公开(公告)号：US07405830B2

公开(公告)日：2008-07-29

申请号：US11207327

申请日：2005-08-19

Applicant: Seung Woo Kim ,  Hagyong Kihm ,  Jung Jae Park

Inventor： Seung Woo Kim ,  Hagyong Kihm ,  Jung Jae Park

IPC: G01B9/02 ,  G01B11/02

CPC classification number: G01B9/02039 ,  G01B9/02076 ,  G01B9/02081 ,  G01B2290/70 ,  G01J2009/0203 ,  G01J2009/0223 ,  G01J2009/0226

Abstract: The present invention relates to vibration-insensitive point-diffraction interferometry. For the purpose of obtaining high immunity to vibration, a single-mode optical fiber is used to generate the reference wave, by means of point diffraction, directly from a measurement wave reflected from test objects. The capability of vibration desensitization is further strengthened by adding a spatial phase-shift device that enables four interferograms of different amounts of phase shift to be obtained simultaneously with no time delay between interferograms. The present invention may be effectively used in the design of measuring systems for in-line applications where measurements need to be performed in the presence of significant levels of vibration.

Abstract translation: 本发明涉及振动不敏感点衍射干涉测量。 为了获得高的抗振动性，使用单模光纤通过点衍射直接从测试对象反射的测量波产生参考波。 通过添加空间相移装置进一步加强了振动脱敏的能力，该空间相移装置能够在干涉图之间没有时间延迟的同时获得不同量的相移的四个干涉图。 本发明可以有效地用于设计用于需要在显着水平的振动的情况下进行测量的在线应用的测量系统。

公开(公告)号：US07304746B2

公开(公告)日：2007-12-04

申请号：US11501413

申请日：2006-08-09

Applicant: William J. Cottrell

Inventor： William J. Cottrell

IPC: G01B9/02

CPC classification number: G01J9/02 ,  G01J2009/0223 ,  G01J2009/0261 ,  G01M11/005 ,  G01M11/331 ,  G01M11/333

Abstract: A common-path, point-diffraction, phase-shifting interferometer uses a half wave plate having a diffractive element, such as pin hole. A coherent, polarized light source simultaneously generates a reference beam from the diffractive element and an object beam from remaining portions of the light going through the half wave plate. The reference beam has a nearly spherical wavefront. Each of the two beams possesses a different polarization state. The object and reference beams are then independently phase modulated by a polarization sensitive phase modulator that shifts phase an amount depending on applied voltage and depending on polarization state of the incident light. A polarizer is then used to provide the object and reference beams in the same polarization state with equal intensities so they can interfere to create an interferogram with near unity contrast.

Abstract translation: 公共路径，点衍射，相移干涉仪使用具有诸如针孔的衍射元件的半波片。 相干偏振光源同时从衍射元件产生参考光束，并且从通过半波片的光的剩余部分产生物体光束。 参考光束具有近似球面的波前。 两个光束中的每一个具有不同的偏振状态。 物体和参考光束然后通过偏振敏感相位调制器独立相位调制，偏振相位调制器根据施加的电压和取决于入射光的偏振状态移相量。 然后使用偏振器以相同的强度在相同的极化状态下提供物体和参考光束，因此它们可以干扰以产生具有近乎一致的对比度的干涉图。

公开(公告)号：US20060250620A1

公开(公告)日：2006-11-09

申请号：US11402218

申请日：2006-04-10

Applicant: Henry Hill

Inventor： Henry Hill

IPC: G01B9/02

CPC classification number: G01J9/02 ,  G01B9/02022 ,  G01B9/02024 ,  G01B9/02056 ,  G01B9/02057 ,  G01J2009/0223 ,  G03F7/706

Abstract: A point diffraction interferometer for measuring properties of a spatial impulse response function, the interferometer including: a source for generating a source beam; an optical system; an optical element including a test object located in an object plane of the optical system, the test object including a diffraction point for generating from the source beam a measurement beam that passes through the optical system, wherein the optical element also generates from the source beam a reference beam that is combined with the measurement beam to generate an interference pattern in an image plane of the optical system, the interference pattern representing the spatial impulse response function of the optical system.

