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公开(公告)号：KR101401742B1
公开(公告)日：2014-07-01
申请号：KR1020130011027
申请日：2013-01-31
Applicant: 한국표준과학연구원
Abstract: A particle complex characteristic measurement apparatus having a detachable particle focusing unit according to the present invention comprises: the particle focusing unit including an aerodynamic lens; a first chamber arranging a first connection part at one end to be connected to the particle focusing unit, controlling an internal pressure at medium-vacuum (1-10^-3 Torr), and forming a nozzle at the other end to accelerate particles flowing in via the particle focusing unit; a second chamber having one end connected to the nozzle of the first chamber, and installing an electron gun for charging the particles accelerated in the first chamber while controlling an internal pressure at high-vacuum (10^-3-10^-7 Torr); a third chamber having one end connected to the second chamber and installing an electrostatic deflection device for classifying only particles with a specific size among the particles charged to a saturation state by the electron gun and a second connection part having the same standard as the first connection part; one pump connected to the first and the second chamber via a drain flow path and discharging a gas out of the first and the second chamber; and a fourth chamber having one end vertically connected to the third chamber and installing a particle collection device in the inside, wherein the second connection part is arranged coaxially to the part collection device.
Abstract translation: 具有根据本发明的可拆卸颗粒聚焦单元的颗粒复合特征测量装置包括：颗粒聚焦单元，包括空气动力学透镜; 第一室，其一端设置第一连接部分以连接到颗粒聚焦单元，控制中等真空（1-10 ^ -3乇）的内部压力，并在另一端形成喷嘴以加速颗粒流动 通过粒子聚焦单元; 第二室，其一端连接到第一室的喷嘴，并且安装电子枪，用于对加速在第一室中的颗粒进行充电，同时控制高真空（10 -3 -3 -7 -7 Torr）的内部压力， ; 第三室，其一端连接到第二室，并且安装静电偏转装置，用于仅分离由电子枪充电到饱和状态的颗粒中的特定尺寸的颗粒;以及具有与第一连接相同标准的第二连接部 部分; 一个泵经由排水流路连接到第一和第二室，并将气体排出第一和第二室; 以及第四室，其一端垂直连接到所述第三室，并且在所述内部安装颗粒收集装置，其中所述第二连接部与所述部件收集装置同轴布置。
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公开(公告)号：KR101378301B1
公开(公告)日：2014-03-28
申请号：KR1020130011028
申请日：2013-01-31
Applicant: 한국표준과학연구원
Abstract: A device for measuring particle complex characteristics having a module for measuring and correcting particle distribution of the present invention comprises: a particle focusing unit including an aerodynamic lens; a first chamber which has one end connecting with the particle focusing unit, controls internal pressure at medium vacuum (1 to 10-3 Torr), and has a nozzle formed at the other end so as to accelerate particles injected through the particle focusing unit; a second chamber having one end connected with the nozzle of the first chamber, and in which an electron gun is installed to control internal pressure at high vacuum (10-3 to 10-7 Torr) and charging the particles accelerated in the first chamber; a third chamber having one end connected with the second chamber, and in which an electrostatic deflecting device is installed to apply a particular voltage therein and select only particles having a particular size among those charged to be saturated in the electron gun; a pump connecting with the first and second chambers through an exhaust flow path and discharging air inside the first and second chambers to the outside; a fourth chamber having one end vertically connected with the third chamber, and which has a particle collecting device installed therein; and a particle sensing unit which is disposed to be capable of moving and tilting in a moving route of the charged particles between the particle collecting device and the electrostatic deflecting device or which is installed instead of the particle collecting device to be capable of moving and tilting on a virtual plane vertical to direction of movement of the charged particles, and which has a smaller diameter than the particle collecting device.
