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    SAMPLE TRANSFER UNIT AND SAMPLE TRANSFERRING METHOD
    224.
    发明申请
    SAMPLE TRANSFER UNIT AND SAMPLE TRANSFERRING METHOD 失效
    样本传送单元和样本传送方法

    公开(公告)号：US20080203302A1

    公开(公告)日：2008-08-28

    申请号：US12038179

    申请日：2008-02-27

    Applicant: Takashi Gunji ,  Hidetoshi Sato ,  Katsuya Kawakami ,  Hideki Yatabe

    Inventor： Takashi Gunji ,  Hidetoshi Sato ,  Katsuya Kawakami ,  Hideki Yatabe

    IPC: G01B15/00 ,  H01L21/677

    CPC classification number: H01L21/67769 ,  H01J37/20 ,  H01J37/28 ,  H01J2237/201 ,  H01J2237/204 ,  H01J2237/2816 ,  H01J2237/2817 ,  H01L21/67236 ,  H01L21/67259 ,  H01L21/67742

    Abstract: There is provided a mini environment type transfer unit which can efficiently transfer a sample to a critical dimension scanning electron microscope (CD-SEM) even in the case of use of a SMIF pod which can store only one photomask. In addition to a load port, a stocker which can store a plurality of photomasks is provided in the mini environment type transfer unit. A mask storage slot in which a plurality of storage units are stacked is provided in the stocker, and one photomask is stored in each storage unit. A sensor is provided in each storage unit to determine whether or not the photomask is normally stored. Additionally, a sensor is provided in each storage unit to detect whether or not the photomask exists.

    Abstract translation: 提供了即使在使用只能存储一个光掩模的SMIF盒的情况下也可以将样品有效地转移到临界尺寸扫描电子显微镜（CD-SEM）的微型环境型转印单元。 除了负载端口之外，可以存储多个光掩模的储料器设置在迷你环境型转印单元中。 储存器中设置有多个存储单元堆叠的掩模存储槽，并且在每个存储单元中存储一个光掩模。 在每个存储单元中提供传感器以确定光掩模是否正常存储。 此外，在每个存储单元中提供传感器以检测是否存在光掩模。

    Beam processing system and beam processing method
    225.
    发明授权
    Beam processing system and beam processing method 失效
    光束处理系统和光束处理方法

    公开(公告)号：US07411709B2

    公开(公告)日：2008-08-12

    申请号：US11806546

    申请日：2007-06-01

    Applicant: Takanori Yagita ,  Hisaki Izutani ,  Mitsukuni Tsukihara ,  Takashi Kuroda

    Inventor： Takanori Yagita ,  Hisaki Izutani ,  Mitsukuni Tsukihara ,  Takashi Kuroda

    IPC: G02B26/08 ,  G21K5/10

    CPC classification number: H01J37/20 ,  H01J2237/201 ,  H01J2237/20214 ,  H01J2237/20228 ,  H01J2237/31701 ,  H01L21/68764 ,  H01L21/68771 ,  Y10S359/90

    Abstract: A beam processing system comprises a rotary disk mounted thereon with processing objects, a controller for controlling a reciprocating drive mechanism, and a beam width measuring unit for measuring a beam width of a processing beam. The controller sets an inner and an outer overscan position depending on a measured value of the beam width. The controller, based on the number of rotation of the rotary disk per unit time, a scan speed and the number of reciprocating scan times, a reversal start timing of the rotary disk at at least one of the inner and the outer overscan positions, and the measured value, controls the reciprocating drive mechanism so as to ensure an overlap region between a last and a current processing beam irradiation region on each of the processing objects, the overlap region overlapping at least half of the last processing beam irradiation region.

    Abstract translation: 光束处理系统包括安装有处理对象的旋转盘，用于控制往复驱动机构的控制器和用于测量处理光束的光束宽度的光束宽度测量单元。 控制器根据波束宽度的测量值设置内部和外部过扫描位置。 控制器基于每单位时间的旋转盘的旋转次数，扫描速度和往复扫描次数，旋转盘在内部和外部过扫描位置中的至少一个上的反转开始正时，以及 测量值控制往复驱动机构，以确保在每个处理对象上的最后处理光束照射区域和当前处理光束照射区域之间的重叠区域，重叠区域与最后一个处理光束照射区域的至少一半重叠。

    Method and apparatus for in-situ probe tip replacement inside a charged particle beam microscope
    228.
    发明申请
    Method and apparatus for in-situ probe tip replacement inside a charged particle beam microscope 有权
    用于在带电粒子束显微镜内进行原位探针尖端置换的方法和装置

    公开(公告)号：US20060022135A1

    公开(公告)日：2006-02-02

    申请号：US11186073

    申请日：2005-07-21

    Applicant: Thomas Moore ,  Lyudmilla Zaykova-Feldman

    Inventor： Thomas Moore ,  Lyudmilla Zaykova-Feldman

    IPC: G21K7/00

    CPC classification number: H01J37/20 ,  H01J37/26 ,  H01J2237/2005 ,  H01J2237/2006 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/204 ,  H01J2237/208 ,  H01J2237/26 ,  H01J2237/262 ,  H01J2237/31745 ,  H01J2237/31749

    Abstract: We disclose a gripper and associated apparatus and methods for delivering nano-manipulator probe tips inside a vacuum chamber. The gripper includes a tube; a compression cylinder inside of and coaxial with the tube; and at least one elastic ring adjacent to the compression cylinder. There is a vacuum seal coaxial with the compression cylinder for receiving and sealing against a probe tip. An actuator is connected to the compression cylinder for compressing the elastic ring and causing it to grip the probe tip. Thus the probe tip can be gripped, transferred to a different location in the vacuum chamber, and released there. Samples attached to the probe tips will be transferred to a TEM sample holder, shown in several embodiments, that includes a bar having opposed ends; an arm attached to each opposed end of the bar; one or more slots for receiving a probe tip; and, each slot having an inner part and an outer part, where the inner part is smaller than the outer part. The TEM sample holders just described are inserted into a carrier cassette. A cassette for transferring one or more TEM sample holders comprises a platform; at least one bar extending upwardly from the platform; the bar having a groove for receiving and holding a TEM sample holder. A rotatable magazine holds one or more probe tips and selectively releases the tips. The magazine includes a cartridge having a plurality of longitudinal openings for receiving probe tips and dispensing probe tips.

    Abstract translation: 我们公开了一种夹具和相关的装置和方法，用于在真空室内输送纳米机械手探针尖端。 夹具包括管; 压缩缸内部并与管同轴; 以及与压缩圆筒相邻的至少一个弹性环。 存在与压缩筒同轴的真空密封件，用于接收和密封探针尖端。 致动器连接到压缩气缸，用于压缩弹性环并使其夹持探针尖端。 因此，探针尖端可以被夹持，转移到真空室中的不同位置，并在那里释放。 附接到探针尖端的样品将转移到TEM样品保持器，如几个实施方案中所示，其包括具有相对端的棒; 连接到杆的每个相对端的臂; 用于接收探针尖端的一个或多个狭槽; 并且每个狭槽具有内部部分和外部部分，其中内部部分小于外部部分。 刚刚描述的TEM样品架被插入到载体盒中。 用于转移一个或多个TEM样品保持器的盒子包括平台; 从平台向上延伸的至少一个杆; 该棒具有用于容纳和保持TEM样品保持器的凹槽。 一个可旋转刀库可容纳一个或多个探针尖端并选择性地释放尖端。 该盒包括具有多个用于接收探针尖端并分配探针尖端的多个纵向开口的盒。

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