-
公开(公告)号：JP2006038874A
公开(公告)日：2006-02-09
申请号：JP2005247907
申请日：2005-08-29
Inventor： SATO KATSUMI , INOUE KAZUO , YOSHIOKA MUTSUHIKO , FUJIYAMA HITOSHI , IGARASHI HISAO
Abstract: PROBLEM TO BE SOLVED: To provide a sheet-shaped probe attaining a stable connecting state even for a circuit device having a small-pitch electrode by enabling formation of a small-diameter surface electrode part, providing high durability without causing dropping-out of an electrode structure from an insulating film, and stably keeping a satisfactory connecting state to a large-area wafer or a circuit device having a small-pitch electrode to be inspected by surely preventing positional shift of the electrode structure from the electrode to be inspected due to temperature change in a burn-in test. SOLUTION: The sheet-shaped probe is provided with a contact point film having an insulating film and a plurality of the electrode structures extending in the thickness direction of the insulating film; and a metal-made supporting film for supporting the contact point film. The electrode structure is composed of a front surface electrode part protruding from the front surface of the insulating film, a rear surface electrode part exposing on the rear surface of the insulating film, a short-circuiting part which extends continuously from a base edge of the front surface electrode part in the thickness direction of the insulating film and is connected to the rear surface electrode part, and a supporting part which extends continuously outward from the base edge part of the front surface electrode part along the front surface of the insulating film. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract translation: 要解决的问题：为了提供即使对于具有小节距电极的电路装置也能够形成小直径表面电极部分而获得稳定的连接状态的片状探针，提供高耐久性而不会下落， 从绝缘膜排出电极结构，并且通过可靠地防止电极结构从电极的位置偏移而稳定地保持与大面积晶片或具有小间距电极的电路器件的良好连接状态 在老化测试中由于温度变化而进行检查。
解决方案：片状探针设置有具有绝缘膜的接触点膜和沿绝缘膜的厚度方向延伸的多个电极结构; 以及用于支撑接触点膜的金属制支撑膜。 电极结构由从绝缘膜的前表面突出的前表面电极部分，暴露在绝缘膜的后表面上的后表面电极部分，从基底边缘连续延伸的短路部分 绝缘膜的厚度方向上的前表面电极部分，并且与背面电极部分相连，并且沿着绝缘膜的前表面从前表面电极部分的基部边缘部分连续向外延伸的支撑部分。 版权所有（C）2006，JPO＆NCIPI
-
公开(公告)号：JP2006003346A
公开(公告)日：2006-01-05
申请号：JP2005143824
申请日：2005-05-17
Inventor： SATO KATSUMI , INOUE KAZUO , MOCHIZUKI ISAMU , HIRASAWA HIROYUKI
Abstract: PROBLEM TO BE SOLVED: To provide a sheet probe which forms a surface polar zone with small diameter, surely achieves stable electrical connection state, even in a circuit device with electrodes formed in small pitches, and inhibits drop-out of electrode structures from an insulating film to provide highest durability, and also to provide its manufacturing method, and its application. SOLUTION: This sheet probe has a contact film, wherein a plurality of electrode structures passing through to be extended in the thickness direction of a flexible insulating film are located in the planar direction of the insulating film with spaced each other. Each of these electrode structures comprises: a surface electrode section exposed to the surface of the insulating film to be projected from the insulating film; a rear-face electrode section exposed to the rear face of the insulating film; a short-circuiting section, extended in the thickness direction of the insulating film which is directly linked with each of the surface electrode section and the rear face electrode section to electrically connect them; and a retaining section formed on the base end of the surface electrode section to be extended in the planar direction of the insulating film. At least a part of this retaining section is embedded in the insulating film. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract translation: 要解决的问题：为了提供形成小直径的表面极性区的片材探针，即使在具有以小间距形成的电极的电路器件中，也可以确保稳定的电连接状态，并且抑制电极结构的脱落 从绝缘膜提供最高的耐久性，并提供其制造方法及其应用。 解决方案：该片材探针具有接触膜，其中通过在柔性绝缘膜的厚度方向上延伸的多个电极结构位于绝缘膜的平面方向上彼此间隔开。 这些电极结构中的每一个包括：暴露于从绝缘膜突出的绝缘膜的表面的表面电极部分; 暴露于所述绝缘膜的背面的背面电极部; 短路部，其在与所述表面电极部和所述背面电极部中的每一个直接连接的所述绝缘膜的厚度方向上延伸，使其电连接; 以及保持部，其形成在所述表面电极部的基端上，以在所述绝缘膜的平面方向延伸。 该保持部的至少一部分嵌入绝缘膜。 版权所有（C）2006，JPO＆NCIPI
-
公开(公告)号：JP2005128028A
公开(公告)日：2005-05-19
申请号：JP2004362951
申请日：2004-12-15
Inventor： INOUE KAZUO , SATO KATSUMI
