公开(公告)号：WO2003050035A2

公开(公告)日：2003-06-19

申请号：PCT/US2002/039152

申请日：2002-12-06

Applicant: NANOSTREAM, INC.

Inventor： COVINGTON, Joseph, F. ,  HOBBS, Steven, E. ,  KOEHLER, Jeffrey, A. ,  PATEL, Paren, P. ,  PEZZUTO, Marci ,  SCHEIB, Mark, S.

IPC: B81B1/00

CPC classification number: B01L3/502707 ,  B01J2219/00783 ,  B01J2219/00833 ,  B01J2219/00835 ,  B01J2219/00891 ,  B01J2219/00952 ,  B01L3/502738 ,  B01L3/502746 ,  B01L2200/0689 ,  B01L2200/10 ,  B01L2200/12 ,  B01L2300/0681 ,  B01L2300/0874 ,  B01L2300/0887 ,  B01L2300/14 ,  B29C65/18 ,  B29C66/02 ,  B29C66/026 ,  B29C66/1122 ,  B29C66/45 ,  B29C66/71 ,  B29C66/727 ,  B29C66/73112 ,  B29C66/8322 ,  B29C66/91212 ,  B29C66/91213 ,  B29C66/91216 ,  B29C66/91221 ,  B29C66/91231 ,  B29C66/91411 ,  B29C66/91445 ,  B29C66/91645 ,  B29C66/92445 ,  B29C66/929 ,  B29C66/961 ,  B29K2023/00 ,  B29K2023/12 ,  B29L2031/756 ,  B32B37/0023 ,  B32B37/08 ,  B32B37/10 ,  B32B38/004 ,  B32B41/00 ,  B32B2037/0092 ,  B32B2038/166 ,  B32B2309/02 ,  B32B2309/022 ,  B32B2309/12 ,  B32B2310/024 ,  B81B2201/058 ,  B81C1/00119 ,  B81C3/008 ,  B81C2201/019 ,  G01N27/44791 ,  G01N30/6095 ,  Y10T29/49002 ,  Y10T137/0402 ,  Y10T137/2224 ,  Y10T137/598 ,  B29C2035/0827 ,  B29K2067/00

Abstract: A method for fabricating a microfluidic device where first and second substantially flat platens are provided. Multiple substantially planar, substantially metal-free, adhesiveless polymer device layers, including at least one stencil layer defining a microfluidic channel penetrating through the entire thickness of the stencil such that the channel is bounded laterally by a stencil layer, and bounded from above and below by surrounding device layers to define an upper channel surface and a lower channel surface are provided. The device layers are stacked between the first platen and the second platen and controllably heated according to a heating profile adapted to form a substantially sealed adhesiveless microfluidic device wherein each upper channel surface remains distinct from its corresponding lower channel surface. The resulting microfluidic device has high inter-layer bond strength while preserving the integrity of the channel(s) defined in the stencil layer(s).

Abstract translation: 一种制造微流体装置的方法，其中设置有第一和第二基本平坦的压板。 多个基本上平坦的，基本上无金属的无粘合剂聚合物装置层，包括至少一个模板层，其限定穿过模板的整个厚度的微流体通道，使得通道横向由模板层限定，并且从上方和下方限定 通过周围的装置层来限定上通道表面和下通道表面。 装置层被堆叠在第一压板和第二压板之间，并且根据适于形成基本上密封的无粘合微流体装置的加热分布可控地加热，其中每个上部通道表面保持与其相应的下部通道表面不同。 所得到的微流体装置具有高的层间结合强度，同时保持在模版层中定义的通道的完整性。

公开(公告)号：WO2003012491A2

公开(公告)日：2003-02-13

申请号：PCT/US2002/024593

申请日：2002-08-02

Applicant: SANTUR CORPORATION

Inventor： TON, Dinh

IPC: G02B

CPC classification number: G02B26/0833 ,  B81B2201/042 ,  B81C1/00357 ,  B81C2201/019 ,  G02B26/0841 ,  Y10S359/904

Abstract: A MEMS mirror and method for fabricating the mirror is provided. The mirror has a plurality of structures that operatively rotate around a support structure. The mirror is fabricated, such that the silicon components are separated from a glass structure having electrodes to prevent shorting the electrodes to the mirror. Additionally, the electrodes are positioned such that providing electrical contact is eased.

