公开(公告)号：US20140049933A1

公开(公告)日：2014-02-20

申请号：US14000674

申请日：2012-02-24

Applicant: Hans-Heinrich Gatzen ,  Tim Griesbach

Inventor： Hans-Heinrich Gatzen ,  Tim Griesbach

IPC: H05K1/02 ,  H05K3/30

CPC classification number: H05K1/0271 ,  B81B3/0072 ,  B81B2201/11 ,  B81C2201/0167 ,  H05K3/303 ,  Y10T29/49133

Abstract: The invention relates to space-saving micro- and nano-components and to methods for producing same. The components are characterized in that they do not comprise a rigid substrate having a considerable thickness. The mechanical stresses, which result in deformations and/or warpage within a component, are compensated by means of a mechanically stress-compensated design and/or by means of active mechanical stress compensation by depositing suitable stress compensation layers such that there is no need for relatively thick substrates. Thus, the overall thickness of the components is decreased and the integration options thereof in technical systems are improved. In addition, the field of application of such components is expanded.

Abstract translation: 本发明涉及节省空间的微米和纳米组分及其制备方法。 这些部件的特征在于它们不包括具有相当厚度的刚性基板。 导致部件内的变形和/或翘曲的机械应力通过机械应力补偿设计和/或借助于通过沉积合适的应力补偿层的有源机械应力补偿来补偿，使得不需要 相对厚的基材。 因此，组件的总体厚度减小，并且其技术系统中的集成选项得到改善。 此外，这些组件的应用领域也得到了扩展。

公开(公告)号：US20100315938A1

公开(公告)日：2010-12-16

申请号：US12192006

申请日：2008-08-14

Applicant: Peter David Ascanio ,  Tom P. Frangesh

Inventor： Peter David Ascanio ,  Tom P. Frangesh

IPC: G11B9/00 ,  H01L23/48 ,  B23P17/04

CPC classification number: G11B9/1436 ,  B81B7/0051 ,  B81B2201/038 ,  B81B2201/07 ,  B81B2201/11 ,  H01L2924/0002 ,  H02K5/04 ,  H02K99/20 ,  Y10T29/49 ,  H01L2924/00

Abstract: A package to receive a memory device including an electromagnetic motor comprises a body having a top surface and a bottom surface. Conductive leads extend through the body so that the conductive leads are at least partially exposed within the package. A base is connectable with the bottom surface of the body, and a lid is connectable with the top surface of the body. The base and the lid have substantially matched thermal expansion characteristics and provide magnetic flux return paths for the electromagnetic motor.

Abstract translation: 用于接收包括电磁电动机的存储装置的包装件包括具有顶表面和底表面的主体。 导电引线延伸穿过主体，使得导电引线至少部分地暴露在封装内。 基座可与主体的底面连接，盖可与主体的上表面连接。 基座和盖具有基本上匹配的热膨胀特性，并为电磁马达提供磁通返回路径。

公开(公告)号：US20090001486A1

公开(公告)日：2009-01-01

申请号：US11824465

申请日：2007-06-29

Applicant: John Heck ,  Tsung-Kuan Allen Chou

Inventor： John Heck ,  Tsung-Kuan Allen Chou

IPC: H01L29/84 ,  H01L21/00

CPC classification number: B81C1/00246 ,  B81B2201/07 ,  B81B2201/11 ,  B81B2201/12 ,  B81B2203/0118 ,  B81C2203/0735 ,  B82Y10/00 ,  G11B9/1436

Abstract: In one embodiment, the present invention includes a method for forming a sacrificial oxide layer on a base layer of a microelectromechanical systems (MEMS) probe, patterning the sacrificial oxide layer to provide a first trench pattern having a substantially rectangular form and a second trench pattern having a substantially rectangular portion and a lateral portion extending from the substantially rectangular portion, and depositing a conductive layer on the patterned sacrificial oxide layer to fill the first and second trench patterns to form a support structure for the MEMS probe and a cantilever portion of the MEMS probe. Other embodiments are described and claimed.

