OPTO-MECHANICAL OPTICAL PATH RETARDATION MULTIPLIER FOR OPTICAL MEMS APPLICATIONS
    25.
    发明公开
    OPTO-MECHANICAL OPTICAL PATH RETARDATION MULTIPLIER FOR OPTICAL MEMS APPLICATIONS 有权
    用于光学MEMS应用的光机械式光路延迟倍增器

    公开(公告)号:EP2419770A1

    公开(公告)日:2012-02-22

    申请号:EP10719144.7

    申请日:2010-04-16

    CPC classification number: G02B5/124 G02B17/023 G02B26/0841

    Abstract: An optical Micro Electro-Mechanical System (MEMS) device provides an optical path retardation multiplier. The MEMS device includes a moveable corner cube reflector, a fixed mirror and a MEMS actuator. The moveable corner cube reflector is optically coupled to receive an incident beam and reflect the incident beam through 180 degrees towards the fixed mirror. The fixed mirror is optically coupled to reflect a reflected beam back towards the moveable corner cube reflector along a reverse path of the incident beam. The MEMS actuator is coupled to the moveable corner cube reflector to cause a displacement of the moveable corner cube reflector to extend an optical path length of the reflected beam.

    Abstract translation: 光学微机电系统(MEMS)装置提供光路延迟倍增器。 MEMS器件包括可移动的隅角立方体反射器,固定镜和MEMS致动器。 可移动的角隅立方反射器被光学耦合以接收入射光束并将入射光束反射180度朝向固定反射镜。 固定反射镜被光学耦合以沿着入射光束的反向路径将反射光束反射回可移动角隅立方反射器。 MEMS致动器耦合到可移动隅角立方反射器以引起可移动隅角立方反射器的位移以延伸反射光束的光路长度。

    COMPENSATED MEMS FTIR SPECTROMETER ARCHITECTURE
    30.
    发明公开
    COMPENSATED MEMS FTIR SPECTROMETER ARCHITECTURE 审中-公开
    补偿的MEMS红外光谱仪架构

    公开(公告)号:EP2475970A1

    公开(公告)日:2012-07-18

    申请号:EP10755038.6

    申请日:2010-09-08

    CPC classification number: G01J3/4532 G01J3/02 G01J3/021 G01J3/45

    Abstract: A Micro Electro-Mechanical System (MEMS) spectrometer architecture compensates for verticality and dispersion problems using balancing interfaces. A MEMS spectrometer/interferometer includes a beam splitter formed on a first surface of a first medium at an interface between the first medium and a second medium, a first mirror formed on a second surface of the first medium, a second mirror formed on a third surface of the first medium and balancing interfaces designed to minimize both a difference in tilt angles between the surfaces and a difference in phase errors between beams reflected from the first and second mirrors.

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