公开(公告)号：US20100180634A1

公开(公告)日：2010-07-22

申请号：US12688332

申请日：2010-01-15

Applicant: Shigeru Maida ,  Hisatoshi Otsuka

Inventor： Shigeru Maida ,  Hisatoshi Otsuka

IPC: C03B20/00 ,  C03B19/08

CPC classification number: C03B19/1453 ,  C03B19/1469 ,  C03B2201/075 ,  C03B2201/21 ,  C03B2207/20 ,  Y02P40/57

Abstract: Disclosed is a method of producing a synthetic quartz glass for excimer laser by depositing on a target silica particulates obtained by subjecting a silica raw material to vapor-phase hydrolysis or oxidative decomposition in an oxyhydrogen flame in a vacuum sintering furnace to form a porous silica base material, vitrifying the porous silica base material, and subjecting the vitrified material to hot forming, an annealing treatment and a hydrogen doping treatment, wherein the vitrification of the porous silica base material includes: (a) a step of holding a vacuum pressure at or below 20.0 Pa in a temperature range from 400° C., inclusive, to 900° C., exclusive; (b) a step of holding a vacuum pressure at or below 10.0 Pa in a temperature range from 900° C., inclusive, to 1100° C., exclusive; and (c) a step of holding a vacuum pressure at or below 3.0 Pa in a temperature range from 1100° C. to a transparent-vitrification temperature.

Abstract translation: 公开了一种通过在真空烧结炉中在氧氢火焰中使二氧化硅原料进行气相水解或氧化分解而获得的目标二氧化硅微粒上沉积以制备准分子激光的合成石英玻璃的方法，以形成多孔二氧化硅基质 材料，玻璃化多孔二氧化硅基材，以及对玻璃化材料进行热成型，退火处理和氢掺杂处理，其中多孔二氧化硅基材的玻璃化包括：（a）将真空压力保持在或 低于20.0Pa，温度范围为400℃，至900℃，独占; （b）在900℃以上至1100℃的温度范围内保持真空压力为10.0Pa以下的工序。 和（c）在1100℃的温度范围内保持真空压力等于或低于3.0Pa的步骤至透明玻璃化温度。

公开(公告)号：US20100034998A1

公开(公告)日：2010-02-11

申请号：US12448998

申请日：2008-01-15

Applicant: Gerhard Schoetz ,  Karsten Braeuer ,  Jan Vydra

Inventor： Gerhard Schoetz ,  Karsten Braeuer ,  Jan Vydra

IPC: C03C13/04 ,  C03B37/018 ,  B28B23/08

CPC classification number: C03B37/01426 ,  C03B37/01211 ,  C03B37/01466 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/23 ,  C03B2203/42 ,  C03C3/06

Abstract: To improve a known method for making a quartz glass tube as a semifinished product for the manufacture of optical fibers, the tube comprising an inner fluorine-doped quartz glass layer and an outer quartz glass layer, so as to achieve inexpensive manufacture and improved dimensional stability of the quartz glass tube, it is suggested according to the invention that the quartz glass of the inner layer should be produced in a first plasma deposition process with formation of an inner layer having a wall thickness of at least 1.5 mm, with a fluorine content of at least 1.5% by wt. being set in the quartz glass, and that the quartz glass of the outer layer should be produced in a second plasma deposition process and deposited directly or indirectly on the inner layer with formation of a composite tube, and that the composite tube should be elongated into the quartz glass tube.

Abstract translation: 为了改进用于制造石英玻璃管作为制造光纤的半成品的已知方法，该管包括内部掺氟石英玻璃层和外部石英玻璃层，以便实现便宜的制造和改善的尺寸稳定性 的石英玻璃管，根据本发明提出，内层的石英玻璃应该在第一等离子体沉积工艺中生产，形成壁厚至少为1.5mm的内层，氟含量 至少1.5重量％。 设置在石英玻璃中，并且外层的石英玻璃应该在第二等离子体沉积工艺中生产并直接或间接沉积在内层上，形成复合管，并且复合管应该被拉长成 石英玻璃管。

公开(公告)号：US20090232463A1

公开(公告)日：2009-09-17

申请号：US12381302

申请日：2009-03-10

Applicant: Lance Gibson ,  David Peckham ,  Robert Lingle, JR.

