公开(公告)号：EP1062684A4

公开(公告)日：2006-07-26

申请号：EP99903085

申请日：1999-01-14

Applicant: CORNELL RES FOUNDATION INC

Inventor： ADAMS SCOTT G ,  SHAW KEVIN A ,  WEBB RUSSELL Y ,  REED BRYAN W ,  MACDONALD NOEL C ,  DAVIS TIMOTHY J

IPC: B81C1/00 ,  B81B3/00 ,  H01L21/76 ,  H01L21/762 ,  H01L29/84 ,  H01L21/00

CPC classification number: H01L21/76224 ,  B81B2203/0118 ,  B81B2203/033 ,  B81C1/00142 ,  B81C1/00698

Abstract: An isolation process which enhances the performance of silicon micromechanical devices incorporates dielectric isolation segments (254, 256) within the silicon microstructure, which is otherwise composed of an interconnected grid of cantilevered beams. A metal layer on top of the beams (276, 278) provides interconnects (244, 246) and also allows contact to the silicon beams. Multiple conduction paths are incorporated through a metal patterning step prior to structure definition. The invention improves manufacturability of previous processes by performing all lithographic patterning steps on flat topographies, and removing complicated metal sputtering steps required of most high aspect ratio processes. With little modification, the invention can be implemented with integrated circuit fabrication sequences for fully integrated devices.

公开(公告)号：EP0834218A4

公开(公告)日：2002-04-10

申请号：EP96923321

申请日：1996-06-20

Applicant: CORNELL RES FOUNDATION INC

Inventor： ADAMS SCOTT G ,  BERTSCH FRED M ,  SHAW KEVIN A ,  MACDONALD NOEL C

IPC: H03H9/125 ,  H02N1/00 ,  H03H9/02 ,  H03H9/205 ,  H03H9/24 ,  H03H9/46

CPC classification number: H03H9/02425 ,  H02N1/008 ,  H03H9/02417 ,  H03H9/46 ,  H03H2009/02496

Abstract: A tunable electromechanical resonator structure incorporates an electrostatic actuator (66, 68) which permits reduction or enhancement of the resonant frequency of the structure. The actuator consists of two sets of opposed electrode fingers, each set having a multiplicity of spaced, parallel fingers (70, 72, 84, 90). One set (70, 72) is mounted on a movable portion (54) of the resonator structure and one set (84, 90) is mounted on an adjacent fixed base (132, 134) on the substrate, adjacent ends spaced apart by a gap (86, 92). An adjustable bias voltage (130) across the sets of electrodes adjusts the resonant frequency of the movable structure.