公开(公告)号：WO1997017715A1

公开(公告)日：1997-05-15

申请号：PCT/EP1996004763

申请日：1996-11-02

Applicant: FORSCHUNGSZENTRUM KARLSRUHE GMBH ,  SCHULTHEISS, Christoph ,  ENGELKO, Vladimir ,  KRAFFT, Gerd ,  SCHUMACHER, Gustav ,  MÜLLER, Georg

Inventor： FORSCHUNGSZENTRUM KARLSRUHE GMBH

IPC: H01J37/06

CPC classification number: H01J3/02 ,  H01J37/06 ,  H01J2237/06375 ,  H01J2237/316

Abstract: The invention relates to a pulsed electron beam source based on the vacuum diode principle and comprising: a vacuum diode with a multipoint emission cathode; a control grid; a pulse generator; a magnetic compression unit made from field coils; a drift chamber; a target chamber; and a synchronisation unit. The objective of the invention is to design the electron beam source in such a way that pulse durations of 100 microseconds are attainable and the pulse shape can be stepped rather than simply rectangular. This is achieved by embedding the multipoint emission cathode in a free-floating shield grid.

Abstract translation: 本发明涉及一种脉冲电子束源根据真空二极管的原则，包括真空二极管与多点发射阴极（MPEK），控制栅极，脉冲发生器，从励磁线圈的磁压缩单元，一个漂移室，一个靶室和同步单元。 本发明的目的是设计的电子束源，使得100个S上的脉冲长度是可实现的，并且脉冲形状不仅是矩形的，但是也可以包括阶段。 该目的的实现在于该MPEK嵌入在解决了一个自由浮动屏蔽电极。

公开(公告)号：WO1997008730A1

公开(公告)日：1997-03-06

申请号：PCT/GB1996000404

申请日：1996-02-23

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION ,  BEETESON, John ,  KNOX, Andrew ,  KERIGAN, Shaun

Inventor： INTERNATIONAL BUSINESS MACHINES CORPORATION

IPC: H01J31/12

CPC classification number: B41J2/4476 ,  G09G1/20 ,  G09G3/22 ,  H01J3/02 ,  H01J3/24 ,  H01J29/46 ,  H01J29/68 ,  H01J2329/00

Abstract: A display system comprises a display screen including a matrix of display elements and a permanent magnet having an array of channels formed therein. Each channel corresponds to a different display element. Each display element comprises a phosphor target, an electron source and means for controlling flow of electrons from the source through the corresponding channel in the magnet onto the target. Addressing means comprises first and second orthogonal conductors defining a grid. Each display element is located at the intersection of a different pair of first and second conductors. Each first conductor is connected to a first control electrode of the control means of each display element in a corresponding line of display elements and each second conductor is connected to a second control electrode of the control means of each display element in a corresponding line of display elements.

Abstract translation: 显示系统包括包括显示元件的矩阵的显示屏和具有形成在其中的通道阵列的永磁体。 每个通道对应于不同的显示元件。 每个显示元件包括荧光体靶，电子源和用于控制电子从源通过磁体中的相应通道到目标上的流动的装置。 寻址装置包括限定网格的第一和第二正交导体。 每个显示元件位于不同对的第一和第二导体的交叉处。 每个第一导体连接到显示元件的相应行中的每个显示元件的控制装置的第一控制电极，并且每个第二导体以相应的显示线连接到每个显示元件的控制装置的第二控制电极 元素。

公开(公告)号：WO1996009626A1

公开(公告)日：1996-03-28

申请号：PCT/US1995011991

申请日：1995-09-21

Applicant: TERASTORE, INC.

Inventor： TERASTORE, INC. ,  HURT, Thomas, D. ,  HALPINE, Scott, A.

