公开(公告)号：WO2004059704A1

公开(公告)日：2004-07-15

申请号：PCT/US2002/041318

申请日：2002-12-26

Applicant: KIONIX INC. ,  ADAMS, Scott, G. ,  MILLER, Scott, A.

Inventor： MILLER, Scott, A.

IPC: H01L21/00

CPC classification number: H01L21/76229 ,  B81B3/0086 ,  B81B2203/033 ,  B81C1/00126 ,  B81C2201/0178 ,  H01L21/31612 ,  H01L21/31662 ,  H01L21/76208

Abstract: A method of manufacturing an insulating micro-structure (100) by etching a plurality of trenches in a silicon substrate (101) and filling said trenches with insulating materials (105, 107). The trenches are etched and then oxidized until completely or almost completely filled with silicon dioxide. Additional insulating material is then deposited as necessary to fill any remaining trenches, thus forming the structure. When the top of the structure is metallized, the insulating structure increases voltage resistance and reduces the capacitive coupling between the metal (109) and the silicon substrate. Part of the silicon substrate underlying the structure is optionally removed further to reduce the capacitive coupling effect. Hybrid silicon-insulator structures can be formed to gain the effect of the benefits of the structure in three-dimensional configurations, and to permit metallization of more than one side of the structure.

Abstract translation: 一种通过蚀刻硅衬底（101）中的多个沟槽并用绝缘材料（105,107）填充所述沟槽来制造绝缘微结构（100）的方法。 蚀刻沟槽，然后氧化直到完全或几乎完全充满二氧化硅。 然后根据需要沉积额外的绝缘材料以填充任何剩余的沟槽，从而形成结构。 当结构的顶部被金属化时，绝缘结构增加了电阻并降低了金属（109）和硅衬底之间的电容耦合。 可选地，进一步去除结构底层的硅衬底的一部分以降低电容耦合效应。 可以形成混合硅 - 绝缘体结构以获得三维结构中结构的益处的效果，并且允许结构多于一侧的金属化。

公开(公告)号：CA2467503C

公开(公告)日：2009-12-22

申请号：CA2467503

申请日：2002-10-16

Applicant: KIONIX INC

Inventor： MILLER SCOTT A ,  JOHNSON WENDY JO H ,  ADAMS SCOTT G

IPC: G01P15/125 ,  G01P9/04 ,  G01P15/08 ,  H01L29/00

Abstract: An accelerometer (100) comprising a silicon wafer is etched to form a fixed portion (400), a movable portion (300), and a resilient coupling (120) between, the fixed and movable portions generally arranged in the plane of t he wafer, the mass of the movable portion being concentrated on one side of the resilient coupling. One of the fixed and moveable portions of the silicon structure includes a first electrode. The other of the fixed and moveable portions includes a second electrode oriented parallel to the axis of acceleration, and an electrically-conductive layer electrically connected as a third electrode coplanar and mechanically coupled with the second electrode. The second and third electrodes are arranged in capacitive opposition to the first electrode, the capacitance between the first electrode and third electrode increasing as the movable portion moves in a direction along the axis of acceleration relative to the fixed portion and decreasing as the movable portion moves in an opposite direction. A resilient coupling retains the first and third electrodes in capacitive opposition to each other across a capacitance gap while allowing motion of the first electrode relative to the second and third electrodes in response to acceleration along an axis of acceleration perpendicular to the plane of the wafer, and resiliently restor es the first electrode to an equilibrium position when the acceleration ceases. The second electrode is in opposition to a majority of the surface area of t he first electrode when the electrodes are in the equilibrium position. Capacitance between the first and third electrodes is measured to obtain a measurement of acceleration along the axis.