Inventor： Lance Gibson ,  David Peckham ,  Robert Lingle, JR.

IPC: G02B6/036

CPC classification number: G02B6/03683 ,  C03B37/01211 ,  C03B37/01228 ,  C03B37/014 ,  C03B37/018 ,  C03B2201/04 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/31 ,  C03B2203/22

Abstract: The specification describes an improved optical fiber produced by a hybrid VAD/MCVD process. The core of the fiber is produced using VAD and the inner cladding layer has a depressed index and is produced using MCVD. In preferred embodiments, the optical power envelope is essentially entirely contained in VAD produced core material and the MCVD produced depressed index cladding material. Optical loss is minimized by confining most of the optical power to the VAD core where OH presence is low, as well as by maximizing the optical power in the un-doped silica region. The MCVD substrate tube material is essentially devoid of optical power.

Abstract translation: 本说明书描述了通过混合VAD / MCVD工艺生产的改进的光纤。 使用VAD制造纤维的芯，并且内包层具有凹陷指数，并且使用MCVD制造。 在优选实施例中，光功率包层基本上完全包含在VAD生产的芯材料中，并且MCVD产生凹陷的折射率包层材料。 通过将大部分光功率限制在其中OH存在低的VAD核心以及通过使未掺杂二氧化硅区域中的光功率最大化来将光损耗最小化。 MCVD衬底管材料基本上没有光学功率。

公开(公告)号：US07501367B2

公开(公告)日：2009-03-10

申请号：US11403267

申请日：2006-04-13

Applicant: Bodo Kuehn ,  Stephan Ochs ,  Steffen Kaiser ,  Denis Kassube

Inventor： Bodo Kuehn ,  Stephan Ochs ,  Steffen Kaiser ,  Denis Kassube

IPC: C03C3/06

CPC classification number: C03C3/06 ,  C03B19/1453 ,  C03B19/1469 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/21 ,  C03C4/0085 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/21 ,  C03C2201/23 ,  Y02P40/57

Abstract: To provide an optical component of quartz glass for use in a projection lens system for immersion lithography with an operating wavelength below 250 nm, which is optimized for use with linearly polarized UV laser radiation and particularly with respect to compaction and birefringence induced by anisotropic density change, it is suggested according to the invention that the quartz glass should show the combination of several properties: particularly a glass structure essentially without oxygen defects, a mean content of hydroxyl groups of less than 60 wt ppm, a mean content of fluorine of less than 10 wt ppm, a mean content of chlorine of less than 1 wt ppm. A method for producing such an optical component comprises the following method steps: producing and drying an SiO2 soot body under reducing conditions and treating the dried soot body before or during vitrification with a reagent reacting with oxygen defects of the quartz glass structure.

Abstract translation: 提供用于投影透镜系统的石英玻璃的光学部件，用于工作波长低于250nm的浸没式光刻，其被优化用于线偏振UV激光辐射，特别是关于由各向异性密度变化引起的压实和双折射 根据本发明，建议石英玻璃应显示几种性能的组合：特别是基本上没有氧缺陷的玻璃结构，羟基的平均含量小于60重量ppm，氟的平均含量小于 10重量ppm，氯的平均含量小于1重量ppm。 一种制造这种光学元件的方法包括以下方法步骤：在还原条件下制备和干燥SiO 2烟炱体，并在玻璃化之前或期间用与石英玻璃结构的氧缺陷反应的试剂处理干燥的烟炱体。

公开(公告)号：US20080066497A1

公开(公告)日：2008-03-20

申请号：US11630405

申请日：2006-03-30

Applicant: Juergen Weber ,  Tobias Pogge ,  Martin Trommer ,  Bodo Kuehn ,  Ulrich Kirst ,  Waltraud Werdecker

Inventor： Juergen Weber ,  Tobias Pogge ,  Martin Trommer ,  Bodo Kuehn ,  Ulrich Kirst ,  Waltraud Werdecker

