公开(公告)号：EP3285092A1

公开(公告)日：2018-02-21

申请号：EP16779766.1

申请日：2016-04-12

Applicant: Dai Nippon Printing Co., Ltd.

Inventor： OOTA, Kohei ,  MOTOMURA, Tomohisa ,  OONO, Motonori

IPC: G01T1/18 ,  H01J47/06

CPC classification number: G01T1/185 ,  G01T1/18 ,  G01T1/2935 ,  G01T7/00 ,  H01J47/06

Abstract: A radiation detector using gas amplification, includes: an insulator having a first surface and a second surface positioned at a back surface side of the first surface; a first electrode layer that is provided on the first surface of the insulator and has a circular opening portion; a pixel electrode positioned inside the opening portion; a second electrode layer provided on the second surface of the insulator; and a via hole conductor that has one end surface thereof bonded to the second electrode layer through the interior of the insulator and has the other end surface thereof bonded to the pixel electrode, in which at least a part of the other end surface side of the via hole conductor exhibits a column or truncated cone shape and an outer diameter of the via hole conductor becomes smallest at the one end surface.

Abstract translation: 使用气体放大的放射线检测器包括：绝缘体，具有第一表面和位于第一表面的后表面侧的第二表面; 设置在绝缘体的第一表面上并具有圆形开口部分的第一电极层; 位于开口部分内部的像素电极; 设置在绝缘体的第二表面上的第二电极层; 以及通孔导体，其一个端面通过所述绝缘体的内部与所述第二电极层接合，并且另一个端面接合于所述像素电极，所述通孔导体的所述另一个端面的至少一部分 通孔导体具有圆柱形或圆锥台形状，并且通孔导体的外径在一个端面处变得最小。

公开(公告)号：EP2317538B1

公开(公告)日：2017-03-22

申请号：EP09290825.0

申请日：2009-10-28

Applicant: CERN - European Organization For Nuclear Research ,  CEA

Inventor： Giomataris, Ioannis ,  Rui de Oliveira

IPC: H01J47/06

CPC classification number: H01J47/065 ,  H01J47/06

公开(公告)号：EP2489060B1

公开(公告)日：2015-07-29

申请号：EP10765792.6

申请日：2010-10-15

Applicant: EOS Imaging

Inventor： DESAUTE, Pascal

IPC: H01J47/06 ,  G01T1/185

CPC classification number: H01J47/06 ,  G01T1/185

公开(公告)号：EP2107591A1

公开(公告)日：2009-10-07

申请号：EP09156789.1

申请日：2009-03-31

Applicant: FEI Company

Inventor： Marek, Uncovsky ,  Toth, Milos ,  Knowles, Ralph

IPC: H01J37/244 ,  H01J37/28 ,  H01J47/06

CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J47/06 ,  H01J2237/24445 ,  H01J2237/2448 ,  H01J2237/2605

Abstract: A novel detector for a charged particle beam system which includes multiple gas amplification stages. The stages are typically defined by conductors to which voltage are applied relative to the sample or to a previous stage. By creating cascades of secondary electrons in multiple stages, the gain can be increased without causing dielectric breakdown of the gas.

Abstract translation: 一种用于带电粒子束系统的新型检测器，其包括多个气体放大级。 这些级通常由相对于样品施加电压的导体或前一级定义。 通过在多级中产生二级电子级联，可以增加增益，而不会引起气体的介质击穿。

公开(公告)号：EP1326094A3

公开(公告)日：2008-02-20

申请号：EP02396172.5

申请日：2002-11-20

Applicant: Oxford Instruments Analytical Oy

Inventor： Sipilä, Heikki ,  Kiuru, Erkki Sakari

IPC: G01T1/29

CPC classification number: H01J47/06 ,  G01T1/18 ,  G01T1/2935

Abstract: The invention relates to a radiation detector, an arrangement and a method for an energy-dispersive detection of X-ray photons. X-ray photons are allowed to collide (701) in the radiation detector (201, 601), whereby there are produced (702, 703, 704, 705, 706, 707, 708) observations of the X-ray photons that collided in the detector. According to the invention, there are separately produced observations of X-ray photons (702, 703, 704) that collided in the first detector space (205, 501) of the radiation detector and X-ray photons (705, 706, 707, 708) that collided in the second detector space (206, 502) of the radiation detector. The (712) observations of X-ray photons that collided in the first detector space (205, 501) are ignored, when there is received a simultaneous observation of an X-ray photon that collided in the second detector space.