Abstract translation: 提供了用于制造镜子的MEMS镜和方法。 反射镜具有围绕支撑结构可操作地旋转的多个结构。 制造镜子，使得硅组件与具有电极的玻璃结构分离，以防止电极短路到反射镜。 此外，电极被定位成使得提供电接触被减轻。

公开(公告)号：WO2002100543A1

公开(公告)日：2002-12-19

申请号：PCT/US2002/017591

申请日：2002-06-04

Applicant: NANOSTREAM, INC.

Inventor： PEZZUTO, Marci ,  DANTSKER, Eugene

IPC: B01L3/00

CPC classification number: B01F5/0471 ,  B01F5/064 ,  B01F13/0059 ,  B01F15/0205 ,  B01F15/0264 ,  B01L3/502707 ,  B01L3/502738 ,  B01L2300/0864 ,  B01L2300/0874 ,  B01L2300/0887 ,  B01L2400/0406 ,  B01L2400/0487 ,  B01L2400/06 ,  B01L2400/0683 ,  B01L2400/0688 ,  B81B2201/058 ,  B81C1/00119 ,  B81C2201/019 ,  Y10T137/0318 ,  Y10T137/2496 ,  Y10T137/2501 ,  Y10T137/2562 ,  Y10T436/11 ,  Y10T436/117497 ,  Y10T436/118339 ,  Y10T436/2575

Abstract: Microfluidic devices (140, 160, 170, 180, 230, 260, 280, 300, 320, 350, 400, 450) capable of combining discrete fluid volumes generally include channels (144, 147, 161A-D, 162A-D, 176, 177, 188, 189, 249, 250, 269, 270, 296, 297, 319A, 319B, 335, 336, 379A, 386A, 409, 415, 456) for supplying different fluids toward a sample chamber (146, 120, 122, 124, 126, 178, 191, 240, 271, 291, 314, 334, 375, 410, 459) and means for establishing fluid communication between the fluids within the chamber. Discrete fluid plugs are defined from larger fluid volumes before being combined. Certain embodiments utilize actuation chambers (240, 267, 289, 290, 292, 293, 313, 329, 330, 371, 372) or include subchambers (146A, 146B, 120A, 120B, 122A, 122B, 124A, 124B, 126A, 126B, 178A, 178B, 191A, 191B, 410A, 410B) divided by a rupture region (151, 165A, 165B, 179, 190) such as a frangible seal. Further embodiments utilize one or more deformable membranes (171, 185, 242, 268, 283, 323, 355, 420, 451) and/or porous regions (305, 303) to direct fluid flow. Certain devices may be pneumatically or magnetically actuated.

Abstract translation: 能够组合离散流体体积的微流体装置（140,160,170,180,230,260,3300,320,350,400,450）通常包括通道（144,147,161A-D，162A-D，176 ，177,188,289,249,250,269,270,296,297,319A，319B，335,336,397A，386A，409,415,456，用于向样品室（146,120,407,408,407）提供不同的流体， 122,124,126,178,191,240,271,291,314,334,375,410,459）和用于建立所述腔室内的流体之间的流体连通的装置。 离散流体塞在组合之前由更大的流体体积定义。 某些实施例使用致动室（240,267,289,290,292,293,313,329,330,371,372）或包括子室（146A，146B，120A，120B，122A，122B，124A，124B，126A， 126B，178A，178B，191A，191B，410A，410B）除以诸如易碎密封件的破裂区域（151,165A，165B，179,190）。 另外的实施例利用一个或多个可变形膜（171,185,242,268,283,323,355,420,451）和/或多孔区域（305,303）来引导流体流动。 某些装置可以是气动或磁力驱动的。

公开(公告)号：WO2002096640A1

公开(公告)日：2002-12-05

申请号：PCT/US2002/010874

申请日：2002-04-05

Applicant: MOTOROLA, INC.

Inventor： BURDON, Jeremy, W. ,  OLIVER, Manuel

IPC: B32B18/00

CPC classification number: B81C1/00119 ,  B01J19/0093 ,  B01J2219/00783 ,  B01J2219/00824 ,  B32B18/00 ,  B81B2201/058 ,  B81C2201/019 ,  B81C2201/034 ,  C04B35/62218 ,  C04B2235/6567 ,  C04B2235/667 ,  C04B2237/341 ,  C04B2237/343 ,  C04B2237/348 ,  C04B2237/365 ,  C04B2237/366 ,  C04B2237/368 ,  C04B2237/62 ,  C04B2237/66 ,  C04B2237/704 ,  C04B2237/76 ,  H05K1/0306 ,  H05K3/0014 ,  H05K2203/0582 ,  H05K2203/0759

