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21.发明申请ELECTRON BEAM CONTROL METHOD, ELECTRON BEAM GENERATING APPARATUS, APPARATUS USING THE SAME, AND EMITTER 有权电子束控制方法，电子束生成装置，使用其的装置和发射器公开(公告)号：US20100127170A1
公开(公告)日：2010-05-27
申请号：US12306635
申请日：2006-06-30
Applicant: Shin Fujita , Mohamed El-Gomati , Torquil Wells
Inventor： Shin Fujita , Mohamed El-Gomati , Torquil Wells
IPC: G01N23/225 , H01J29/46 , G21K1/08 , H01J35/06
CPC classification number: H01J37/065 , H01J35/06 , H01J2201/196 , H01J2237/06316 , H01J2237/3175
Abstract: Provided is a Schottky emitter having the conical end with a radius of curvature of 2.0 μm on the emission side of an electron beam. Since a radius of curvature is 1 μm or more, a focal length of an electron gun can be longer than in a conventional practice wherein a radius of curvature is in the range of from 0.5 μm to not more than 0.6 μm. The focal length was found to be roughly proportional to the radius of the curvature. Since the angular current intensity (the beam current per unit solid angle) is proportional to square of the electron gun focal length, the former can be improved by an order of magnitude within a practicable increase in the emitter radius. A higher angular current intensity means a larger beam current available from the electron gun and the invention enables the Schottky emitters to be used in applications which require relatively high beam current of microampere regime such as microfocus X-ray tube, electron probe micro-analyzer, and electron beam lithography system.
Abstract translation: 提供了一种在电子束的发射侧具有2.0μm的曲率半径的锥形端的肖特基发射体。 由于曲率半径为1μm以上，电子枪的焦距可以比曲率半径在0.5μm以上0.6μm以下的现有技术中更长。 发现焦距与曲率半径成正比。 由于角电流强度（每单位立体角的射束电流）与电子枪焦距的平方成比例，所以前者可以在发射极半径的可行增加范围内提高一个数量级。 较高的角电流强度意味着可从电子枪获得的较大的束电流，并且本发明使肖特基发射体能够用于需要相对较高的微安电流束流的应用，如微焦X射线管，电子探针微量分析仪， 和电子束光刻系统。
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22.发明授权Electron emission device comprising carbon nanotubes yarn and method for generating emission current 有权包含碳纳米管纱线的电子发射装置和产生发射电流的方法公开(公告)号：US07638933B2
公开(公告)日：2009-12-29
申请号：US11478406
申请日：2006-06-28
Applicant: Kai-Li Jiang , Peng Liu , Yang Wei , Liang Liu , Shou-Shan Fan
Inventor： Kai-Li Jiang , Peng Liu , Yang Wei , Liang Liu , Shou-Shan Fan
CPC classification number: H01J1/14 , H01J1/15 , H01J1/20 , H01J1/304 , H01J2201/19 , H01J2201/196 , H01J2201/30449 , H01J2201/30469 , H01J2201/30496
Abstract: An exemplary electron emission device includes an electron emitter, an anode opposite to and spaced apart from the electron emitter, a first power supply circuit, and a second power supply circuit. The first power supply circuit is configured for electrically connecting the electron emitter and the anode with a power supply to generate an electric field between the electron emitter and the anode. The second power supply circuit is configured for electrically connecting the electron emitter with a power supply to supply a heating current for heating the electron emitter whereby electrons emit therefrom. Methods for generating an emission current with a relatively higher stability also are provided.
Abstract translation: 示例性的电子发射装置包括电子发射极，与电子发射极相对且间隔开的阳极，第一电源电路和第二电源电路。 第一电源电路被配置为用电源电连接电子发射器和阳极，以在电子发射器和阳极之间产生电场。 第二电源电路被配置为将电子发射器与电源电连接以提供用于加热电子发射器的加热电流，从而电子从其发射。 还提供了用于产生具有相对较高稳定性的发射电流的方法。
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公开(公告)号：US20090167138A1
公开(公告)日：2009-07-02
申请号：US12288865
申请日：2008-10-23
Applicant: Peng Liu , Liang Liu , Kai-Li Jiang , Shou-Shan Fan
Inventor： Peng Liu , Liang Liu , Kai-Li Jiang , Shou-Shan Fan
IPC: H01J21/10
CPC classification number: H01J1/14 , H01J31/127 , H01J2201/196
Abstract: A thermionic electron source includes a substrate, two electrodes, and a thermionic emitter. The thermionic emitter is electrically connected to the two electrodes. The substrate has a recess formed on a surface thereof, and the thermionic emitter is located on the surface of the substrate corresponding to the recess.