公开(公告)号：EP1034557A1

公开(公告)日：2000-09-13

申请号：EP98955259.1

申请日：1998-11-18

Applicant: Danilatos, Gerasimos Daniel

Inventor： Danilatos, Gerasimos Daniel

IPC: H01J37/244 ,  H01J37/28 ,  H01J47/06 ,  G01N23/225

CPC classification number: H01J37/244 ,  H01J47/06

Abstract: An alternating electromagnetic field in the radiofrequency range is applied in a gaseous environment (4). Free electrons produced in the gas (4), by an ionising source of radiation (5) or by interaction of a charged particle beam with a specimen, are acted upon by the alternating electromagnetic field and undergo an oscillatory motion resulting in multiple collisions with the gas molecules or atoms. Amplified electron and photon signals are generated in a controlled discharge, proportional to the initial number of free electrons, and are collected by suitable means (6, 7, 8). The alternating field is generated either by electrodes (1, 2) biased with an alternating voltage, or by a coil driven by an AC current, and may be superposed with a static electric field. The detection device may be used with instruments such as electron microscopes, in ion beam technologies, and with instruments used for detection of ionising radiations such as proportional counters.

公开(公告)号：EP0340126B1

公开(公告)日：1993-08-04

申请号：EP89420149.0

申请日：1989-04-25

Applicant: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS) ,  SOCIETE INEL

Inventor： Comparat, Vincent ,  Ballon, Jean ,  Carrechio, Pierre ,  Pélissier, Alain

IPC: H01J47/00 ,  H01J47/06

CPC classification number: H01J47/06 ,  H01J47/008

公开(公告)号：EP3385755A1

公开(公告)日：2018-10-10

申请号：EP16870708.1

申请日：2016-11-30

Applicant: Dai Nippon Printing Co., Ltd.

Inventor： MOTOMURA, Tomohisa ,  OTA, Kohei ,  TANIMORI, Toru ,  TAKADA, Atsushi ,  TAKEMURA, Taito

IPC: G01T1/18 ,  G01T5/00 ,  H01J47/06

CPC classification number: G01T1/18 ,  G01T5/00 ,  H01J47/06

Abstract: It is an object to provide a radiation detection device that has improved resolution without a reduction in gas amplification. According to one embodiment of the present invention, there is provided a radiation detection element includes a plurality of pixel electrodes, each pixel electrodes including a first electrode placed on the first surface of an insulating member and having an opening portion and a second electrode placed at the opening portion of the first electrode. The plurality of pixel electrodes is arrayed in the row direction and the column direction. The pitch of the pixel electrodes in the row direction and the column direction is 380 µm or less. An area ratio between the first electrode and the second electrode falls within the range of 14.5:1 to 154.6:1.

公开(公告)号：EP3361492A1

公开(公告)日：2018-08-15

申请号：EP16853490.7

申请日：2016-09-30

Applicant: Dai Nippon Printing Co., Ltd.

Inventor： OTA, Kohei ,  MOTOMURA, Tomohisa ,  TAKANO, Takamasa ,  NAKAYAMA, Koichi

IPC: H01J47/06 ,  G01T1/18

CPC classification number: G01T1/185 ,  G01T1/18 ,  H01J47/06

Abstract: A detection element can obtain a high-resolution radiation image having a high signal intensity and a high S/N ratio. A detection element including a substrate having a through hole, an insulating layer arranged inside of the through hole, a through electrode arranged further to the inner side of the through hole than the insulating layer, a resin layer having insulating properties and having an opening portion exposing the through electrode, a first electrode arranged above the through electrode and the resin layer, the first electrode being connected to the through electrode through the opening portion, and a second electrode arranged above the resin layer, the second electrode being separated from the first electrode.

公开(公告)号：EP3196921A4

公开(公告)日：2018-05-02

申请号：EP15841522

申请日：2015-09-10

Applicant: FUJIKURA LTD

Inventor： ARAI DAISUKE

IPC: H01J47/02 ,  G01T1/18 ,  H01J1/46 ,  H01J9/14

CPC classification number: H01J1/46 ,  G01T1/18 ,  H01J9/14 ,  H01J47/02 ,  H01J47/06

Abstract: An ion filter used for an electron multiplier is provided. The ion filter has an insulating substrate (11), a first conductive layer (12) formed on one main surface of the insulating substrate (11), a second conductive layer (13) formed on the other main surface of the insulating substrate (11), and a plurality of through-holes (30) formed along the thickness direction of the insulating substrate (11). The ion filter is configured such that a first thickness (th1) of the first conductive layer (12) is different from a second thickness (th2) of the second conductive layer (13).