OPTICAL COMPONENT MADE OF QUARTZ GLASS FOR USE IN ArF EXCIMER LASER LITHOGRAPHY AND METHOD FOR PRODUCING THE COMPONENT
    295.
    发明申请
    OPTICAL COMPONENT MADE OF QUARTZ GLASS FOR USE IN ArF EXCIMER LASER LITHOGRAPHY AND METHOD FOR PRODUCING THE COMPONENT 有权
    在ArF EXCIMER激光光刻仪中使用的QUARTZ玻璃的光学元件及其制造方法

    公开(公告)号:US20160002092A1

    公开(公告)日:2016-01-07

    申请号:US14769382

    申请日:2014-02-19

    Inventor: Bodo KUEHN

    Abstract: An optical component made of synthetic quartz glass includes a glass structure substantially free of oxygen defect sites and having a hydrogen content of 0.1×1016 to 1.0×1018 molecules/cm3, an SiH group content of less than 2×1017 molecules/cm3, a hydroxyl group content of 0.1 to 100 wt. ppm, and an Active temperature of less than 1070° C. The optical component undergoes a laser-induced change in the refractive index in response to irradiation by a radiation with a wavelength of 193 nm using 5×109 pulses with a pulse width of 125 ns and a respective energy density of 500 μJ/cm2 at a pulse repetition frequency of 2000 Hz. The change totals a first measured value M193nm when measured using the applied wavelength of 193 nm and a second measured value M633nm when measured using a measured wavelength of 633 nm. The ratio M193nm/M633nm is less than 1.7.

    Abstract translation: 由合成石英玻璃制成的光学部件包括基本上不含氧缺陷部位的玻璃结构,氢含量为0.1×1016〜1.0×1018分子/ cm3,SiH基含量小于2×1017分子/ cm3, 羟基含量为0.1〜100wt。 ppm,并且有效温度低于1070℃。光学组件响应于波长为193nm的辐射的照射,使用脉冲宽度为125的5×109脉冲对激光引起的折射率变化 ns,相应的能量密度为500μJ/ cm2,脉冲重复频率为2000Hz。 当使用193nm的施加波长测量时,该变化达到第一测量值M193nm,并且当使用633nm的测量波长测量时,该变化达到第二测量值M633nm。 M193nm / M633nm的比例小于1.7。

    Method for producing optical fiber preform
    297.
    发明授权
    Method for producing optical fiber preform 有权
    光纤预制棒的制造方法

    公开(公告)号:US08839646B2

    公开(公告)日:2014-09-23

    申请号:US13356984

    申请日:2012-01-24

    Abstract: There is provided a method for producing an optical fiber preform used in producing an optical fiber having low attenuation. The production method includes (1) a rod formation step of forming a glass rod of a silica glass containing an alkali metal element, the average concentration of the alkali metal element being 5 at·ppm or more, (2) a heat treatment step of heat-treating the glass rod, (3) a core part formation step of forming an alkali metal element-free silica glass layer having a chlorine concentration of 6000 at·ppm or more around the perimeter of the glass rod heat-treated in the heat treatment step to form a core part including the glass rod and the silica glass layer, and (4) a cladding part formation step of forming a cladding part of a silica-based glass having a lower refractive index than the core part around the perimeter of the core part.

    Abstract translation: 提供了用于制造具有低衰减的光纤的光纤预制件的制造方法。 制造方法包括:(1)形成含有碱金属元素的石英玻璃的玻璃棒的棒形成工序,碱金属元素的平均浓度为5atppm以上,(2)热处理工序 对玻璃棒进行热处理,(3)在热处理的玻璃棒的周边周围形成氯浓度为6000以上的碱金属元素的二氧化硅玻璃层的芯部形成工序 处理步骤以形成包括玻璃棒和石英玻璃层的核心部分,以及(4)包层部分形成步骤,形成具有比围绕周边的核心部分的折射率低的二氧化硅基玻璃的包层部分 核心部分。

    Silica container and method for producing the same
    299.
    发明授权
    Silica container and method for producing the same 有权
    二氧化硅容器及其制造方法

    公开(公告)号:US08815403B2

    公开(公告)日:2014-08-26

    申请号:US13131987

    申请日:2010-06-25

    Abstract: A method for producing a silica container having a rotational symmetry is provided. The method includes forming a preliminarily molded article by feeding a powdered substrate's raw material to an inner wall of an outer frame having aspiration holes with rotating the frame, and forming a silica substrate. The preliminarily molded article is aspirated from an outer peripheral side with controlling a humidity inside the outer frame by ventilating gases present in the outer frame with charging from inside the preliminarily molded article a gas mixture comprised of an O2 gas and an inert gas and made below a prescribed dew-point temperature by dehumidification, and at the same time heated from inside the preliminarily molded article by a discharge-heat melting method with carbon electrodes, thereby making an outer peripheral part of the preliminarily molded article to a sintered body while an inner peripheral part to a fused glass body.

    Abstract translation: 提供了具有旋转对称性的二氧化硅容器的制造方法。 该方法包括通过将粉末状基材的原料供给到具有旋转框架的具有抽吸孔的外框架的内壁,并形成二氧化硅基板来形成预成型品。 从外周侧抽吸预成型品,通过从外部框架内部充填从O 2气体和惰性气体构成的气体混合物从外部框架内的气体通风来控制外框内的湿度, 通过除湿规定的露点温度,同时用碳电极通过放电加热熔融法从预成型体内部加热,由此使预成型品的外周部分成为烧结体,而内部 周边部分为熔融玻璃体。

    METHOD OF MANUFACTURING OPTICAL FIBER PREFORM, AND OPTICAL FIBER
    300.
    发明申请
    METHOD OF MANUFACTURING OPTICAL FIBER PREFORM, AND OPTICAL FIBER 审中-公开
    制造光纤预制件的方法和光纤

    公开(公告)号:US20140140673A1

    公开(公告)日:2014-05-22

    申请号:US14065599

    申请日:2013-10-29

    Abstract: The present invention relates to a preform manufacturing method and others for effectively reducing variation in refractive index due to chlorine used in manufacture of an optical fiber preform. The manufacturing method includes a dechlorination step carried out between a point of an end time of a dehydration step and a point of a start time of a sintering step, the dechlorination step being a step of heating a porous preform after dehydrated, in an atmosphere containing no chlorine-based dehydrating agent, for a given length of time while maintaining a temperature lower than a sintering temperature, thereby removing chlorine from the porous preform after dehydrated.

    Abstract translation: 本发明涉及一种用于有效地减少由于在制造光纤预制件时使用的氯引起的折射率变化的预制件制造方法。 制造方法包括在脱水步骤的结束时间点和烧结步骤的开始时间点之间进行的脱氯工序,脱氯工序是在脱水后的多孔预成型体的加热步骤中,在含有 在保持低于烧结温度的温度的同一时间段内,不脱氯脱水剂,从而在脱水后从多孔预型体中除去氯。

Patent Agency Ranking