Abstract translation: 用于测量具有用于测量和校正颗粒分布的模块的颗粒复合特性的装置包括：包括空气动力学透镜的颗粒聚焦单元; 具有与粒子聚焦单元连接的一端的第一腔室控制中等真空（1〜10-3乇）的内部压力，并且在另一端形成有喷嘴，以加速通过粒子聚焦单元喷射的颗粒; 第二室，其一端与第一室的喷嘴连接，并且其中安装电子枪以控制高真空（10-3至10-7乇）的内部压力并对在第一室中加速的颗粒进行充电; 第三室，其一端与第二室连接，并且其中安装有静电偏转装置以在其中施加特定电压，并且仅选择在电子枪中被充电为饱和的颗粒中的特定尺寸的颗粒; 泵，其通过排气流路与第一和第二室连接，并将第一和第二室内的空气排出到外部; 第四室，其一端与第三室垂直连接，并且其中安装有颗粒收集装置; 以及粒子感测单元，其设置成能够在颗粒收集装置和静电偏转装置之间的带电粒子的移动路线中移动和倾斜，或者代替颗粒收集装置而安装以能够移动和倾斜 在与带电粒子的运动方向垂直的虚拟平面上，并且具有比颗粒收集装置更小的直径。
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公开(公告)号：KR101360891B1
公开(公告)日：2014-02-12
申请号：KR1020120039524
申请日：2012-04-17
Applicant: 한국표준과학연구원
IPC: G01N15/02 , G01N15/14 , G01N23/225 , H01J37/26
Abstract: 본 발명에 의한 입자측정장치는, 전자생성 및 집속이 이루어지며, 내부를 진공으로 유지하는 메인 프레임; 상기 메인 프레임과 결합되는 제 1 챔버; 상기 제 1 챔버의 내부 공간에 설치되는 입자 포집유닛; 상기 제 1 챔버에 상기 입자 포집유닛을 바라보도록 설치되어, 상기 입자 포집유닛에 포집된 입자를 광학적으로 측정 가능한 제 1 검출유닛; 상기 제 1 챔버에 상기 입자 포집유닛을 바라보도록 설치되어, 상기 입자 포집유닛에 입자를 주입하는 제 2 검출유닛;을 포함하며, 상기 입자 포집유닛은, 상기 제 1 검출유닛의 스테이지 역할과, 상기 제 2 검출유닛으로부터 주입된 입자의 포집 역할을 동시에 수행하는 것을 특징으로 한다.
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公开(公告)号：KR1020130116986A
公开(公告)日：2013-10-25
申请号：KR1020120039524
申请日：2012-04-17
Applicant: 한국표준과학연구원
IPC: G01N15/02 , G01N15/14 , G01N23/225 , H01J37/26
Abstract: PURPOSE: A particle composite property measuring device is provided to enable the correction of the size distribution on a real time by correcting the size of particles grasped by observing images. CONSTITUTION: A particle composite property measuring device includes a main frame (10), a first chamber (30), a particle collection unit (50), a first detection unit (20), and a second detection unit (40). The main frame generates and collects electrons and maintains the vacuum state of the inside. The first chamber is joined to the main frame. The particle collection member is installed inside an internal space (31) of the first chamber. The first detection unit is installed on the first chamber to face the particle collection unit and optically measure the particles collected by the particle collection unit. The second detection unit is installed on the first chamber to face the particle collection unit and injects the particles into the particle collection unit. The particle collection unit performs a function of a stage for the first detection unit and collects the injected articles from the second detection unit.
Abstract translation: 目的：提供一种粒子复合特性测量装置，通过校正通过观察图像掌握的颗粒的尺寸，实时地校正尺寸分布。 构成：颗粒复合材料性质测量装置包括主框架（10），第一室（30），颗粒收集单元（50），第一检测单元（20）和第二检测单元（40）。 主框架产生和收集电子并保持内部的真空状态。 第一个室连接到主框架。 颗粒收集构件安装在第一室的内部空间（31）内。 第一检测单元安装在第一室上以面对颗粒收集单元并且光学地测量由颗粒收集单元收集的颗粒。 第二检测单元安装在第一室上以面对颗粒收集单元并将颗粒注入颗粒收集单元。 粒子收集单元对第一检测单元执行阶段的功能，并从第二检测单元收集注入的物品。
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