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    ACCELEROMETER WITH FOLDED BEAMS
    21.
    发明公开
    ACCELEROMETER WITH FOLDED BEAMS 审中-公开
    BESCHLEUNIGUNGSMESSER MIT GEFALTETEN BALKEN

    公开(公告)号：EP1311863A4

    公开(公告)日：2003-07-30

    申请号：EP01948555

    申请日：2001-06-21

    Applicant: INPUT OUTPUT INC

    Inventor： SELVAKUMAR ARJUN ,  YU DULI ,  YU LIANZHONG ,  JONES BEN W

    IPC: B81B3/00 ,  B81C1/00 ,  G01P15/08 ,  G01P15/125 ,  G01V1/18 ,  G01P15/00 ,  H01L21/20 ,  H01L21/762

    CPC classification number: G01V1/181 ,  B81B3/0072 ,  B81B7/0016 ,  B81B2201/0235 ,  B81B2203/0109 ,  B81B2203/0163 ,  B81B2203/053 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0814

    Abstract: An accelerometer comprising a measuring mass (1405) for detecting acceleration, including a housing having a cavity, one or more spring mass assemblies (1400) positioned within the cavity, wherein each spring mass assembly (1400) includes a support structure (1410), including one or more resilient folded beams (1415a-1415d) coupled to the support structure (1410) and the measuring mass (1405) is coupled to the resilent folded beams (1415a-1415d), wherein one or more electrode patterns are coupled to the spring mass assembly (1400), wherein a top cap wafer, including a top capacitor electrode, is coupled to the measurement mass (1405), and a bottom cap wafer, including a bottom capacitor electrode, is also coupled to measurement mass (1405).

    Abstract translation: 一种包括用于检测加速度的测量质量体（1405）的加速度计，所述测量质量体包括具有空腔的壳体，位于所述空腔内的一个或多个弹簧质量组件（1400），其中每个弹簧质量组件（1400）包括支撑结构（1410） 包括耦合到支撑结构（1410）的一个或多个弹性折叠梁（1415a-1415d），并且测量质量块（1405）耦合到重新调谐折叠梁（1415a-1415d），其中一个或多个电极图案耦合到 弹簧质量组件（1400），其中包括顶部电容器电极的顶盖晶片耦合到测量质量块（1405），并且包括底部电容器电极的底盖晶片也耦合到测量质量块（1405） 。

    23.
    发明专利
    未知

    公开(公告)号：NO20026151L

    公开(公告)日：2003-02-14

    申请号：NO20026151

    申请日：2002-12-20

    Applicant: INPUT OUTPUT INC

    Inventor： SELVAKUMAR ARJUN ,  YU DULI ,  YU LIANZHONG ,  JONES BEN W

    IPC: B81B3/00 ,  B81C1/00 ,  G01P15/08 ,  G01P15/125 ,  G01V1/18

    Abstract: An accelerometer comprising a measuring mass (1405) for detecting acceleration, including a housing having a cavity, one or more spring mass assemblies (1400) positioned within the cavity, wherein each spring mass assembly (1400) includes a support structure (1410), including one or more resilient folded beams (1415a-1415d) coupled to the support structure (1410) and the measuring mass (1405) is coupled to the resilient folded beams (1415a-1415d), wherein one or more electrode patterns are coupled to the spring mass assembly (1400), wherein a top cap wafer, including a top capacitor electrode, is coupled to the measurement mass (1405), and a bottom cap wafer, including a bottom capacitor electrode, is also coupled to measurement mass (1405). The folded beams include circular cutouts so as to provide stress relief at connections between foot and leg positions of each folded beam.

    25.
    发明专利
    未知

    公开(公告)号：NO20092749L

    公开(公告)日：2002-03-12

    申请号：NO20092749

    申请日：2009-07-22

    Applicant: INPUT OUTPUT INC

    Inventor： GOLDBERG HOWARD D ,  YU DULI ,  YU LIANZHONG ,  RIED ROBERT P

    IPC: B81B3/00 ,  B81C1/00 ,  G02B26/10 ,  C23F1/02 ,  G01P9/04 ,  G02B26/08 ,  G03F7/20 ,  G06V30/224

    Abstract: The present invention provides merged-mask processes for fabricating micromachined devices in general and mirrored assemblies for use in optical scanning devices in particular. A method of fabricating a three dimensional structure, comprising, providing a substrate, applying a layer of a first masking material onto the substrate, applying a layer of a second masking material onto the layer of the first masking material, patterning the layer of the second masking material, applying a layer of a third masking material onto the portions not covered by the patterned layer of the second masking material, the layer of the third masking material is at least as thick as the combined thickness of the layers of the first and second masking materials, patterning the layers of the first and third masking materials, etching the exposed portions of the substrate, etching the exposed portions of the layers of the first and third masking materials and etching the exposed portions of the substrate.

    ACCELEROMETER WITH FOLDED BEAMS
    26.
    发明专利
    ACCELEROMETER WITH FOLDED BEAMS 未知

    公开(公告)号：CA2413965A1

    公开(公告)日：2001-12-27

    申请号：CA2413965

    申请日：2001-06-21

    Applicant: INPUT OUTPUT INC

    Inventor： YU LIANZHONG ,  SELVAKUMAR ARJUN ,  JONES BEN W ,  YU DULI

    IPC: B81B3/00 ,  B81C1/00 ,  G01P15/08 ,  G01P15/125 ,  G01V1/18 ,  G01P15/00

    Abstract: An accelerometer comprising a measuring mass (1405) for detecting acceleration, including a housing having a cavity, one or more spring mass assemblies (1400) positioned within the cavity, wherein each spring mass assembly (1400) includes a support structure (1410), including one or more resilient folded beams (1415a-1415d) coupled to the support structure (1410) and the measuring mass (1405) is coupled to the resilent folded beams (1415a - 1415d), wherein one or more electrode patterns are coupled to the spring mas s assembly (1400), wherein a top cap wafer, including a top capacitor electrod e, is coupled to the measurement mass (1405), and a bottom cap wafer, including a bottom capacitor electrode, is also coupled to measurement mass (1405).

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