公开(公告)号：JPS63232964A

公开(公告)日：1988-09-28

申请号：JP6480487

申请日：1987-03-19

Applicant: CANON KK

Inventor： HIYOSHI TOYOHIKO ,  IWATA MIKIO ,  WATANABE KAZUO ,  OKAWA SHINKICHI

IPC: B24B13/06 ,  B24B49/04

Abstract: PURPOSE:To stably obtain a polishing amount of correction polishing for a fine part, by providing a measuring means for a polished surface, polishing amount determining means determining a polishing amount of the polished surface and its polishing position, arithmetic means calculating a turning speed in every turning angle of a workpiece, driving control means and a polishing means. CONSTITUTION:A polishing device presses a lap tape (tape-shaped polishing member) 39 to the polished surface of a workpiece 1 by a pressing member (nose) 38 to grind and polish the workpiece 1. And the device, removing the lap tape 39, measures the polished surface with the nose 38 serving as the measuring piece. Next the device, being based on a measured data of the polished surface, controls a relative position between the nose 38 and the workpiece 1 and their relative speed polishing the workpiece 1. Consequently, the device, in which a series of polishing work from measurement to polishing can be fully automatized, enables control operation to be substantially reduced. Simultaneously with the above, the device, in which a polishing tool and the workpiece 1 can be accurately controlled corresponding to a measured polishing amount and a polishing position, stably obtains a polishing amount of correction polishing for a fine part enabling higher accurate polishing to be performed.

公开(公告)号：JPS63232952A

公开(公告)日：1988-09-28

申请号：JP6480687

申请日：1987-03-19

Applicant: CANON KK

Inventor： HIYOSHI TOYOHIKO ,  IWATA MIKIO ,  WATANABE KAZUO ,  OKAWA SHINKICHI

IPC: B24B13/01 ,  B24B13/06 ,  B24B21/00

Abstract: PURPOSE:To make corrective polishing for a microscopic part stably and accurately performable, by forming the tip of a polishing tool, pressing the back of a taper with an abradant to be fed in the specified direction, with a spherical body of a steel ball or the like tightly attached. CONSTITUTION:A lap tape 39 is guided by a guide roller 58, entering an interspace between a lower groove part 38a of a nose 38 and a sleeve 74, and it passes through the exposed spherical tip part 38b as being bent, then it reenters the interspace between the upper groove 38a and the sleeve 74, accurately guided out of a guide roller 59, pressing the nose 38 to a polished surface, whereby polishing at an accurate working position comes possible. A tip form of the nose 38 is required to be of highly accurate sphericity, therefore spherical polishing for the tip part 38b is hard to be carried out at the integral type nose 38, so that a steel ball 106 for a bearing ball or the like on the market is tightly attached to a tip of a nose body 38c by a bonding agent or the like, and if each tape guide groove 106a is formed or both upper and lower surfaces, the highly accurate sphericity is obtained. Thus, fine partial corrective polishing is performable in a highly accurate manner.

公开(公告)号：JPS63192864A

公开(公告)日：1988-08-10

申请号：JP2488087

申请日：1987-02-06

Applicant: CANON KK

Inventor： MATSUSHITA KOICHI ,  OKAWA SHINKICHI ,  SUZUKI HIROYUKI

IPC: H01L21/302 ,  C23C14/34 ,  C23C14/56 ,  F16C32/06 ,  F16J15/447 ,  H01L21/3065

Abstract: PURPOSE:To prevent the damage of a movable part and a partition wall due to the inclination of the movable part etc., and to maintain and improve the lubricity and airtightness by providing a sliding member opposed to the movable part through a minute gap in a housing. CONSTITUTION:The sliding member 18 having a solid lubricating action is fixed on the inside of the housing 11 of a vacuum chamber, etc. The compressed gas supplied to a gas inlet 4 is passed through the bearing member 3 of a porous body, injected into the minute gap between a shaft 1 and the bearing member 3 to support the shaft 1, and then discharged into a gas discharge part 12. The shaft 1 is supported by a bearing B, and can be smoothly rotated or moved in an axial direction. Only a small amt. of the gas discharged into the gas discharge part 12 flows into a groove 14a. The gas in the groove 14 is sucked by a suction pump 24 through a pipeline 22 and a suction port 16, and the pressure at this part is reduced. Moreover, the amt. of the gas flowing out into the chamber is reduced by the pipeline resistance due to the partition walls 13a-13c and the suction of a suction pump 25, and sealing performance is improved.