IPC: C03C3/06 ,  C03B19/14 ,  H01L21/00

CPC classification number: C03C3/06 ,  C03B19/06 ,  C03B19/09 ,  C03B32/00 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/24 ,  C03B2201/32 ,  C03C15/00 ,  C03C19/00 ,  C03C23/0025 ,  C03C23/006 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/23 ,  C03C2201/24 ,  C03C2201/32 ,  C03C2201/50 ,  C03C2203/54 ,  C30B25/12 ,  C30B31/14 ,  C30B35/00 ,  Y02P40/57

Abstract: An ideal quartz glass for a wafer jig for use in an environment having an etching effect is distinguished by both high purity and high resistance to dry etching. To indicate a quartz glass that substantially fulfills these requirements, it is suggested according to the invention that the quartz glass is doped with nitrogen at least in a near-surface area, has a mean content of metastable hydroxyl groups of less than 30 wt ppm and that its fictive temperature is below 1250° C. and its viscosity is at least 1013 dPa·s at a temperature of 1200° C. An economic method for producing such a quartz glass comprises the following method steps: melting an SiO2 raw material to obtain a quartz glass blank, the SiO2 raw material or the quartz glass blank being subjected to a dehydration measure, heating the SiO2 raw material or the quartz glass blank to a nitriding temperature in the range between 1050° C. and 1850° C. in an ammonia-containing atmosphere, a temperature treatment by means of which the quartz glass of the quartz glass blank is set to a fictive temperature of 1250° C. or less, and a surface treatment of the quartz glass blank with formation of the quartz glass jig.

Abstract translation: 用于具有蚀刻效果的环境中的晶片夹具的理想石英玻璃的特征在于高纯度和高耐干蚀刻性。 为了表明基本满足这些要求的石英玻璃，根据本发明提出，石英玻璃至少在近表面积中掺杂氮，其平均含量小于30重量ppm， 其假想温度低于1250℃，在1200℃的温度下其粘度至少为10-13Pa。制备这种石英玻璃的经济方法包括以下方法步骤 ：将SiO 2原料熔化，得到石英玻璃坯料，将SiO 2原料或石英玻璃坯料进行脱水处理，加热SiO _{2 原料或石英玻璃坯料，在含氨气氛中在1050℃至1850℃的范围内的氮化温度，使用石英玻璃的石英玻璃 将玻璃坯料设定为1250℃以下的假想温度，进行表面处理 石英玻璃夹具形成石英玻璃夹具。}

公开(公告)号：US20080050079A1

公开(公告)日：2008-02-28

申请号：US11630051

申请日：2004-07-07

Applicant: Chan-Joo Lee ,  Ki-Wan Jang ,  Young-Beom Seo

Inventor： Chan-Joo Lee ,  Ki-Wan Jang ,  Young-Beom Seo

IPC: G02B6/036 ,  C03B37/018

CPC classification number: C03B37/01807 ,  C03B37/01853 ,  C03B2201/075 ,  C03B2201/31 ,  G02B6/03622 ,  G02B6/03694

Abstract: Disclosed is a low-attenuation single-mode optical fiber having a photoconductive core and a clad, which shows very low OH concentration in MFD (Mode Field Diameter) region. The optical fiber includes a core positioned at its center for photoconduction, and a dehydrated clad and a base clad which are coated on the clad in order. The dehydrated clad has a substantially identical refractive index to the base clad. A refractive index of the core is greater than those of the dehydrated clad and the base clad. The dehydrated clad has a relatively lower OH concentration than the base clad. The region composed of the core and the dehydrated clad has an MFD region at which OH concentration is less than 0.8 ppb.

