公开(公告)号：EP1023634A4

公开(公告)日：2002-02-13

申请号：EP98952017

申请日：1998-09-28

Applicant: BREWER SCIENCE INC

Inventor： MEADOR JIM D ,  GUERRERO DOUGLAS J ,  SHAO XIE ,  KRISHNAMURTHY VANDANA

IPC: G03F7/11 ,  C08F8/00 ,  C08F220/32 ,  C08F283/10 ,  C09D133/06 ,  G03F7/09 ,  G03C1/492 ,  G03C1/815

CPC classification number: G03F7/091 ,  C08F8/18 ,  C08F283/10 ,  C08F2800/10 ,  C08F2800/20 ,  C08F2810/20 ,  C09D133/062 ,  C08L2666/14 ,  C08L2666/28 ,  C08F120/32 ,  C08F8/14 ,  C08F20/32 ,  C08F8/00

Abstract: Anti-reflective coating compositions having improved etchrate, inter alia, are prepared from certain high molecular weight polymers and copolymers, particularly glycidyl methacrylate.