IPC: G11B11/10

CPC classification number: G11B5/65 ,  G11B5/00 ,  G11B5/64 ,  G11B5/653 ,  G11B5/656 ,  G11B9/10 ,  G11B11/11 ,  G11B11/115 ,  G11B13/045 ,  G11B19/04 ,  G11B20/1883 ,  G11B23/28 ,  G11C11/02 ,  G11C11/23 ,  H01J3/02 ,  H01J31/60 ,  H01J2203/0296 ,  H01J2237/06383

Abstract: A data storage device including a substrate, a data storage layer on the substrate, and a spin-polarized electron source. The data storage layer comprises a fixed number of atomic layers of a magnetic material which provide the data storage layer with a magnetic anisotropy perpendicular to a surface of the data storage layer. A data magnetic field is created in the data storage layer. The data magnetic field is polarized either in a first direction corresponding to a first data value or in a second direction corresponding to a second data value. Data is stored in the data storage layer by providing a spin-polarized electron having an electron magnetic field with a direction of polarization corresponding to one of the first and the second data values, the electron having a wavelength "characteristic" of unpaired electrons in the data storage layer which cause the magnetic moment of the material, and directing the spin-polarized electron at the data magnetic field to impart the direction of polarization of the electron magnetic field to the data magnetic field. Data is read from the data storage layer by directing the spin-polarized electron at a second wavelength at the data magnetic field and detecting a deflection or attraction of the spin-polarized electron by the data magnetic field. Alternatively, data is read from the data storage layer by directing the spin-polarized electron at the data magnetic field so that the magnetic medium produces a secondary electron and then detecting certain characteristics of the secondary electron.

Abstract translation: 一种数据存储装置，包括基板，基板上的数据存储层和自旋极化电子源。 数据存储层包括固定数量的磁性材料的原子层，为数据存储层提供垂直于数据存储层表面的磁各向异性。 在数据存储层中创建数据磁场。 数据磁场在对应于第一数据值的第一方向或对应于第二数据值的第二方向上被极化。 通过提供具有电子磁场的自旋极化电子，数据存储在数据存储层中，该电子磁场具有与第一和第二数据值中的一个数据值相对应的极化方向，电子具有波长“特征”的不成对电子 数据存储层，其引起材料的磁矩，并将自旋极化电子引导到数据磁场，以将电子磁场的极化方向赋予数据磁场。 通过在数据磁场处引导第二波长的自旋极化电子并通过数据磁场检测自旋极化电子的偏转或吸引，从数据存储层读取数据。 或者，通过将自旋极化电子指向数据磁场，从数据存储层读取数据，使得磁介质产生二次电子，然后检测二次电子的某些特性。

公开(公告)号：WO1995020814A1

公开(公告)日：1995-08-03

申请号：PCT/US1995001013

申请日：1995-01-26

Applicant: TERASTORE, INC.

Inventor： TERASTORE, INC. ,  HURT, Thomas, D. ,  HALPINE, Scott, A.

IPC: G11B11/10

CPC classification number: G11B5/65 ,  G11B5/00 ,  G11B5/64 ,  G11B5/653 ,  G11B5/656 ,  G11B9/10 ,  G11B11/11 ,  G11B11/115 ,  G11B13/045 ,  G11B19/04 ,  G11B20/1883 ,  G11B23/28 ,  G11C11/02 ,  G11C11/23 ,  H01J3/02 ,  H01J2203/0296 ,  H01J2237/06383

Abstract: A data storage medium comprising a substrate and a data storage layer formed on the substrate. The data storage layer comprises a fixed number of atomic layers of a magnetic material which provide the data storage layer with a magnetic anisotropy perpendicular to a surface of the data storage layer. A data magnetic field is created in the data storage layer. The data magnetic field is polarized either in a first direction corresponding to a first data value or in a second direction corresponding to a second data value. Data is stored in the data storage layer by providing a spin-polarized electron having an electron magnetic field with a direction of polarization corresponding to one of the first and the second data values, and directing the spin-polarized electron at the data magnetic field to impart the direction of polarization of the electron magnetic field to the data magnetic field. Data is read from the data storage layer by directing the spin-polarized electron at the data magnetic field and detecting a deflection or attraction of the spin-polarized electron by the data magnetic field. Alternatively, data is read from the data storage layer by directing the spin-polarized electron at the data magnetic field so that the magnetic medium produces a secondary electron and then detecting certain characteristics of the secondary electron.