Abstract: PROBLEM TO BE SOLVED: To provide a sheet-like probe capable of reliably preventing the misalignment between an electrode structure and an electrode to be inspected resulting from a temperature change in a burn-in test and hence stably maintaining a satisfactory electrical connection state, even in a large-area wafer whose diameter is 8 inches or longer and a circuit device in which the pitch of the electrode to be inspected is extremely small, and to provide applications for the sheet-like probe. SOLUTION: The sheet-like probe comprises a contact film and a frame board for supporting the contact film. In the contact film, a plurality of electrode structures are retained by an insulating film made of a flexible resin. In this case, the plurality of electrode structures are arranged according to a pattern corresponding to an electrode to be connected each and have a surface electrode section exposed onto the surface and a a reverse-surface electrode section exposed onto the reverse surface. COPYRIGHT: (C)2005,JPO&NCIPI
Abstract translation: 要解决的问题：提供一种片状探针，其能够可靠地防止由于老化试验的温度变化而导致的电极结构和被检查电极之间的不对准，并因此稳定地保持令人满意的电连接 状态，即使在直径为8英寸以上的大面积晶片中，以及要检查的电极的间距极小的电路器件，也可用于片状探针。 解决方案：片状探针包括接触膜和用于支撑接触膜的框架板。 在接触膜中，多个电极结构被由柔性树脂制成的绝缘膜保持。 在这种情况下，多个电极结构根据与要连接的电极对应的图案布置，并且具有暴露在表面上的表面电极部分和暴露在反面上的反面电极部分。 版权所有（C）2005，JPO＆NCIPI
-
公开(公告)号：JP2004172589A
公开(公告)日：2004-06-17
申请号：JP2003358106
申请日：2003-10-17
Inventor： SATO KATSUMI , INOUE KAZUO
IPC: G01R31/02 , G01R1/06 , G01R1/067 , G01R1/073 , G01R31/28 , H01B5/16 , H01L21/66 , H01L23/498 , H01R11/01 , H01R33/76 , H05K1/11 , H05K3/40 , H05K3/42
CPC classification number: G01R1/07314 , G01R1/06711 , G01R1/06733 , H01L23/49811 , H01L23/49827 , H01L2924/0002 , H01L2924/09701 , H01R11/01 , H01R12/523 , H05K1/116 , H05K3/4007 , H05K3/423 , H05K2201/0367 , H05K2201/0394 , H05K2201/09436 , H05K2201/09481 , H05K2203/0733 , H01L2924/00
Abstract: PROBLEM TO BE SOLVED: To provide a sheet-like connector in which electrode structures having small-diameter surface electrode sections can be formed in a state where the structures do not cause troubles of falling from an insulating sheet and can obtain high durability, and which can surely gain a stable electrically connected state even to a circuit device in which electrodes are formed in short pitches, and to provide a method of manufacturing the connector and the application of the connector. SOLUTION: This sheet-like connector has an insulating sheet and a plurality of electrode structures formed in the insulating sheet in a state where the structures are extended through the insulating sheet in the thickness direction of the sheet. Each electrode structure comprises a surface electrode exposed on and protruded from the surface of the insulating sheet, a rear electrode exposed on the rear surface of the insulating sheet, and a short-circuiting section which is continuously extended in the thickness direction of the insulating sheet through the sheet from the base-side end of the surface electrode section and connected to the rear electrode. The structure also comprises a holding section which is continuously extended outward along the surface of the insulating sheet from the base-side end of the surface electrode. COPYRIGHT: (C)2004,JPO
-
公开(公告)号：JP2003124272A
公开(公告)日：2003-04-25
申请号：JP2001320541
申请日：2001-10-18
Applicant: JSR CORP
Inventor： SATO KATSUMI , IGARASHI HISAO , INOUE KAZUO
Abstract: PROBLEM TO BE SOLVED: To provide a sheet-like connector whose diameter is small, whose ratio of projected height against the diameter is high, in which an electrode structure having the surface electrode part of high size precision can be formed and a stable electric connection state can surely be obtained for a circuit device where an electrode is formed with a small pitch. SOLUTION: The sheet-like connector 10 has an insulating sheet 11 and multiple electrode structures 15 where the projected surface electrode parts 16 exposed to the surface of the insulating sheet 11 and back electrode parts 17 exposed to the back of the insulating sheet 11 are connected by shorting parts 19 extending through the insulating sheet 11 in the thickness direction. The surface electrode parts 16 in the electrode structures 15 are formed in such a way that pattern holes in a resist film having the pattern holes corresponding to the surface electrode parts 16, which are formed on the surface of the insulating sheet 11, are filled with metal.
