Abstract:
A tilt structure includes a shaft section formed on a substrate section, a tilt structure film having one end formed on an upper surface of the shaft section, and the other end bonded to the substrate section, and a thin film section provided to the tilt structure film, located on a corner section composed of the upper surface of the shaft section and a side surface of the shaft section, and having a film thickness thinner than the tilt structure film, the tilt structure film is bent in the thin film section, and an acute angle is formed by the substrate section and the tilt structure film.
Abstract:
An ellipsometer or polarimeter system and method for controlling intensity of an electromagnetic beam over a spectrum of wavelengths by applying control (P2) and beam (P) polarizers, optionally in combination with an intervening and control compensator (C).
Abstract:
An apparatus for imaging a tooth having a light source with a first spectral range and a second spectral range. A polarizing beamsplitter (18) light having a first polarization state toward the tooth and directs light from the tooth having a second polarization state along a return path toward a sensor (68), wherein the first and second polarization states are orthogonal. A first lens (22) in the return path directs image-bearing light from the tooth, through the polarizing beamsplitter (18), toward the sensor (68), and obtains image data from the redirected portion of the light having the second polarization state. A long-pass filter (15) in the return path attenuates light in the second spectral range. Control logic enables the sensor to obtain either the reflectance image or the fluorescence image.
Abstract:
An apparatus for imaging a tooth having a light source with a first spectral range and a second spectral range. A polarizing beamsplitter (18) light having a first polarization state toward the tooth and directs light from the tooth having a second polarization state along a return path toward a sensor (68), wherein the first and second polarization states are orthogonal. A first lens (22) in the return path directs image-bearing light from the tooth, through the polarizing beamsplitter (18), toward the sensor (68), and obtains image data from the redirected portion of the light having the second polarization state. A long-pass filter (15) in the return path attenuates light in the second spectral range. Control logic enables the sensor to obtain either the reflectance image or the fluorescence image.
Abstract:
Systems and techniques for imaging spectroscopy using improved data acquisition for infrared and near-infrared imaging. A first filter corresponding to a first wavelength may be positioned in the optical path of an infrared camera, and subframe data may be acquired for different exposures. A second filter corresponding to a second different wavelength may be positioned in the optical path of the infrared camera, and subframe data acquired for different exposures. Image data for the first wavelength and the second wavelength may then be compared to reference spectroscopic data.
Abstract:
A rotating compensator spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, the system being functionally present in an environmental control chamber and therefore suitable for application in wide spectral range, (for example, 130-1700 nm). Preferred compensator design involves a substantially achromatic multiple element compensator systems wherein multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements thereof are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.
Abstract:
The present invention relates to a method and system of array imaging that extends or maximizes the longevity of the sensor array by minimizing the effects of photobleaching. The imaging system has a light source, a variable exposure aperture, and a variable filter system. The system extends the longevity of sensors by (1) using the variable exposure aperture to selectively expose sections of the sensor array containing representative numbers of each type of sensor, and/or (2) using the variable filter system to control the intensity of the excitation light, providing only the intensity required to induce the appropriate excitation and increasing that intensity over time as necessary to counteract the effects of photobleaching.
Abstract:
An optical microscope according to a first embodiment of the present invention includes: a laser light source; a Y-directional scanning unit moving the light beam in a Y direction; an objective lens; a X-directional scanning unit moving the light beam in a X direction; a beam splitter provided in an optical path from the Y-directional scanning unit to the sample, and separating outgoing light out of the light beam incident on the sample, which exits from the sample toward the objective lens from the light beam incident on the sample from the laser light source; a spectroscope having an entrance slit extending along the Y direction and spatially dispersing the outgoing light passed through the entrance slit in accordance with a wavelength of the light; and a detector detecting the outgoing light dispersed by the spectroscope.
Abstract:
An optical power control system for a semiconductor source spectroscopy system controls power fluctuations in the tunable signal from the spectroscopy system and thus improves the noise performance of the system. This general solution has advantages relative to other systems that simply detect reference power levels during the scan and then correct the detected signal after interaction with the sample by reducing the requirements for coordinating the operation of the sample detectors and power or reference detectors. The spectroscopy system comprises a semiconductor source and a tunable filter. The combination of the semiconductor source and tunable signal illuminate a sample with a tunable signal, being tunable over a scan band. The power control system comprises an amplitude detector system for detecting the power of the tunable optical signal and power control system for regulating the amplitude of the tunable optical signal in response to its detected power.
Abstract:
Methods and apparatus for measuring an electromagnetic radiation response property associated with a substrate and calibrating an electromagnetic measurement device are disclosed. The methods and apparatus generate electromagnetic waves and capture a portion of the generated waves after the waves pass through a first polarized filter, reflect from a substrate, and pass through a second polarized filter arranged in a cross polar arrangement with respect to the first polarized filter. In addition, the apparatus captures electromagnetic waves that pass through an attenuating filter and reflect from one or more calibration standards. Digital data is determined from the captured electromagnetic waves. The digital data is used to recalibrate the apparatus.