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21.发明公开Temperature measuring method using infrared sensors and processor 失效Verfahren zur Temperaturmessung unter Benutzung von Infrarotdetektoren und Prozessor。
公开(公告)号：EP0456412A2
公开(公告)日：1991-11-13
申请号：EP91303974.9
申请日：1991-05-02
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor： Allen, John B.
IPC: G01J5/60
CPC classification number: G01J5/602 , G01J5/0014 , G01J2005/604
Abstract: A method of measuring the temperature of a remote body which comprises determining the frequency range to be covered and the portion of that range or frequency band to be covered by each detector of a detector array or by a single detector via a filter for applying different frequency bands to the single detector. The required detector or detectors are then provided and sense the energy radiated by the remote body whose temperature is to be measured. The detector or detectors then provide an output of the amount of energy measured in each unique frequency band and sends these measured outputs to a processor. The processor receives the measured outputs from the detector(s) and determines therefrom in accordance with an algorithm thereat the measured temperature. The processor then provides an output indicative of the measured temperature.
Abstract translation: 一种测量远程身体的温度的方法，其包括确定待覆盖的频率范围以及要被检测器阵列的每个检测器覆盖的该范围或频带的部分，或者通过用于施加不同频率的滤波器的单个检测器 带到单个探测器。 然后提供所需的检测器或检测器，并感测由待测温度的远程机体辐射的能量。 然后，检测器或检测器提供在每个唯一频带中测量的能量的输出，并将这些测量的输出发送到处理器。 处理器从检测器接收测量的输出，并根据测量的温度根据算法确定。 然后处理器提供指示测量温度的输出。
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22.发明公开
公开(公告)号：EP0253002A1
公开(公告)日：1988-01-20
申请号：EP86109562.8
申请日：1986-07-12
Applicant: Pusch, Günter, Dr.-Ing.
Inventor： Pusch, Günter, Dr.-Ing.
IPC: G01J5/08
CPC classification number: G01J5/061 , G01J5/024 , G01J5/08 , G01J5/0862 , G01J2005/283 , G01J2005/604 , H01L31/0203 , H01L31/02165
Abstract: Eine Vorrichtung zur Erkennung thermischer Kontraste im Temperaturbereich um 300 K und innerhalb zumindest eines atmosphärischen Fensters weist einen IR-Detektor (1) mit wenigstens einem Detektorelement (8) und einem davor angeordneten Reflexionsfilter (9) auf, dessen Durchlässigkeit dem Spektralbereich guter Durchlässigkeit im betreffenden atmosphärischen Fenster entspricht.
Damit der Reflexionsfilter (9) in zuverlässig reproduzierender Weise und mit vergleichsweise einfachen Mitteln hergestellt und gleichzeitig ein Übersprechen von Signalen bei einer Reihe von Detektorelementen (8) vermieden werden kann, ist der Reflexionsfilter (9) an dem bzw. den Detektorelement(en) (8) direkt anliegend angebracht, vorzugsweise aufgedampft.Abstract translation: 用于检测在大约300K范围内和至少一个大气窗口内的温度范围内的热对比度的装置具有红外检测器（1），其具有至少一个检测器元件（8）和反射过滤器（9） 并且其透明度对应于有关大气窗口中有效透明度的光谱区域。 为了使反射滤波器（9）能够以可靠地再现的方式并以相对简单的方式制造，同时在一排检测器元件（8）的情况下可以避免信号串扰，反射 过滤器（9）优选地气相沉积，直接承载在检测器元件（8）上。
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公开(公告)号：EP1298391A3
公开(公告)日：2004-03-03
申请号：EP02079310.5
申请日：1998-12-04
Applicant: Meggitt Avionics, Inc.
Inventor： Cusack, Deidre E. , Jubinville, Leo , Plimpton, Jonathan C. , Stebbings, Keith
CPC classification number: F23N5/082 , F01D17/02 , F01D21/003 , F02C9/00 , G01J5/0014 , G01J5/0821 , G01J5/0878 , G01J2005/604 , H05H1/0025
Abstract: A method of detecting an amount of a contaminant in an enclosure, the method comprising: detecting (S7) a first amplitude of energy within a first wavelength band of a first width centered about an emission wavelength of the contaminant, the method characterized by:detecting (S8) a second amplitude of energy within a second wavelength band of a second width larger than the first width, the second wavelength band also centered about the emission wavelength of the contaminant;determining (218) a ratio of the first amplitude of energy to the second amplitude of energy; andcomparing (220) the ratio to a known threshold to determine the amount of contaminant in the enclosure.
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24.发明授权
公开(公告)号：EP0456412B1
公开(公告)日：1995-06-28
申请号：EP91303974.9
申请日：1991-05-02
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor： Allen, John B.