Abstract translation: 热电子源包括衬底，两个电极和热离子发射器。 热电子发射器电连接到两个电极。 基板的表面形成有凹部，热离子发射体位于与凹部对应的基板的表面上。
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24.发明授权Thermal-field type electron source composed of transition metal carbide material 有权由过渡金属碳化物材料组成的热场型电子源公开(公告)号：US09490098B1
公开(公告)日：2016-11-08
申请号：US14992870
申请日：2016-01-11
Applicant: Applied Physics Technologies, Inc.
Inventor： William A. Mackie , Gerald G. Magera
CPC classification number: H01J1/148 , H01J1/14 , H01J1/146 , H01J19/10 , H01J37/06 , H01J2201/196 , H01J2201/2889 , H01J2201/30484 , H01J2201/317 , H01J2237/06316
Abstract: An electron source is made from mixed-metal carbide materials of high refractory nature. Producing field-enhanced thermionic emission, i.e., thermal-field or extended Schottky emission, from these materials entails the use of a certain low work function crystallographic direction, such as, for example, (100), (210), and (310). These materials do not naturally facet because of their refractory nature. The disclosed electron source made from transition metal carbide material is especially useful when installed in a scanning electron microscope (SEM) performing advanced imaging applications that require a high brightness, high beam current source.
Abstract translation: 电子源由具有高耐火性质的混合金属碳化物材料制成。 从这些材料产生场强增强的热离子发射，即热场或延伸的肖特基发射需要使用某种低功函数的晶体学方向，例如（100），（210）和（310） 。 这些材料由于其耐火性质而不自然而然。 所披露的由过渡金属碳化物材料制成的电子源在安装在需要高亮度，远光束电流源的先进成像应用的扫描电子显微镜（SEM）中是特别有用的。
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公开(公告)号：US07915797B2
公开(公告)日：2011-03-29
申请号：US12288865
申请日：2008-10-23
Applicant: Peng Liu , Liang Liu , Kai-Li Jiang , Shou-Shan Fan
Inventor： Peng Liu , Liang Liu , Kai-Li Jiang , Shou-Shan Fan
IPC: H01J9/02
CPC classification number: H01J1/14 , H01J31/127 , H01J2201/196
Abstract: A thermionic electron source includes a substrate, two electrodes, and a thermionic emitter. The thermionic emitter is electrically connected to the two electrodes. The substrate has a recess formed on a surface thereof, and the thermionic emitter is located on the surface of the substrate corresponding to the recess.
Abstract translation: 热电子源包括衬底，两个电极和热离子发射器。 热电子发射器电连接到两个电极。 基板的表面形成有凹部，热离子发射体位于与凹部对应的基板的表面上。
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Patent Agency Ranking
26.发明申请ELECTRON EMISSION DEVICE COMPRISING CARBON NANOTUBES YARN AND METHOD FOR GENERATING EMISSION CURRENT 有权包含碳纳米管丝的电子发射装置和用于产生排放电流的方法公开(公告)号：US20090289555A1
公开(公告)日：2009-11-26
申请号：US11478406
申请日：2006-06-28
Applicant: Kai-Li Jiang , Peng Liu , Yang Wei , Liang Liu , Shou-Shan Fan
Inventor： Kai-Li Jiang , Peng Liu , Yang Wei , Liang Liu , Shou-Shan Fan
CPC classification number: H01J1/14 , H01J1/15 , H01J1/20 , H01J1/304 , H01J2201/19 , H01J2201/196 , H01J2201/30449 , H01J2201/30469 , H01J2201/30496
Abstract: An exemplary electron emission device includes an electron emitter, an anode opposite to and spaced apart from the electron emitter, a first power supply circuit, and a second power supply circuit. The first power supply circuit is configured for electrically connecting the electron emitter and the anode with a power supply to generate an electric field between the electron emitter and the anode. The second power supply circuit is configured for electrically connecting the electron emitter with a power supply to supply a heating current for heating the electron emitter whereby electrons emit therefrom. Methods for generating an emission current with a relatively higher stability also are provided.