Abstract translation: 在一个实施例中，本发明包括在微机电系统（MEMS）探针的基底层上形成牺牲氧化物层的方法，图案化牺牲氧化物层以提供具有基本矩形形状的第一沟槽图案和第二沟槽图案 具有基本上矩形的部分和从所述大致矩形部分延伸的横向部分，以及在所述图案化的牺牲氧化物层上沉积导电层以填充所述第一和第二沟槽图案以形成用于所述MEMS探针的支撑结构， MEMS探针。 描述和要求保护其他实施例。

公开(公告)号：US06914871B2

公开(公告)日：2005-07-05

申请号：US09750007

申请日：2000-12-27

Applicant: Masaki Hara ,  Kazuhito Hori ,  Hiroto Ido ,  Naoto Kojima ,  Kazuhiro Hane

Inventor： Masaki Hara ,  Kazuhito Hori ,  Hiroto Ido ,  Naoto Kojima ,  Kazuhiro Hane

IPC: B81B3/00 ,  B81C1/00 ,  G02B7/182 ,  G02B26/08 ,  G11B7/085 ,  G11B7/09 ,  G11B7/135

CPC classification number: G11B7/08564 ,  B81B2201/042 ,  B81B2201/11 ,  B81B2203/0109 ,  B81C1/00595 ,  G02B7/1821 ,  G02B26/0841 ,  G11B7/08576 ,  Y10T428/24942

Abstract: The hinge (13) should preferably be formed to have a higher resistance than ever against the pivoting of the mirror body (12) to effectively prevent the hinge (13) from being damaged. By adopting a suitable one of a variety of production steps as necessary, the hinge (13) can be formed more finely and with a higher precision and thus the micro mirror unit can be produced more easily in a shorter time. To this end, the hinge (13) is formed from a different material, such as SiNx, from the mirror substrate material from which the frame (11) and mirror body (12) are formed.

Abstract translation: 优选地，铰链（13）形成为具有比以往更高的抗反射镜主体（12）的枢转的阻力，以有效地防止铰链（13）被损坏。 通过根据需要采用各种生产步骤中的合适的一种，铰链（13）可以更精细地形成并且具有更高的精度，从而可以在更短的时间内更容易地制造微反射镜单元。 为此，铰链（13）由形成框架（11）和反射镜主体（12）的反射镜基板材料由不同的材料（例如SiN x x）形成。

公开(公告)号：US20030002133A1

公开(公告)日：2003-01-02

申请号：US09892616

申请日：2001-06-28

Applicant: SOUTH WEST RESEARCH INSTITUTE

Inventor： Heather Shannon Hanson ,  Joseph Nathan Mitchell

IPC: G02B026/00

CPC classification number: B81B3/0024 ,  B81B2201/031 ,  B81B2201/11 ,  B81B2203/055 ,  H01H2061/008

Abstract: A thermal actuator includes a first arm having a proximal end and a distal end, a second arm, parallel to the first arm, having a proximal end and a distal end, and a third arm arranged between and parallel to the first and second arms, the third arm having a proximal end and a distal end. The third arm has at least one portion at the distal end of the third arm having a width that is substantially larger than a width of the first arm and a width of the second arm. The distal ends of the first, second and third arms are coupled together to form a distal end of the thermal actuator, and the first, second and third arms preferably are made of a single material. When the proximal end of the third arm is coupled to ground and current is applied to the proximal end of the first arm, the distal end of the thermal actuator moves and applies force in a first direction, and when the proximal end of the third arm is coupled to ground and current is applied to the proximal end of the second arm, the distal end of the thermal actuator moves and applies force in a direction opposite to the first direction. A number of thermal actuators can be arranged in an array. The thermal actuator or array of thermal actuators can be coupled to an applicator.