Abstract translation: 一种数据存储介质，包括形成在基板上的基板和数据存储层。 数据存储层包括固定数量的磁性材料的原子层，为数据存储层提供垂直于数据存储层表面的磁各向异性。 在数据存储层中创建数据磁场。 数据磁场在对应于第一数据值的第一方向或对应于第二数据值的第二方向上被极化。 通过提供具有电子磁场的自旋极化电子将数据存储在数据存储层中，该电子磁场具有对应于第一和第二数据值之一的极化方向，并将数据磁场的自旋极化电子引导到 将电子磁场的极化方向赋予数据磁场。 通过在数据磁场处引导自旋极化电子并通过数据磁场检测自旋极化电子的偏转或吸引，从数据存储层读取数据。 或者，通过将自旋极化电子指向数据磁场，从数据存储层读取数据，使得磁介质产生二次电子，然后检测二次电子的某些特性。

公开(公告)号：WO1991001038A1

公开(公告)日：1991-01-24

申请号：PCT/JP1990000892

申请日：1990-07-11

Applicant: IKEGAMI, Hidetsugu

IPC: G21K01/00

CPC classification number: H05H7/18 ,  H01J3/02 ,  H01J37/06

Abstract: A solenoïd magnetic field generating part (5) is arranged along an electron beam (0) of an electron beam unit, and a high-frequency resonator (4) for inducing cyclotron maser is provided in this part (5). High-frequency waves for inducing cyclotron maser are projected from the high-frequency resonator (4) in the same direction as, or opposite to, the travelling direction of the electron beam (0) to adjust the emittance of the electron beam (0) and to generate a high-intensity beam.

公开(公告)号：KR1020110020085A

公开(公告)日：2011-03-02

申请号：KR1020090077796

申请日：2009-08-21

Applicant: 포항공과대학교 산학협력단

Inventor： 박용운 ,  박성주 ,  홍주호 ,  문성익 ,  고인수 ,  김창범

IPC: H01J23/06 ,  H01J23/20

CPC classification number: H01J3/02

Abstract: PURPOSE: An electron beam generating apparatus and an electron beam generating method thereof are provided to receive and discharge the laser beam by forming only one hole on the front part of the housing. CONSTITUTION: A resonant cavity is arranged on the inner side of the housings(120, 140). A wave guide(110) is combined to the peripheral part of the housing. The wave guide is communicated with the resonant cavity through the coupling hole. A first pumping port(160) is combined to the opposite side of the wave guide.

Abstract translation: 目的：提供一种电子束产生装置及其电子束产生方法，以通过在壳体前部形成一个孔来接收和排出激光束。 构成：谐振腔布置在壳体（120,140）的内侧。 波导（110）组合到壳体的周边部分。 波导通过耦合孔与谐振腔连通。 第一抽吸口（160）组合到波导的相对侧。

公开(公告)号：KR1020100101682A

公开(公告)日：2010-09-17

申请号：KR1020107016868

申请日：2003-10-30

Applicant: 마퍼 리쏘그라피 아이피 비.브이.

Inventor： 윌랜드마르코잰-자코 ,  캠퍼비크베르트잰 ,  반빈알렉산더핸드릭빈센트 ,  크루이트피터

IPC: H01J37/302 ,  H01J37/304 ,  H01J37/317 ,  G03F7/20

CPC classification number: H01J3/02 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/06 ,  H01J37/3177 ,  H01J2237/0435 ,  H01J2237/06308 ,  H01J2237/06375 ,  H01J2237/3045

Abstract: The invention relates to an electron beam generator for generating an electron beam, comprising an electron source and an extractor. The combination of electron source and extractor in use forms a negative lens, wherein said extractor has a positive voltage with respect to the source. The extractor and the electron source are positioned such that, in use, a space charge limited region is present between them. In an embodiment, the extractor is a planar extractor. In another embodiment, the source is a thermionic source.. The generator may comprise an illumination system for collimating the electron beam.

公开(公告)号：KR1020050065659A

公开(公告)日：2005-06-29

申请号：KR1020057007705

申请日：2003-10-30

Applicant: 마퍼 리쏘그라피 아이피 비.브이.