-
Patent Agency Ranking
公开(公告)号：JPH11204176A
公开(公告)日：1999-07-30
申请号：JP1640798
申请日：1998-01-12
Applicant: JSR CORP
Inventor： SATO KATSUMI
Abstract: PROBLEM TO BE SOLVED: To provide an elastic conductive rubber sheet which is placed in a position facing the electrode of an inspecting material on a testing board, in the inspection of a surface mounting LSI or an electronic circuit board, and electrically connected to the surface mounting LSI or the electronic circuit board, and to provide a connector used in the conductive rubber sheet and an electrical testing on jig of the circuit board. SOLUTION: Conductive rubber sheets 1, 2 have a plurality of conductive parts within an electrically insulating material, and in at least one conductive part 3, the ratio of the area of the conductive part of at least one surface of the anisotropic conductive rubber sheet and the area of the conductive part 3 of the surface of the other conductive rubber sheet is 1.05 or more.
-
公开(公告)号：JP2005338066A
公开(公告)日：2005-12-08
申请号：JP2005123347
申请日：2005-04-21
Inventor： SATO KATSUMI , INOUE KAZUO , YOSHIOKA MUTSUHIKO , FUJIYAMA HITOSHI , IGARASHI HISAO
Abstract: PROBLEM TO BE SOLVED: To provide a sheetlike probe, method of manufacturing the same, and its application, capable of forming the surface electrode of a small diameter, capable of attaining a stable connection state even for a circuit device having small pitch electrodes, capable of obtaining a high durability of the electrode structures without dropout from the insulation film, capable of preventing positional misalignment between the electrode structures and the electrodes to be inspected caused by the temperature variation in the burn-in test to a wafer of large area or to a circuit device of electrodes to be tested of small pitch and capable of stably maintaining the excellent connection state. SOLUTION: The sheetlike probe is provided with a contact point film with a plurality of electrode structures and a supporting metal film. The electrode structure is composed of: a surface electrode part protruding from the surface of the insulation film; a rear face electrode part exposing from the rear face of the insulation film; a short circuit part extending from the base of the surface electrode part continuously in the thickness direction of the insulation film and connected with the rear electrode part; and a holding part extending from the base end part continuously along the surface of the insulation film toward outside. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract translation: 要解决的问题：为了提供能够形成小直径的表面电极的片状探针，其制造方法及其应用，即使对于具有小间距的电路器件也能够获得稳定的连接状态 电极，其能够获得电极结构的高耐久性而不会从绝缘膜脱落，能够防止电极结构与被检查的电极之间的位置偏移，这是由于对大晶片的老化试验的温度变化引起的 区域或电极的电路装置，其测试小间距并能够稳定地保持良好的连接状态。 解决方案：片状探针设置有具有多个电极结构和支撑金属膜的接触膜。 电极结构由以下部分构成：从绝缘膜的表面突出的表面电极部分; 从绝缘膜的背面露出的背面电极部; 从绝缘膜的厚度方向连续地与表面电极部的基部延伸并与后部电极部连接的短路部; 以及保持部，其从所述基端部沿着所述绝缘膜的表面向外部连续地延伸。 版权所有（C）2006，JPO＆NCIPI
-
28.发明专利
公开(公告)号：JP2005317944A
公开(公告)日：2005-11-10
申请号：JP2005094958
申请日：2005-03-29
Inventor： IGARASHI HISAO , SATO KATSUMI , INOUE KAZUO
Abstract: PROBLEM TO BE SOLVED: To provide a wafer-inspecting apparatus, a wafer-inspecting method, and a probe apparatus, by which electrical inspections can be performed in batch on many electrodes to be tested, and superior electrical connection status can surely be attained for all the electrodes to be tested using a small load. SOLUTION: A probe apparatus is provided with: an inspection circuit board, having many inspection electrodes; a probe card which has a connection circuit board having many terminal electrodes and a contact member; an anisotropic conductive connector which is positioned between the inspection circuit board and the connecting circuit board for electrically connecting each of the inspection electrodes and each of the terminal electrodes; and a parallelism-adjusting mechanism which adjusts the parallelism of the inspection circuit board and the connecting circuit board to a wafer. The parallelism-adjusting mechanism is provided with a position-variable mechanism which relatively displaces the inspection circuit board or the connecting circuit board, in the thickness direction of the anisotropic conductive connector. The wafer-inspecting apparatus is provided with the probe apparatus. