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公开(公告)号:DE3778741D1
公开(公告)日:1992-06-11
申请号:DE3778741
申请日:1987-01-09
Applicant: IBM
Inventor: ANDERSON JR , ARAPS CONSTANCE JOAN , DIVAKARUNI RENUKA SHASTRI , SACHDEV KRISHNA GANDHI , ZALAR STOYAN MATHIAS , KIRBY DANIEL PATRICK , WOLFFNUFER ROBERT , SACHDEV HARBANS SINGH , SURYANARAYANA DARBHA
IPC: C03C10/00 , C04B35/622 , C04B35/628 , C04B35/63 , C04B35/632 , C04B35/634 , H01L21/48 , H05K1/03 , C04B35/00 , H05K3/46
Abstract: Prepn. comprises (a) forming a finely divided cpd. that includes particles of ceramic particles, (b) coating the particles with a heat decomposable surface modification organo cpd. (I) selected from organo silanes, organo silazanes, titanium chelates and titanium esters, (c) combining and mixing the coated particles of finely divided cpd. with an organic resin binder and solvent for the binder to form a slurry, (d) shaping the slurry to form the desired element, heating the element to remove the coating, the binder and the solvent and (e) continuing the heating to fuse the particles of finely divided cpd.