Abstract: A cast-on-resist (COR) method of forming a ceramic layer (114) with a recessed pattern is provided according to a preferred exemplary embodiment of the present invention. The COR method is comprised of depositing a resist (102) on a substrate (104) and selectively exposing the resist (102) to a radiation source such that a first portion (106) of the resist (102) having a positive image of the pattern is soluble in a solvent and a second portion (108) of the resist (102) having a negative image of the pattern is insoluble in the solvent. The COR method is further comprised of immersing the resist (102) in the solvent to remove the first portion (106) to form a casting substrate (110) having the negative image of the pattern, applying ceramic slurry (112) on the casting substrate (110), curing the ceramic slurry (112) on the casting substrate (110) and removing the ceramic layer (114) from the casting substrate (110) after the curing.

Abstract translation: 根据本发明的优选示例性实施例提供了形成具有凹陷图案的陶瓷层（114）的耐蚀刻（COR）方法。 COR方法包括在衬底（104）上沉积抗蚀剂（102）并选择性地将抗蚀剂（102）暴露于辐射源，使得抗蚀剂（102）的第一部分（106）具有正像 图案可溶于溶剂，并且具有图案的负像的抗蚀剂（102）的第二部分（108）不溶于溶剂。 COR方法还包括将抗蚀剂（102）浸入溶剂中以去除第一部分（106）以形成具有图案的负像的流延基底（110），将陶瓷浆料（112）施加到流延基底 （110），固化所述铸塑基材（110）上的陶瓷浆料（112）并在固化后从所述铸塑基材（110）除去所述陶瓷层（114）。

公开(公告)号：WO2002080262A1

公开(公告)日：2002-10-10

申请号：PCT/US2002/009755

申请日：2002-03-29

Applicant: THE PENN STATE RESEARCH FOUNDATION

Inventor： JACKSON, Thomas, N.

IPC: H01L21/4763

CPC classification number: B81C1/00126 ,  B81C2201/0104 ,  B81C2201/019 ,  B82B3/00 ,  B82Y30/00 ,  B82Y40/00

Abstract: The present invention is directed to a process for forming one or more lateral nanostructures on a subtrate (20). The process comprises the steps of: providing a substrate (20); depositing a first layer (24) on the substrate; forming at least one edge (26) on the first layer; depositing at least one separation layer (28) on the first layer, depositing a third layer (30) on the separation layer; and removing a portion of the separation layer and the third layer from the substrate such that a substantially planar surface is formed exposing the first layer, the separation layer, and the third layer (30).

Abstract translation: 本发明涉及一种用于在副滴（20）上形成一个或多个横向纳米结构的方法。 该方法包括以下步骤：提供衬底（20）; 在衬底上沉积第一层（24）; 在所述第一层上形成至少一个边缘（26）; 在所述第一层上沉积至少一个分离层（28），在所述分离层上沉积第三层（30） 以及从所述基板移除所述分离层和所述第三层的一部分，使得形成暴露所述第一层，所述分离层和所述第三层（30）的基本平坦的表面。

公开(公告)号：WO02050874A2

公开(公告)日：2002-06-27

申请号：PCT/US2001/049427

申请日：2001-12-19

IPC: B81B3/00 ,  B81B7/00 ,  B81B7/04 ,  B81C1/00 ,  G02B6/34 ,  G02B6/35 ,  G02B26/08 ,  H01L

CPC classification number: G02B26/0866 ,  B81B3/0051 ,  B81B7/0067 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2201/047 ,  B81B2203/051 ,  B81C1/00182 ,  B81C2201/019 ,  B81C2203/0109 ,  G02B6/3512 ,  G02B6/353 ,  G02B6/3548 ,  G02B6/356 ,  G02B6/3566 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3576 ,  G02B6/3578 ,  G02B6/3582 ,  G02B6/3584 ,  G02B26/0841 ,  G02B26/085 ,  G02B26/0858 ,  H01H2001/0052 ,  H01L2224/48091 ,  H01L2924/00014

Abstract: MEMS device (300) having an actuator (302, 306) with curved electrodes (308, 310). According to one embodiment of the present invention, an actuator is provided for moving an actuating device linearly. The actuator includes a substrate (304) having a planar surface and an actuating device movable in a linear direction relative to the substrate. The actuator includes at least one electrode beam (312, 314) attached to the actuating device and having an end attached to the substrate (304). The electrode beam is flexible (322, 324) between the actuating device and the end of the electrode beam attached to the substrate. Furthermore, the actuator includes at least one electrode (308, 310) attached to the substrate. The electrode (308, 310) has a curved surface aligned in a position adjacent the length of the electrode beam, whereby the actuating device is movable in its substantially linear direction as the electrode beam (312, 314) moves in a curved fashion corresponding substantially to the curved surface of the electrode.

