公开(公告)号：US5523266A

公开(公告)日：1996-06-04

申请号：US286538

申请日：1994-08-05

Applicant: Hiroyuki Nishimura ,  Akira Fujinoki ,  Toshikatsu Matsuya ,  Kyoichi Inaki ,  Toshiyuki Kato ,  Atsushi Shimada

Inventor： Hiroyuki Nishimura ,  Akira Fujinoki ,  Toshikatsu Matsuya ,  Kyoichi Inaki ,  Toshiyuki Kato ,  Atsushi Shimada

IPC: C03B8/04 ,  C03B19/14 ,  C03B37/014 ,  C03C3/06 ,  G03F7/20 ,  C03B20/00

CPC classification number: C03B37/014 ,  C03B19/1415 ,  C03B19/1453 ,  C03C3/06 ,  G03F7/70958 ,  C03B2201/02 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/20 ,  C03B2201/21 ,  C03B2201/23 ,  C03B2203/22 ,  C03B2207/32 ,  C03C2201/11 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2203/40 ,  Y02P40/57 ,  Y10S501/90 ,  Y10S65/08

Abstract: A synthetic quartz glass optical member for an ultraviolet laser, where the quartz glass has a hydroxyl content of 10-100 ppm, a chlorine content of 200 ppm or less, a hydrogen content of 1.times.10.sup.16 molecules/cm.sup.3 or less, a homogeneity of refractive index of 5.times.10.sup.-6 or less in terms of .DELTA.n, and a birefringence of 5 nm/cm or less.

Abstract translation: 一种用于紫外线激光的合成石英玻璃光学构件，其中石英玻璃的羟基含量为10-100ppm，氯含量为200ppm以下，氢含量为1×1016分/ cm 3以下，折射率均匀性 在DELTA n方面为5×10 -6以下，双折射为5nm / cm以下。

公开(公告)号：US5364433A

公开(公告)日：1994-11-15

申请号：US977397

申请日：1993-05-15

Applicant: Hiroyuki Nishimura ,  Akira Fujinoki ,  Toshikatsu Matsuya ,  Kyoichi Inaki ,  Toshiyuki Kato ,  Atsushi Shimada

Inventor： Hiroyuki Nishimura ,  Akira Fujinoki ,  Toshikatsu Matsuya ,  Kyoichi Inaki ,  Toshiyuki Kato ,  Atsushi Shimada

IPC: C03B8/04 ,  C03B19/14 ,  C03B37/014 ,  C03C3/06 ,  G03F7/20

CPC classification number: C03B37/014 ,  C03B19/1415 ,  C03B19/1453 ,  C03C3/06 ,  G03F7/70958 ,  C03B2201/02 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/20 ,  C03B2201/21 ,  C03B2201/23 ,  C03B2203/22 ,  C03B2207/32 ,  C03C2201/11 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2203/40 ,  Y02P40/57 ,  Y10S501/90 ,  Y10S65/08

Abstract: A synthetic quartz glass optical member for an ultraviolet laser, suitably applicable as a stepper lens of a lithographer using an excimer laser beam and other optical members, wherein the quartz glass has a hydroxyl content of 10 to 100 ppm, a chlorine content of 200 ppm or less, a hydrogen content of 1.times.10.sup.16 molecules/cm.sup.3 or less, a homogeneity of refractive index of 5.times.10.sup.-6 or less in terms of .DELTA.n, and a birefringence of 5 nm/cm or less. The optical member can be produced by subjecting a volatile silicon compound to flame hydrolysis with oxyhydrogen flame, depositing the formed particulate silica on a heat-resistant support to prepare a porous silica matrix, heating the matrix in a vacuum as high as 1.times.10.sup.-2 Torr or above to a temperature of 1,400 .degree. C. or above to effect dehydration and degassing, homogenizing the resultant transparent quartz glass into highly homogeneous quartz glass free from striae in at last one direction, molding the highly homogeneous quartz glass, and annealing the molded glass.

Abstract translation: PCT No.PCT / JP92 / 00821 Sec。 371日期1993年3月15日 102（e）1993年3月15日PCT提交1992年6月29日PCT公布。 公开号WO93 / 00307 日期：1993年1月7日。一种用于紫外线激光的合成石英玻璃光学元件，适用于使用准分子激光束和其它光学部件的平版印刷机的步进透镜，其中石英玻璃的羟基含量为10〜100ppm ，氯含量为200ppm以下，氢含量为1×1016分/ cm 3以下，折射率均匀性为DELTA n为5×10 -6以下，双折射为5nm / cm以下。 光学构件可以通过使挥发性硅化合物用氢氧焰火焰水解，将形成的颗粒二氧化硅沉积在耐热载体上以制备多孔二氧化硅基质来制造，在高达1×10 -2乇的真空中加热基质 以上至1400℃以上的温度进行脱水脱气，将得到的透明石英玻璃均匀化成最后一个方向不含条纹的高度均匀的石英玻璃，成型高度均匀的石英玻璃，退火成型玻璃 。

