QUARTZ GLASS SUBSTRATE AND PROCESS FOR ITS PRODUCTION
    282.
    发明公开
    QUARTZ GLASS SUBSTRATE AND PROCESS FOR ITS PRODUCTION 审中-公开
    石英玻璃基板及其制造方法

    公开(公告)号:EP2041036A1

    公开(公告)日:2009-04-01

    申请号:EP07791789.6

    申请日:2007-07-26

    Abstract: For a substrate having fine convexoconcave patterns on its surface, the dimensions of the convexoconcave patterns in a vertical direction of a quartz glass substrate are controlled to be uniform with extreme accuracy and over the entire substrate surface. The quartz glass substrate is made to have a fictive temperature distribution of at most 4O°C and a halogen concentration of less than 400 ppm, or a fictive temperature distribution of at most 4O°C, a halogen concentration of at least 400ppm and a halogen concentration distribution of at most 400ppm and the etching rate of the surface of the quartz glass substrate is made uniform, whereby the dimensions of the convexoconcave patterns in a vertical direction of the quartz glass substrate are controlled to be uniform with good accuracy and over the entire substrate surface.

    Process for the production of monoliths by means of the sol-gel process
    286.
    发明公开
    Process for the production of monoliths by means of the sol-gel process 有权
    Verfahren zur Herstellung von Monolithen durch ein Sol-Gel Verfahren

    公开(公告)号:EP1700831A1

    公开(公告)日:2006-09-13

    申请号:EP05005096.2

    申请日:2005-03-09

    Abstract: Process for the production of monoliths by means of the sol-gel process, comprising the following steps:

    a. hydrolysis of an alkoxide in aqueous solution to form a hydrolysate and optionally evaporation to optimum concentration of the same,
    b. addition of an oxide prepared by the pyrogenic route,
    c. mixing of the hydrolysate of the alkoxide with the oxide prepared by the pyrogenic route to form a colloidal sol,
    d. optional removal of coarse contents from the colloidal sol,
    e. gelling of the colloidal sol in a mould,
    f. optional replacement of the water contained in the resulting aerogel by an organic solvent,
    g. drying of the aerogel,
    h. heat treatment of the dried aerogel, the coarse content being removed from the colloidal sol.

    Abstract translation: 通过溶胶 - 凝胶法生产整料的方法,包括以下步骤:a。 在水溶液中水解醇盐以形成水解产物,并任选地蒸发至最佳浓度,b。 加入通过热解法制备的氧化物,c。 将醇盐的水解产物与通过热解法制备的氧化物混合以形成胶体溶胶,d。 可选地从胶体溶胶中除去粗含量, 胶体胶体在模具中凝胶化,f。 用有机溶剂任选地替代所得气凝胶中所含的水,g。 干燥气凝胶,h。 干燥的气凝胶的热处理,从胶体溶胶中除去粗含量。

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