Abstract translation: 公开了一种具有光导芯和包层的低衰减单模光纤，其在MFD（模场直径）区域中显示出非常低的OH浓度。 光纤包括位于其中心的用于感光的芯，以及依次涂覆在包层上的脱水包层和基底包层。 脱水包层具有与基底包层基本相同的折射率。 芯的折射率大于脱水包层和基底包层的折射率。 脱水包层的OH浓度比底层包层低。 由核心和脱水包层组成的区域具有OH浓度小于0.8ppb的MFD区域。

公开(公告)号：US07312170B2

公开(公告)日：2007-12-25

申请号：US10548237

申请日：2004-03-03

Applicant: Hiroyuki Nishimura ,  Akira Fujinoki

Inventor： Hiroyuki Nishimura ,  Akira Fujinoki

IPC: C03C3/06 ,  C03B37/07 ,  C03B37/075 ,  C03B37/018

CPC classification number: C03B32/00 ,  C03B19/1453 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/21 ,  C03B2201/23 ,  C03C3/06 ,  C03C4/0071 ,  C03C2201/12 ,  C03C2201/23 ,  C03C2203/40 ,  C03C2203/42 ,  Y02P40/57

Abstract: The present invention provides an optical synthetic quartz glass material which substantially does not cause changes in transmitted wave surface (TWS) by solarization, compaction (TWS delayed), rarefaction (TWS progressed) and photorefractive effect when ArF excimer laser irradiation is applied at a low energy density, e.g. at energy density per pulse of 0.3 mJ/cm2 or less. The present invention further provides a method for manufacturing the same. In order to solve the above-mentioned problems, the optical synthetic quartz glass material of the present invention is characterized in that, in a synthetic quartz glass prepared by a flame hydrolysis method using a silicon compound as a material, the followings are satisfied that the amount of SiOH is within a range of more than 10 ppm by weight to 400 ppm by weight, content of fluorine is 30 to 1000 ppm by weight, content of hydrogen is 0.1×1017 to 10×1017 molecules/cm3 and, when the amounts of SiOH and fluorine are A and B, respectively, total amount of A and B is 100 ppm by weight or more and B/A is 0.25 to 25.

Abstract translation: 本发明提供了一种光学合成石英玻璃材料，其在低温下施加ArF准分子激光照射时，通过太阳化，压实（TWS延迟），稀释（TWS进行）和光折射效应基本上不会引起透射波面（TWS）的变化 能量密度，例如 每个脉冲的能量密度为0.3mJ / cm 2以下。 本发明还提供一种制造该方法的方法。 为了解决上述问题，本发明的光学合成石英玻璃材料的特征在于，在使用硅化合物作为材料的火焰水解法制备的合成石英玻璃中，满足以下条件： SiOH的量在大于10重量ppm至400重量ppm的范围内，氟含量为30至1000重量ppm，氢含量为0.1×10 17至10 10 17分子/ cm 3，当SiOH和氟的量分别为A和B时，A和B的总量为100重量ppm以上，B / A为 0.25至25。

公开(公告)号：US07159418B2

公开(公告)日：2007-01-09

申请号：US09930693

申请日：2001-08-17

Applicant: Koji Matsuo ,  Hisatoshi Otsuka ,  Kazuo Shirota ,  Shigeru Maida

Inventor： Koji Matsuo ,  Hisatoshi Otsuka ,  Kazuo Shirota ,  Shigeru Maida

IPC: C03B19/14 ,  C03C3/06

CPC classification number: C03B19/1453 ,  C03B19/1423 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/21 ,  C03B2207/30 ,  C03B2207/64 ,  C03C3/06 ,  C03C2201/12 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2203/40 ,  C03C2203/42 ,  C03C2203/54 ,  Y02P40/57

Abstract: Fluorine-containing synthetic quartz glass is produced by feeding silica-forming material, hydrogen, and oxygen gases from a burner to a reaction zone, flame hydrolyzing the silica-forming material in the reaction zone to form particles of silica, depositing the silica particles on a rotatable substrate in the reaction zone to form a porous silica matrix, and heating and vitrifying the porous silica matrix in a fluorine compound gas-containing atmosphere. During formation of the porous silica matrix, the angle between the center axes of the silica matrix and the silica-forming reactant flame from the burner is adjusted to 90–120° so that the porous silica matrix has a density of 0.1–1.0 g/cm3 with a narrow distribution within 0.1 g/cm3. The resulting quartz glass has a high transmittance to light in the vacuum ultraviolet region below 200 nm.

