Abstract:
A slurry supply nozzle for chemical mechanical polishing equipment is provided to enhance the polishing rate of an object by using the hot slurry. A slurry supply nozzle(10) is communicated with a pump for circulating slurry so that it supplies the slurry onto a pad. A temperature sensor(12) is mounted on the nozzle to detect a temperature of the slurry supplied to the nozzle, and a heat coil(14) is wound around an outer periphery of the nozzle to heat the slurry so that the hot slurry is supplied on the pad attached to a polishing table(30). The temperature sensor and the heat wire are controlled by a controller(16).
Abstract:
The present invention relates to a method for annealing a CdTe thin film solar cell by using a 808-nm diode laser. The purpose of the present invention is to improve particle growth and the crystal of a thin film by performing a laser annealing process on a CdTe thin film by using a CW 808-nm diode laser and to analyze a structure and an optical property, light transmittance, absorption coefficient, crystal size, etc., by performing an annealing process with various laser outputs. To achieve the purpose, the present invention includes (a) a process of depositing a CdTe thin film by a CdTe target; and (b) a process of annealing the deposited CdTe thin film by using a diode laser.
Abstract:
The present invention relates to a method for manufacturing a CIGS thin film using a non-selenization sputtering process with a CuSe2 target. The purpose of the present invention is to provide a method for manufacturing a CIGS thin film by performing a sputtering deposition process with a CuSe2 target. To achieve the purpose, the present invention includes (a) a step of performing a free sputtering process on a CuSe2 target prepared on a substrate; (b) a step of performing an RF magnetron sputtering process; and (c) a step of depositing an In and Ga target on the CuSe2 thin film by performing an RF sputtering process to generate a Ga/In/CuSe2 multilayer stack structure.