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract translation: 要解决的问题：为了提供晶片检查装置，晶片检查方法和探针装置，通过该检查装置可以批量地在待测试的许多电极上进行电气检查，并且可以确保优良的电连接状态 可以使用小负载来测试所有的电极。 解决方案：探针装置设有：检查电路板，具有许多检查电极; 探针卡，其具有具有多个端子电极的连接电路板和接触构件; 位于检查电路板和连接电路板之间的各向异性导电连接器，用于电连接每个检查电极和每个端子电极; 以及平行调整机构，其将检查电路板和连接电路板的平行度调整到晶片。 平行调整机构设置有位置可变机构，其在各向异性导电连接器的厚度方向上使检查电路板或连接电路板相对移位。 晶片检查装置设置有探针装置。 版权所有（C）2006，JPO＆NCIPI
-
公开(公告)号：JP2005108861A
公开(公告)日：2005-04-21
申请号：JP2004362950
申请日：2004-12-15
Inventor： SATO KATSUMI , INOUE KAZUO
IPC: G01R31/02 , G01R1/06 , G01R1/067 , G01R1/073 , G01R31/28 , H01B5/16 , H01L21/66 , H01L23/498 , H01R11/01 , H01R33/76 , H05K1/11 , H05K3/40 , H05K3/42
CPC classification number: G01R1/07314 , G01R1/06711 , G01R1/06733 , H01L23/49811 , H01L23/49827 , H01L2924/0002 , H01L2924/09701 , H01R11/01 , H01R12/523 , H05K1/116 , H05K3/4007 , H05K3/423 , H05K2201/0367 , H05K2201/0394 , H05K2201/09436 , H05K2201/09481 , H05K2203/0733 , H01L2924/00
Abstract: PROBLEM TO BE SOLVED: To provide a sheet-like connector which can form electrode structures having small-diameter surface electrodes, can surely gain a stable electrically connected state even by a circuit device in which the electrodes are formed at short pitches, and can obtain high durability while preventing the structures from falling off from an insulating sheet, and to provide the application of the connector. SOLUTION: This sheet-like connector has an insulating sheet and a plurality of electrode structures extended penetrating into the insulating sheet in its thickness direction. Each electrode structure comprises a surface electrode exposed on and protruded from the surface of the insulating sheet, a rear face electrode exposed on the rear surface of the insulating sheet, a short-circuiting section continuously extended penetrating into the thickness direction of the insulating sheet from the base end of the surface electrode and connected to the rear electrode, and a holding section continuously extended outward along the surface of the insulating sheet from the base end of the surface electrode. COPYRIGHT: (C)2005,JPO&NCIPI
Abstract translation: 要解决的问题：为了提供一种能够形成具有小直径表面电极的电极结构的片状连接器，即使通过以短间距形成电极的电路装置，也可以确实获得稳定的电连接状态， 并且可以在防止结构从绝缘片脱落的同时获得高耐久性，并提供连接器的应用。 解决方案：该片状连接器具有在其厚度方向上延伸穿过绝缘片的绝缘片和多个电极结构。 每个电极结构包括暴露在绝缘片的表面上并从其突出的表面电极，暴露在绝缘片的后表面上的背面电极，连续延伸穿过绝缘片的厚度方向的短路部分， 表面电极的基端并连接到后电极，并且保持部分从表面电极的基端沿着绝缘片的表面向外延伸。 版权所有（C）2005，JPO＆NCIPI
-
公开(公告)号：JP2001283996A
公开(公告)日：2001-10-12
申请号：JP2000100703
申请日：2000-04-03
Applicant: JSR CORP
Inventor： IGARASHI HISAO , SATO KATSUMI
Abstract: PROBLEM TO BE SOLVED: To provide a sheet-like connector which can hold high contact reliability over a long period of time, and can attain electrical connection in the state that a resistance is small enough to a metal electrode of a semiconductor equipment which should be connected, and its manufacturing method, an electrical equipment connection device, and an inspection equipment. SOLUTION: The sheet-like connector is formed of two or more penetration electrical conduction parts, which penetrate and are extended in the thickness direction, in a mutually insulated state; a barrier layer which consists of a diffusion-resistant metal is prepared in the surface of the penetration electrical conduction part which makes contacts oppositely with a metal electrode of an electric equipment which should be connected. Moreover, an edge is formed in a part contacting oppositely of the penetration electrical conduction part, which oppositely contacts with the metal electrode of the electrical equipment which should be connected.
-
-
-
-
-
-
-
-
-
Search Results
56
records
(took 0.055 seconds)