Abstract translation: MEMS器件（300）具有带有弯曲电极（308,310）的致动器（302,306）。 根据本发明的一个实施例，提供了用于使致动装置线性移动的致动器。 致动器包括具有平坦表面的基板（304）和可相对于基板沿线性方向移动的致动装置。 致动器包括附接到致动装置的至少一个电极梁（312,314），并且具有连接到基板（304）的一端。 电极束在致动装置和连接到基底的电极束的端部之间是柔性的（322,324）。 此外，致动器包括附接到基板的至少一个电极（308,310）。 电极（308,310）具有在与电极束的长度相邻的位置对准的弯曲表面，由此当电极束（312,314）以基本相当的弯曲方式移动时，致动装置可在其基本上线性的方向上移动 到电极的弯曲表面。

公开(公告)号：WO02038490A2

公开(公告)日：2002-05-16

申请号：PCT/DE2001/004141

申请日：2001-11-07

IPC: B81B1/00 ,  B81C1/00

CPC classification number: B81B1/00 ,  B81C1/00357 ,  B81C2201/019

Abstract: The invention relates to a method for producing glass-silicon-glass sandwich structures which are connected irreversibly and in such a way that they are adjusted to correspond. Said structures consist of a bottom and a top glass substrate (2, 3) and a silicon substrate (1) in-between. At least one of the substrates (1; 2; 3) is provided with 3D depth structuring. The aim of the invention is to provide a low-cost production method, especially with a view to mass production of glass-silicon-glass sandwich structures. To this end, the silicon substrate (1) is irreversibly connected to one of the glass substrates (2; 3) before or after the 3D depth structuring. The bond is reduced to a predetermined end thickness from the glass and/or the silicon side by means of grinding, etching and polishing methods and the remaining silicon surface is then connected to a second glass substrate (3; 2) by anodic bonding.

Abstract translation: 本发明涉及一种方法，用于不可逆地和调整的制备由以下组成的下部和上部玻璃基板互相连接的玻璃 - 硅 - 玻璃夹层结构（2，3），和中间的硅衬底（1），其中，所述基板的至少一个（1; 2; 3）设置有一个3-D结构的深度。 现在有一种低成本的制造工艺中，尤其在考虑到大量生产玻璃 - 硅 - 玻璃夹层结构的创建。 这得以实现，所述硅衬底（1）之前或与玻璃基板中的一个的3-D深度结构化后（2，3）不可逆地通过阳极接合，复合通过研磨，蚀刻和抛光过程中的玻璃相连接 和/或硅侧减薄到预定的最终厚度，并与第二玻璃基板，其随后剩余的硅表面（3; 2）通过阳极接合接合。

公开(公告)号：WO01044140A1

公开(公告)日：2001-06-21

申请号：PCT/GB2000/004552

申请日：2000-11-30

IPC: B81C3/00 ,  A61K9/02 ,  A61L27/00 ,  B23K11/00 ,  C04B37/00

CPC classification number: C04B37/003 ,  B81C3/001 ,  B81C2201/019 ,  B81C2203/032 ,  C04B2237/16 ,  C04B2237/341 ,  C04B2237/52 ,  C04B2237/55 ,  C04B2237/597

Abstract: This invention relates to a method of fabricating a bonded product comprising at least two components that are bonded together, the method comprising the steps of: a) bringing the components together; and b) heating the components; wherein at least one of the components comprises a nanomaterial and wherein steps (a) and (b) are performed in such a manner that the components are bonded together by heating at least part of the nanomaterial. The method allows the components to be welded together at lower temperatures than for prior art methods. The method also provides a more reliable form of bonding and improves the strength of the bond formed.

