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    23.
    发明专利
    未知

    公开(公告)号：DE69825226T2

    公开(公告)日：2005-08-04

    申请号：DE69825226

    申请日：1998-09-08

    Applicant: LUCENT TECHNOLOGIES INC

    Inventor： AKSYUK VLADIMIR ANATOLYEVICH ,  BISHOP DAVID JOHN ,  GAMMEL PETER LEDEL

    IPC: G12B5/00 ,  G01N37/00 ,  G01Q10/04 ,  G01Q60/18 ,  G02B21/26 ,  H02N1/00 ,  G02B21/00

    Abstract: A micromachined xyz stage, and microscopes utilizing such a stage, are disclosed. The xyz stage includes co-planar x- and y-drive means linked to a sample stage. Such x- and y- drive means are operable to position the sample stage in an x-y plane. The xyz stage further includes z-drive means operable to moves the sample stage out of the x-y plane. The z-drive means can be implemented by suspending a flat-plate electrode over the sample stage using hinged plate supports. As a voltage is applied across the plate electrode and the sample stage, an electrostatic force is generated, causing the sample stage to move towards the plate electrode. The hinged plate supports facilitate assembly of the z-drive means, in addition to providing support for it in its assembled configuration. By incorporating an optical fiber, the aperture of which has be drawn down to submicron size, a near-field scanning optical microscope can be formed. By forming a micromachined tip on the xyz stage, a scanning tunneling microscope or an atomic force microscope can be formed.

    24.
    发明专利
    未知

    公开(公告)号：DE60001479T2

    公开(公告)日：2003-12-18

    申请号：DE60001479

    申请日：2000-08-21

    Applicant: LUCENT TECHNOLOGIES INC

    Inventor： ANATOLYEVICH AKSYUK VLADIMIR ,  BISHOP DAVID JOHN

    IPC: F16S1/02 ,  B81B3/00 ,  B81B5/00 ,  B81B7/00 ,  G01N13/10 ,  G02B26/08

    Abstract: A micro-electro-mechanical optical device is disclosed. The micro-electro-mechanical optical device includes a micro-electro-mechanical structure coupled with an optical device. Both the micro-electro-mechanical structure and the optical device are disposed on a substrate surface. The micro-electro-mechanical structure lifts the optical device a predetermined distance above the plane of the substrate surface. Thereafter, the lifted optical device is moveable relative to the plane of the substrate surface in response to an electrostatic field generated between the optical device and the substrate.

    25.
    发明专利
    未知

    公开(公告)号：DE69811563D1

    公开(公告)日：2003-04-03

    申请号：DE69811563

    申请日：1998-05-05

    Applicant: LUCENT TECHNOLOGIES INC

    Inventor： AKSYUK VLADIMIR ANATOLYEVICH ,  GAMMEL PETER LEDEL ,  BISHOP DAVID JOHN

    IPC: G02B6/35 ,  G02B26/08 ,  G02B6/26 ,  G02B26/02

    Abstract: Optical switches utilizing electrostatically-driven actuators formed from micro machined plates are disclosed. Under an applied voltage, a movable plate moves toward a fixed plate or a conductive region of an underlying support. The switches further include a mechanical linkage from the actuator to an optical device. The displacement of the movable plate generated at the actuator is transferred, via the mechanical linkage, to the optical device. The optical device, which is positioned in close proximity to optically-aligned spaced optical fibers, is movable into and out of an optical path defined by the optical cores of the optical fibers by the action of the actuator. An "in-plane" optical switch includes an actuator having two vertically-oriented electrodes, which generates a substantially horizontally-directed displacement of the movable plate and the linked optical device. An "out-of-plane" optical switch includes an actuator having at least one horizontally-disposed suspended above a conductive region of an underlying support. The actuator generates a substantially vertically-directed displacement of the movable plate and the linked optical device.

    MEMS OPTICAL ISOLATORS
    29.
    发明专利
    MEMS OPTICAL ISOLATORS 未知

    公开(公告)号：CA2324836C

    公开(公告)日：2003-12-23

    申请号：CA2324836

    申请日：2000-10-30

    Applicant: LUCENT TECHNOLOGIES INC

    Inventor： BISHOP DAVID JOHN ,  GILES RANDY CLINTON

    IPC: B81B3/00 ,  G02B6/35 ,  G02B26/02 ,  G02B26/08 ,  G02B26/00 ,  B81B5/00

    Abstract: An opto-isolator incorporating a MEMS device includes an optical signal source and an optical signal detector defining therebeween an optical path for communication of optical signals. A MEMS device having an actuator for controlling a moveable element is disposed between the source and detector for manipulating the optical signals. In one embodiment, the moveable element is a shutter which is operable to selectively allow optical signals to be received by the detector and prevent signals from being detected. In another embodiment, the moveable member is a MEMS tilt mirror for selectively directing optical signals to the detecto r.

    30.
    发明专利
    未知

    公开(公告)号：DE60000565T2

    公开(公告)日：2003-08-14

    申请号：DE60000565

    申请日：2000-08-21

    Applicant: LUCENT TECHNOLOGIES INC

    Inventor： AKSYUK VLADIMIR ANATOLYEVICH ,  BISHOP DAVID JOHN

    IPC: F16S1/02 ,  B81B3/00 ,  B81B5/00 ,  B81B7/00 ,  G01N13/10 ,  G02B26/08

    Abstract: A method for pivoting an optical device about one or more axes thereof is disclosed. Springs couple the optical device to the micro-electro-mechanical structure. A portion of the springs are fastened on the micro-electro-mechanical structure. Fastening the portion of each spring on the electro-mechanical structure prevents the springs from moving the optical device in a translational direction when such optical device pivots about the one or more axes.

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