公开(公告)号：US5495334A

公开(公告)日：1996-02-27

申请号：US735740

申请日：1991-07-25

Applicant: Toshiyuki Nagoshi ,  Tsutomu Ichimura ,  Fumio Inaba

Inventor： Toshiyuki Nagoshi ,  Tsutomu Ichimura ,  Fumio Inaba

IPC: G01J3/453 ,  G01J9/02 ,  G01B9/02

CPC classification number: G01J3/4532 ,  G01J2009/0223

Abstract: An apparatus for effecting spatial Fourier transform spectroscopic detection of light from a surface luminescent object with high sensitivity by use of a quadrangular common path interferometer. The apparatus includes an improvement which consists of an additional imaging optical system which converges a light beam from the specimen so as to enter the beam splitter. The additional imaging optical system is disposed so that an image position is substantially coincident with the position of the second of three mirrors in the apparatus.

Abstract translation: 一种通过使用四边形公共路径干涉仪来实现来自具有高灵敏度的表面发光物体的光的空间傅里叶变换光谱检测的装置。 该装置包括一种改进，该附加成像光学系统会聚来自试样的光束以进入分束器。 附加成像光学系统被设置成使得图像位置与装置中的三个反射镜中的第二个反射镜的位置基本一致。

公开(公告)号：US20180143079A1

公开(公告)日：2018-05-24

申请号：US15821918

申请日：2017-11-24

Applicant: IMEC VZW

Inventor： Abdulkadir YURT ,  Ziduo Lin ,  Richard Stahl ,  Geert Vanmeerbeeck

IPC: G01J9/02

CPC classification number: G01J9/02 ,  G01J9/0215 ,  G01J2009/0223 ,  G03H1/0443 ,  G03H1/0465 ,  G03H2001/0447 ,  G03H2223/12 ,  G03H2223/19

Abstract: According to a first aspect, there is provided a method of holographic wavefront sensing, the method including: receiving a light beam, which has a wavefront to be analyzed, on a transparent, flat substrate, which is provided with a lattice of opaque dots, wherein the substrate is arranged above an image sensor; detecting by the image sensor an interference pattern formed by diffracted light, being scattered by the opaque dots, and undiffracted light of the light beam received by the image sensor; processing the detected interference pattern to digitally reconstruct a representation of a displaced lattice of opaque dots, which would form the interference pattern on the image sensor upon receiving the light with a known wavefront; and comparing the representation of the displaced lattice to a known representation of the lattice of opaque dots on the substrate to determine a representation of the wavefront form of the received light beam.

公开(公告)号：US09863841B2

公开(公告)日：2018-01-09

申请号：US14986560

申请日：2015-12-31

Applicant: Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences

Inventor： Xiangzhao Wang ,  Feng Tang ,  Guoxian Zhang ,  Shifu Xu

IPC: G01M11/02 ,  G03F7/20 ,  G01J9/02

CPC classification number: G01M11/0271 ,  G01J9/0215 ,  G01J2009/0223 ,  G01J2009/0226 ,  G01J2009/0265 ,  G03F7/706

Abstract: A point diffraction interferometric wavefront aberration measuring device comprising an optical source, an optical splitter, a first light intensity and polarization regulator, a phase shifter, a second light intensity and polarization regulator, an ideal wavefront generator, an object precision adjusting stage, a measured optical system, an image wavefront detection unit, an image precision adjusting stage, and a data processing unit. The center distance between the first output port and the second output port of the ideal wavefront generator is smaller than the diameter of the isoplanatic region of the measured optical system and is greater than the ratio of the diameter of the image point dispersion speckle of the measured optical system over the amplification factor thereof. A method for detecting wavefront aberration of the optical system is also provided by using the device.