公开(公告)号：US5326729A

公开(公告)日：1994-07-05

申请号：US13396

申请日：1993-02-04

Applicant: Susumu Yaba ,  Shinya Kikugawa

Inventor： Susumu Yaba ,  Shinya Kikugawa

IPC: C03B8/04 ,  C03B19/14 ,  C03C3/06 ,  G03F7/20

CPC classification number: G03F7/70958 ,  C03B19/1453 ,  C03C3/06 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/21 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2203/42 ,  C03C2203/54 ,  Y10S65/08 ,  Y10S65/90

Abstract: Quartz glass obtained by flame-hydrolyzing a glass-forming raw material to obtain fine particles of quartz glass, having the fine particles of quartz glass deposited and grown on a substrate to obtain a porous quartz glass product and heating the porous quartz glass product to obtain a transparent quartz glass product, which has an OH content of not more than 10 ppm and a halogen content of at least 400 ppm and which contains hydrogen.

Abstract translation: 通过对形成玻璃的原料进行火焰水解获得的石英玻璃，得到石英玻璃微粒，将石英玻璃微粒沉积生长在基板上，得到多孔石英玻璃制品，加热多孔石英玻璃制品，得到 透明的石英玻璃制品，其OH含量不超过10ppm，卤素含量为至少400ppm，并含有氢。

公开(公告)号：US5306322A

公开(公告)日：1994-04-26

申请号：US924767

申请日：1992-07-24

Applicant: Shinji Ishikawa ,  Yuichi Ohga ,  Ichiro Tsuchiya ,  Hiroo Kanamori ,  Hiroshi Yokota ,  Michihisa Kyoto

Inventor： Shinji Ishikawa ,  Yuichi Ohga ,  Ichiro Tsuchiya ,  Hiroo Kanamori ,  Hiroshi Yokota ,  Michihisa Kyoto

IPC: G02B6/00 ,  C03B37/014 ,  C03B37/023

CPC classification number: C03B37/01446 ,  C03B37/0146 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  Y10S65/16 ,  Y10S65/90

Abstract: The present invention providesa process for the dehydrating and purifying treatment by heating a porous glass preform for an optical fiber comprising passing the porous glass preform through a muffle tube having a SiC layer at least on its inner surface at a high temperature under an atmosphere comprising an inert gas and a silicon halogenide gas;a process for the fluorine-doping treatment by heating a porous glass preform for an optical fiber comprising passing a porous glass preform through a muffle tube having a SiC layer at least on its inner surface at a high temperature under an atmosphere comprising a fluorine compound gas and an inert gas; anda process for the vitrifying treatment by heating a porous glass preform for an optical fiber comprising passing the preform, which has been previously dehydrated and purified, through a muffle tube having a SiC layer at least on its inner surface at a high temperature under an atmosphere gas.

Abstract translation: 本发明提供了一种通过加热用于光纤的多孔玻璃预制件进行脱水和净化处理的方法，包括使多孔玻璃预制件通过具有SiC层的马弗管至少在其内表面上在高温下在包括 惰性气体和卤化硅气体; 通过加热用于光纤的多孔玻璃预制件进行氟掺杂处理的方法，包括使多孔玻璃预制件通过具有SiC层的马弗管至少在其内表面上在高温下在包含氟化合物气体 和惰性气体; 以及通过加热用于光纤的多孔玻璃预制件进行玻璃化处理的方法，包括使预先脱水和净化的预成型体至少在其内表面上通过具有SiC层的马弗管在高温下 气氛气体。

公开(公告)号：US5145507A

公开(公告)日：1992-09-08

申请号：US640556

申请日：1991-01-14

Applicant: Michihisa Kyoto ,  Yoichi Ishiguro ,  Akira Urano ,  Hideo Kakuzen

Inventor： Michihisa Kyoto ,  Yoichi Ishiguro ,  Akira Urano ,  Hideo Kakuzen

IPC: C03B37/014

CPC classification number: C03B37/01446 ,  C03B37/0146 ,  C03B2201/075 ,  C03B2201/12 ,  Y10S65/16 ,  Y10S65/90

Abstract: A glass preform is produced by forming a glass soot composite body having a core portion consisting of a solid glass and a peripheral portion consisting of a porous glass mass, removing trapped gas and water from pores of the soot composite body by heating the soot composite body under a pressure lower than several ten Torr. at a temperature at which the porous glass mass is not vitrified, filling the pores in the porous glass mass of the soot composite body with a gas containing SiF.sub.4, the partial pressure of which is a function of the desired specific difference of refractive index, thus uniformly adding fluorine to the soot glass mass, and vitrifying the fluorine-added soot glass mass into a transparent glass mass to form a glass preform.

