Abstract:
PURPOSE: A recombination time calculating method and a system thereof are provided to easily analyze by calculating a recombination time which is measured with actual operation current range information. CONSTITUTION: A driving power is supplied to a driving device. A recombination time is generated from the driving device. A recombination time is calculated according to the change of the driving power (S110). A luminescence recombination time is calculated by using the recombination time (S120). A non-luminescence recombination time is calculated by using the luminescence recombination time (S130). [Reference numerals] (S110) Measure a recombination time measured in a current driving device by the change of a pulse width or the current change injected into the current driving device; (S120) Measure the illumination recombination time using the measured recombination time and equation 1; (S130) Measure the non-illumination recombination time using the measured recombination time, the illumination recombination time, and equation 2
Abstract:
본 발명은 공간 광변조기를 이용한 리소그라피 장치를 이용한 리소그라피 방법에 관한 것으로, 대상물에 일정 간격으로 빔을 조사하고, 일정 간격들의 사이 공간들에 추가로 빔을 조사하는 단계를 구비하며, 조사된 빔들이 임계 치를 넘는 부분만 전사되는 방식으로 광의 분해능의 한계 보다 미세한 패턴을 형성할 수 있는 리소그라피 방법을 제공한다.
Abstract:
PURPOSE: An image processing apparatus and a method thereof are provided to have super high speed of image acquisition and high definition since two-dimensional images are obtained by a linear canning method. CONSTITUTION: A beam splitter(600) makes beam of a line focus shape incident thereon and splits the beam in multiple directions. Multiple slits arranges each beam on transmission sections of different spatial domains. An image processing apparatus(800) synthesizes each beam outputted through the multiple slits. A light source(100) uses a laser of the spot light scanning the surface of a sample(10). A scanner(400) vertically varies the route of the beam outputted from a lens(300).
Abstract:
PURPOSE: A broadband light generating device, a broadband light source using the same, and a manufacturing method thereof are provided to generate light of various wide wavelength bands in a small intensity light source for pumping. CONSTITUTION: An optical member(10) has an incident surface for inputting external light and an emission surface for emitting light. A light emitting body(20) is combined with the outside of the optical member and includes the optical member inside. The optical member guides light through a clad layer formed on the outside of the optical member.