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    초고속 분광 타원계
    21.
    发明公开
    초고속 분광 타원계 失效
    超高分子光谱仪

    公开(公告)号：KR1020030049473A

    公开(公告)日：2003-06-25

    申请号：KR1020010079681

    申请日：2001-12-15

    Applicant: (주)엘립소테크놀러지

    Inventor： 김상준 ,  김상열

    IPC: G01J4/00

    CPC classification number: G01J4/04 ,  G01B11/0641 ,  G01J3/0208 ,  G01J3/2889

    Abstract: PURPOSE: An ultra high-speed spectroscopic ellipsometer is provided to improve productivity and quality of articles, such as semiconductor devices and flat-type image display devices, by furnishing spectroscopic ellipse data within a few milli-minute time periods. CONSTITUTION: An ultra high-speed spectroscopic ellipsometer includes a light source(100) for generating white light. A first collimation section(200) receives white light from the light source(100). White light introduced into the first collimation section(200) is incident into a polarization state generator, which polarizes white light. Then, polarized light is incident into a sample(110). The sample(110) reflects polarized light by converting a polarization state of polarized light. Polarized light reflected from the sample(110) is incident into a second collimation section, which converts polarized light into parallel light. A DOAP(400) is provided to polarize parallel light in a stokes vector state. A spectrograph/PDA(500) is provided to measure a quantity of polarized light.

    Abstract translation: 目的：通过在几分钟的时间内提供光谱椭圆数据，提供超高速光谱椭偏仪，以提高诸如半导体器件和平面型图像显示器件的物品的生产率和质量。 构成：超高速光谱椭偏仪包括用于产生白光的光源（100）。 第一准直部（200）从光源（100）接收白光。 引入到第一准直部分（200）中的白光入射到偏振状态发生器中，这使得白光偏振。 然后，偏振光入射到样品（110）中。 样品（110）通过转换偏振光的偏振状态来反射偏振光。 从样品（110）反射的偏振光入射到将偏振光转换成平行光的第二准直部分。 提供了一个DOAP（400），用于使斯托克斯矢量状态下的平行光偏振。 提供了一种用于测量偏振光量的光谱仪/ PDA（500）。

    스펙트럼 분석기의 디스플레이 장치
    22.
    发明公开
    스펙트럼 분석기의 디스플레이 장치 有权
    频谱分析仪的显示装置

    公开(公告)号：KR1020030016603A

    公开(公告)日：2003-03-03

    申请号：KR1020010050258

    申请日：2001-08-21

    Applicant: 엘지이노텍 주식회사

    Inventor： 서성태 ,  이수원

    IPC: G01J3/28

    CPC classification number: G01J3/2846 ,  G01J3/12 ,  G01J3/2889

    Abstract: PURPOSE: A display device of a spectrum analyzer is provided to reduce the volume of the spectrum analyzer and directly input a command through a display part. CONSTITUTION: A display part(30) senses coordinates of a position where pressure is applied to a display surface displaying a spectrum of a signal to output a menu window according to the corresponding position. The display part applies pressure to a set position of the menu window to display the result to users if the users input a command. A control unit(40) for display processes the command input from the display part and transmits a control signal to the display part displaying the result of the command. A coordinate correcting part(50) transmits coordinates of the position sensed when applying pressure to the display part, to a main control unit(60) of a spectrum analyzer to correct the coordinates.

    Abstract translation: 目的：提供频谱分析仪的显示装置，以减小频谱分析仪的音量，并通过显示部分直接输入指令。 构成：显示部件（30）根据相应位置感测施加压力的位置的坐标，以显示信号频谱的显示面，输出菜单窗口。 如果用户输入命令，显示部分将压力施加到菜单窗口的设置位置，以将结果显示给用户。 用于显示的控制单元（40）处理从显示部分输入的命令，并将控制信号发送到显示命令结果的显示部分。 坐标校正部件（50）在向显示部件施加压力时将检测到的位置的坐标传送到频谱分析仪的主控制单元（60）以校正坐标。

    다채널 분광분석을 위한 고속 주사형 겹살 분광광도계
    23.
    发明公开
    다채널 분광분석을 위한 고속 주사형 겹살 분광광도계 有权
    用于多通道光谱分析的高速扫描双光束分光光度计

