公开(公告)号：US20070228887A1

公开(公告)日：2007-10-04

申请号：US11683755

申请日：2007-03-08

Applicant: Michihiko Nishigaki ,  Toshihiko Nagano ,  Takashi Miyazaki ,  Kazuhiko Itaya ,  Takashi Kawakubo

Inventor： Michihiko Nishigaki ,  Toshihiko Nagano ,  Takashi Miyazaki ,  Kazuhiko Itaya ,  Takashi Kawakubo

IPC: H01L41/00

CPC classification number: B81B3/0072 ,  B81B2201/032 ,  H01G5/18 ,  H01H57/00 ,  H01H2057/006 ,  H01L41/094

Abstract: A MEMS device includes: a first actuator having a first fixed end, including a stacked structure of a first lower electrode, a first piezoelectric film, and a first upper electrode, and being able to be operated by applying voltages to the first lower electrode and the first upper electrode; a second actuator having a second fixed end, being disposed in parallel with the first actuator, including a stacked structure of a second lower electrode, a second piezoelectric film, and a second upper electrode, and being able to be operated by applying voltages to the second lower electrode and the second upper electrode; and an electric circuit element having a first action part connected to the first actuator and a second action part connected to the second actuator.

Abstract translation: MEMS器件包括：第一致动器，具有第一固定端，包括第一下电极，第一压电膜和第一上电极的堆叠结构，并且能够通过向第一下电极施加电压而操作， 第一上电极; 具有第二固定端的第二致动器，与所述第一致动器平行设置，包括第二下电极，第二压电膜和第二上电极的堆叠结构，并且能够通过向所述第二致动器施加电压而被操作 第二下电极和第二上电极; 以及具有连接到第一致动器的第一作用部分和连接到第二致动器的第二作用部分的电路元件。

公开(公告)号：US07239064B1

公开(公告)日：2007-07-03

申请号：US11138108

申请日：2005-05-26

Applicant: Arthur Anthony Jenkins ,  Michael Scott Kranz ,  Marty Ray Williams

Inventor： Arthur Anthony Jenkins ,  Michael Scott Kranz ,  Marty Ray Williams

IPC: H01H71/16 ,  H02N10/00

CPC classification number: H01H37/52 ,  B81B3/0078 ,  B81B2201/032 ,  B81B2203/056 ,  H01H2001/0047 ,  H01H2037/008 ,  H01H2300/032

Abstract: The Resettable Latching MEMS Temperature Sensor provides the capability of recording external temperature extremes without consuming electrical power. The device incorporates a thermal bimorph, contacts, latches, and actuators for device reset. The device can be designed, hardwired, or programmed to trigger at various temperature levels. The device can be fabricated in a simple micromachining process that allows its size to be miniaturized for embedded and portable applications. During operation, the device consumes no quiescent power. The device can be configured to close a circuit, switch an interrupt signal, or switch some other electrical trigger signal between devices at the time of a temperature extreme being reached, or it can be configured to latch and be polled at some time after the temperature limit has occurred.

Abstract translation: 可复位闭锁MEMS温度传感器提供了记录外部温度极限而不消耗电力的能力。 该器件包含一个热双压电晶片，触点，闩锁和执行器，用于器件复位。 该设备可以设计，硬连线或编程为在各种温度水平触发。 该器件可以在简单的微加工工艺中制造，允许其尺寸被小型化以用于嵌入式和便携式应用。 在运行期间，该设备不消耗静态功率。 该设备可以配置为在达到温度极限时关闭电路，切换中断信号或切换设备之间的其他电触发信号，或者可以将其配置为在温度之后的某个时间锁存和轮询 发生了极限。

公开(公告)号：US07179674B2

公开(公告)日：2007-02-20

申请号：US11024192

申请日：2004-12-28

Applicant: Joseph Colby McAlexander, III

Inventor： Joseph Colby McAlexander, III

IPC: H01L21/00

CPC classification number: H01H35/14 ,  B81B2201/0235 ,  B81B2201/032 ,  B81C1/0015 ,  B81C2201/019 ,  G01P15/125 ,  G01P15/135 ,  G01P2015/0828 ,  H01H1/0036