Abstract translation: 热致动器包括具有近端和远端的第一臂，平行于第一臂的第二臂，具有近端和远端，以及布置在第一臂和第二臂之间并平行于第一臂的第三臂， 第三臂具有近端和远端。 第三臂具有在第三臂的远端处的至少一个部分，其宽度基本上大于第一臂的宽度和第二臂的宽度。 第一，第二和第三臂的远端联接在一起以形成热致动器的远端，并且第一，第二和第三臂优选地由单一材料制成。 当第三臂的近端联接到地面并且电流被施加到第一臂的近端时，热致动器的远端在第一方向上移动并施加力，并且当第三臂的近端 耦合到地面，并且电流施加到第二臂的近端，热致动器的远端移动并沿与第一方向相反的方向施加力。 许多热致动器可以排列成阵列。 热致动器或热致动器阵列可以耦合到施加器。

公开(公告)号：US20010017726A1

公开(公告)日：2001-08-30

申请号：US09750007

申请日：2000-12-27

Inventor： Masaki Hara ,  Kazuhito Hori ,  Hiroto Ido ,  Naoto Kojima ,  Kazuhiro Hane

IPC: G02B026/08 ,  G02B007/182

CPC classification number: G11B7/08564 ,  B81B2201/042 ,  B81B2201/11 ,  B81B2203/0109 ,  B81C1/00595 ,  G02B7/1821 ,  G02B26/0841 ,  G11B7/08576 ,  Y10T428/24942

Abstract: The hinge (13) should preferably be formed to have a higher resistance than ever against the pivoting of the mirror body (12) to effectively prevent the hinge (13) from being damaged. By adopting a suitable one of a variety of production steps as necessary, the hinge (13) can be formed more finely and with a higher precision and thus the micro mirror unit can be produced more easily in a shorter time. To this end, the hinge (13) is formed from a different material, such as SiNx, from the mirror substrate material from which the frame (11) and mirror body (12) are formed.

Abstract translation: 优选地，铰链（13）形成为具有比以往更高的抗反射镜主体（12）的枢转的阻力，以有效地防止铰链（13）被损坏。 通过根据需要采用各种生产步骤中的合适的一种，铰链（13）可以更精细地形成并且具有更高的精度，从而可以在更短的时间内更容易地制造微反射镜单元。 为此，铰链（13）由形成框架（11）和镜体（12）的反射镜基板材料由诸如SiN x的不同材料形成。

公开(公告)号：US5726073A

公开(公告)日：1998-03-10

申请号：US588919

申请日：1996-01-19

Applicant: Z. Lisa Zhang ,  Noel C. MacDonald

Inventor： Z. Lisa Zhang ,  Noel C. MacDonald

IPC: B81B1/00 ,  B81B3/00 ,  H02N1/00 ,  H01L21/465

CPC classification number: H02N1/008 ,  B81B3/0021 ,  B81B3/0062 ,  B81C1/0019 ,  B82Y15/00 ,  B81B2201/11 ,  B81B2203/053 ,  B81B2203/055 ,  B81B2207/07

Abstract: A microelectromechanical compound stage microactuator assembly capable of motion along x, y, and z axes for positioning and scanning integrated electromechanical sensors and actuators is fabricated from submicron suspended single crystal silicon beams. The microactuator incorporates an interconnect system for mechanically supporting a central stage and for providing electrical connections to componants of the microactuator and to devices carried thereby. The microactuator is fabricated using a modified single crystal reactive etching and metallization process which incorporates an isolation process utilizing thermal oxidation of selected regions of the device to provide insulating segments which define conductive paths from external circuitry to the actuator components and to microelectronic devices such as gated field emitters carried by the actuator.

公开(公告)号：WO2012113902A2

公开(公告)日：2012-08-30

申请号：PCT/EP2012053147

申请日：2012-02-24

Applicant: HARTING KGAA ,  GATZEN PROF DR-ING HANS-HEINRICH ,  GRIESBACH DIPL-ING TIM

Inventor： GATZEN PROF DR-ING HANS-HEINRICH ,  GRIESBACH DIPL-ING TIM

IPC: B81B3/00

CPC classification number: H05K1/0271 ,  B81B3/0072 ,  B81B2201/11 ,  B81C2201/0167 ,  H05K3/303 ,  Y10T29/49133

Abstract: The invention relates to space-saving micro- and nano-components and to methods for producing same. The components are characterized in that they do not comprise a rigid substrate having a considerable thickness. The mechanical stresses, which result in deformations and/or warpage within a component, are compensated by means of a mechanically stress-compensated design and/or by means of active mechanical stress compensation by depositing suitable stress compensation layers such that there is no need for relatively thick substrates. Thus, the overall thickness of the components is decreased and the integration options thereof in technical systems are improved. In addition, the field of application of such components is expanded.