Abstract translation: 示例性的电子发射装置包括电子发射极，与电子发射极相对且间隔开的阳极，第一电源电路和第二电源电路。 第一电源电路被配置为用电源电连接电子发射器和阳极，以在电子发射器和阳极之间产生电场。 第二电源电路被配置为将电子发射器与电源电连接以提供用于加热电子发射器的加热电流，从而电子从其发射。 还提供了用于产生具有相对较高稳定性的发射电流的方法。
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公开(公告)号：US20090167137A1
公开(公告)日：2009-07-02
申请号：US12288864
申请日：2008-10-23
Applicant: Peng Liu , Liang Liu , Kai-Li Jiang , Shou-Shan Fan
Inventor： Peng Liu , Liang Liu , Kai-Li Jiang , Shou-Shan Fan
CPC classification number: H01J1/14 , H01J9/04 , H01J31/127 , H01J2201/196
Abstract: A thermionic electron emission device includes an insulating substrate, and one or more grids located thereon. The one or more grids include(s) a first, second, third and fourth electrode down-leads located on the periphery thereof, and a thermionic electron emission unit therein. The first and second electrode down-leads are parallel to each other. The third and fourth electrode down-leads are parallel to each other. The first and second electrode down-leads are insulated from the third and fourth electrode down-leads. The thermionic electron emission unit includes a first electrode, a second electrode, and a thermionic electron emitter. The first electrode and the second electrode are separately located and electrically connected to the first electrode down-lead and the third electrode down-lead respectively. Wherein the thermionic electron emitter includes a carbon nanotube film structure.
Abstract translation: 热电子发射器件包括绝缘衬底和位于其上的一个或多个栅极。 一个或多个栅格包括位于其周边上的第一，第二，第三和第四电极引线以及其中的热电子发射单元。 第一和第二电极下引线彼此平行。 第三和第四电极下引线彼此平行。 第一和第二电极下引线与第三和第四电极下引线绝缘。 热电子发射单元包括第一电极，第二电极和热离子电子发射体。 第一电极和第二电极分别位于第一电极下引线和第三电极引线下电连接。 其中，热离子电子发射体包括碳纳米管膜结构。
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公开(公告)号：JP5015906B2
公开(公告)日：2012-09-05
申请号：JP2008320197
申请日：2008-12-16
Applicant: ツィンファ ユニバーシティ , 鴻海精密工業股▲ふん▼有限公司
CPC classification number: H01J1/14 , H01J9/04 , H01J31/127 , H01J2201/196
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公开(公告)号：JP5281004B2
公开(公告)日：2013-09-04
申请号：JP2009517369
申请日：2006-06-30
Applicant: 株式会社島津製作所 , ユニバーシティー オブ ヨーク
Inventor： 真 藤田 , エル−ゴマチ・モハメド , ウェルズ・トークイル
IPC: H01J37/073
CPC classification number: H01J37/065 , H01J35/06 , H01J2201/196 , H01J2237/06316 , H01J2237/3175
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公开(公告)号：US20170213685A1
公开(公告)日：2017-07-27
申请号：US15233198
申请日：2016-08-10
Inventor： Jun Tae KANG , Yoon-Ho SONG , Jae-Woo KIM , Jin-Woo JEONG
IPC: H01J35/06
CPC classification number: H01J37/063 , H01J7/18 , H01J7/186 , H01J9/39 , H01J19/48 , H01J21/20 , H01J29/46 , H01J29/488 , H01J29/50 , H01J35/06 , H01J35/065 , H01J35/165 , H01J35/20 , H01J2201/196 , H01J2201/317 , H01J2209/385 , H01J2209/3893 , H01J2229/4827 , H01J2229/4831 , H01J2229/94 , H01J2235/068 , H01J2235/205 , H01J2237/032 , H01J2237/036 , H01J2237/06375 , H01J2237/1825
Abstract: Disclosed is an x-ray tube including a hybrid electron emission source, which uses, as an electron emission source, a cathode including both a field electron emission source and a thermal electron emission source. An x-ray tube includes an electron emission source emitting an electron beam, and a target part including a target material that emits an x-ray as the emitted electron beam collides with the target part, wherein the electron emission source includes a thermal electron emission source and a field electron emission source, and emits the electron beam by selectively using at least one of the thermal electron emission source and the field electron emission source.
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