公开(公告)号：US20080079950A1

公开(公告)日：2008-04-03

申请号：US11540674

申请日：2006-10-02

Applicant: Nora-Jean Harned ,  Robert D. Harned

Inventor： Nora-Jean Harned ,  Robert D. Harned

IPC: G01B11/02

CPC classification number: G01B11/2441 ,  G01J2009/0223 ,  G01M11/005 ,  G01M11/025 ,  G01M11/0264 ,  G01M11/0271

Abstract: The present invention is directed to a system and method for using a spatial light modulator (SLM) to perform a null test of an (aspheric) optical surface. In an embodiment, such a system includes an interferometer, an optical element, and an SLM. The interferometer provides electromagnetic radiation. The optical element conditions the electromagnetic radiation to provide a first beam of radiation and a second beam of radiation. The SLM shapes a wavefront of the first beam of radiation resulting in a shaped wavefront corresponding to an optical surface. The shaped wavefront is incident on and conditioned by the optical surface. The shape of the optical surface is analyzed based on a fringe pattern resulting from interference between the shaped wavefront mapped by the optical surface and the second beam of radiation. The system may also include an optical design module that converts a null corrector design corresponding to the optical surface into instructions for the SLM.

Abstract translation: 本发明涉及一种使用空间光调制器（SLM）来执行（非球面）光学表面的空试验的系统和方法。 在一个实施例中，这样的系统包括干涉仪，光学元件和SLM。 干涉仪提供电磁辐射。 光学元件调节电磁辐射以提供第一辐射束和第二辐射束。 SLM形成第一辐射束的波前，产生对应于光学表面的成形波前。 成形的波前入射到光学表面并由光学表面调节。 基于由光学表面映射的成形波前与第二辐射束之间的干涉导致的条纹图案来分析光学表面的形状。 该系统还可以包括光学设计模块，其将对应于光学表面的空校正器设计转换成针对SLM的指令。

公开(公告)号：US20080037030A1

公开(公告)日：2008-02-14

申请号：US11501644

申请日：2006-08-09

Applicant: Peter Y. M. Livingston

Inventor： Peter Y. M. Livingston

IPC: G01B9/02

CPC classification number: G01B9/02061 ,  G01B9/02038 ,  G01B9/02057 ,  G01J9/0215 ,  G01J2009/0223

Abstract: An apparatus in one example has: first and second Fourier transform lenses, the first Fourier transform lens receiving an incident plane wavefront and focusing the plane wavefront down to a focal point in a focal plane, and the second Fourier transform lens reimaging the focused down plane wavefront to an output plane wavefront; a bead located substantially at the focal point and that is illuminated by radiation that comes in from the first lens, the bead reradiating a spherical wave, which interferes with light that passes around the bead to produce a diffraction pattern; an array of controllable light transmissive elements that support the bead in the focal plane; and a null seeking servomechanism for assigning an electrical value of phase departure of the incident plane wavefront from a reference thereof, the null seeking servomechanism controlling the light transmissive elements to produce phase shifts in light that passes around the bead to thereby remove aberrations in the incident plane wavefront.

Abstract translation: 一个示例中的装置具有：第一和第二傅里叶变换透镜，第一傅里叶变换透镜接收入射平面波前，并将平面波前向下聚焦到焦平面中的焦点，并且第二傅里叶变换透镜重新成像聚焦的下平面 波前到输出平面波前; 基本上位于焦点处并且由来自第一透镜的辐射照射的珠粒，珠粒再辐射球面波，其干扰通过珠粒周围的光以产生衍射图案; 支持焦平面中的珠粒的可控光透射元件的阵列; 以及用于从其参考中分配入射平面波前相位偏移的电值的零寻找伺服机构，该无效寻找伺服机构控制光透射元件以产生通过珠的光的相移，从而去除事件中的像差 平面波前。

