公开(公告)号：US06803755B2

公开(公告)日：2004-10-12

申请号：US10001412

申请日：2001-10-25

Applicant: Patrick C. Herbert ,  Jeffrey R. Annis ,  Jun J. Yao ,  Winfred L. Morris ,  Henric Larsson ,  Richard D. Harris ,  Robert J. Kretschmann

Inventor： Patrick C. Herbert ,  Jeffrey R. Annis ,  Jun J. Yao ,  Winfred L. Morris ,  Henric Larsson ,  Richard D. Harris ,  Robert J. Kretschmann

IPC: G01R3302

CPC classification number: H03H9/462 ,  B81B3/0072 ,  B81B2201/032 ,  B81B2203/0109 ,  B81B2203/051

Abstract: In a MEMS device employing a beam supported by transverse arms, potential bowing of the transverse arms caused by fabrication processes, temperature or local self-heating from resistive losses is accommodated by flexible terminations of the transverse arms. Alternatively, this bowing is controlled so as to provide selective biasing to the beam or mechanical advantage in the sensing of beam motion.

Abstract translation: 在使用由横臂支撑的光束的MEMS装置中，通过制造工艺引起的横向臂的电位弯曲，来自电阻损耗的温度或局部自加热由横向臂的柔性端接来适应。 或者，该弯曲被控制以便在光束运动的感测中提供对光束的选择偏置或机械优点。

公开(公告)号：US06718764B1

公开(公告)日：2004-04-13

申请号：US10184492

申请日：2002-06-28

Applicant: Niladri Sarkar ,  Aaron Geisberger

Inventor： Niladri Sarkar ,  Aaron Geisberger

IPC: F01B2910

CPC classification number: G02B6/4226 ,  B81B3/0024 ,  B81B2201/032

Abstract: A system and method of adjusting the power off positioning of a microactuator is disclosed. The microactuator has a first power off position and comprises a bimorph component. The bimorph comprises at least two materials, wherein the materials have different thermal expansion characteristics. When heated, the bimorph component of the microactuator bends due to asymmetric thermal expansion of the materials. If one of said materials is forced beyond a yield point, then when cooled, the actuator assumes a second power off position. The microactuator maintains the second power off position due to stress in the bimorph, which is induced by forcing the material beyond its yield point.

Abstract translation: 公开了一种微调制动器的停电定位调节系统和方法。 微致动器具有第一断电位置并且包括双压电晶片部件。 双压电晶片包括至少两种材料，其中材料具有不同的热膨胀特性。 当加热时，微致动器的双压电晶片由于材料的不对称热膨胀而弯曲。 如果所述材料之一被强制超过屈服点，则当冷却时，致动器采取第二次断电位置。 微致动器由于双压电晶片中的应力而保持第二断电位置，这是通过迫使材料超出其屈服点而引起的。

公开(公告)号：US20030184189A1

公开(公告)日：2003-10-02

申请号：US10112369

申请日：2002-03-29

Inventor： Michael J. Sinclair

IPC: H02N001/00

CPC classification number: B81B3/0054 ,  B81B2201/032 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2201/047

Abstract: An electrostatic bimorph actuator includes a cantilevered flexible bimorph arm that is secured and insulated at one end to a planar substrate. In an electrostatically activated state the bimorph arm is generally parallel to the planar substrate. In a relaxed state, residual stress in the bimorph arm causes its free end to extend out-of-plane from the planar substrate. The actuator includes a substrate electrode that is secured to and insulated from the substrate and positioned under and in alignment with the bimorph arm. An electrical potential difference applied between the bimorph arm and the substrate electrode imparts electrostatic attraction between the bimorph arm and the substrate electrode to activate the actuator. As an exemplary application in which such actuators could be used, a microelectrical mechanical optical display system is described.

Abstract translation: 静电双压电晶片致动器包括悬臂式柔性双压电晶臂，其在一端固定并绝缘到平面衬底。 在静电激活状态下，双压电晶片臂通常平行于平面衬底。 在松弛状态下，双压电晶片臂中的残余应力使其自由端从平面基板向外延伸。 致动器包括固定到基板并与基板绝缘并位于双压电晶片臂下方并与之对准的基板电极。 施加在双压电晶片臂和衬底电极之间的电势差使得双压电晶片臂和衬底电极之间的静电吸引力激活致动器。 作为可以使用这种致动器的示例性应用，描述了一种微电子机械光学显示系统。

公开(公告)号：US20030121260A1

公开(公告)日：2003-07-03

申请号：US10036810

申请日：2001-12-31

Inventor： Michael J. Sinclair

IPC: F02G001/04 ,  F01B029/10

CPC classification number: F03G7/06 ,  B81B3/0024 ,  B81B3/0037 ,  B81B2201/032 ,  B81B2203/0109 ,  B81B2203/051 ,  F02G1/04

Abstract: A unilateral in-plane thermal buckle-beam microelectrical mechanical actuator is formed on a planar substrate of semiconductor material, for example. The actuator includes first and second anchors secured to the substrate and a floating shuttle positioned movable parallel to the substrate. Symmetric first and second sets of elongated thermal half-beams are secured between the floating shuttle and the respective first and second anchors. The first and second anchors and the first and second sets of thermal half-beams are positioned along one side of the floating shuttle. The half-beams are formed of semiconductor material, such as polysilicon. A current source directs electrical current through the thermal half beams via the anchors to impart thermal expansion of the thermal half-beams and hence linear motion of the floating center beam generally parallel to the substrate. A floating cold beam connected between the shuttle and the substrate constrains and amplifies the motion of the shuttle in a predefined direction.