Abstract: An acceleration sensor includes a semiconductor substrate, a first layer formed on the substrate, a first aperture within the first layer, and a beam coupled at a first end to the substrate and suspended above the first layer for a portion of the length thereof. The beam includes a first boss coupled to a lower surface thereof and suspended within the first aperture, and a second boss coupled to an upper surface of the second end of the beam. A second layer is positioned on the first layer over the beam and includes a second aperture within which the second boss is suspended by the beam. Contact surfaces are positioned within the apertures such that acceleration of the substrate exceeding a selected threshold in either direction along a selected axis will cause the beam to flex counter to the direction of acceleration and make contact through one of the bosses with one of the contact surfaces.

Abstract translation: 加速度传感器包括半导体衬底，形成在衬底上的第一层，第一层内的第一孔，以及在第一端处耦合到衬底并在其长度的一部分上悬浮在第一层上方的梁。 梁包括联接到其下表面并悬挂在第一孔内的第一凸起，以及联接到梁的第二端的上表面的第二凸台。 第二层位于梁上的第一层上，并且包括第二孔，第二凸起由梁悬挂在该第二孔内。 接触表面定位在孔内，使得沿着所选择的轴线在任一方向超过选定阈值的基底的加速度将导致梁相对于加速方向弯曲并且通过一个凸起与其中一个接触表面 。

公开(公告)号：US07141915B2

公开(公告)日：2006-11-28

申请号：US10896769

申请日：2004-07-22

Applicant: Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Koji Kimura ,  Natsumi Shimogawa ,  Takayoshi Akao

Inventor： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Koji Kimura ,  Natsumi Shimogawa ,  Takayoshi Akao

IPC: H01L41/08

CPC classification number: B81B3/0018 ,  B81B2201/032 ,  G02B26/0841 ,  G02B26/0858 ,  H01L41/0474 ,  H01L41/0973 ,  H04R17/005 ,  H04R2201/003

Abstract: An actuator device has a drive section including a plurality of actuators arranged in a plane on a substrate, and a single first plate member to which drive forces from the actuators of the drive section are transmitted. A plurality of spacers are disposed between the first plate member and the substrate, forming m cells. Each of the actuators has a cavity, a vibrating section and a fixed section formed on the substrate. The rigidity of the first plate member is greater than the rigidity of the vibrating section of the actuator.

Abstract translation: 致动器装置具有驱动部，该驱动部具有布置在基板上的平面中的多个致动器，以及传递来自驱动部的致动器的驱动力的单个第一板部件。 多个间隔件设置在第一板构件和基板之间，形成m个单元。 每个致动器具有形成在基板上的空腔，振动部分和固定部分。 第一板构件的刚性大于致动器的振动部的刚性。

公开(公告)号：US07070699B2

公开(公告)日：2006-07-04

申请号：US10727191

申请日：2003-12-03

Applicant: Joel A. Kubby ,  Fuqian Yang ,  Jun Ma ,  Kristine A. German ,  Peter M. Gulvin

Inventor： Joel A. Kubby ,  Fuqian Yang ,  Jun Ma ,  Kristine A. German ,  Peter M. Gulvin

IPC: B29D11/00 ,  C23F1/00

CPC classification number: G02B6/3508 ,  B81B3/0054 ,  B81B2201/032 ,  G02B6/3546 ,  G02B6/3568 ,  G02B6/3582 ,  G02B6/3596 ,  H01H2001/0042

Abstract: A bistable microelectromechanical system (MEMS) based system comprises a micromachined beam having a first stable state, in which the beam is substantially stress-free and has a specified non-linear shape, and a second stable state. The curved shape may comprises a simple curve or a compound curve. In embodiments, the boundary conditions for the beam are fixed boundary conditions, bearing boundary conditions, spring boundary conditions, or a combination thereof. The system may further comprise an actuator arranged to move the beam between the first and second stable states and a movable element that is moved between a first position and a second position in accordance with the movement of the beam between the first and second stable states. The actuator may comprise one of a thermal actuator, an electrostatic actuator, a piezoelectric actuator and a magnetic actuator. The actuator may further comprise a thermal impact actuator or a zippering electrostatic actuator.