Abstract translation: 通过形成具有由固体玻璃构成的核心部分和由多孔玻璃组成的周边部分的玻璃烟炱复合体制造玻璃预制件，通过加热烟炱复合体，从烟炱复合体的孔中除去捕获的气体和水 在低于几十乇的压力下。 在多孔玻璃体未被玻璃化的温度下，用含有SiF 4的气体填充烟灰复合体的多孔玻璃体中的孔，其分压是期望的折射率差异的函数，因此 向烟灰玻璃块均匀地加入氟，并将氟化烟炱玻璃块玻璃化成透明玻璃块以形成玻璃预制件。

公开(公告)号：US4650511A

公开(公告)日：1987-03-17

申请号：US739876

申请日：1985-05-31

Applicant: Kazuo Koya ,  Yoshiharu Konya

Inventor： Kazuo Koya ,  Yoshiharu Konya

IPC: C03B19/14 ,  C03B37/014 ,  C03C13/04 ,  C03C23/00 ,  G02B6/00 ,  C03B29/00

CPC classification number: C03C23/0085 ,  C03B19/1453 ,  C03B37/01446 ,  C03B2201/075 ,  C03B2201/12 ,  Y10S65/16

Abstract: The invention provides an efficient method for the dehydration, i.e. removal of silicon-bonded hydroxy groups, of a porous silica body before vitrification as a precursor of quartz glass-made optical fibers obtained by the flame hydrolysis of a silicon compound and deposition of fine silica particles formed therefrom. The problems and disadvantages accompanying the use of conventional dehydrating agents can be solved in the invention by heating the hydroxy-containing porous silica body at 1000.degree. to 1300.degree. C. in an atmosphere containing thionyl fluoride or sulfuryl fluoride as the dehydrating agent which is also effective as a dechlorinating agent so that the optical fibers prepared from the quartz glass material of the invention are highly transparent and resistant against hydrogen-containing atmosphere at elevated temperatures.

Abstract translation: 本发明提供了一种有效的方法，用于在玻璃化之前将多孔二氧化硅体脱水，即除去与硅键合的羟基，作为通过硅化合物的火焰水解获得的石英玻璃制成的光纤的前体和沉积细二氧化硅 由此形成的颗粒。 使用常规脱水剂的问题和缺点可以在本发明中通过在含有亚硫酰氟或硫酰氟的气氛中在1000℃至1300℃下加热含羟基的多孔二氧化硅作为脱水剂来解决，该脱水剂也是 作为脱氯剂有效，使得由本发明的石英玻璃材料制备的光纤是高度透明的并且在高温下对含氢气氛具有抗性。

公开(公告)号：US4162908A

公开(公告)日：1979-07-31

申请号：US874965

申请日：1978-02-03

Applicant: Karlheinz Rau ,  Fritz Simmat ,  Albert Muhlich ,  Norbert Treber

Inventor： Karlheinz Rau ,  Fritz Simmat ,  Albert Muhlich ,  Norbert Treber

IPC: C03B37/014 ,  C03B37/018 ,  C03C3/06 ,  C03C17/00 ,  C03C17/02 ,  C03C25/02

CPC classification number: C03B37/01426 ,  C03B37/01413 ,  C03B37/01823 ,  C03C3/06 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2207/85 ,  C03C2201/12 ,  C03C2203/40 ,  Y10S65/16

Abstract: An improvement in a method for producing a synthetic hydroxyl ion-free quartz glass wherein a hydrogen free silicon compound is heated in a hydrogen-free gas stream while the gas stream is passed through an induction coupled plasma burner, the gas stream containing elemental and/or bound oxygen and the oxidation product is deposited on a refractory support as a vitreous mass, the improvement lying in including in the gas stream a gaseous hydrogen-free, thermally decomposable compound which yields fluorine in an amount of at least 500 gms. per kilogram of silica to be produced; an apparatus for producing a synthetic OH ion-free quartz glass comprising an induction coupled plasma burner which burner has disposed thereabout 3 concentric quartz glass tubes disposed in stepped configuration of which the outermost tube is the longest and the innermost tube is the shortest. The apparatus includes means for passing through the innermost tube a hydrogen-free gas stream containing elemental oxygen and/or bound oxygen together with a gaseous hydrogen free thermally decomposable compound which yields fluorine. The apparatus further contains means for passing a separating gas such as oxygen through the space defined by the innermost tube and the middle tube and the middle tube and the outermost tube.