公开(公告)号：HK1105910A1

公开(公告)日：2008-02-29

申请号：HK07111306

申请日：2004-12-09

Applicant: KIONIX INC ,  ADVION BIOSYSTEMS INC

Inventor： MOON JAMES E ,  SCHULTZ GARY A ,  CORSO THOMAS N ,  DAVIS TIMOTHY J ,  GALVIN GREGORY J ,  LOWES STEPHEN

IPC: G01N27/62 ,  B01D20100101 ,  B01D15/08 ,  G01N20100101 ,  G01N30/60 ,  G01N30/72 ,  G01N37/00 ,  H01J49/04

Abstract: An electrospray device, a liquid chromatography device and an electrospray-liquid chromatography system are disclosed. The electrospray device comprises a substrate defining a channel between an entrance orifice on an injection surface and an exit orifice on an ejection surface, a nozzle defined by a portion recessed from the ejection surface surrounding the exit orifice, and an electrode for application of an electric potential to the substrate to optimize and generate an electrospray; and, optionally, additional electrode(s) to further modify the electrospray. The liquid chromatography device comprises a separation substrate defining an introduction channel between an entrance orifice and a reservoir and a separation channel between the reservoir and an exit orifice, the separation channel being populated with separation posts perpendicular to the fluid flow; a cover substrate bonded to the separation substrate to enclose the reservoir and the separation channel adjacent the cover substrate; and, optionally, electrode(s) for application of a electric potential to the fluid. The exit orifice of the liquid chromatography device may be homogeneously interfaced with the entrance orifice of the electrospray device to form an integrated single system. An array of multiple systems may be fabricated in a single monolithic chip for rapid sequential fluid processing and generation of electrospray for subsequent analysis, such as by positioning the exit orifices of the electrospray devices near the sampling orifice of a mass spectrometer.

公开(公告)号：NO20073803L

公开(公告)日：2007-10-17

申请号：NO20073803

申请日：2007-07-20

Applicant: KIONIX INC

Inventor： ADAMS SCOTT G ,  MILLER SCOTT A ,  SHEN-EPSTEIN JUNE ,  EPSTEIN KEITH

IPC: G01P15/125 ,  G01P15/18

Abstract: In an embodiment of the present invention there is provided a micro-electromechanical (MEMS) accelerometer, including a substrate, a first sensor and a second sensor. The first sensor is configured to measure an acceleration along a first axis parallel to a plane of the substrate. The second sensor is configured to measure an acceleration along an axis perpendicular to the plane of the substrate. The second sensor comprises a first beam, a second beam and a single support structure. The single support structure supports the first and second beams relative to the substrate, wherein the first and second beams circumscribe the first sensor.

公开(公告)号：CA2540273A1

公开(公告)日：2005-04-07

申请号：CA2540273

申请日：2004-09-20

Applicant: KIONIX INC

Inventor： CHOJNACKI ERIC P ,  SHEN-EPSTEIN JUNE P ,  NISTOR VASILE ,  STIRLING NATHAN L ,  NENADIC NENAD

IPC: G01P9/04 ,  G01C19/56

Abstract: An oscillatory rate sensor is described for sensing rotation about the "z-axis". It is tuning-fork in nature with structural linkages and dynamics such that fundamental anti-phase oscillation of two proof masses is accomplished by virtue of the mechanical linkages.

公开(公告)号：HK1066859A1

公开(公告)日：2005-04-01

申请号：HK04109751

申请日：2004-12-09

Applicant: ADVION BIOSCIENCES IN ,  KIONIX INC

Inventor： MOON JAMES ,  SCHULTZ GARY ,  CORSO THOMAS ,  DAVIS TIMOTHY ,  GALVIN GREGORY ,  LOWES STEPHEN

IPC: G01N20060101 ,  B01D20060101 ,  G01N27/62 ,  B01D15/08 ,  G01N30/60 ,  G01N30/72 ,  G01N37/00 ,  H01J20060101 ,  H01J49/04

Abstract: An electrospray device, a liquid chromatography device and an electrospray-liquid chromatography system are disclosed. The electrospray device comprises a substrate defining a channel between an entrance orifice on an injection surface and an exit orifice on an ejection surface, a nozzle defined by a portion recessed from the ejection surface surrounding the exit orifice, and an electrode for application of an electric potential to the substrate to optimize and generate an electrospray; and, optionally, additional electrode(s) to further modify the electrospray. The liquid chromatography device comprises a separation substrate defining an introduction channel between an entrance orifice and a reservoir and a separation channel between the reservoir and an exit orifice, the separation channel being populated with separation posts perpendicular to the fluid flow; a cover substrate bonded to the separation substrate to enclose the reservoir and the separation channel adjacent the cover substrate; and, optionally, electrode(s) for application of a electric potential to the fluid. The exit orifice of the liquid chromatography device may be homogeneously interfaced with the entrance orifice of the electrospray device to form an integrated single system. An array of multiple systems may be fabricated in a single monolithic chip for rapid sequential fluid processing and generation of electrospray for subsequent analysis, such as by positioning the exit orifices of the electrospray devices near the sampling orifice of a mass spectrometer.