Abstract translation: 含氟合成石英玻璃是通过将二氧化硅形成材料，氢气和氧气从燃烧器送入反应区而产生的，火焰水解反应区中二氧化硅形成材料，形成二氧化硅颗粒，将二氧化硅颗粒沉积在 反应区中的可旋转基底，形成多孔二氧化硅基质，并在含氟化合物气体的气氛中加热和玻璃化多孔二氧化硅基质。 在形成多孔二氧化硅基体期间，将二氧化硅基体的中心轴线与来自燃烧器的形成二氧化硅的反应物火焰之间的角度调节至90-120°，使得多孔二氧化硅基质的密度为0.1-1.0g / cm 3，窄分布在0.1g / cm 3以内。 所得的石英玻璃对于低于200nm的真空紫外线区域的光具有高透射率。

公开(公告)号：US20060281623A1

公开(公告)日：2006-12-14

申请号：US11266638

申请日：2005-11-03

Applicant: Michael Winnen ,  Todd Springer

Inventor： Michael Winnen ,  Todd Springer

IPC: C03C3/06 ,  C03B11/00 ,  C03B13/00 ,  C03B23/00 ,  C03B18/02

CPC classification number: C03B20/00 ,  C03B19/02 ,  C03B2201/04 ,  C03B2201/075 ,  C03C3/06 ,  C03C10/0009 ,  C03C2201/23 ,  Y02P40/57

Abstract: A method to form quartz glass ingots of ultra low contamination and defect levels by firing a high-purity quartz form as the feedstock, wherein the quartz glass ingot is free-formed on a platen rotating concentrically with the feedstock quartz article.

Abstract translation: 通过烧制高纯度石英形式作为原料来形成超低污染和缺陷水平的石英玻璃锭的方法，其中石英玻璃锭自由形成在与原料石英制品同心旋转的压板上。

公开(公告)号：US07130513B2

公开(公告)日：2006-10-31

申请号：US11141203

申请日：2005-06-01

Applicant: Tetsuya Haruna ,  Shinji Ishikawa ,  Toshiki Taru ,  Tetsutarou Katayama ,  Nobuyuki Taira

Inventor： Tetsuya Haruna ,  Shinji Ishikawa ,  Toshiki Taru ,  Tetsutarou Katayama ,  Nobuyuki Taira

IPC: G02B6/02

CPC classification number: C03B37/01807 ,  C03B37/01876 ,  C03B2201/04 ,  C03B2201/075 ,  C03B2201/10 ,  C03B2201/28 ,  C03B2201/31 ,  C03B2201/34 ,  C03B2201/36 ,  C03B2203/22 ,  C03B2207/90

Abstract: A method produces a glass body that contains a reduced amount of OH groups in the metallic-oxide-containing glass layer and that has a reduced amount of transmission loss due to OH groups when the glass body is transformed into an optical fiber. The production method produces an optical glass body. An optical fiber contains the optical glass body in at least one part of its region for guiding a lightwave. The production method includes the following steps: (a) introducing into a glass pipe a gas containing an organometallic compound and a glass-forming material; (b) decomposing the organometallic compound into an organic constituent and a metallic constituent; (c) heating and oxidizing the metallic constituent so that produced glass particles containing a metallic oxide are deposited on the inner surface of the glass pipe to form a glass-particle-deposited layer; and (d) consolidating the deposited layer to form a metallic-oxide-containing glass layer.

Abstract translation: 一种方法产生玻璃体，其在含金属氧化物的玻璃层中含有少量的OH基团，并且当玻璃体转变成光纤时，其具有由OH基导致的传输损失量减少的玻璃体。 该制造方法产生光学玻璃体。 光纤在其区域的至少一部分中包含用于引导光波的光学玻璃体。 制造方法包括以下步骤：（a）向玻璃管内导入含有有机金属化合物和玻璃形成材料的气体; （b）将有机金属化合物分解成有机成分和金属成分; （c）加热和氧化金属成分，使得在玻璃管的内表面上沉积含有金属氧化物的玻璃颗粒，形成玻璃颗粒沉积层; 和（d）固化沉积层以形成含金属氧化物的玻璃层。