Abstract translation: 例如，在半导体材料的平面基板上形成单边平面内的热扣梁微电机械致动器。 致动器包括固定到基板上的第一和第二锚定件以及平行于基板移动的浮动梭。 对称的第一和第二组细长的热半束固定在浮动梭和相应的第一和第二锚固件之间。 第一和第二锚定装置以及第一和第二组热半束装置沿浮动梭的一侧定位。 半波束由诸如多晶硅的半导体材料形成。 电流源通过锚定器引导电流通过热半束，以赋予热半光束的热膨胀，并因此使浮动中心光束与基底平行的线性运动。 连接在梭子和基底之间的浮动冷束限制并放大梭子在预定方向上的运动。

公开(公告)号：US06496351B2

公开(公告)日：2002-12-17

申请号：US09822128

申请日：2001-03-30

Applicant: Edward A. Hill ,  Ramaswamy Mahadevan

Inventor： Edward A. Hill ,  Ramaswamy Mahadevan

IPC: H01G501

CPC classification number: H01H1/0036 ,  B81B3/001 ,  B81B2201/032 ,  B81B2203/0118 ,  B81B2203/0307 ,  F03G7/06 ,  H01G5/16 ,  H01G5/18 ,  H01H59/0009 ,  H01H61/02 ,  H01H2059/0063 ,  H01H2059/0072 ,  H01H2059/0081 ,  H01H2061/006

Abstract: MEMS devices include a substrate, an anchor attached to the substrate, and a multilayer member attached to the anchor and spaced apart from the substrate. The multilayer member can have a first portion that is remote from the anchor and that curls away from the substrate and a second portion that is adjacent the anchor that contacts the substrate. Related methods are also disclosed.

公开(公告)号：US20020086540A1

公开(公告)日：2002-07-04

申请号：US09682894

申请日：2001-10-30

Inventor： Kyle Lebouitz

IPC: H01L021/311

CPC classification number: G01J5/40 ,  B81B3/0081 ,  B81B2201/0278 ,  B81B2201/032 ,  B81B2203/0118 ,  G01J5/02 ,  G01J5/0225 ,  G01J5/023 ,  G01J5/06

Abstract: This invention relates to the construction of microfabricated devices and, in particular, to types of microfabricated devices requiring thermal isolation from the substrates upon which they are built. This invention discloses vertical thermal isolators and methods of fabricating the vertical thermal isolators. Vertical thermal isolators offer an advantage over thermal isolators of the prior art, which were substantially horizontal in nature, in that less wafer real estate is required for the use of the vertical thermal isolators, thereby allowing a greater density per unit area of the microfabricated devices.

Abstract translation: 本发明涉及微制造装置的构造，特别涉及需要从其构建基板的热隔离的微加工装置的类型。 本发明公开了垂直热隔离器和垂直隔热器的制造方法。 垂直隔热器具有优于现有技术的隔热装置的优点，其本质上基本上是水平的，因为使用垂直热隔离器需要更少的晶片实际尺寸，从而允许每单位面积的微加工装置的密度更大 。

公开(公告)号：US5606452A

公开(公告)日：1997-02-25

申请号：US548034

申请日：1995-10-25

Applicant: Yong-Ki Min

Inventor： Yong-Ki Min

IPC: G02B5/09 ,  B81B3/00 ,  G02B5/10 ,  G02B7/18 ,  G02B26/08 ,  G09F9/37 ,  H04N5/74 ,  H04N9/30 ,  G02B26/00

CPC classification number: B81C1/00214 ,  B81C1/00174 ,  G02B26/0858 ,  H04N9/30 ,  B81B2201/032 ,  B81B2201/042 ,  B81C2201/0109

Abstract: An array of M.times.N thin film actuated mirrors includes an active matrix having a substrate with an array of M.times.N connecting terminals and an array of M.times.N transistors, and an array of M.times.N actuating structures, wherein each of the actuating structures being a bimorph structure, includes a second thin film electrode, a lower electrodisplacive member, an intermediate thin film electrode, an upper electrodisplacive member and a first thin film electrode. Furthermore, there is disclosed a method for the manufacture thereof, the method comprising the steps of: providing an active matrix; forming a thin film sacrificial layer on top of the active matrix; removing selectively the thin film sacrificial layer; forming a second thin film electrode layer thereon; removing selectively the second thin film electrode layer; depositing a lower electrodisplacive layer; forming an intermediate electrode layer; depositing an upper electrodisplacive layer; forming a first thin film electrode layer, thereby forming a multiple layered structure; patterning the multiple layered structure into an array of M.times.N semifinished actuating structures; and removing the thin film sacrificial layer.