Abstract translation: 一种制备合成的无羟基离子的石英玻璃的方法的改进，其中在气流通过感应耦合等离子体燃烧器的同时，在无氢气体气流中加热无氢硅化合物，所述气流含有元素和/ 或结合氧，并且氧化产物作为玻璃体堆积在耐火载体上，其改进在于在气流中包含无气态的可热分解化合物，其产生至少500gms的量的氟。 每千克生产的二氧化硅; 一种用于生产合成的无OH离子的石英玻璃的装置，包括感应耦合等离子体燃烧器，该燃烧器设置在三个同心的石英玻璃管上，该同心石英玻璃管以阶梯状构造，其中最外面的管是最长的并且最内的管是最短的。 该装置包括用于通过最内管将含有元素氧和/或结合氧的无氢气体气流与产生氟的无氢气的可热分解化合物通过的装置。 该装置还包括用于使诸如氧的分离气体通过由最内管和中管以及中管和最外管限定的空间的装置。

公开(公告)号：US20240034667A1

公开(公告)日：2024-02-01

申请号：US18377484

申请日：2023-10-06

Applicant: CORNING INCORPORATED

Inventor： Steven Bruce Dawes ,  Douglas Hull Jennings ,  Pushkar Tandon

IPC: C03C3/06 ,  C03B19/14 ,  C03B37/014 ,  C03B19/06 ,  C03B25/02 ,  C03B37/012 ,  C03B37/018 ,  G02B6/036

CPC classification number: C03C3/06 ,  C03B19/1453 ,  C03B19/1461 ,  C03B37/01453 ,  C03B37/01446 ,  C03B19/066 ,  C03B25/02 ,  C03B37/01282 ,  C03B37/014 ,  C03B37/01853 ,  G02B6/036 ,  C03B2201/12 ,  C03B2201/42 ,  C03B2201/20 ,  C03B2201/075

Abstract: A method of forming an optical element is provided. The method includes producing silica-based soot particles using chemical vapor deposition, the silica-based soot particles having an average particle size of between about 0.05 μm and about 0.25 μm. The method also includes forming a soot compact from the silica-based soot particles and doping the soot compact with a halogen in a closed system by contacting the silica-based soot compact with a halogen-containing gas in the closed system at a temperature of less than about 1200° C.

公开(公告)号：US11795097B2

公开(公告)日：2023-10-24

申请号：US16869076

申请日：2020-05-07

Applicant: FURUKAWA ELECTRIC CO., LTD.

Inventor： Keiichi Aiso ,  Tomohiro Gonda

IPC: C03B37/014 ,  C03B37/012 ,  C03B37/018 ,  C03B37/025

CPC classification number: C03B37/01446 ,  C03B37/014 ,  C03B37/018 ,  C03B37/01228 ,  C03B37/01231 ,  C03B37/01248 ,  C03B37/01257 ,  C03B37/01413 ,  C03B37/01466 ,  C03B37/025 ,  C03B2201/075 ,  C03B2201/50 ,  C03B2207/34

Abstract: A method of producing an optical fiber preform includes a silica glass body forming step of forming a silica glass body to be at least a portion of a core portion. The method includes an alkali-metal-doped silica glass body forming step of forming an alkali-metal-doped silica glass body doped with an alkali metal around the silica glass body such that the alkali-metal-doped silica glass body contacts the silica glass body. The method further includes a diffusing step of diffusing the alkali metal from the alkali-metal-doped silica glass body to the silica glass body by a heat treatment.

公开(公告)号：US09919946B2

公开(公告)日：2018-03-20

申请号：US15412283

申请日：2017-01-23

Applicant: Corning Incorporated

Inventor： Amanda Lee Billings ,  Dana Craig Bookbinder ,  Robert Brett Desorcie ,  Liam Ruan de Paor ,  Pushkar Tandon ,  Li Yang

IPC: G02B6/02 ,  C03B37/014 ,  C03B37/012 ,  C03B37/027 ,  G02B6/036

CPC classification number: C03B37/01446 ,  C03B37/01211 ,  C03B37/01248 ,  C03B37/027 ,  C03B2201/075 ,  C03B2201/20 ,  C03B2203/23 ,  G02B6/02 ,  G02B6/021 ,  G02B6/03627 ,  G02B6/0365 ,  Y02P40/57

Abstract: A method for forming an optical fiber preform and fibers drawn from the preform. The method includes forming a soot cladding monolith, inserting a consolidated core cane into the internal cavity, and processing the resulting core-cladding assembly to form a preform. Processing may include exposing the core-cladding assembly to a drying agent and/or dopant precursor, and sintering the core-cladding assembly in the presence of a reducing agent to densify the soot cladding monolith onto the core cane to form a preform. The preform features low hydroxyl content and low sensitivity to hydrogen. Fibers drawn from the preform exhibit low attenuation losses from absorption by the broad band centered near 1380 nm.