AN IMAGER
    314.
    发明申请
    AN IMAGER 审中-公开
    一个图像

    公开(公告)号:WO2008077839A1

    公开(公告)日:2008-07-03

    申请号:PCT/EP2007/064057

    申请日:2007-12-17

    Abstract: An imager comprising a detector (14) having at least one element sensitive to radiation having a first polarisation and at least one element sensitive to radiation having a second polarisation and means for simultaneously directing (12) from the same scene or point of a scene radiation of the first polarisation onto the first polarisation element and radiation of the second polarisation onto the second polarisation element. Preferably, the detector (14) consists of a two dimensional array of elements.

    Abstract translation: 一种成像器,包括具有对具有第一偏振的辐射敏感的至少一个元件的检测器(14)和对具有第二极化的辐射敏感的至少一个元件以及用于从场景辐射的相同场景或点同时引导(12)的装置 第一偏振到第一偏振元件上的第二偏振和第二偏振的辐射到第二偏振元件上。 优选地,检测器(14)由二维阵列的元件组成。

    MICROSCOPE WITH INTERFEROMETER ARRANGEMENT FOR TRANSMITTED LIGHT EXAMINATION OF TRANSPARENT OBJECTS USING INTERFERENCE CONTRAST AND POLARIZATION CONTRAST
    315.
    发明申请
    MICROSCOPE WITH INTERFEROMETER ARRANGEMENT FOR TRANSMITTED LIGHT EXAMINATION OF TRANSPARENT OBJECTS USING INTERFERENCE CONTRAST AND POLARIZATION CONTRAST 审中-公开
    用干涉显微镜光通过学习透明物体的干扰对比度和偏振对比度的方式

    公开(公告)号:WO2008019729A8

    公开(公告)日:2008-05-29

    申请号:PCT/EP2007005720

    申请日:2007-06-28

    Abstract: The invention relates to a microscope for transmitted light examination of objects, with a beam path between an illumination apparatus and an apparatus for viewing/detecting an object image, in particular a camera, in which an interferometer is arranged in the beam path, which interferometer has means for changing the polarization (4) and means, which are independent thereof, for changing the relative phase (6) in at least one of the partial beams (II) of the interferometer. The invention relates furthermore to a method for transmitted light microscopy of objects (8, 9), in which the beam path between an illumination apparatus (1) and an apparatus (15) for viewing/detecting an object image extends through an interferometer (II, III), with at least one image of an object (8, 9), in particular a series of images, being recorded using a camera (15), in particular as a function of a position of the polarization and/or of the phase of the light in at least one of the partial beams (II, III) of the interferometer.

    Abstract translation: 本发明涉及一种用于具有照明装置和一个对象图像的观看/记录装置之间的光束路径中的物体的透射光检查的显微镜,特别是照相机,干涉仪被设置在在光路中,包括用于改变偏振(4)和独立的其 具有用于改变干涉仪的部分光束(II)中的至少一个中的相对相位(6)的装置。 本发明还涉及一种用于物体的透射光显微镜(8,9),其特征在于,照明装置之间的光路(1)和一个装置(15),用于通过干涉仪观看/对象图像的记录(II,III),其特征在于,至少在 一个对象的图像(8,9),特别是通过一个照相机(15)的一系列图像被接收,尤其是在依赖于偏振和/或光的部分光束中的至少一个的相位的位置(II,III)的 干涉。

    OPTICAL POWER LIMITING DEVICES AND A METHOD FOR PROTECTING IMAGING AND NON-IMAGING SENSORS
    316.
    发明申请
    OPTICAL POWER LIMITING DEVICES AND A METHOD FOR PROTECTING IMAGING AND NON-IMAGING SENSORS 审中-公开
    光功率限制器件和保护成像和非成像传感器的方法

    公开(公告)号:WO2004053442A1

    公开(公告)日:2004-06-24

    申请号:PCT/IL2003/001028

    申请日:2003-12-04

    CPC classification number: G02F1/3525 G01J4/00

    Abstract: There is provided an optical power switching device, including at least one plate made of transparent dielectric material, a thin, electrically conductive, metallic material coated on one side of the plate, wherein, upon being exposed to an optical power beam having a power level exceeding a predetermined threshold focused thereon, the layer of conductive material forms a plasma, damaging the dielectric material, thereby rendering the portion of the surface of the plate under the impinging beam opaque to light. A method for reducing or interrupting optical transmission in response to the transmission of excessive optical power or energy is also provided.

    Abstract translation: 提供一种光功率开关装置,其包括由透明介电材料制成的至少一个板,涂覆在板的一侧上的薄的导电金属材料,其中,在暴露于具有功率水平的光功率光束 超过其上聚焦的预定阈值,导电材料层形成等离子体,损坏电介质材料,由此使板下表面的部分在入射光束下不透光。 还提供了用于响应于过度的光功率或能量的传输而减少或中断光传输的方法。

    SCATTEROMETRISCHE MESSANORDNUNG UND MESSVERFAHREN
    317.
    发明申请
    SCATTEROMETRISCHE MESSANORDNUNG UND MESSVERFAHREN 审中-公开
    Scatterometric测定装置及测定方法

    公开(公告)号:WO2003029770A1

    公开(公告)日:2003-04-10

    申请号:PCT/EP2002/010476

    申请日:2002-09-18

    CPC classification number: G01J4/00 G01J3/28 G01N21/211 G01N21/47

    Abstract: Bei einer Messanordnung mit einer Optikeinrichtung, in die zur Messung ein von einer Probe ausgehendes, divergierendes Strahlenbündel (10) eingekoppelt wird, und weiter mit einem der Optikeinrichtung nachgeordneten Detektor (13), der eine Vielzahl von in einer Ebene angeordneten, unabhängig voneinander auswertbaren Detektorpixeln aufweist, wobei die Optikeinrichtung (11) das divergierende Strahlenbündel (10) in einer ersten Richtung quer zur Ausbreitungsrichtung des Strahlenbündels (10) spektral zerlegt und auf den Detektor (13) lenkt, parallelisiert die Optikeinrichtung das Strahlenbündel auch noch, bevor es auf den Detektor (13) trifft, in einer zweiten Richtung quer zur Ausbreitungsrichtung derart, dass in der zweiten Richtung benachbarte Strahlen des auf den Detektor (13) treffenden Strahlenbündels zueinander parallel verlaufen.