公开(公告)号：AU5612100A

公开(公告)日：2001-01-02

申请号：AU5612100

申请日：2000-06-14

Applicant: KIONIX INC

Inventor： MOON JAMES E ,  DAVIS TIMOTHY J ,  GALVIN GREGORY J ,  SHAW KEVIN A ,  WALDROP PAUL C ,  WILSON SHARLENE A

IPC: G01N37/00 ,  B01D15/08 ,  B05B5/00 ,  B81B1/00 ,  B81C1/00 ,  H01L21/302 ,  H01L21/3065

Abstract: Three fundamental and three derived aspects of the present invention are disclosed. The three fundamental aspects each disclose a process sequence that may be integrated in a full process. The first aspect, designated as "latent masking", defines a mask in a persistent material like silicon oxide that is held abeyant after definition while intervening processing operations are performed. The latent oxide pattern is then used to mask an etch. The second aspect, designated as " simultaneous multi- level etching (SMILE)", provides a process sequence wherein a first pattern may be given an advanced start relative to a second pattern in etching into an underlying material, such that the first pattern may be etched deeper, shallower, or to the same depth as the second pattern. The third aspect, designated as "delayed LOCOS", provides a means of defining a contact hole pattern at one stage of a process, then using the defined pattern at a later stage to open the contact holes. The fourth aspect provides a process sequence that incorporates all three fundamental aspects to fabricate an integrated liquid chromatography (LC)/electrospray ionization (ESI) device. The fifth aspect provides a process sequence that incorporates two of the fundamental aspects to fabricate an ESI device. The sixth aspect provides a process sequence that incorporates two of the fundamental aspects to fabricate an LC device. The process improvements described provide increased manufacturing yield and design latitude in comparison to previously disclosed methods of fabrication.

公开(公告)号：US20200041538A1

公开(公告)日：2020-02-06

申请号：US16446433

申请日：2019-06-19

Applicant: Kionix, Inc.

Inventor： Andrew Hocking

IPC: G01P15/13 ,  B81B7/02

Abstract: A MEMS includes, in part, a parallel plate capacitor, a proofmass adapted to be displaced by a first distance from a rest state in response to a first voltage applied to the capacitor, and a piezoelectric material adapted to generate a second voltage in response to an external force applied to the MEMS. The second voltage causes the MEMS to transition from a standby mode to an active mode of operation. The proofmass is displaced by a second distance in response to the external force thereby causing the piezoelectric material to generate the second voltage. A spring couples the proofmass to the piezoelectric material, and a transistor turns on in response to the second voltage thereby causing the MEMS to transition to the active mode of operation. The proofmass returns to the rest state when the MEMS is in the active mode of operation.

公开(公告)号：US20180282153A1

公开(公告)日：2018-10-04

申请号：US15677994

申请日：2017-08-15

Applicant: Kionix, Inc.

Inventor： Martin Heller ,  Toma Fujita

IPC: B81C1/00 ,  B32B15/04 ,  B81B7/00 ,  B32B15/20 ,  H01L23/02

Abstract: A MEMS device formed in a first semiconductor substrate is sealed using a second semiconductor substrate. To achieve this, an Aluminum Germanium structure is formed above the first substrate, and a polysilicon layer is formed above the second substrate. The first substrate is covered with the second substrate so as to cause the polysilicon layer to contact the Aluminum Germanium structure. Thereafter, eutectic bonding is performed between the first and second substrates so as to cause the Aluminum Germanium structure to melt and form an AlGeSi sealant thereby to seal the MEMS device. Optionally, the Germanium Aluminum structure includes, in part, a layer of Germanium overlaying a layer of Aluminum.

公开(公告)号：US10030976B2

公开(公告)日：2018-07-24

申请号：US14710991

申请日：2015-05-13

Applicant: Kionix, Inc.

Inventor： Jonah DeWall

IPC: G01C19/56 ,  G01C19/5684 ,  G01C19/5712 ,  G01C19/5776

Abstract: A gyroscope includes a resonator, a transducer, and a comparator. The comparator is designed to receive an input signal from the transducer and compare the input signal with a reference signal to produce an output signal. Rising and falling edge transitions of the output signal are substantially synchronized with a motion of the resonator along a sense-axis of the transducer.