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    赤外線センサ
    21.
    发明申请
    赤外線センサ 审中-公开
    红外传感器

    公开(公告)号：WO2013114861A1

    公开(公告)日：2013-08-08

    申请号：PCT/JP2013/000467

    申请日：2013-01-29

    Applicant: 三菱マテリアル株式会社

    Inventor： 田里　和義 ,  石川　元貴 ,  白田　敬治 ,  中村　賢蔵

    IPC: G01J1/02 ,  G01J5/10 ,  G01J5/20 ,  H01L35/10 ,  H01L35/30 ,  H01L37/02

    CPC classification number: G01J5/10 ,  G01J5/0022 ,  G01J5/06 ,  G01J5/0803 ,  G01J2005/103 ,  G01J2005/206 ,  G03G15/2039 ,  G03G2215/00772 ,  H01L27/144 ,  H01L37/02 ,  H05K1/0271 ,  H05K1/189 ,  H05K2201/068 ,  H05K2201/09136 ,  H05K2201/09781

    Abstract: 　片側にリード線が接続されていても、熱バランスを崩さずに測定対象物の温度を高精度に測定可能な赤外線センサを提供する。絶縁性フィルム２と、絶縁性フィルムの一方の面に設けられた第１の感熱素子３Ａ及び第２の感熱素子３Ｂと、絶縁性フィルムの一方の面に形成され第１の感熱素子に接続された第１の配線膜４Ａ及び第２の感熱素子に接続された第２の配線膜４Ｂと、第２の感熱素子に対向して絶縁性フィルムの他方の面に設けられた赤外線反射膜５と、絶縁性フィルムの同じ端部側に設けられ対応する第１の配線膜及び第２の配線膜に接続された複数の端子電極６と、絶縁性フィルムの他方の面に設けられ第１の配線膜と第２の配線膜とのうち端子電極からの配線距離の長い方の少なくとも一部に対向して絶縁性フィルムよりも熱放散性の高い材料で形成された熱抵抗調整膜７とを備えている。

    Abstract translation: 提供了一种红外传感器，即使在将引线连接到一侧时，也可以对待测对象进行高精度的温度测量而不破坏热平衡。 红外传感器包括：绝缘膜（2）; 设置在所述绝缘膜的一个面上的第一热敏元件（3A）和第二热敏元件（3B） 连接到第一热敏元件的第一布线膜（4A）和与第二热敏元件连接的第二布线膜（4B），所述布线膜形成在绝缘膜的一个面上; 设置在所述绝缘膜的与所述第二热敏元件相反的另一面上的红外线反射膜（5）; 多个端子电极（6），其设置在所述绝缘膜的同一端部侧，并且与所述第一布线膜和所述第二布线膜连接; 和设置在所述绝缘膜的另一面上的热电阻调节膜（7），所述隔热膜与所述端子电极的布线距离处于与所述第一布线膜和所述第二布线膜的长度的至少一部分相对的位置 并且其由比绝缘膜更大的散热材料形成。

    LARGE-AREA LASER HEATING SYSTEM
    22.
    发明申请
    LARGE-AREA LASER HEATING SYSTEM 审中-公开

    公开(公告)号：US20180135181A1

    公开(公告)日：2018-05-17

    申请号：US15353680

    申请日：2016-11-16

    Applicant: ADNANOTEK CORP.

    Inventor： KAI YANG

    IPC: C23C16/48 ,  H01S5/183 ,  H01S5/024 ,  G01J5/10 ,  H01S5/42 ,  C23C16/52

    CPC classification number: C23C16/483 ,  C23C14/5813 ,  G01J5/0818 ,  G01J5/10 ,  G01J2005/103 ,  H01S5/02252 ,  H01S5/0228 ,  H01S5/423

    Abstract: The instant disclosure provides a large-area laser heating system including a laser module, a reaction module and a guiding module. The laser module includes a vertical-cavity surface-emitting laser for emitting a laser beam and a laser adjusting structure connected to the vertical-cavity surface-emitting laser. The incident angle of the laser beam emitted by the vertical-cavity surface-emitting laser is adjusted by the laser adjusting structure. The reaction module includes a sample holder for carrying a sample. The guiding module is connected between the laser module and the reaction module, and the laser beam emitted by the vertical-cavity surface-emitting laser passes through the guiding module and projects onto the surface of the sample.