Abstract translation: MxN薄膜致动反射镜阵列包括具有MxN连接端子阵列和MxN晶体管阵列的衬底以及MxN致动结构阵列的有源矩阵，其中每个致动结构是双压电晶片结构，包括一个 第二薄膜电极，下电致位移元件，中间薄膜电极，上部电致位移元件和第一薄膜电极。 此外，公开了一种制造方法，该方法包括以下步骤：提供有源矩阵; 在有源矩阵的顶部形成薄膜牺牲层; 选择性地去除薄膜牺牲层; 在其上形成第二薄膜电极层; 选择性地去除第二薄膜电极层; 沉积较低的电致位移层; 形成中间电极层; 沉积上部电致位移层; 形成第一薄膜电极层，从而形成多层结构; 将多层结构图案化成MxN半成品致动结构的阵列; 并去除薄膜牺牲层。

公开(公告)号：EP3343265A1

公开(公告)日：2018-07-04

申请号：EP17172096.4

申请日：2017-05-19

Applicant: STMicroelectronics S.r.l.

Inventor： CARMINATI, Roberto ,  GIUSTI, Domenico ,  COSTANTINI, Sonia

IPC: G02B26/08

CPC classification number: G02B26/0858 ,  B81B3/0083 ,  B81B2201/032 ,  B81B2203/0118 ,  G02B26/105 ,  H04N9/3129

Abstract: A MEMS device comprising a fixed structure (22) and a suspended structure (26) including an internal structure (29; 109) and a first arm (B1) and a second arm (B2), each of which has a respective first end and a respective second end, the first ends being fixed to the fixed structure and being angularly arranged at a distance apart, the second ends being fixed to the internal structure, being angularly arranged at a distance apart and being arranged angularly in a same direction of rotation with respect to the corresponding first ends. The MEMS device further includes a number of piezoelectric actuators (50, 52, 54, 56), each of which can be driven so as to cause deformation of a corresponding arm, thus causing a rotation of the internal structure. In resting conditions, each of the first and second arms has a respective elongated portion (30, 32) with a respective concavity. The internal structure extends in part within the concavities of the elongated portions of the first and second arms.

公开(公告)号：EP3009395B1

公开(公告)日：2017-03-22

申请号：EP15188669.4

申请日：2015-10-07

Applicant: Ricoh Company, Ltd.

Inventor： NAKAGAWA, Jun ,  HASHIGUCHI, Tsuyoshi ,  WATANABE, Eri ,  AKANUMA, Goichi ,  KITAZAWA, Tomofumi

IPC: B81B3/00 ,  H01L41/053 ,  H01L41/113

CPC classification number: G02B26/101 ,  B81B3/0045 ,  B81B2201/032 ,  B81B2201/042 ,  G02B26/0858 ,  H04N9/3129

公开(公告)号：EP3037381A1

公开(公告)日：2016-06-29

申请号：EP15202061.6

申请日：2015-12-22

Applicant: Commissariat à l'Énergie Atomique et aux Énergies Alternatives

Inventor： HILT, Thierry

IPC: B81B3/00 ,  H01H1/00

CPC classification number: G05G11/00 ,  B81B3/0051 ,  B81B2201/032 ,  B81B2201/037 ,  B81B2203/051 ,  H01H1/0036 ,  H01H2001/0078 ,  H01L41/08

Abstract: Actionneur comportant deux dispositifs comprenant chacun un élément déformable (4, 104) hors plan, ledit élément déformable (4, 104) comprenant une première extrémité fixe (4.1, 104.1) ancrée sur un substrat et une deuxième extrémité libre (4.2, 104.2) par rapport au substrat, ledit dispositif comportant également des moyens de guidage en translation de la deuxième extrémité libre (4.2) dans le plan le long d'une première direction (X), le premier élément déformable (4, 104) étant apte à être déformé hors plan par application d'un stimulus de sorte que la deuxième extrémité libre (4.2, 104.2) se rapproche de la premier extrémité fixe (4.1, 104.1) selon un mouvement de translation dans le plan. L'actionneur comportant également un élément mobile en rotation (8) autour d'un axe (Z) orthogonal au plan et relié mécaniquement aux extrémités libres (4.2, 104.2) des éléments déformables (4,104) et un élément mobile en translation (18) relié mécaniquement à l'élément mobile en rotation (8).

Abstract translation: 的致动器，其包括两个装置各包括外的平面中的可变形元件，所述可变形元件，其包括第一固定端锚定在一个基材和相对于所述基板的第二自由端，所述装置，从而包括装置以引导在第二自由端 面内沿着第一方向平移，所述第一可变形元件能够通过刺激的应用变形外的平面的所以也第二自由端贴近第一固定端继面内平移运动。 所以，致动器在轴线正交的平面中旋转大约元件移动的并包括机械地连接到所述可变形元件的自由端，和一个平移移动元件机械地连接到与旋转移动元件。