Inventor： 윌랜드마르코잰-자코 ,  캠퍼비크베르트잰 ,  반빈알렉산더핸드릭빈센트 ,  크루이트피터

IPC: H01J37/302 ,  H01J37/304 ,  H01J37/317

CPC classification number: H01J3/02 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/06 ,  H01J37/3177 ,  H01J2237/0435 ,  H01J2237/06308 ,  H01J2237/06375 ,  H01J2237/3045

Abstract: The invention relates to an electron beam exposure apparatus for transferring a pattern onto the surface of a target (14), comprising: a beamlet generator for generating a plurality of electron beamlets (5a, 5b); a modulation array for receiving said plurality of electron beamlets, comprising a plurality of modulators for modulating the intensity of an electron beamlet; a controller, connected to the modulation array for individually controlling the modulators, an adjustor, operationally connected to each modulator, for individually adjusting the control signal of each modulator; a focusing electron optical system comprising an array of electrostatic lenses (7) wherein each lens focuses a corresponding individual beamlet, which is transmitted by said modulation array, to a cross section smaller than 300 nm, and a target holder for holding a target with its exposure surface onto which the pattern is to be transferred in the first focal plane of the focusing electron optical system.

Abstract translation: 本发明涉及一种用于将图案转印到目标（14）的表面上的电子束曝光装置，包括：用于产生多个电子束（5a，5b）的小波发生器; 用于接收所述多个电子子束的调制阵列，包括用于调制电子束的强度的多个调制器; 连接到用于单独控制调制器的调制阵列的控制器，可操作地连接到每个调制器的调节器，用于单独调整每个调制器的控制信号; 一种聚焦电子光学系统，包括静电透镜阵列（7），其中每个透镜将由所述调制阵列传输的相应的单独子束聚焦到小于300nm的横截面，以及用于保持目标的靶保持器 在聚焦电子光学系统的第一焦平面中将图案转印到其上的曝光表面。

公开(公告)号：KR1020050001090A

公开(公告)日：2005-01-06

申请号：KR1020030042653

申请日：2003-06-27

Applicant: 에스케이하이닉스 주식회사

Inventor： 이영모

IPC: H01J3/02

CPC classification number: H01J37/21 ,  H01J3/02 ,  H01J37/073

Abstract: PURPOSE: An electron gun is provided to allow for ease of focusing and distance measurement by using a dummy pattern for focusing formed on a surface of a cylinder cap. CONSTITUTION: An electron gun comprises a cathode gun tip for emitting electrons; a Wehnelt cylinder for supporting the cathode gun tip; a focusing assist pattern formed on a surface of a cylinder cap so as to be used in a measurement of distance between the cathode gun tip and an anode; and the anode arranged in an electron beam exit direction. The size of the focusing assist pattern is determined on the basis of resolution of optical microscope for measuring the distance between the cathode gun tip and the anode.

Abstract translation: 目的：提供一种电子枪，通过使用形成在气缸盖表面上的聚焦用虚拟图案，便于聚焦和距离测量。 构成：电子枪包括用于发射电子的阴极枪尖; 用于支撑阴极枪尖的Wehnelt气缸; 形成在气缸盖的表面上的聚焦辅助图案，用于测量阴极枪头和阳极之间的距离; 并且阳极以电子束出射方向排列。 基于用于测量阴极枪头和阳极之间的距离的光学显微镜的分辨率确定聚焦辅助图案的尺寸。

公开(公告)号：KR1019990072401A

公开(公告)日：1999-09-27

申请号：KR1019990003643

申请日：1999-02-03

Applicant: 홍헝얼 ,  융 와아 봉 ,  양 카이

Inventor： 홍헝얼 ,  융와아봉 ,  양카이

IPC: H01J31/00

CPC classification number: H01J29/48 ,  H01J3/02 ,  H01J29/04 ,  H01J29/62

Abstract: 본발명은음극선관(CRT)과유사한사이클로트론디스플레이장치를포함하는데, CRT 전자총은 CRT 전자총보다더 저전압및 에너지비용을전자를생성시키는하나이상의사이클로트론으로대체된다. 이는기술되는바와같이단색및 컬러디스플레이양자로행해질수 있다. 게다가, 전자는적당한속도로사이클로트론에서생성하여, 전극을가속시킬필요성을제거한다. 전자집속을위한필요성도감속되거나제거되는데, 그이유는전자는확산클라우드(diffuse clouds) 보다는빔으로서사이클로트론에서생성하기때문이다. 사이클로트론디스플레이어셈블리는종래의전자총 CRT 보다상당히짧게될 수있다· 게다가, 단일사이클로트론보다는사이클로트론의어레이가이용될수 있음으로써, 각사이클로트론은비디오스크린의부분으로맵한다. 이는사이클로트론디스플레이의길이를더욱짤벡한다.