    Detection device with suspended bolometric membranes having a high absorption efficiency and signal-to-noise ratio
    23.
    发明授权
    Detection device with suspended bolometric membranes having a high absorption efficiency and signal-to-noise ratio 有权

    公开(公告)号：US09869593B2

    公开(公告)日：2018-01-16

    申请号：US15355835

    申请日：2016-11-18

    Applicant: ULIS

    Inventor： Sébastien Cortial ,  Michel Vilain

    IPC: G01J5/02 ,  G01J5/10 ,  G01J5/04 ,  G01J5/20

    CPC classification number: G01J5/10 ,  G01J5/024 ,  G01J5/045 ,  G01J5/20 ,  G01J2005/103

    Abstract: A bolometric detection device includes a substrate having a read-out circuit. The device also includes an array of elementary detectors each including a membrane suspended above the substrate and connected to the read-out circuit by at least two electric conductors. The membrane has two electrically-conductive electrodes respectively connected to the two electric conductors, and a volume of transducer material electrically connecting the two electrodes. The read-out circuit is configured to apply an electrical stimulus between the two electrodes of the membrane and to form an electric signal as a response to said application. The volume includes a volume of a first transducer material electrically connecting the two electrodes of the membrane and forming walls of a closed enclosure having each of the electrodes at least partially housed therein; and a volume of a second transducer material, electrically connecting the two electrodes and housed in the enclosure, the electric resistivity of the second material being smaller than the electric resistivity of the first material; and the two transducer materials having a negative thermal coefficient of resistivity TCR.

    Non-Contact Thermal Measurements of VUV Optics
    24.
    发明申请
    Non-Contact Thermal Measurements of VUV Optics 审中-公开

    公开(公告)号：US20170153145A1

    公开(公告)日：2017-06-01

    申请号：US15360722

    申请日：2016-11-23

    Applicant: KLA-Tencor Corporation

    Inventor： Anatoly Shchemelinin ,  Ilya Bezel ,  Kenneth P. Gross

    IPC: G01J5/10 ,  H04N5/225 ,  H04N5/33

    CPC classification number: G01J5/10 ,  G01J5/0003 ,  G01J5/524 ,  G01J2005/0077 ,  G01J2005/103

    Abstract: Methods and systems for performing non-contact temperature measurements of optical elements with long wavelength infrared light are described herein. The optical elements under measurement exhibit low emissivity to long wavelength infrared light and are often highly reflective or highly transmissive to long wavelength infrared light. In one aspect, a material coating having high emissivity, low reflectivity, and low transmission at long wavelength IR wavelengths is disposed over selected portions of one or more optical elements of a metrology or inspection system. The locations of the material coating are outside the direct optical path of the primary measurement light employed by the metrology or inspection system to perform measurements of a specimen. Temperature measurements of the front and back surfaces of an IR-transparent optical element are performed with a single IR camera. Temperature measurements are performed through multiple optical elements in an optical path of a primary measurement beam.

    INFRARED SENSOR
    25.
    发明申请
    INFRARED SENSOR 有权
    红外传感器

    公开(公告)号：US20140374596A1

    公开(公告)日：2014-12-25

    申请号：US14375065

    申请日：2013-01-29

    Applicant: MITSUBISHI MATERIALS CORPORATION

    Inventor： Kazuyoshi Tari ,  Mototaka Ishikawa ,  Keiji Shirata ,  Kenzo Nakamura

    IPC: G01J5/10 ,  G01J5/08

    CPC classification number: G01J5/10 ,  G01J5/0022 ,  G01J5/06 ,  G01J5/0803 ,  G01J2005/103 ,  G01J2005/206 ,  G03G15/2039 ,  G03G2215/00772 ,  H01L27/144 ,  H01L37/02 ,  H05K1/0271 ,  H05K1/189 ,  H05K2201/068 ,  H05K2201/09136 ,  H05K2201/09781

    Abstract: Provided is an infrared sensor which is capable of measuring a temperature of an object to be measured with high accuracy even when lead wires are connected to one side thereof. The infrared sensor includes an insulating film; a first and a second heat sensitive element which are provided on one face of the insulating film; a first and a second wiring film that are respectively connected to the first and the second heat sensitive element; an infrared reflecting film; a plurality of terminal electrodes; and a thermal resistance adjusting film which is provided on the other face of the insulating film, is in opposition to at least a portion of the longer one of the first or the second wiring film in wiring distance from the terminal electrodes, and is formed of a material with greater heat dissipation than the insulating film.

