公开(公告)号：WO2011031791A1

公开(公告)日：2011-03-17

申请号：PCT/US2010/048169

申请日：2010-09-08

Applicant: SI-WARE SYSTEMS ,  KHALIL, Diaa A. ,  MORTADA, Bassem ,  NABIL, Mohamed ,  MEDHAT, Mostafa ,  SAADANY, Bassam A.

Inventor： KHALIL, Diaa A. ,  MORTADA, Bassem ,  NABIL, Mohamed ,  MEDHAT, Mostafa ,  SAADANY, Bassam A.

IPC: G01J3/02 ,  G01J3/45 ,  G01J3/453

CPC classification number: G01J3/4532 ,  G01J3/02 ,  G01J3/021 ,  G01J3/45

Abstract: A Micro Electro-Mechanical System (MEMS) spectrometer architecture compensates for verticality and dispersion problems using balancing interfaces. A MEMS spectrometer/interferometer includes a beam splitter formed on a first surface of a first medium at an interface between the first medium and a second medium, a first mirror formed on a second surface of the first medium, a second mirror formed on a third surface of the first medium and balancing interfaces designed to minimize both a difference in tilt angles between the surfaces and a difference in phase errors between beams reflected from the first and second mirrors.

Abstract translation: 微机电系统（MEMS）光谱仪架构使用平衡接口补偿垂直度和色散问题。 MEMS光谱仪/干涉仪包括在第一介质和第二介质之间的界面处形成在第一介质的第一表面上的分束器，形成在第一介质的第二表面上的第一反射镜，形成在第三介质上的第三反射镜 第一介质的表面和平衡界面被设计成最小化表面之间的倾斜角的差异以及从第一和第二反射镜反射的光束之间的相位误差。

公开(公告)号：EP2475970A1

公开(公告)日：2012-07-18

申请号：EP10755038.6

申请日：2010-09-08

Applicant: SI-Ware Systems

Inventor： KHALIL, Diaa A. ,  MORTADA, Bassem ,  NABIL, Mohamed ,  MEDHAT, Mostafa ,  SAADANY, Bassam A.

IPC: G01J3/02 ,  G01J3/45 ,  G01J3/453

CPC classification number: G01J3/4532 ,  G01J3/02 ,  G01J3/021 ,  G01J3/45

Abstract: A Micro Electro-Mechanical System (MEMS) spectrometer architecture compensates for verticality and dispersion problems using balancing interfaces. A MEMS spectrometer/interferometer includes a beam splitter formed on a first surface of a first medium at an interface between the first medium and a second medium, a first mirror formed on a second surface of the first medium, a second mirror formed on a third surface of the first medium and balancing interfaces designed to minimize both a difference in tilt angles between the surfaces and a difference in phase errors between beams reflected from the first and second mirrors.