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1.发明专利
公开(公告)号：JP2009037245A
公开(公告)日：2009-02-19
申请号：JP2008216969
申请日：2008-08-26
Applicant: Brewer Science Inc , ブルーワー サイエンス アイ エヌ シー.
Inventor： SHAO XIE , MEADOR JIM D , BHAVE MANDAR , KRISHNAMURTHY VANDANA , NOWAK KELLY A , FOWLER MICHELLE , DESHPANDE SHREERAM V
IPC: G03F7/11 , B32B7/02 , C08J3/24 , C09D5/00 , C09D7/12 , C09D105/00 , C09D133/00 , C09D161/20 , C09D163/00 , C09D167/00 , C09D171/00 , C09D179/08 , C09D201/00 , G03F7/004 , G03F7/09 , H01L21/027
CPC classification number: C08J3/241 , G03F7/091 , Y10S430/151
Abstract: PROBLEM TO BE SOLVED: To provide an anti-reflective coating composition that does not crosslink prior to a bake stage in microlithographic processes so as to solve problems of spin bowl incompatibility and stability of an anti-reflective coating. SOLUTION: The anti-reflective composition includes a polymer dissolved or dispersed in a solvent system, a crosslinking agent, a light attenuating compound and a strong acid. The polymer is selected from a group consisting of acrylic polymers, polyesters, epoxy novolacs, polysaccharides, polyethers, polyimides and mixtures thereof. The crosslinking agent is selected from a group consisting of amino resin and epoxy resin. The light attenuating compound is selected from a group consisting of phenolic compounds, carboxylic acid, phosphoric acid, cyano compounds, benzene, naphthalene and anthracene. The composition contains the strong acid by less than 1.0 mass% based upon the total mass of the composition taken as 100 mass%. COPYRIGHT: (C)2009,JPO&INPIT
Abstract translation: 要解决的问题：提供在微光刻工艺中在烘烤阶段之前不交联的抗反射涂料组合物，以解决纺丝碗不相容性和抗反射涂层的稳定性的问题。 抗反射组合物包括溶解或分散在溶剂体系中的聚合物，交联剂，光衰减化合物和强酸。 聚合物选自丙烯酸聚合物，聚酯，环氧酚醛清漆，多糖，聚醚，聚酰亚胺及其混合物。 交联剂选自氨基树脂和环氧树脂。 光衰减化合物选自酚类化合物，羧酸，磷酸，氰基化合物，苯，萘和蒽。 组合物以占组合物总质量的100质量％为基准，含有小于1.0质量％的强酸。 版权所有（C）2009，JPO＆INPIT
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公开(公告)号：CA2301020A1
公开(公告)日：1999-04-08
申请号：CA2301020
申请日：1998-09-28
Applicant: BREWER SCIENCE INC
Inventor： GUERRERO DOUGLAS J , KRISHNAMURTHY VANDANA , SHAO XIE , MEADOR JIM D
IPC: G03F7/11 , C08F8/00 , C08F220/32 , C08F283/10 , C09D133/06 , G03F7/09 , G03C1/492 , G03C1/815
Abstract: Anti-reflective coating compositions having improved etchrate, inter alia, are prepared from certain high molecular weight polymers and copolymers, particularly glycidyl methacrylate.
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公开(公告)号：AT195025T
公开(公告)日：2000-08-15
申请号：AT95944193
申请日：1995-12-14
Applicant: BREWER SCIENCE INC
Inventor： FLAIM TONY D , MEADOR JIM D , SHAO XIE , BREWER TERRY L
Abstract: A thermosetting anti-reflective coating and method for making and using the same is disclosed for a broad range of exposure wavelengths, said coating containing an active curing catalyst, ether or ester linkages derived from epoxy functionality greater than 3.0, a dye-grafted hydroxyl-functional oligomer, and an alkylated aminoplast crosslinking agent, all present in a low-to-medium alcohol-containing solvent.
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公开(公告)号：CA2330689A1
公开(公告)日：1999-11-04
申请号：CA2330689
申请日：1999-04-20
Applicant: BREWER SCIENCE INC
Inventor： BREWER TERRY LOWELL , SHAO XIE , MEADOR JIM D
IPC: G03F7/11 , C08B15/06 , C08L1/10 , C08L1/26 , C08L61/32 , C09D5/00 , C09D101/08 , C09D101/14 , C09D161/20 , G02B1/11 , G03F7/09 , C08L1/12 , C08L1/14
Abstract: Anti-reflective compostions are prepared from cellulosic binders and alkylat ed aminoplast cross-linking agents derived from melamine, urea, benzoguanamine or glycoluril. These compositions are used to form bottom anti-reflective layer s with high plasma etch selectivity when used in multilayer photoresist processes.
