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公开(公告)号：AU4777001A
公开(公告)日：2001-10-08
申请号：AU4777001
申请日：2001-03-23
Applicant: ONIX MICROSYSTEMS INC
Inventor： BEHIN BEHRANG , PANNU SATINDERPALL S
Abstract: A method for rotating a combdriven device about an axis uses applied bias force along with applied voltage between first and second comb fingers to controllably rotate the device about one or two axis. One mode of the present invention includes measuring the position of a rotating element and providing feedback to control the angular position thereof by changing bias force and/or drive voltage. The present invention can be employed with prior-art staggered combdrives, single layer self-aligned combdriven devices, and in a broad range of applications in optical telecommunication switching, video, biomedical, inertial sensors, and in storage magnetic disk drives.
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22.发明专利
公开(公告)号：AU4774801A
公开(公告)日：2001-10-08
申请号：AU4774801
申请日：2001-03-23
Applicant: ONIX MICROSYSTEMS INC
Inventor： BEHIN BEHRANG , PANNU SATINDERPALL S
Abstract: A multi-layer vertical comb-drive actuator includes a first comb structure having a plurality of first comb fingers and a second comb structure having a plurality of second comb fingers, wherein the first and second comb fingers are substantially interdigitated. The first and second comb fingers may include two or more stacked conductive layers electrically isolated from each other by an insulating layer or an air gap. Alternatively, either the first or second comb fingers may include only one conductive layer. An application of a voltage between the first and second comb fingers causes the second comb structure to move relative to the first comb structure. The present invention includes a 2D-gimble configuration to rotate a movable element along two axis.
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公开(公告)号：AU4941901A
公开(公告)日：2001-10-08
申请号：AU4941901
申请日：2001-03-23
Applicant: ONIX MICROSYSTEMS INC
Inventor： DANEMAN MICHAEL J , BEHIN BEHRANG
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公开(公告)号：AU6804101A
公开(公告)日：2001-10-23
申请号：AU6804101
申请日：2001-04-04
Applicant: ONIX MICROSYSTEMS INC
Inventor： BEHIN BEHRANG , DANEMAN MICHAEL J , KIANG MENG-HSIUNG , LAU KAM-YIN , BEERLING TIMOTHY J
Abstract: Disclosed is an apparatus and method for detecting whether rotatable MEMS elements are in the "on" or "off" position. Embodiments of the invention have application in devices switches that employ mirrors that move between an "on" or "off" position, wherein they reflect light from an input fiber into an output fiber in the "on" position, and allow the light to pass in the "off" position. Electrodes are positioned in the device such that the mirrors are close to, and therefor capacitively coupled to, a different electrode depending on whether they are in the "on" or "off" position. This invention is especially useful for switches that already employ electrodes for electrostatic clamping of mirrors in one or more positions, since those same electrodes can be used both to electrostatically clamp the mirrors and to sense their position. The method described in this invention comprises sensing of the capacitance between the mirrors and the one or more electrodes used to clamp the mirrors in its one or more position in order to detect which of the positions the mirrors are clamped in. Furthermore, the magnitude of the capacitances can be monitored to detect improper clamping.
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公开(公告)号：AU5315901A
公开(公告)日：2001-10-23
申请号：AU5315901
申请日：2001-04-04
Applicant: ONIX MICROSYSTEMS INC
Inventor： DANEMAN MICHAEL J , BEHIN BEHRANG , KIANG MENG-HSIUNG
Abstract: A device having a landing pad structure on an underside of a device and method for fabricating same. The device is formed from a device layer with at least one landing pad protruding from an underside thereof. The landing pad is attached to the device layer by a plug passing through an opening in the device layer. The device may be attached to the device layer by one or more compliant flexures, which allow the device to rotate in and out of a plane defined by the device layer. The landing pads are fabricated by forming one or more vias through the device layer. An underlying sacrificial layer is then partially etched to form one or more depressions at locations corresponding to locations of the vias in the device layer. The vias and depressions are then filled with a landing pad material to form a structure having one or more landing pads protruding from an underside of the device layer. The sacrificial layer is subsequently removed to release the device. Particular embodiments of both methods may be applied to fabricating microelectromechanical systems (MEMS) especially MEMS mirrors. The various embodiments are well suited to use with silicon on insulator (SOI) substrates.