IPC: G01J5/60
CPC classification number: G01J5/602 , G01J5/0014 , G01J2005/604
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公开(公告)号：JP2018046130A
公开(公告)日：2018-03-22
申请号：JP2016179189
申请日：2016-09-14
Applicant: 株式会社SCREENホールディングス
Inventor： 伊藤 禎朗
IPC: H01L21/268 , H01L21/26
CPC classification number: H05B3/0047 , G01J5/0007 , G01J5/041 , G01J5/0865 , G01J5/602 , G01J2005/0055 , G01J2005/604 , H01L21/67115 , H01L21/67248 , H01L21/68707 , H05B1/0233 , H05B3/009
Abstract: 【課題】赤外光を吸収する処理ガスの雰囲気中であっても正確に基板の温度を測定することができる熱処理装置を提供する。 【解決手段】半導体ウェハーの熱処理を行うチャンバー内には、放射温度計120の測定波長域と重なる波長域の赤外光を吸収するアンモニアの雰囲気を形成する。放射温度計120の光学レンズ系21と検出器23との間に、アンモニアの吸収波長域と重ならない波長の赤外光を選択的に透過するフィルター22を設置することにより、アンモニアの赤外光吸収の影響を排除する。また、放射温度計120に入射する赤外光のエネルギーと黒体の温度との相関関係を示す複数の変換テーブル26から設置したフィルター22に対応した変換テーブル26を選択して放射温度計120に使用させる。これにより、アンモニア雰囲気であるにも関わらず半導体ウェハーWの温度を正確に測定することができる。 【選択図】図8
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Patent Agency Ranking
公开(公告)号：JP2016197097A
公开(公告)日：2016-11-24
申请号：JP2016052783
申请日：2016-03-16
Applicant: パロ アルト リサーチ センター インコーポレイテッド
Inventor： ヴィクター・リュー , バーナード・ディー・カッセ , ジュリー・エイ・バート , アーミン・アール・ヴォルケル
CPC classification number: G01J5/0014 , G01J5/02 , G01J5/0225 , G01J5/023 , G01J5/046 , G01J5/0853 , G01J5/20 , G01J5/24 , G01J5/602 , H04N5/33 , G01J2005/0077 , G01J2005/202 , G01J2005/604 , G01J5/0809
Abstract: 【課題】従来のマイクロボロメータより広い波長範囲のIR放射を検知可能な、高感度の非冷却型受動温度センサを提供する。 【解決手段】温度センサ200は、それぞれが薄膜を有する画素100のアレイを含む。これらの薄膜は、脚部120−1,120−2に取り付けられて、反射板110の上方に配置され、ファブリ−ペロ空洞を形成する。各薄膜には、ミクロンレベルの距離で隔てられた複数の離間開口135を画定する赤外線(IR)吸収材料が含まれ、これにより、熱容量を減少させ、薄膜のIR吸収を増加させる。隣接する開口間のレギュラーピッチ距離により、狭帯域のIR吸収が提供され、7.1μm未満のピッチ距離で7.5μm未満の波長を有するIR放射の検知が容易になる。マルチスペクトルの熱画像の形成は、繰り返されるグループ(スーパー画素)内に画素を配列し、各スーパー画素に、同じ集合のIR放射の波長を検知させることにより実現される。 【選択図】図1
Abstract translation: 要解决的问题：提供一种能够检测比常规微电流计更宽波长范围的红外辐射的高灵敏度非致冷无源热传感器。解决方案：热传感器200包括每个具有膜的像素阵列100。 膜在反射器110上安装在腿120-1,120-2上，形成法布里 - 珀罗腔。 每个膜包括红外（IR）吸收材料，其限定由微米级距离分开的多个间隔开的开口135，其减小热容量并增加膜的IR吸收。 相邻开口之间的常规间距距离提供窄带红外吸收，间距距离低于7.1μm，便于检测波长低于7.5μm的红外辐射。 多光谱热成像通过以重复的组（超像素）排列像素而形成，其中每个超像素检测相同的一组IR辐射波长。图1：
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公开(公告)号：US20240337538A1
公开(公告)日：2024-10-10
申请号：US18036396
申请日：2022-11-17
Applicant: China University of Mining and Technology
Inventor： Huaichun ZHOU , Kuangyu LI , Bo YU , Xianyong PENG , Han GUO , Kun YANG , Zhuoran JING
CPC classification number: G01J5/485 , G01J5/0044 , G01J5/0802 , G01J5/0887 , G01J5/10 , G01J5/602 , G01J5/802 , G01J5/804 , G01J2005/0074 , G01J2005/0077 , G01J2005/604 , G01J2005/607
Abstract: Disclosed in the present invention is a visual monitoring method for cross-section temperature fields and radiation characteristics of boiler furnaces by combining radiation images and spectra. Image detectors can be directly inserted into observation holes of a boiler to acquire flame image data, so that when the detection system is applied to a power station boiler, extra holes are not required to be drilled, and therefore, there is no risk that the strength of a furnace wall of the boiler is reduced by drilling holes. According to cross-section temperature fields of a furnace measured by the detection system, the state of combustion in the furnace can be accurately judged, which can play an accurate and effective guiding role in boiler combustion control, and reduce the temperature deviation in each combustion area of the boiler so as to keep the boiler running smoothly, thereby improving the combustion efficiency of the boiler.
