METHOD AND DEVICE FOR COATING AND METHOD AND DEVICE FOR MANUFACTURE OF COLOR FILTER

    公开(公告)号:JPH10216598A

    公开(公告)日:1998-08-18

    申请号:JP2144997

    申请日:1997-02-04

    Abstract: PROBLEM TO BE SOLVED: To provide a coating device and a coating method for removing securely the adhered matter such as a coating liquid adhered on the periphery of a jet opening of a coating instrument regardless of the kind of the coating liquid while minimizing the wear of a cleaning head and securing the dustproof properties and long life and forming a high quality film free from film defects, and also provide a manufacturing device and a manufacturing method thereof for a color filter in which the above coating device and the coating method are used. SOLUTION: A cleaning component 94 moving along the longitudinal direction of a jet opening while being brought into contact slidably with a jet opening peripheral section 10 of a coating instrument 40 and removing a coating liquid adhered on the jet opening peripheral section is provided, and also a sensing means for sensing the position of the jet opening of the coating instrument is provided, and based on the measured value of the jet opening position sensed by the sensing means, the relative position between both of the cleaning component 94 and the coating instrument 40 at the time of being brought into contact slidably is controlled to be constant on the basis of the jet opening position of the coating instrument as a reference.

    EQUIPMENT AND METHOD FOR COATING
    22.
    发明专利

    公开(公告)号:JPH09206657A

    公开(公告)日:1997-08-12

    申请号:JP2022896

    申请日:1996-02-06

    Abstract: PROBLEM TO BE SOLVED: To stably form a film on a glass base and improve its productivity. SOLUTION: A coating fluid storage source 66 for feeding a coating fluid into a slit die as a coating instrument through a syringe pump is provided in a coating equipment for carrying out a coating method used for the manufacture of a color filter, and the coating fluid storage source 66 is provided with the coating equipment through a closed type treatment tank 68, an exhaust pipe 78 for exhausting the inside of the treatment tank 68, a supersonic vibrator 78 disposed in the treatment tank 68, and a closed type storage tank 86 connected with the treatment tank 68 through a replenishment piping 96 and connected with the syringe pump through a suction hose 48.

    PRODUCTION FOR COLOR FILTER
    23.
    发明专利

    公开(公告)号:JPH0784118A

    公开(公告)日:1995-03-31

    申请号:JP23010993

    申请日:1993-09-16

    Abstract: PURPOSE:To obtain such a forming method that thickness of a protective film is gradually and smoothly decreased in the peripheral part to the peripheral part of a transparent substrate, by using different two or more kinds of developers or etching liquids and developing or etching in two or more steps. CONSTITUTION:Development or etching is done in two or more steps by using different two or more kinds of developers or etching liquids. Namely, two- or more-step treatment ('treatment' means development or etching) is performed in the developing process when the transparent protective film has photosensitive performance or in the etching process when the film has no photosensitivity. These two or more kinds of treating liquids mean liquids having different liquid compsns. (solute, concn.) and temp. from each other. Treatment is preferably performed in two or more steps. By performing the treatment in two or more steps, the transparent protective film after treated can be formed to have the peripheral part having thickness gradually and smoothly decreased to the peripheral part of a transparent substrate.

    COLOR FILTER AND ITS PRODUCTION
    24.
    发明专利

    公开(公告)号:JPH116913A

    公开(公告)日:1999-01-12

    申请号:JP17321397

    申请日:1997-06-13

    Abstract: PROBLEM TO BE SOLVED: To prevent faulty display such as an afterimage, etc., from occurring by setting the tilt angle of the surface of a color filter on the pattern edge part of a black matrix to be smaller than a specified value. SOLUTION: This color filter is provided with the black matrix 24 and a coloring layer 26 formed on the aperture part of the black matrix 24 and a part of the black matrix 24 on a transparent base plate 22. The layer 26 is flat in the vicinity of the center of the aperture part of the black matrix 24 but swells on the pattern edge part of the black matrix 24 because of the black matrix 24. It is conceivable to form a transparent protective film 28 and a transference electrode 30 on the layer 26 as necessary but the swell on the black matrix 24 is not eliminated. By grinding the surface of the layer 26, the tilt angle θ of the layer 26 on the pattern edge part of the black matrix 24 is set to =1.6 μm.

    DETAIL COATING METHOD AND MANUFACTURE OF COLOR FILTER

    公开(公告)号:JPH08229497A

    公开(公告)日:1996-09-10

    申请号:JP34420895

    申请日:1995-12-28

    Abstract: PURPOSE: To provide a detail coating device and a coating method for improving the ratio of a regular section of a uniform film thickness and reducing to a large extent the unevenness of film thickness of a coating start section and a coating completing section when detail coating is carried out by using a die coater. CONSTITUTION: A coating material bead 13 spreading all over the whole width of desired coating width of a slit 14 is formed on the end of a cap 7 by stopping temporarily a material 9 to be coated on a coating start position, and then the material 9 to be coated is moved by a constant speed to form a film 8 of a uniform thickness, and squeegee coating is carried out in the vicinity of the coating completing position without feeding a coating material, and the excessive coating material is sucked and recovered through the cap 7.