    Abstract translation: 提供一种能够即使在将引线连接到其一侧时也能够以高精度测量被测量物体的温度的红外线传感器。 红外线传感器包括绝缘膜; 第一和第二热敏元件，设置在绝缘膜的一个面上; 分别连接到第一和第二热敏元件的第一和第二布线膜; 红外反射膜; 多个端子电极; 并且设置在所述绝缘膜的另一面上的热电阻调节膜与所述端子电极的布线距离处于与所述第一或第二布线膜中较长的一个的至少一部分相对，并且由所述热电阻调节膜形成为 具有比绝缘膜更大散热的材料。

    OPTICAL LAYERED STRUCTURE, MANUFACTURING METHOD, AND USE
    28.
    发明公开
    OPTICAL LAYERED STRUCTURE, MANUFACTURING METHOD, AND USE 审中-公开
    OPTISCHE SCHICHTSTRUKTUR，HERSTELLUNGSVERFAHRENDAFÜRUND VERWENDUNG DAVON

    公开(公告)号：EP2893770A1

    公开(公告)日：2015-07-15

    申请号：EP13834572.3

    申请日：2013-09-05

    Applicant: VAISALA OYJ

    Inventor： TALVITIE, Hannu ,  KORHONEN, Jukka ,  BLOMBERG, Martti

    IPC: H05B3/20 ,  G01J3/10 ,  G01J5/20 ,  G02B5/22

    CPC classification number: G02B5/22 ,  F21V7/10 ,  G01J3/108 ,  G01J5/024 ,  G01J5/048 ,  G01J5/0809 ,  G01J5/10 ,  G01J5/20 ,  G01J2005/103 ,  H01L51/5271 ,  H01L51/529 ,  H05B3/84 ,  H05B2203/013

    Abstract: The present publication describes a heat-resistant optical layered structure, a manufacturing method for a layered structure, and the use of a layered structure as a detector, emitter, and reflecting surface. The layered structure comprises a reflecting layer, an optical structure on top of the reflecting layer, and preferably shielding layers for shielding the reflecting layer and the optical structure. According to the invention, the optical structure on top of the reflecting layer comprises at least one partially transparent layer, which is optically fitted at a distance to the reflecting layer.

    Abstract translation: 本公开描述了耐热光学层叠结构，层状结构的制造方法，以及层叠结构作为检测器，发射体和反射面的用途。 层叠结构包括反射层，反射层顶部的光学结构，优选用于屏蔽反射层和光学结构的屏蔽层。 根据本发明，反射层顶部的光学结构包括至少一个部分透明的层，其在与反射层一定距离的光学上被配合。

    INFRARED SENSOR
    30.
    发明公开
    INFRARED SENSOR 审中-公开
    INFRAROTSENSOR

    公开(公告)号：EP2811271A1

    公开(公告)日：2014-12-10

    申请号：EP13743471.8

    申请日：2013-01-29

    Applicant: Mitsubishi Materials Corporation

    Inventor： TARI, Kazuyoshi ,  ISHIKAWA, Mototaka ,  SHIRATA, Keiji ,  NAKAMURA, Kenzo

    IPC: G01J1/02 ,  G01J5/10 ,  G01J5/20 ,  H01L35/10 ,  H01L35/30 ,  H01L37/02

    CPC classification number: G01J5/10 ,  G01J5/0022 ,  G01J5/06 ,  G01J5/0803 ,  G01J2005/103 ,  G01J2005/206 ,  G03G15/2039 ,  G03G2215/00772 ,  H01L27/144 ,  H01L37/02 ,  H05K1/0271 ,  H05K1/189 ,  H05K2201/068 ,  H05K2201/09136 ,  H05K2201/09781

    Abstract: Provided is an infrared sensor which is capable of measuring a temperature of an object to be measured with high accuracy even when lead wires are connected to one side thereof. The infrared sensor includes an insulating film; a first and a second heat sensitive element which are provided on one face of the insulating film; a first and a second wiring film that are respectively connected to the first and the second heat sensitive element; an infrared reflecting film; a plurality of terminal electrodes; and a thermal resistance adjusting film which is provided on the other face of the insulating film, is in opposition to at least a portion of the longer one of the first or the second wiring film in wiring distance from the terminal electrodes, and is formed of a material with greater heat dissipation than the insulating film.

    Abstract translation: 提供一种红外线传感器，其即使在将导线连接到其一侧时也能够以高精度测量被测量物体的温度。 红外传感器包括绝缘膜; 第一和第二热敏元件，设置在绝缘膜的一个面上; 分别连接到第一和第二热敏元件的第一和第二布线膜; 红外反射膜; 多个端子电极; 并且设置在所述绝缘膜的另一面上的热电阻调节膜与所述端子电极的布线距离处于与所述第一或第二布线膜中较长的一个的至少一部分相对，并且由所述热电阻调节膜形成为 具有比绝缘膜更大散热的材料。

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