Abstract translation: 本发明涉及一种制造包含至少两个结合在一起的组分的粘合产品的方法，该方法包括以下步骤：a）将组分合并在一起; 和b）加热部件; 其中所述组分中的至少一种包含纳米材料，并且其中步骤（a）和（b）以通过加热所述纳米材料的至少一部分而将所述组分结合在一起的方式进行。 该方法允许组件在比现有技术方法更低的温度下焊接在一起。 该方法还提供了更可靠的粘结形式并提高了形成的键的强度。

公开(公告)号：WO01037050A1

公开(公告)日：2001-05-25

申请号：PCT/EP2000/011448

申请日：2000-11-17

IPC: G03F7/038 ,  B81C1/00 ,  C09J179/08 ,  G03F7/095 ,  G03F7/11 ,  G03F7/40 ,  H01L21/768

CPC classification number: B81C3/001 ,  B81C2201/019 ,  G03F7/11 ,  H01L21/76802 ,  H01L21/76879

Abstract: The invention relates to a lithographic method for producing microcomponents with component structures in the sub-millimeter range. According to the inventive method, a structured adhesive layer is applied to a metal layer and then a photostructured epoxy resin layer is applied to said adhesive layer. Said epoxide resin is structured by means of selective exposition and removing the unexposed zones and filling in the gaps between the resin structures with metal by electroplating. The aim of the invention is to provide an adhesive layer that is suitable for photostructured epoxy resins, especially for SU-8 resist material and that prevents the resist material from being detached. To this end, the adhesive layer consists of polyimide or a polyimide mixture.

Abstract translation: 它是用于制造具有在亚毫米范围内分量的结构，描述了其中可光环氧树脂的层施加到金属层，一个结构化的粘合剂层和粘合剂层的微平版印刷工艺。 环氧树脂是通过选择性曝光和溶解出来的未曝光区域的手段和结构，除去粘接剂层之后，中间空间由从树脂结构之间的空间的金属电镀工艺来填充。 搜索的粘合剂层，其适合于可光的环氧树脂，特别是用于SU-8抗蚀剂，并防止抗蚀剂材料的脱离。 根据本发明的聚酰亚胺的粘合剂层或聚酰亚胺的混合物。

公开(公告)号：WO0101025A2

公开(公告)日：2001-01-04

申请号：PCT/US0017740

申请日：2000-06-27

Applicant: CALIFORNIA INST OF TECHN ,  UNGER MARC A ,  CHOU HOU PU ,  THORSEN TODD A ,  SCHERER AXEL ,  QUAKE STEPHEN R

Inventor： UNGER MARC A ,  CHOU HOU-PU ,  THORSEN TODD A ,  SCHERER AXEL ,  QUAKE STEPHEN R

IPC: G03F7/20 ,  B01L3/00 ,  B81B1/00 ,  B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  B81C99/00 ,  C12Q1/68 ,  F04B17/00 ,  F04B35/04 ,  F04B43/04 ,  F15C5/00 ,  F16K7/00 ,  F16K17/02 ,  F16K99/00 ,  F16K17/00

CPC classification number: B29C51/00 ,  B01L3/502707 ,  B01L3/50273 ,  B01L3/502738 ,  B01L2300/0861 ,  B01L2300/0887 ,  B01L2300/123 ,  B01L2400/046 ,  B01L2400/0481 ,  B01L2400/0655 ,  B33Y80/00 ,  B81B5/00 ,  B81B2201/036 ,  B81B2201/054 ,  B81C1/00119 ,  B81C2201/019 ,  B81C2201/034 ,  C12Q1/6874 ,  F04B43/043 ,  F15C1/06 ,  F15C5/00 ,  F16K11/20 ,  F16K13/00 ,  F16K31/126 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0046 ,  F16K99/0048 ,  F16K99/0051 ,  F16K99/0059 ,  F16K2099/0074 ,  F16K2099/0076 ,  F16K2099/0078 ,  F16K2099/008 ,  F16K2099/0094 ,  Y10T137/0491 ,  Y10T137/0497 ,  Y10T137/2224 ,  Y10T137/87249 ,  Y10T156/10 ,  Y10T428/24479 ,  Y10T428/24744 ,  C12Q2535/125

Abstract: A method of fabricating an elastomeric structure, comprising : forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.

Abstract translation: 一种制造弹性体结构的方法，包括：在第一微机械模具的顶部上形成第一弹性体层，所述第一微机械模具具有第一凸起突起，所述第一凸起形成沿所述第一弹性体层的底表面延伸的第一凹陷; 在第二微机械模具的顶部上形成第二弹性体层，所述第二微机械模具具有第二凸起突起，所述第二凸起形成沿着所述第二弹性体层的底表面延伸的第二凹陷; 将所述第二弹性体层的底表面结合到所述第一弹性体层的顶表面上，使得在所述第一和第二弹性体层之间的所述第二凹陷中形成控制通道; 以及将第一弹性体层定位在平面基底的顶部上，使得在第一弹性体层和平面基底之间的第一凹陷中形成流动通道。