公开(公告)号：JPH0758008A

公开(公告)日：1995-03-03

申请号：JP15850294

申请日：1994-07-11

Applicant: CANON KK

Inventor： YAMAMOTO SEKINORI ,  OKAWA SHINKICHI ,  MATSUSHITA KOICHI ,  KAWAI YASUO ,  HIGOMURA MAKOTO ,  KARIYA TAKUO

IPC: G01B21/00 ,  G03F7/20 ,  G12B5/00 ,  H01L21/027

Abstract: PURPOSE:To provide a vertical aligner which can accurately position by an effective and stable operating mechanism. CONSTITUTION:The aligner comprises a main frame MF, a sub-frame SF installed inside the frame MF, stages XS, Y1S, Y2S held in the sub-frame SF and movable in a direction including a vertical component, means Y1M, Y2M, XM for relatively moving the stages to exposure luminous flux EX to be introduced substantially from a horizontal direction, gravity compensating means Y1BR, Y2BR, Y1BL, Y2BL, Y1SR, Y1SL for suspending the stages to gravity- compensate. Part (Y1BR, Y2BR, Y1BL, Y2BL) of the compensating means is fixed to the main frame.

公开(公告)号：JPH0251616A

公开(公告)日：1990-02-21

申请号：JP20272688

申请日：1988-08-16

Applicant: CANON KK

Inventor： OKAWA SHINKICHI ,  SAWAGUCHI KAZUYA

IPC: F16C29/02

Abstract: PURPOSE:To prevent production of dust and eliminate a backlash without lubrication by providing U-shaped holes and long holes in a connecting member for a connector to form plate springs so as to absorb components of force in other directions than a drive direction. CONSTITUTION:A plate spring 3 absorbs a displacement in the direction X, and a plate spring 4 absorbs a displacement in the direction Y. The plate springs 3, 4 are composed of U-shaped holes 6a, 6b, and long holes 5a, 5b on the outer side at facing parts to them respectively. Only rigid components of the plate springs 3, 4 are transmitted to a stage 8. The force in the direction Z, which is the drive direction, has a high rigidity. Forces such as thetax, thetay, which are inclinations of a robot 7, are also absorbed by distortion of the plate springs 3, 4. Production of dust can thus be prevented and a backlash is eliminated without lubrication.

公开(公告)号：JPS63232939A

公开(公告)日：1988-09-28

申请号：JP6480287

申请日：1987-03-19

Applicant: CANON KK

Inventor： HIYOSHI TOYOHIKO ,  IWATA MIKIO ,  WATANABE KAZUO ,  OKAWA SHINKICHI

IPC: B24B13/00

Abstract: PURPOSE:To stabilize stock removal in corrective polishing as well as to make yet more highly accurate polishing performable, by installing a tool holding device, holding a tip convex tool to polish a workpiece in a way of pressing a tape with an abradant to this workpiece free of slide motion and also a pressurizing force generating device, pressurizing the tool at constant pressure. CONSTITUTION:In this device, there is provided with a slide shaft 32 which holds a tip convex nose 38 to polish a work 1 in a way of pressing a lap tape 39 to a polishing surface of the work 1 free of slide motion toward the work 1, and the nose 38 is constituted so as to be pressurized in the work direction with a weight 33. In consequence, there is no variation in working pressure with movement of the slide shaft 32, and since pressurizing force during polishing is always constant, stable polishing can be done, thus accuracy of finishing is improvable. In addition, the slide shaft 32 is hydrostatically supported whereby the nose 38 follows the form of the polishing surface very smoothly, thus good fine corrective polishing is performable.