    DETAIL COATING DEVICE AND METHOD THEREFOR

    公开(公告)号:JPH08229482A

    公开(公告)日:1996-09-10

    申请号:JP34420395

    申请日:1995-12-28

    Abstract: PURPOSE: To improve uniformity of film thickness, spectral characteristics, flatness, processing accuracy, etc., by sensing a relative position of a stage with respect to a coating material delivery device to control a delivery state of coating material from a coating material feed device. CONSTITUTION: After a predetermined quantity of coating material is drawn from a coating material tank 1 to a microcylinder pump 2, a switch valve 2a is changed over to a mouth piece 3a and a stage 4 is driven normally and a material 8 to be coated is moved to just under the piece 3a and stopped. Next, the piece 3a is lowered to ensure a predetermined clearance. Simultaneously with the lowering action, the microcylinder pump 2 is actuated to deliver coating material. And the stage 4 is stopped for a predetermined time period to form a coating material bead over the entire region in a predetermined transfer direction between the piece 3a and the material 8. And the stage 4 is caused to run normally to effect coating operation. When the stage 4 has been moved to a coating terminal position, a position sensor 5 senses it to switch the valve 2a to a coating material suction side to prepare a following coating operation.

    SHEET COATING DEVICE AND SHEET COATING

    公开(公告)号:JPH08182952A

    公开(公告)日:1996-07-16

    申请号:JP32908694

    申请日:1994-12-28

    Abstract: PURPOSE: To enhance coating efficiency without entailing the generation of cavities and air bubbles by adopting a piston type fixed delivery pump as a coating material supply source for sheet coating. CONSTITUTION: This sheet coating device is provided with one pair of selector valves 2a and microsyringe pumps 2 in parallel with each other between a coating material suction pipeline 1a connected to a coating material tank 1 and a coating material discharge pipeline 3b communicated with a coating material discharge device 3 and is provided, with a computer 7 for controlling both microsyringe pumps and selector valves in such a manner that the other microsyringe pump 2 operates to suck the coating material while the one microsyringe pump 2 operates to discharge the coating material.

    SHEET COATING DEVICE AND SHEET COATING

    公开(公告)号:JPH08182951A

    公开(公告)日:1996-07-16

    申请号:JP32823994

    申请日:1994-12-28

    Abstract: PURPOSE: To make it possible to set a high suction packing operation speed and to assure the uniformity of a coating film by providing coating material suction routes from a coating material tank to a piston type fixed delivery pump with positive pressure holding means of the coating material. CONSTITUTION: The coating material is sucked by the piston type fixed delivery pump 2 from a coating material tank 1 through a first liquid feed pipeline 1a and a selector valve 2a. The coating material is supplied through a selector valve 2b and a second liquid feed pipeline 3b to a slit 3a for discharging the coating material of a coating material discharging device 3. A material 8 to be coated is attracted and held by a stage 4 and is coated by nearly intersecting the lower prescribed position of the coating material discharging device 3 with the coating material discharge direction. At this time, the routes 1a, 2a from the coating material tank 1 to the piston type fixed delivery pump 2 are provided with the holding means (pressure regulating valves, release valves, etc.) for holding the coating material at a positive pressure. The generation of cavitation and air bubbles is then prevented and the high uniformity of the coating material supply is attained.

    PRODUCTION OF COATED FILM
    30.
    发明专利

    公开(公告)号:JPH08173891A

    公开(公告)日:1996-07-09

    申请号:JP32297694

    申请日:1994-12-26

    Abstract: PURPOSE: To keep uniformity of a film thickness near a coating start place of a sample to be coated continuously and to suppress a stripe-like defect generating at the coating start place to a coating direction by discharging a paint before the start of coating and/or after the finish of coating, then wiping a lip part of a mouth piece. CONSTITUTION: In a producing method of a coated film 6 on a substrate 5 by applying a paint by using a slit die coater mouth piece provided with a slit 3 for discharging a paint, the paint is discharged before wiping the mouth piece lip part, that is, before the start of coating or after the finish of coating. An air space is generated in the slit 3 when the paint is suck from the mouth piece slit 3 at the coating finished position of the substrate 5 by subjecting a pump 8 for paint supplying to inverted driving in order to keep a coated film 6 thickness from increasing near coating finished place, but the air space is filled with the paint and arranged at a lip tip surface by discharging the paint before wiping the tip part. That is, the coating is started reproduciblely in a state in which the slit 3 is filled with the paint.

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