公开(公告)号：US06967362B2

公开(公告)日：2005-11-22

申请号：US10669428

申请日：2003-09-25

Applicant: Yun-woo Nam ,  Suk-han Lee

Inventor： Yun-woo Nam ,  Suk-han Lee

IPC: H04R17/02 ,  B81B3/00 ,  H01L41/09 ,  H01L41/193 ,  H01L41/45 ,  H04R31/00 ,  H01L27/20 ,  H01L29/84

CPC classification number: H01L41/45 ,  B81B2201/0257 ,  B81B2201/032 ,  B81B2203/0118 ,  B81B2203/0127 ,  B81C1/00182 ,  H01L41/094 ,  H01L41/0973 ,  H04R1/406 ,  H04R17/02 ,  H04R2420/07

Abstract: A flexible wireless MEMS microphone includes a substrate of a flexible polymeric material, a flexible MEMS transducer structure formed on the substrate by PECVD, an antenna printed on the substrate for communicating with an outside source, a wire and interface circuit embedded in the substrate to electrically connect the flexible MEMS transducer and the antenna, a flexible battery layer electrically connected to the substrate for supplying power to the MEMS transducer, and a flexible bluetooth module layer electrically connected to the battery layer. The flexible MEMS transducer includes a flexible substrate, a membrane layer deposited on the substrate, a lower electrode layer formed on the membrane layer, an active layer formed by depositing a piezopolymer on the lower electrode layer, an upper electrode layer formed on the active layer, and a first and a second connecting pad electrically connected to the lower and upper electrode layers, respectively.

Abstract translation: 灵活的无线MEMS麦克风包括柔性聚合物材料的基底，通过PECVD在基底上形成的柔性MEMS换能器结构，印刷在基底上用于与外部源连通的天线，嵌入在基底中的电线和接口电路， 连接柔性MEMS换能器和天线，电连接到基板的用于向MEMS换能器供电的柔性电池层以及电连接到电池层的柔性蓝牙模块层。 柔性MEMS换能器包括柔性基板，沉积在基板上的膜层，形成在膜层上的下电极层，通过在下电极层上沉积压电聚合物形成的有源层，形成在有源层上的上电极层 以及分别电连接到下电极层和上电极层的第一和第二连接焊盘。

公开(公告)号：US20050104478A1

公开(公告)日：2005-05-19

申请号：US11017498

申请日：2004-12-20

Applicant: Baomin Xu ,  William Wong

Inventor： Baomin Xu ,  William Wong

IPC: H01L41/09 ,  H01L41/24 ,  H02N2/04 ,  H01L41/08

CPC classification number: B81B3/0024 ,  B81B2201/032 ,  H01L41/094 ,  H01L41/22 ,  H01L41/313 ,  H01L41/314 ,  H01L41/337 ,  Y10T29/42 ,  Y10T29/49126 ,  Y10T29/49128 ,  Y10T29/4913 ,  Y10T29/49147 ,  Y10T29/49155 ,  Y10T29/49156

Abstract: A micro-electromechanical dimensioned bimorph structure includes a first element layer structure, and a second element layer structure. The element layer structures are provided in various combinations, including piezoelectric/piezoelectric, antiferroelectric/antiferroelectric or antiferroelectric/piezoelectric. The layer thickness of the element structure is less than 100 μm. A bonding layer bonds the first element structure directly to the second element structure and the bonding layer thickness is less than 10 μm. The bimorph structure can be made in various forms including a cantilever or a diaphragm. Microfluidic devices using the bimorph structures may also be constructed.