公开(公告)号：JPS63169739A

公开(公告)日：1988-07-13

申请号：JP109987

申请日：1987-01-08

Applicant: CANON KK

Inventor： HIGOMURA MAKOTO ,  OKAWA SHINKICHI ,  MATSUSHITA KOICHI

IPC: H01L21/68 ,  B23Q5/40 ,  G03F7/20 ,  H01L21/027 ,  H01L21/30

Abstract: PURPOSE:To enable positioning with high precision by storing a feed means and a drive means into a sealed vessel while penetrating a direct-acting rod to a wall body in the sealed vessel and slidably constituting the rod. CONSTITUTION:Since the revolution of a nut 4 screwed to a screw section 3a for a feed screw shaft 3 is prevented by rollers 13a, 13b and a guide rail 14, the nut 14 linearly moves along the guide rail 14 when the screw section 3a is turned. Consequently, a direct-acting rod 5 which the nut 4 is fixed linearly operates in response to the direction of rotation of the screw section 3a in the axial direction of the rod 5 as shown in the arrow B. As a result, a movable stage 6 in a vacuum atmosphere is shifted in the desired direction. When the movable stage 6 reaches a predetermined position, a piezoelectric element 7 is driven, a chuck 8 is pushed and the direct-acting rod 5 is clamped, thus locking the direct-acting rod 5. The inside of a sealed vessel 102 is kept at atmospheric pressure during operation in such a vacuum atmosphere. Accordingly, a normal lubricant can be used, and smooth working is attained, thus allowing positioning with high precision.

公开(公告)号：JPH05328752A

公开(公告)日：1993-12-10

申请号：JP13390392

申请日：1992-05-26

Applicant: CANON KK

Inventor： SAITO MASAMICHI ,  OKAWA SHINKICHI

IPC: H02N2/00

Abstract: PURPOSE:To prevent the occurrence of discharge, etc., in vacuum or special gas atmosphere, in an actuator which rectilinearly shifts the driving shaft as a spanworm by enabling the area between opposite driving piezoelectric elements for clamping being so arranged as to surround the drive shaft and capable of displacement in diametrical direction to be displaced in axial direction by means of piezoelectric elements for driving. CONSTITUTION:Piezoelectric elements 2 for driving and clampers 3a and 3b are surrounded by a cover 4, and the periphery of the exposed section of a mobile shaft 1 is covered with bellows covers 5a and 5b so that there may be no hindrance in the shifting of the mobile shaft 1.

公开(公告)号：JPH0257717A

公开(公告)日：1990-02-27

申请号：JP20738488

申请日：1988-08-23

Applicant: CANON KK

Inventor： FURUKAWA KANAME ,  OKAWA SHINKICHI

IPC: F16C32/06 ,  F16C29/02 ,  F16H25/20 ,  G03F7/20 ,  H01L21/027 ,  H01L21/30

Abstract: PURPOSE:To increase damping effect to suit to the use for precision devices such as semiconductor printing device, etc. by using a hollow tubular material as a guide bar and filling it with high damping material such as sand, vibration- proof rubber, etc. CONSTITUTION:A cylindrical hollow tube 1 is filled with vibration damping material 4 such as sand, rubber, etc. and a cover 2 is placed on it through a sealing member 3 such as O-ring, etc. The cross-sectional shape of the hollow tube 1 may be square as well as circular. When a direct-acting stage guide bar is constructed so, the damping capacity of the stage can be increased. When it is used for precision devices such as semiconductor exposure device, etc., therefore, movement and positioning of high accuracy can be achieved smoothly and rapidly.

公开(公告)号：JPH0242299A

公开(公告)日：1990-02-13

申请号：JP19219388

申请日：1988-08-02

Applicant: CANON KK

Inventor： CHIBA HIROSHI ,  OKAWA SHINKICHI

IPC: F16M7/00 ,  F16B1/02 ,  F16M13/02

Abstract: PURPOSE:To reduce production of an external force on a device due to the decrease of the internal pressure of a vacuum container to the utmost and to prevent the damage of a device by a method wherein a device is mounted to the vacuum container by using a mounting member adapted to absorb a force produced due to deformation of the vacuum container. CONSTITUTION:A fulcrum member 3 has structure in which a precision device 1 is constrained in any direction of directions x, y, and z and is not constrained in rotation around any axis of axes x, y, and z by a vacuum container 2. A fulcrum member 4 has a mechanism in which the precision device 1 is not constrained in translational movement in the direction (x) and in rotation around any axis of the axes x, y, and z by the vacuum container 2. This constitution enoughly reduces an external force on the precision device 1 since deformation of the vacuum container 2 is absorbed by means of the fulcrum members 3 and 4 when the vacuum container 2 is contracted for deformation.