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公开(公告)号：US20180077754A1
公开(公告)日：2018-03-15
申请号：US15703316
申请日：2017-09-13
Applicant: SCREEN HOLDINGS CO., LTD.
Inventor： Yoshio ITO
CPC classification number: H05B3/0047 , G01J5/0007 , G01J5/041 , G01J5/0865 , G01J5/602 , G01J2005/0055 , G01J2005/604 , H01L21/67115 , H01L21/67248 , H01L21/68707 , H05B1/0233 , H05B3/009
Abstract: An atmosphere of ammonia that absorbs infrared light in a wavelength band overlapping with the measurement wavelength band of a radiation thermometer is formed in a chamber in which a semiconductor wafer is thermally treated. A filter that selectively transmits infrared light having a wavelength not overlapping with the absorption wavelength band of ammonia is installed between an optical lens system and a detector of the radiation thermometer to avoid influence of the infrared light absorption by ammonia. A conversion table corresponding to the installed filter is selected from a plurality of conversion tables representing a correlation between energy of infrared light incident on the radiation thermometer and temperature of a black body, and is used at the radiation thermometer. Accordingly, the temperature of the semiconductor wafer can be accurately measured in the atmosphere of ammonia.
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29.发明授权公开(公告)号：US09816863B1
公开(公告)日：2017-11-14
申请号：US14497996
申请日：2014-09-26
Applicant: Exelis Inc.
Inventor： Christopher E Lietzke , Ronald J Glumb
CPC classification number: G01J5/007 , G01B11/0608 , G01C11/06 , G01J5/505 , G01J5/602 , G01J2005/0077 , G01J2005/0085 , G01J2005/604 , G01W1/00 , G01W1/10
Abstract: Techniques are provided for an image processing device to receive image information comprising image data for a plurality of mid-wave infrared region (MWIR) channels, where the image data is obtained during a first imaging period and during a second imaging period temporally different from the first imaging period. A plurality of sets of atmospheric wind vectors are calculated using differences between image data obtained during the first imaging period and the image data obtained during the second imaging period for corresponding sets of MWIR channels. An altitude is assigned to the plurality of atmospheric wind vectors in each set based on a brightness temperature of each wind vector and a pre-computed atmospheric temperature profile to generate a set of two-dimensional wind fields comprising one two-dimensional wind field for each set of MWIR channels.
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30.发明授权Thermal sensor with infrared absorption membrane including metamaterial structure 有权具有红外吸收膜的热传感器包括超材料结构公开(公告)号：US09404804B1
公开(公告)日：2016-08-02
申请号：US14677419
申请日：2015-04-02
Applicant: Palo Alto Research Center Incorporated
Inventor： Victor Liu , Bernard D. Casse , Julie A. Bert , Armin R. Volkel
CPC classification number: G01J5/0014 , G01J5/02 , G01J5/0225 , G01J5/023 , G01J5/046 , G01J5/0809 , G01J5/0853 , G01J5/20 , G01J5/24 , G01J5/602 , G01J2005/0077 , G01J2005/202 , G01J2005/604 , H04N5/33
Abstract: A thermal sensor includes an array of pixels, each having a membrane mounted on legs over a reflector, forming a Fabry-Pérot cavity. Each membrane includes an infrared (IR) absorbing material that defines multiple spaced-apart openings separated by micron-level distances that decrease thermal capacity and increase IR absorption of the membrane. Regular pitch distances between adjacent openings provides narrowband IR absorption, with pitch distances below 7.1 μm facilitating the detection of IR radiation wavelengths below 7.5 μm. Multispectral thermal imaging is achieved by arranging the pixels in repeated groups (superpixels), where each superpixel detects the same set of IR radiation wavelengths. Thermal imaging devices include thermal sensors, IR lenses and device control circuitry arranged in a camera-like manner. A methane leak detection system utilizes two multispectral imaging devices positioned to image a wellhead from two directions, and a system controller that generates spatial and spectral information describing methane plumes using the image data.
Abstract translation: 热传感器包括像素阵列，每个像素具有安装在反射器上的腿上的膜，形成法布里 - 珀罗腔。 每个膜包括红外（IR）吸收材料，其限定由微米级距离分开的多个间隔开的开口，其降低热容量并增加膜的IR吸收。 相邻开口之间的常规间距距离提供窄带IR吸收，间距距离低于7.1μm，有助于检测低于7.5μm的IR辐射波长。 通过将重复组（超像素）中的像素排列成多个光谱热成像，其中每个超像素检测相同的一组IR辐射波长。 热成像设备包括以相机方式布置的热传感器，IR透镜和设备控制电路。 甲烷泄漏检测系统利用定位成从两个方向对井口进行成像的两个多光谱成像装置，以及使用该图像数据产生描述甲烷羽流的空间和光谱信息的系统控制器。
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