Abstract translation: 微机电尺寸双压电晶片结构包括第一元件层结构和第二元件层结构。 元件层结构以各种组合提供，包括压电/压电，反铁电/反铁电或反铁电/压电。 元件结构的层厚小于100μm。 结合层将第一元件结构直接结合到第二元件结构，并且结合层厚度小于10μm。 双压电晶片结构可以以各种形式制成，包括悬臂或隔膜。 也可以构造使用双压电晶片结构的微流体装置。

公开(公告)号：US20040114259A1

公开(公告)日：2004-06-17

申请号：US10473532

申请日：2003-09-29

Inventor： Tohru Ishizuya ,  Keiichi Akagawa

IPC: G02B005/08

CPC classification number: G02B26/0841 ,  B81B3/0062 ,  B81B2201/032 ,  B81B2201/045 ,  B81B2203/053 ,  B81B2203/055 ,  B81B2203/058

Abstract: The mirror device has a mirror 2, and a supporting mechanism which elastically supports the mirror 2 on a substrate 1 in a state in which the mirror floats from the substrate 1, so that the mirror can be inclined in an arbitrary direction. The supporting mechanism has three supporting parts 3A, 3B and 3C that mechanically connect the substrate 1 and mirror 2. Each of the supporting parts 3A, 3B and 3C has one or more plate spring parts 5 that are constructed from a thin film consisting of one or more layers. One end portion of each plate spring part 5 is connected to the substrate 1 via a leg part 9 which has a rising part that rises from the substrate 1. The other end portion of the plate spring part 5 is mechanically connected to the mirror 2 via a connecting part which has a rising part that rises from this other end portion. The mirror 2 is supported on the substrate 1 only via the plate spring part 5 of the respective 3A, 3B and 3C. As a result, compactness and mass production characteristics can be greatly improved while maintaining superior optical characteristics.

Abstract translation: 镜装置具有反射镜2和支撑机构，其以反射镜从基板1浮起的状态将基板1上的反射镜2弹性支撑，使得反射镜能够在任意方向上倾斜。 支撑机构具有机械地连接基板1和反射镜2的三个支撑部件3A，3B和3C。每个支撑部件3A，3B和3C具有一个或多个板簧部件5，该板簧部件由由一个 或更多层。 每个板簧部分5的一个端部经由腿部9连接到基板1，腿部9具有从基板1上升的上升部分。板簧部分5的另一端部通过 连接部具有从该另一端部上升的上升部。 反射镜2仅通过相应的3A，3B和3C的板簧部分5支撑在基板1上。 结果，可以在保持优异的光学特性的同时大大提高紧凑性和批量生产特性。

公开(公告)号：US20030189351A1

公开(公告)日：2003-10-09

申请号：US10406845

申请日：2003-04-04

Applicant: Yoshikazu Nakayama ,  Daiken Chemical Co., Ltd.

Inventor： Yoshikazu Nakayama ,  Seiji Akita ,  Akio Harada ,  Takashi Okawa

IPC: B25J007/00

CPC classification number: B25J7/00 ,  B81B2201/032 ,  B81B2201/12 ,  B81B2203/0118 ,  B81C99/002 ,  B82B3/00 ,  G01Q80/00 ,  Y10S977/732 ,  Y10S977/734 ,  Y10S977/742 ,  Y10S977/778 ,  Y10S977/78 ,  Y10S977/837 ,  Y10S977/842 ,  Y10S977/858 ,  Y10S977/863 ,  Y10S977/875 ,  Y10S977/876 ,  Y10S977/89 ,  Y10S977/901 ,  Y10S977/962