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公开(公告)号：SG173730A1
公开(公告)日：2011-09-29
申请号：SG2011059177
申请日：2010-02-19
Applicant: BREWER SCIENCE INC
Inventor： MEADOR JIM D , LOWES JOYCE A , MERCADO RAMIL-MARCELO L
Abstract: Acid-sensitive, developer-soluble bottom anti-reflective coating compositions are provided, along with methods of using such compositions and microelectronic structures formed thereof. The compositions preferably comprise a crosslinkable polymer dissolved or dispersed in a solvent system. The polymer preferably comprises recurring monomeric units having adamantyl groups. The compositions also preferably comprise a crosslinker, such as a vinyl ether crosslinking agent, dispersed or dissolved in the solvent system with the polymer. In some embodiments, the composition can also comprise a photoacid generator (PAG) and/or a quencher. The bottom anti-reflective coating compositions are thermally crosslinkable, but can be decrosslinked in the presence of an acid to be rendered developer soluble.
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Patent Agency Ranking
公开(公告)号：ES2150600T3
公开(公告)日：2000-12-01
申请号：ES95944193
申请日：1995-12-14
Applicant: BREWER SCIENCE INC
Inventor： FLAIM TONY D , MEADOR JIM D , SHAO XIE , BREWER TERRY L
Abstract: A thermosetting anti-reflective coating and method for making and using the same is disclosed for a broad range of exposure wavelengths, said coating containing an active curing catalyst, ether or ester linkages derived from epoxy functionality greater than 3.0, a dye-grafted hydroxyl-functional oligomer, and an alkylated aminoplast crosslinking agent, all present in a low-to-medium alcohol-containing solvent.
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公开(公告)号：AT287098T
公开(公告)日：2005-01-15
申请号：AT98952017
申请日：1998-09-28
Applicant: BREWER SCIENCE INC
Inventor： MEADOR JIM D , GUERRERO DOUGLAS J , SHAO XIE , KRISHNAMURTHY VANDANA
IPC: G03F7/11 , C08F8/00 , C08F220/32 , C08F283/10 , C09D133/06 , G03F7/09 , G03C1/492 , G03C1/815
Abstract: Anti-reflective coating compositions having improved etch rate, inter alia, are prepared from certain high molecular weight polymers and copolymers, particularly glycidyl methacrylate with grafted dyes.
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公开(公告)号：DE69518171T2
公开(公告)日：2001-03-15
申请号：DE69518171
申请日：1995-12-14
Applicant: BREWER SCIENCE INC
Inventor： FLAIM TONY D , MEADOR JIM D , SHAO XIE , BREWER TERRY L
Abstract: A thermosetting anti-reflective coating and method for making and using the same is disclosed for a broad range of exposure wavelengths, said coating containing an active curing catalyst, ether or ester linkages derived from epoxy functionality greater than 3.0, a dye-grafted hydroxyl-functional oligomer, and an alkylated aminoplast crosslinking agent, all present in a low-to-medium alcohol-containing solvent.
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公开(公告)号：DE69518171D1
公开(公告)日：2000-08-31
申请号：DE69518171
申请日：1995-12-14
Applicant: BREWER SCIENCE INC
Inventor： FLAIM TONY D , MEADOR JIM D , SHAO XIE , BREWER TERRY L
Abstract: A thermosetting anti-reflective coating and method for making and using the same is disclosed for a broad range of exposure wavelengths, said coating containing an active curing catalyst, ether or ester linkages derived from epoxy functionality greater than 3.0, a dye-grafted hydroxyl-functional oligomer, and an alkylated aminoplast crosslinking agent, all present in a low-to-medium alcohol-containing solvent.
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公开(公告)号：WO2009059031A2
公开(公告)日：2009-05-07
申请号：PCT/US2008081831
申请日：2008-10-30
Applicant: BREWER SCIENCE INC , XU HAO , MERCADO RAMIL-MARCELO L , GUERRERO DOUGLAS J , MEADOR JIM D
Inventor： XU HAO , MERCADO RAMIL-MARCELO L , GUERRERO DOUGLAS J , MEADOR JIM D
CPC classification number: G03F7/091 , C08L25/18 , Y10S430/151
Abstract: Novel, developer-soluble anti-reflective coating compositions and methods of using those compositions are provided. The compositions comprise a multi-functional acid reacted with a multi-functional vinyl ether to form a branched polymer or oligomer. In use, the compositions are applied to a substrate and thermally crosslinked. Upon exposure to light and post-exposure baking, the cured polymers/oligomers will decrosslink and depolymerize, rendering the layer soluble in typical photoresist developing solutions (e.g., alkaline developers).
Abstract translation: 提供了新颖的显影剂可溶的抗反射涂层组合物和使用这些组合物的方法。 该组合物包含与多官能乙烯基醚反应形成支化聚合物或低聚物的多官能酸。 在使用中，将组合物施加到基材上并热交联。 在曝光和曝光后烘烤后，固化的聚合物/低聚物将发生解交联和解聚，使该层溶于典型的光致抗蚀剂显影溶液（例如碱性显影剂）中。
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