    Abstract translation: 在用光学设备的测量装置,耦合到所述测量出射的发散的辐射束(10),并且还包括在平面中布置的多个光学系统的下游检测器(13),彼此独立地评价的检测器像素的样本 ,其中所述光学装置(11)在第一方向上横向于所述辐射光束(10)的传播方向分割发散光束(10)的光谱和到检测器(13)引导所述光学装置的并行化,光束仍然检测器之前 (13)施加,在第二方向上横向于所述传播方向,以便在所述检测器(13)上的相邻波束的第二方向上的每个撞击光束平行延伸。

    METHOD AND DEVICE TO CALCULATE AND DISPLAY THE PHASE TRANSFORMATION OF OPTICAL POLARIZATION
    319.
    发明申请
    METHOD AND DEVICE TO CALCULATE AND DISPLAY THE PHASE TRANSFORMATION OF OPTICAL POLARIZATION 审中-公开
    用于计算和显示光学偏振相变的方法和装置

    公开(公告)号:WO02054028A2

    公开(公告)日:2002-07-11

    申请号:PCT/US2001/049624

    申请日:2001-12-28

    CPC classification number: G01J4/00

    Abstract: Apparatus (1200, 1300) and accompanying methods to visualize and calculate, by direct visual measurement and interpolation, polarized light, in the form of sphere (observable polarization sphere - OPS) along with its associated spherical coordinate system consisting of latitudes and longitudes, which maps transformation of the state(s) of polarization (SOP) of an optical beam that propagates through either a single optical device (generally a "media) or a series of optical devices (mediums), e.g., phase shifters (waveplates, compensators), attenuators (polarizers), and field rotators. The OPS can be used to calculate and display phase shifting of the polarization state of an optical beam as it propagates through each such polarizing media. The OPS describes the behavior of a rotated ideal linear polarizer on a propagating polarized optical beam, as well as polarized light in many regions of the electro-magnetic spectrum.

    Abstract translation: 装置(1200,1300)以及通过直接视觉测量和内插来以球体(可观察极化球 - OPS)的形式可视化和计算偏振光的装置(1200,1300)及其相关的由纬度和经度组成的球面坐标系, 映射通过单个光学器件(通常为“介质”)或一系列光学器件(介质)(例如移相器(波片,补偿器))传播的光束的偏振状态(SOP)的变换, ,衰减器(偏振器)和场旋转器,OPS可用于计算和显示光束在通过每个这样的偏振介质时传播的偏振态的相移,OPS描述旋转的理想线性偏振器的行为 传播偏振光束以及电磁光谱的许多区域中的偏振光。

    ELLIPSOMETER AND ELLIPSOMETRY METHOD
    320.
    发明申请
    ELLIPSOMETER AND ELLIPSOMETRY METHOD 审中-公开
    ELLIPSOMETER和ELLIPSOMETRY方法

    公开(公告)号:WO01053786A1

    公开(公告)日:2001-07-26

    申请号:PCT/US2001/000504

    申请日:2001-01-08

    CPC classification number: G01J4/00 G01N21/211

    Abstract: An improved ellipsometry method and a self-correcting simultaneous multiple angle/multiple wavelength return path ellipsometer (20) are disclosed which allow for simultaneous measurement at multiple angles of incidence in a manner which permits separation of instrument error from the measured properties. Non-sample optical system ellipsometric effects of the ellipsometer are measured and the measured changes in polarization state are corrected to eliminate errors introduced thereby. The disclosed embodiment is self-correcting by way of a convex reflector (6) which can be inserted into and removed from the optical path of the beam of polarized light between a focusing optic (5) and the sample optical system (7) under study. The convex reflector (6) when inserted into the optical path causes the light rays of the beam of polarized light in each of the plurality of angles of incidence to retrace its path through the focusing optic (5) for detection by a detector array (10) without undergoing reflection and re-reflection as during a sample measurement configuration of the ellipsometer (20) is removed from the optical path.

    Abstract translation: 公开了一种改进的椭圆偏振方法和自校正同时多角度/多波长返回路径椭偏仪(20),其允许以允许将仪器误差与所测量的属性分离的方式以多个入射角同时进行测量。 测量椭圆光度计的非样本光学系统椭圆效应,并校正测量的极化状态变化,以消除由此引入的误差。 所公开的实施例通过凸面反射器(6)进行自校正,所述凸形反射器可以在被研究的聚焦光学器件(5)和样品光学系统(7)之间插入和偏离偏振光束的光路。 。 凸状反射体(6)当插入到光路中时,多个入射角中的每一个中的偏振光束的光线回扫其通过聚焦光学元件(5)的路径,以便由检测器阵列(10 ),而不会像在椭圆偏振仪(20)的样品测量配置期间从光路中移除反射和再反射。

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