    公开(公告)号：KR1020010079209A

    公开(公告)日：2001-08-22

    申请号：KR1020010035979

    申请日：2001-06-22

    Applicant: 주식회사 파이맥스 ,  김해동

    Inventor： 김해동

    IPC: G01J3/42

    CPC classification number: G01J3/2889 ,  G01J3/433 ,  G01N21/27

    Abstract: PURPOSE: A high speed scanning double beam spectrophotometer is provided to analyze a sample at a high speed, to maximize a spectrum measuring speed over entire wavelengths, to reduce detection limit by enhancing reproducibility and precision degree of sample analysis, and to automatically measure concentration by compacting an optical system and promoting efficiency of the optical system. CONSTITUTION: A beam emitted from a light source(24) having a wide wavelength range of ultraviolet rays and visible rays is incident to optical fiber(26) by passing through a concentrator and a beam shutter(25). The beam is split into two directions. The split beams pass through an analyzing sample(27) and a reference sample(28), and then are incident into a double beam optical selector(30) automatically selecting two beams and transmitting the beams to a spectrometer(31). The beams transmitted into the spectrometer are spatially dispersed by a mirror and a grating depending on wavelengths. Then, beams of respective wavelengths are detected by an optical sensor array(32) installed in a focus face of the split beams. Signals of the respective wavelengths are sequentially and serially outputted by an electronic scanning signal, integrated, amplified, and converted into digital signals. Entire process is controlled via a control computer(34). Since the spectrophotometer communicates with an external computer(36), the operation of all devices and transmission of the measured data are controlled by the external computer. Additionally, a TCP/IP engine(37) is attached to connect the spectrophotometer to the Internet.

    Abstract translation: 目的：提供高速扫描双光束分光光度计，以高速度分析样品，以最大化整个波长的光谱测量速度，通过提高样品分析的重现性和精确度来降低检测限，并通过 压缩光学系统并提高光学系统的效率。 构成：从具有宽的紫外线和可见光线的波长范围的光源（24）发射的光束通过聚光器和光束快门（25）入射到光纤（26）。 光束被分成两个方向。 分束通过分析样品（27）和参考样品（28），然后入射到双光束选择器（30）中，自动选择两个光束并将光束传输到光谱仪（31）。 传输到光谱仪中的光束根据波长通过反射镜和光栅在空间上分散。 然后，通过安装在分束的聚焦面中的光学传感器阵列（32）来检测各波长的光束。 各个波长的信号通过电子扫描信号顺序并串行地输出，被积分，放大并转换为数字信号。 整个过程通过控制计算机（34）进行控制。 由于分光光度计与外部计算机（36）通信，所有设备的操作和测量数据的传输由外部计算机控制。 另外，附加了TCP / IP引擎（37）以将分光光度计连接到因特网。

    분광광도계
    25.
    发明授权
    분광광도계 有权
    分光光度计

    公开(公告)号：KR100555731B1

    公开(公告)日：2006-03-03

    申请号：KR1020040038675

    申请日：2004-05-29

    Applicant: 가부시키가이샤 시마즈세이사쿠쇼

    Inventor： 이시모토준키

    IPC: G01J3/18

    CPC classification number: G01J3/2889 ,  G01J3/10 ,  G01J2003/2836

    Abstract: 외부신호 검출회로는 새로운 측정부에 설치되고, 분광 검출기의 판독신호의 생성 및 완료 시간이 직접적으로 제어되고, 외부 개시신호와 동기된 판독신호가 생성된다. 측정대기지시의 입력후에, 외부 개시신호가 항상 모니터된다. 측정 대기지시의 입력 후에, 외부 개시신호는 항상 모니터된다. 외부 개시신호의 검출 전에, 새로운 측정부가 휴지(pause)상태로 이동되고, 외부 개시신호의 검출 후에, 측정 상태로의 천이가 행해진다. 이 구성에 의해, 외부 개시신호의 입력 시간과 데이터의 판독 개시시간 사이의 지연 시간이 정해지고, 짧은 축적 시간을 설정하는 시간에서 유효한 측정가능 시간이 증가된다.
    외부 개시신호, 휴지 상태, 측정 상태, 판독 개시시간, 판독 신호.

    분광광도계
    26.
    发明公开
    분광광도계 有权
    用于决定外部启动信号的输入时间和数据读取开始时间之间的延迟时间的光谱仪，以及在设定短时间内增加有效的可测量时间

    公开(公告)号：KR1020040103467A

    公开(公告)日：2004-12-08

    申请号：KR1020040038675

    申请日：2004-05-29

    Applicant: 가부시키가이샤 시마즈세이사쿠쇼

    Inventor： 이시모토준키

    IPC: G01J3/18

    CPC classification number: G01J3/2889 ,  G01J3/10 ,  G01J2003/2836

    Abstract: PURPOSE: A spectrometer is provided to move a detection signal of an external signal in a control unit, to always monitor an external starting signal and to directly control the generation of a reading signal and a finishing time by the external starting signal. CONSTITUTION: A spectral detector(9) is connected with a new measurement unit(MN). The measurement unit contains a signal processing circuit(10), An A/D(Analogue/Digital) converter(11), a DSP(Digital Signal Processor)(12), a detector driving circuit(13), an external signal detecting circuit(15) and a clocking circuit(20). The new measurement unit is connected with a new control unit(CN) containing a CPU(Central Processing Unit)(14) and a PC(Personal Computer)(16). The external signal detecting signal is moved to the new measurement unit and connected with the detector driving circuit only through the clocking circuit. The new control unit is connected with an external device(17). Thereby, a delay time is shortened.