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Patent Agency Ranking
公开(公告)号：AU4598401A
公开(公告)日：2001-10-15
申请号：AU4598401
申请日：2001-03-23
Applicant: ONIX MICROSYSTEMS INC
Inventor： BEHIN BEHRANG , PANNU SATINDERPALL S
Abstract: A method for rotating a combdriven device about an axis uses applied bias force along with applied voltage between first and second comb fingers to controllably rotate the device about one or two axis. One mode of the present invention includes measuring the position of a rotating element and providing feedback to control the angular position thereof by changing bias force and/or drive voltage. The present invention can be employed with prior-art staggered combdrives, single layer self-aligned combdriven devices, and in a broad range of applications in optical telecommunication switching, video, biomedical, inertial sensors, and in storage magnetic disk drives.
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公开(公告)号：AU5079901A
公开(公告)日：2001-09-17
申请号：AU5079901
申请日：2001-03-02
Applicant: ONIX MICROSYSTEMS INC
Inventor： KIANG MENG-HSIUNG , LAM KAM Y , BEHIN BEHRANG , DANEMAN MICHAEL J
Abstract: An optical switch module having a movable mirror disposed between two fixed mirrors. All three mirrors are aligned parallel to each other in a linear array to form a crossbar switch. The movable mirror moves between a first position and a second position to selectively couple optical signals between two inputs and two outputs. The basic switch module may be scaled up to form an apparatus that incorporates N movable mirrors and N+1 fixed mirrors, where N is an integer greater than zero. Such an apparatus can accommodate 2N fiber inputs and 2N fiber outputs, e.g., in an optical add/drop multiplexer (OADM). The parallel configuration of the switch module takes advantage of existing lens array and fiber V-groove technology to facilitate integration of the fibers and collimators in the module, thereby reducing the difficulty and cost associated with alignment, assembly, and packaging.
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公开(公告)号：AU6291701A
公开(公告)日：2001-09-12
申请号：AU6291701
申请日：2001-03-02
Applicant: ONIX MICROSYSTEMS INC
Inventor： BEHIN BEHRANG , LAM KAM Y , KIANG MENG-HSIUNG , DANEMAN MICHAEL J
Abstract: An optical crossbar switch having refractive or reflective components for equalizing beam spreading and diffraction in all the connections. The optical fibers or waveguides coupled to the switch are not staggered, but are parallel as in a conventional fiber array. The refractive component is disposed between the switch and the input optical fibers. Preferably, a similar refractive component is disposed between the output optical fibers and the switch. The refractive component can be a stairstep block made of glass, silicon or silica. Light from each input fiber travels through a well-defined thickness of the stairstep block. Since the block has a refractive index greater than the surrounding atmosphere, the wavelength in reduced within the block, and beam spreading and diffraction are reduced.
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29.发明专利
公开(公告)号：AU5079101A
公开(公告)日：2001-09-12
申请号：AU5079101
申请日：2001-02-28
Applicant: ONIX MICROSYSTEMS INC
Inventor： CHAU KELVIN
Abstract: An apparatus and method for aligning one or more optical fibers is disclosed. The apparatus includes a carrier having one or more through holes and one or more plugs, each of which is sized to be received in one or more of the three or more through holes. The carrier is adapted to receive one or more waveguides. The waveguides may be aligned by inserting a plug into each of one or more through holes in a carrier; attaching a waveguide to the carrier; aligning the carrier to align the one or more waveguides with respect to an optical device attached to a substrate; and tacking one or more of the plugs to the substrate to maintain the alignment of the waveguides with respect to the optical device.
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公开(公告)号：AU5098901A
公开(公告)日：2001-10-08
申请号：AU5098901
申请日：2001-03-22
Applicant: ONIX MICROSYSTEMS INC
Inventor： BEHIN BEHRANG , LAM KAM Y , KIANG MENG-HSIUNG , DANEMAN MICHAEL J , PANNU SATINDERPALL S
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