公开(公告)号：JPH0251620A

公开(公告)日：1990-02-21

申请号：JP20272488

申请日：1988-08-16

Applicant: CANON KK

Inventor： OKAWA SHINKICHI ,  MATSUSHITA KOICHI

IPC: F16C32/06 ,  H01L21/027

Abstract: PURPOSE:To detect contact of a gas bearing with a guide bar in a protection mechanism of a gas bearing to be used in vacuum by insulating a movable body from an actuator rod for a drive body for it, and detecting existence of electric continuity. CONSTITUTION:A connecting plate 1 connected with a gas bearing and an actuator rod 2 for driving a stage Y are connected with each other by a floating connector 3. The connecting plate 1 and the floating connector 3 are fixed by a sleeve 7. An insulating member 4 is pressed in on the outer circumference of the floating connector 3, and insulating bodies 5, 6 are provided between the connecting plate 1 and the floating connector 3, so naturally there is no continuity between both. However, continuity occurs when a bearing guide electrically contacting the actuator rod 2 gets in contact with the gas bearing. By detecting this continuity, contact of the bearing with the bearing guide can be acknowledged, and drive can be stopped instantaneously.

公开(公告)号：JPH0242382A

公开(公告)日：1990-02-13

申请号：JP19219288

申请日：1988-08-02

Applicant: CANON KK

Inventor： CHIBA HIROSHI ,  OKAWA SHINKICHI

IPC: G12B5/00 ,  B23Q1/01 ,  B23Q1/26 ,  B23Q1/64 ,  F16F7/00 ,  F16H25/20 ,  G03F7/20 ,  H01L21/027 ,  H01L21/30

Abstract: PURPOSE:To enable fast, high-accuracy positioning by using a frame structure consisting of a hollow pipe which is provided with a node internally, charging a material for increasing attenuation in the hollow pipe, and providing high rigidity and high attenuation. CONSTITUTION:A moving stage 2 where a wafer 1 is fixed is moved in a perpendicular plane by two couples of guide bars 3 and 4 and two stage driving motors 5 and 6 and positioned so that the wafer 1 is set at a specific baking position. The guide bars 4 are accurately fitted to the main frame 7 consisting of the hollow pipe. The main frame 7 is structured by combining hollow prismatic pipes, which are provided nodes 8 inside to have sufficient rigidity. Further, materials 10 with a high attenuation factor such as sands are charged in small rooms 9 in the main frame 7 which are partitioned by the nodes 8, thereby attenuating speedily the elastic deformation vibration of the main frame 7 due to the movement and stop of the moving stage.

公开(公告)号：JPS63232942A

公开(公告)日：1988-09-28

申请号：JP6481087

申请日：1987-03-19

Applicant: CANON KK

Inventor： HIYOSHI TOYOHIKO ,  IWATA MIKIO ,  WATANABE KAZUO ,  OKAWA SHINKICHI

IPC: B24B13/00

Abstract: PURPOSE:To stabilize the corrective stock removal of a microscopic part as well as to make a partial form error eliminable, by installing a tape feed part, feeding a tape with an abradant to the tip of a tool to be energized to the workpiece side and a workpiece, a wrapping part and a winding part. CONSTITUTION:In this feeder, there are provided with a feed reel 42, feeding a lap tape 39 to an interspace between a nose 38 to be energized to the work side and a workpiece in making an abradant turn to the work side, guide rollers 55-60, wrapping along a projected curved surface at a tip of the nose 38 and a rubber wheel 61 and a takeup reel 42. Therefore, the lap tape 39 is always traveled during operation whereby the workpiece is polishable with a new abradant all the time, no polishing unevenness occurs, and stock removal is thus stabilized. And, since the lap tape 39 is recoverable with the takeup reel 42, a working property is very good and, what is more, since wrapping takes place along the tip projected curved surface of the nose 38, the tape 39 is hard to peel, so that a very minute part is polishable in a highly accurate manner, thus a partial form error can be eliminated.

公开(公告)号：JPS63232938A

公开(公告)日：1988-09-28

申请号：JP6480187

申请日：1987-03-19

Applicant: CANON KK

Inventor： HIYOSHI TOYOHIKO ,  IWATA MIKIO ,  WATANABE KAZUO ,  OKAWA SHINKICHI

IPC: B24B13/00 ,  B24B13/06 ,  B24B49/04

Abstract: PURPOSE:To make stock removal easily measurable and also a form error eliminable on the basis of measurand, by installing a presser member, pressing a tapelike abrasive member to a workpiece, and also a work quantity measuring device, removing this abrasive member and setting it down to a probe. CONSTITUTION:In this device, there is provided with a nose 38 which presses a lap tape 39 to a polishing surface of a work 1 at constant pressure and polishes it, and the nose 38 is constituted so as to use it as a probe for a work quantity measuring device after removing the lap tape 39. In consequence, the polishing device is usable for the work quantity measuring device in common whereby the work 1 is measurable in an inexpensive manner. And, any problem on setting slippage will not be caused there, and after measurement, corrective polishing can be done on the basis of measured data at once, thus machining time is sharply reducible. In addition, full automation ranging from measurement to corrective machining comes possible, and thereby operating work is sharply reduced as well, so that manufacturing cost is also reducible.

公开(公告)号：JPS63139288A

公开(公告)日：1988-06-11

申请号：JP28706986

申请日：1986-12-02

Applicant: CANON KK

Inventor： YAMAMOTO SEKINORI ,  OKAWA SHINKICHI ,  MATSUSHITA KOICHI ,  KAWAI YASUO ,  HIGOMURA MAKOTO ,  KARIYA TAKUO

IPC: G01B21/00 ,  G03F7/20 ,  G03F7/207 ,  G12B5/00 ,  H01L21/68

公开(公告)号：JPS62289790A

公开(公告)日：1987-12-16

申请号：JP13278886

申请日：1986-06-10

Applicant: CANON KK

Inventor： OKAWA SHINKICHI ,  MATSUSHITA KOICHI ,  YAMAURA TOSHIHIKO ,  KUBO TADAYUKI

IPC: G12B5/00 ,  G05D3/00 ,  H01L21/027 ,  H01L21/30 ,  H01L21/67 ,  H01L21/68