Abstract:
An electron source comprises cathode means and a permanent magnet. A plurality of channels disposed in the magnet in a two dimensional array of rows and columns and extending between opposite poles of the magnet. The magnet generates, in each channel, a magnetic field which forms electrons received from the cathode means into an electron beam for guidance towards a target. Grid electrode means are disposed between the cathode means and the magnet for controlling flow of electrons from the cathode means into each channel. The grid electrode means comprises a plurality of parallel row conductors and a plurality of parallel column conductors arranged orthogonally to the row conductors. Each channel is located at a different intersection of a row conductor and a column conductor. Electric field isolation means reduces leakage of electric fields from each intersection.
Abstract:
Electrodes for establishing an electrostatic field to influence focus and deflection of an electron beam in a light valve have their surfaces which are exposed to the beam coated with chemically active, electrically conductive, sorbent materials in order to immediately sorb vapors which condense thereon. The electrodes are thus maintained uniformly conductive, precluding spurious charge buildup and facilitating precise control of the beam.
Abstract:
There provided a device for effectively drawing a fine pattern using a permanent magnet. The device has an outer cylinder 201 composed of a cylindrical ferromagnet with a Z axis as a central axis, a cylindrical permanent magnet 202 located inside the outer cylinder and polarized along the Z axis direction, a correction coil 204 located inside the cylindrical permanent magnet with a gap from the cylindrical permanent magnet, for adjusting a magnetic field strength generated by the cylindrical permanent magnet along the Z axis direction, and a coolant passage 203 located in the gap between the cylindrical permanent magnet and the correction coil, for allowing a coolant to flow therethrough and controlling temperature changes in the cylindrical permanent magnet.
Abstract:
An electron source having a cathode and a permanent magnet perforated by a plurality of channels extending between opposite poles thereof. The magnet generates, in each channel, a magnetic field which forms electrons received from the cathode into an electron beam for guidance towards a target. An electrode grid is disposed between the cathode and the magnet for controlling flow of electrons from the cathode into each channel. A magnetic field null region of each magnetic field is positioned at a location remote from the electrode grid. Because the null region is positioned remotely from the grid electrodes, flow of electrons can be improved without increasing electrode drive voltage.