公开(公告)号：US07006234B1

公开(公告)日：2006-02-28

申请号：US10888465

申请日：2004-07-09

Applicant: William Jude Cottrell ,  Thomas George Ference

Inventor： William Jude Cottrell ,  Thomas George Ference

IPC: G01B9/02

CPC classification number: G01B9/02024 ,  G01B9/02057 ,  G01B2290/70 ,  G01J9/02 ,  G01J2009/0223 ,  G01J2009/0265

Abstract: A common-path, point-diffraction, phase-shifting interferometer uses a half wave plate having a diffractive element, such as pin hole. A coherent, polarized light source simultaneously generates a reference beam from the diffractive element and an object beam from remaining portions of the light going through the half wave plate. The reference beam has a nearly spherical wavefront. Each of the two beams possesses a different polarization state. The object and reference beams are then independently phase modulated by a polarization sensitive phase modulator that shifts phase an amount depending on applied voltage and depending on polarization state of the incident light. A polarizer is then used to provide the object and reference beams in the same polarization state with equal intensities so they can interfere to create an interferogram with near unity contrast.

Abstract translation: 公共路径，点衍射，相移干涉仪使用具有诸如针孔的衍射元件的半波片。 相干偏振光源同时从衍射元件产生参考光束，并且从通过半波片的光的剩余部分产生物体光束。 参考光束具有近似球面的波前。 两个光束中的每一个具有不同的偏振状态。 物体和参考光束然后通过偏振敏感相位调制器独立相位调制，偏振相位调制器根据施加的电压和取决于入射光的偏振状态移相量。 然后使用偏振器以相同的强度在相同的极化状态下提供物体和参考光束，因此它们可以干扰以产生具有近乎一致的对比度的干涉图。

公开(公告)号：JP2008145419A

公开(公告)日：2008-06-26

申请号：JP2007257699

申请日：2007-10-01

Applicant: Asml Holding Nv ,  エーエスエムエル ホールディング エヌ.ブイ.

Inventor： HARNED NORA-JEAN ,  HARNED ROBERT D

IPC: G01B9/02 ,  G01B11/24 ,  G02B26/08

CPC classification number: G01B11/2441 ,  G01J2009/0223 ,  G01M11/005 ,  G01M11/025 ,  G01M11/0264 ,  G01M11/0271

Abstract: PROBLEM TO BE SOLVED: To provide a system and a method for executing a null test of an (aspheric) optical surface by using a spatial light modulator (SLM).
SOLUTION: The system includes an interferometer, an optical element and an SLM. The interferometer provides electromagnetic radiation. The optical element conditions the electromagnetic radiation to provide a first beam of radiation and a second beam of radiation. The SLM shapes a wavefront of the first beam of radiation resulting in a shaped wavefront corresponding to an optical surface. The shaped wavefront is incident on and conditioned by the optical surface. The shape of the optical surface is analyzed based on an interference fringe pattern resulting from interference between the shaped wavefront mapped by the optical surface and the second beam of radiation. The system may also include an optical design module that converts a null corrector design corresponding to the optical surface into instructions for the SLM.
COPYRIGHT: (C)2008,JPO&INPIT

Abstract translation: 要解决的问题：提供一种通过使用空间光调制器（SLM）来执行（非球面）光学表面的零点测试的系统和方法。 解决方案：该系统包括干涉仪，光学元件和SLM。 干涉仪提供电磁辐射。 光学元件调节电磁辐射以提供第一辐射束和第二辐射束。 SLM形成第一辐射束的波前，产生对应于光学表面的成形波前。 成形的波前入射到光学表面并由光学表面调节。 基于由光学表面映射的成形波阵面与第二辐射束之间的干涉导致的干涉条纹图案来分析光学表面的形状。 该系统还可以包括光学设计模块，其将对应于光学表面的空校正器设计转换成针对SLM的指令。 版权所有（C）2008，JPO＆INPIT