    Abstract translation: 目的：提供一种光谱仪来移动控制单元中的外部信号的检测信号，以始终监视外部启动信号，并通过外部启动信号直接控制读取信号的产生和结束时间。 构成：光谱检测器（9）与新的测量单元（MN）连接。 测量单元包括信号处理电路（10），A / D（模拟/数字）转换器（11），DSP（数字信号处理器）（12），检测器驱动电路（13），外部信号检测电路 （15）和时钟电路（20）。 新的测量单元与包含CPU（中央处理单元）（14）和PC（个人计算机）（16）的新的控制单元（CN）连接。 外部信号检测信号移动到新的测量单元，并且仅通过时钟电路与检测器驱动电路连接。 新的控制单元与外部设备（17）连接。 从而缩短延迟时间。

    램프의 불량품 선별장치 및 그 선별방법
    27.
    发明授权
    램프의 불량품 선별장치 및 그 선별방법 失效
    用于分拣有缺陷灯的设备和选择它们的方法

    公开(公告)号：KR1019900005117B1

    公开(公告)日：1990-07-19

    申请号：KR1019860006381

    申请日：1986-09-06

    Applicant: 가부시끼가이샤 도시바

    Inventor： 유아사구니오 ,  스기야마하루오 ,  나가이마사오 ,  쓰지하라야스시 ,  기하라구니히꼬 ,  아까이시다까오

    IPC: H01K3/00 ,  H01K3/30

    CPC classification number: G01J3/2889 ,  G01J3/433 ,  G01J3/457 ,  G01N21/67

    Abstract: The lamp quality judgement appts. includes a discharge generator that imposes a high voltage across the bulb of a lamp in which gas and a filament coil of the lamp are sealed and causes producion of a discharge in which a light spectrum of wavelengths in a range of 550- 570 nm is radiated in said lamp. A light spectrum analyser processes the state of the light specturm radiated by the discharge. The repetition frequency of the discharge produced by the generator is made 1 kHz or less. The repetition frequency of the discharge is made that of a commercial line frequency eg. 50Hz. The discharge generator produces a high voltage with repeated quiescent periods.

    Abstract translation: 灯的质量判断appts。 包括放电发生器，其在灯的灯泡上施加高电压，其中灯的气体和灯丝线圈被密封，并且产生其中辐射550-570nm范围内的波长的光谱的放电的产生 在灯中。 光谱分析仪处理由放电辐射的光谱的状态。 由发电机产生的放电的重复频率为1kHz以下。 放电的重复频率为商业线频率，例如。 50赫兹。 放电发生器产生具有重复静止期的高电压。

    光譜檢測裝置及光譜檢測方法
    28.
    发明专利
    光譜檢測裝置及光譜檢測方法 审中-公开
    光谱检测设备及光谱检测方法

    公开(公告)号：TW201326791A

    公开(公告)日：2013-07-01

    申请号：TW100147224

    申请日：2011-12-19

    Applicant: 財團法人工業技術研究院 ,  INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

    Inventor： 張光博 ,  CHANG, KUANG PO ,  王淑儀 ,  WANG, SHU YI

    IPC: G01N21/25

    CPC classification number: G01J3/2889 ,  G01J3/0224 ,  G01J3/4406 ,  G01J3/443 ,  G01N21/718

    Abstract: 一種光譜檢測裝置，包括一雷射裝置、一分光裝置、一光學光閘、一第一偏光元件、一第二偏光元件及一光分析裝置。雷射裝置用以提供一雷射光束。分光裝置用以將雷射光束分離為一第一光束與一第二光束，第二光束係傳送至一樣本以產生一光譜訊號。光學光閘設置於光分析裝置與樣本之間，第一光束係用以驅動光學光閘。第一偏光元件設置於樣本與光學光閘之間，第二偏光元件設置於光學光閘與光分析裝置之間。光分析裝置用以接收光譜訊號，其中當光學光閘被驅動而於一預定時間區間開啟時，光譜訊號係通過第一偏光元件、光學光閘與第二偏光元件而傳送至該光分析裝置。

    Abstract in simplified Chinese: 一种光谱检测设备，包括一激光设备、一分光设备、一光学光闸、一第一偏光组件、一第二偏光组件及一光分析设备。激光设备用以提供一激光光束。分光设备用以将激光光束分离为一第一光束与一第二光束，第二光束系发送至一样本以产生一光谱信号。光学光闸设置于光分析设备与样本之间，第一光束系用以驱动光学光闸。第一偏光组件设置于样本与光学光闸之间，第二偏光组件设置于光学光闸与光分析设备之间。光分析设备用以接收光谱信号，其中当光学光闸被驱动而于一预定时间区间打开时，光谱信号系通过第一偏光组件、光学光闸与第二偏光组件而发送至该光分析设备。

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