Abstract translation: 根据本发明，节省空间的微和纳米组件和方法，提出了它们的制备。 这些部件的特征在于不具有相当厚度的刚性衬底。 在此，变形和/或扭曲的机械应力补偿体的装置在部件内引起的机械应力和/或将要通过有源机械应力补偿装置通过沉积合适的电压补偿层，使得没有Bedarfnach是相对厚的基材补偿。 因此，组分的总厚度减少及其Integrationsmöglichkeitin改进的技术系统。 此外，这些组件的应用领域也在扩大。

公开(公告)号：WO2008126231A1

公开(公告)日：2008-10-23

申请号：PCT/JP2007/057040

申请日：2007-03-30

Applicant: パイオニア株式会社 ,  鈴木 純

Inventor： 鈴木 純

IPC: G11B9/14

CPC classification number: G11B9/1436 ,  B81B3/0062 ,  B81B2201/032 ,  B81B2201/033 ,  B81B2201/11 ,  B81B2203/055 ,  B82Y10/00 ,  G11B9/02

Abstract: 駆動装置（１００）は、ベース部（１１０）と、被駆動物（１２）が搭載されると共に、移動可能なステージ部（１３０）と、ベース部とステージ部とを接続すると共に、ステージ部を一の方向（Ｘ軸）に沿って移動させるような弾性を有する弾性部（１２）と、ステージ部がステージ部及び弾性部により定まる共振周波数で一の方向に沿って共振するようにステージ部を移動させるための加振力を加える印加部（１４１、１４２、２２）とを備える。

Abstract translation: 驱动器（100）包括基部（110），用于安装待驱动的物品（12）的可移动台部（130），用于连接基部和台部的弹性部分（12） 沿着一个方向（X轴）移动舞台部分，以及施加摇动力的部分（141,142,22），所述部分用于使舞台部分沿着一个方向以由舞台部分和弹性部分确定的共振频率振荡 。

公开(公告)号：WO2007114354A1

公开(公告)日：2007-10-11

申请号：PCT/JP2007/057145

申请日：2007-03-30

Applicant: パイオニア株式会社 ,  前田 孝則 ,  高橋 宏和 ,  石杜 昌弘

Inventor： 前田 孝則 ,  高橋 宏和 ,  石杜 昌弘

IPC: H02N1/00 ,  B81B3/00 ,  G11B9/14

CPC classification number: H02N1/008 ,  B81B3/0037 ,  B81B2201/033 ,  B81B2201/034 ,  B81B2201/11 ,  B81B2203/051 ,  B82Y10/00 ,  G11B9/1454

Abstract: アクチュエータ（６）は、一端側が固定部（３）の接続点（Ｃ１）に回転可能に接続され、他端側が移動部（４）の接続点（Ｃ２）に回転可能に接続された連結部（７）と、一端側が固定部（３）の接続点（Ｃ３）に回転可能に接続され、他端側が移動部（４）の接続点（Ｃ４）に回転可能に接続された連結部（８）と、基端側が櫛歯基点（Ｂ１）に接続され、先端側が櫛歯基点（Ｂ１）の旋回軌道に沿って伸びる櫛歯電極（１２）と、基端側が固定部（３）に接続され、先端側が櫛歯電極（１２）の湾曲に対応するように伸び、櫛歯電極（１２）と所定の間隔をもって対向する櫛歯電極（１３）とを備えている。

Abstract translation: 致动器（6）包括连接部分（7），其一端可旋转地连接到固定部分（3）的连接点（C1），另一端可旋转地连接到移动部分（4）的连接点（C2） ），连接部分（8），其一端可旋转地连接到固定部分（3）的连接点（C3），另一端可旋转地连接到移动部分（4）的连接点（C4），梳子 - 具有连接到梳齿基点（B1）的根部分和沿着转动路径延伸的前端部分的电极（12）和具有连接到固定的根部的梳齿电极（13） （3），另一部分沿着梳齿电极（12）的曲线延伸并且以预定的间隙与梳齿电极（12）相对。