Abstract: To provide nanotweezers and a nanomanipulator which allow great miniaturization of the component and are capable of gripping various types of nano-substances such as insulators, semiconductors and conductors and of gripping nano-substances of various shapes. Electrostatic nanotweezers 2 are characterized in that the nanotweezers 2 are comprised of a plurality of nanotubes whose base end portions are fastened to a holder 6 so that the nanotubes protrude from the holder 6, coating films which insulate and cover the surfaces of the nanotubes, and lead wires 10, 10 which are connected to two of the nanotubes 8, 9; and the tip ends of the two nanotubes are freely opened and closed by means of an electrostatic attractive force generated by applying a voltage across these lead wires. Furthermore, by way of forming a piezo-electric film 32 on the surface of the nanotube 9, and the tip ends of the nanotubes are freely opened and closed by expanding and contracting the piezo-electric film, thus allowing any desired nano-substances to be handled regardless of whether the nano-substances are insulators, semiconductors or conductors. Furthermore, if by way of designing three nanotubes so as to be freely opened and closed by an electrostatic system, nano-substances of various shapes such as spherical, rod-form, etc. can be handled. Moreover, a nanomanipulator that is constructed by combining the nanotweezers with a three-dimensional driving mechanism facilitates the gripping, moving and releasing of nano-substances

Abstract translation: 提供纳米管和纳米管操纵器，其允许部件的极小化，并且能够夹持各种类型的纳米物质，例如绝缘体，半导体和导体，并且夹持各种形状的纳米物质。 静电纳米针筒2的特征在于，纳米针筒2由多个纳米管组成，其基端部固定在保持器6上，使得纳米管从支架6突出，绝缘并覆盖纳米管表面的涂膜，以及 引线10,10连接到两个纳米管8,9; 并且通过在这些引线上施加电压而产生的静电吸引力自由地打开和闭合两个纳米管的末端。 此外，通过在纳米管9的表面上形成压电膜32，通过使压电膜膨胀收缩来使纳米管的前端自由地开闭，从而使任何所需的纳米物质 无论纳米物质是绝缘体，半导体还是导体，都要进行处理。 此外，如果通过设计三个纳米管以通过静电系统自由地打开和关闭，则可以处理诸如球形，棒状等各种形状的纳米物质。 此外，通过将纳米针管与三维驱动机构组合而构成的纳米机械手有利于纳米物质的夹持，移动和释放

公开(公告)号：US20030189350A1

公开(公告)日：2003-10-09

申请号：US10406844

申请日：2003-04-04

Applicant: Yoshikazu Nakayama ,  Daiken Chemical Co., Ltd.

Inventor： Yoshikazu Nakayama ,  Seiji Akita ,  Akio Harada ,  Takashi Okawa

IPC: B25J007/00

CPC classification number: B25J7/00 ,  B81B2201/032 ,  B81B2201/12 ,  B81B2203/0118 ,  B81C99/002 ,  B82B3/00 ,  G01Q80/00 ,  Y10S977/732 ,  Y10S977/734 ,  Y10S977/742 ,  Y10S977/778 ,  Y10S977/78 ,  Y10S977/837 ,  Y10S977/842 ,  Y10S977/858 ,  Y10S977/863 ,  Y10S977/875 ,  Y10S977/876 ,  Y10S977/89 ,  Y10S977/901 ,  Y10S977/962

Abstract: To provide nanotweezers and a nanomanipulator which allow great miniaturization of the component and are capable of gripping various types of nano-substances such as insulators, semiconductors and conductors and of gripping nano-substances of various shapes. Electrostatic nanotweezers 2 are characterized in that the nanotweezers 2 are comprised of a plurality of nanotubes whose base end portions are fastened to a holder 6 so that the nanotubes protrude from the holder 6, coating films which insulate and cover the surfaces of the nanotubes, and lead wires 10, 10 which are connected to two of the nanotubes 8, 9; and the tip ends of the two nanotubes are freely opened and closed by means of an electrostatic attractive force generated by applying a voltage across these lead wires. Furthermore, by way of forming a piezo-electric film 32 on the surface of the nanotube 9, and the tip ends of the nanotubes are freely opened and closed by expanding and contracting the piezo-electric film, thus allowing any desired nano-substances to be handled regardless of whether the nano-substances are insulators, semiconductors or conductors. Furthermore, if by way of designing three nanotubes so as to be freely opened and closed by an electrostatic system, nano-substances of various shapes such as spherical, rod-form, etc. can be handled. Moreover, a nanomanipulator that is constructed by combining the nanotweezers with a three-dimensional driving mechanism facilitates the gripping, moving and releasing of nano-substances