（102a，102b，102c）的直接相邻的端部（106）连接在一起。 基本铰链部分（102b）可以包括用于测量板（58）相对于框架（56）围绕轴线（62）的角度旋转的扭转传感器（108）。

公开(公告)号：WO0013210A3

公开(公告)日：2000-06-15

申请号：PCT/US9920218

申请日：1999-09-02

Applicant: XROS INC

Inventor： SLATER TIMOTHY G ,  NEUKERMANS ARMAND P

IPC: B81B3/00 ,  G01P9/04 ,  G02B6/32 ,  G02B6/35 ,  G02B6/36 ,  G02B26/08 ,  G02B26/10 ,  H04Q11/00 ,  G01C19/00 ,  G01P15/08

CPC classification number: H04Q11/0005 ,  B81B3/0051 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/058 ,  G02B6/32 ,  G02B6/327 ,  G02B6/3518 ,  G02B6/357 ,  G02B6/3584 ,  G02B26/0833 ,  G02B26/0841 ,  G02B26/085 ,  H04Q2011/003 ,  H04Q2011/0039 ,  H04Q2011/0043

Abstract: A monolithically fabricated micromachined structure couples a reference frame (56) to a dynamic plate (58). Performance of torsional oscillators or scanners benefits greatly by coupling the frame (56) to the plate (58) with folded torsional flexure hinges (96) rather than torsion bars. A folded torsion flexure hinge (96) for supporting the plate (58) from the frame (56) is made up of three basic hinge segments (102a, 102b, 102c). Each basic hinge segment (102a, 102b, 102c) has a longitudinal axis (98) which is not oriented perpendicular to the rotation axis (62) of the plate (58). An intermediaire region (104) of the folded torsional flexure hinge (96) couples together immediately adjacent ends (106) of the basic hinge segments (102a, 102b, 102c). A basic hinge segment (102b) may include a torsion sensor (108) for measuring angular rotation of the plate (58) about axis (62) with respect to the frame (56).

Abstract translation: 单片制造的微加工结构将参考框架（56）耦合到动态板（58）。 通过用折叠的扭转挠性铰链（96）而不是扭杆将框架（56）联接到板（58）上，扭转振荡器或扫描器的性能受益匪浅。 用于从框架（56）支撑板（58）的折叠扭转挠曲铰链（96）由三个基本铰链段（102a，102b，102c）组成。 每个基本铰链段（102a，102b，102c）具有不垂直于板（58）的旋转轴线（62）定向的纵向轴线（98）。 折叠的扭转挠性铰链（96）的中间区域（104）将基本铰链段（102a，102b，102c）的紧邻的端部（106）联接在一起。 基本铰链段（102b）可以包括用于相对于框架（56）测量围绕轴线（62）的板（58）的角度旋转的扭转传感器（108）。

公开(公告)号：US20240036264A1

公开(公告)日：2024-02-01

申请号：US18169112

申请日：2023-02-14

Applicant: II-VI Delaware, Inc.

Inventor： Yang Li ,  Lixun Chen ,  Tianguo Bai ,  Wade Tang ,  Yunbing Xu ,  Tingyu Xue

IPC: G02B6/35 ,  G02B6/32 ,  B81B7/02

CPC classification number: G02B6/3518 ,  G02B6/32 ,  B81B7/02 ,  G02B6/3582 ,  B81B2201/045

Abstract: An optical switch includes an array of optical fibers to conduct optical signals. A biconvex lens has a front convex surface facing the fibers' tips and has a back convex surface facing a microelectromechanical (MEMS) mirror. The MEMS mirror can be selectively oriented to reflect the optical signals incident to the MEMS mirror so the optical signal input from one fiber can be selectively routed to another of the fibers.

公开(公告)号：US20240019687A1

公开(公告)日：2024-01-18

申请号：US18477744

申请日：2023-09-29

Applicant: Huawei Technologies Co., Ltd.

Inventor： Xiaoshi Dong ,  Jinghui Xu ,  Fengpei Sun

IPC: G02B26/08 ,  B81B7/02

CPC classification number: G02B26/0841 ,  B81B7/02 ,  B81B2203/0136 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2201/045

Abstract: An electrostatic MEMS micromirror is provided, and may be used in a device such as a mobile phone, a microphone, a camera, a radar, or an optical switch. The electrostatic MEMS micromirror includes a support beam, a micromirror, and a drive component. The drive component includes a comb frame and a drive comb located in the comb frame. The support beam and the micromirror are mechanically coupled using the comb frame. Two sides of the comb frame that are mechanically coupled to the micromirror are separately located on two sides of a rotating axis determined by the support beam. The drive comb includes at least one comb pair. The comb pair includes a movable comb structure and a stationary comb structure. The movable comb structure includes a plurality of movable combs. One end of the movable comb is fastened to the comb frame.

公开(公告)号：US20180215612A1

公开(公告)日：2018-08-02

申请号：US15747759

申请日：2015-10-23

Applicant: HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.

Inventor： Richard B. IRWIN, JR.

IPC: B81B7/02 ,  G02B26/08 ,  G03B21/00

CPC classification number: B81B7/02 ,  B81B3/0062 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/0154 ,  B81B2203/0361 ,  B81B2203/04 ,  B81B2207/053 ,  G02B26/0833 ,  G02B26/0841 ,  G03B21/008

Abstract: An example microelectromechanical system (MEMS) switch comprises a hinge plane having two or more intersecting hinges; a switch plate; and a plurality of electrostatic pads. Selective activation of the electrostatic pads causes torsion of at least one of the two or more intersecting hinges to tilt the switch plate to a selected one of three or more positions.

公开(公告)号：US09588293B2

公开(公告)日：2017-03-07

申请号：US14749806

申请日：2015-06-25

Applicant: International Business Machines Corporation

Inventor： John J. Ellis-Monaghan ,  Brendan S. Harris ,  Vibhor Jain ,  Thomas Kessler ,  Yves T. Ngu ,  Sebastian T. Ventrone

IPC: G02B6/12 ,  G02B6/125 ,  G02B6/122 ,  G02B6/35 ,  G02B6/28 ,  B81B7/02

CPC classification number: G02B6/125 ,  B81B7/02 ,  B81B2201/045 ,  G02B6/1225 ,  G02B6/2808 ,  G02B6/3502 ,  G02B6/3562 ,  G02B6/357 ,  G02B6/3596 ,  G02B6/3598 ,  G02B2006/12145 ,  G02B2006/1215

Abstract: Various particular embodiments include a primary waveguide including an end section; cantilevered waveguides, each cantilevered waveguide including an end section disposed adjacent the end section of the primary waveguide; and control pins for applying an electrical bias to the cantilevered waveguides to selectively displace the end sections of the cantilevered waveguides away from the end section of the primary waveguide.

Abstract translation: 各种具体实施例包括：包括端部的主波导; 悬臂波导，每个悬臂式波导包括邻近初级波导的端部设置的端部; 以及控制引脚，用于将电偏压施加到悬臂波导，以选择性地使悬臂波导的端部远离主波导的端部。