-
公开(公告)号：DE3626922A1
公开(公告)日：1987-11-26
申请号：DE3626922
申请日：1986-08-08
Applicant: FUSION SYSTEMS CORP
Inventor： URY MICHAEL G , LYNCH DONALD , KAMAREHI MOHAMMAD , WOOD CHARLES H
Abstract: The invention relates to a light source which has no electrodes and is supplied with microwaves, and in which a relatively high energy level is coupled to the bulb. This is achieved in that a plurality of energy oscillation types, which are essentially decoupled from one another, are produced in a microwave cavity.
-
公开(公告)号：DE3336473A1
公开(公告)日：1984-05-03
申请号：DE3336473
申请日：1983-10-06
Applicant: FUSION SYSTEMS CORP
Inventor： URY MICHAEL G , WOOD CHARLES H
-
公开(公告)号：DE3336421A1
公开(公告)日：1984-05-03
申请号：DE3336421
申请日：1983-10-06
Applicant: FUSION SYSTEMS CORP
Inventor： MUELLER PETER , URY MICHAEL G , WOOD CHARLES H
Abstract: An electrodeless lamp bulb for producing relatively high radiation output in the deep ultraviolet part of the spectrum when excited with microwave energy wherein the bulb envelope is made of synthetic quartz which is substantially water-free. This results in increased bulb lifetime, since loss of bulb transparency with exposure to deep ultraviolet radiation over time is substantially reduced. An electrodeless lamp incorporating the above-described bulb includes a microwave chamber in which the bulb is situated and means for coupling microwave energy to the chamber.
-
公开(公告)号：DE3311249A1
公开(公告)日：1983-10-06
申请号：DE3311249
申请日：1983-03-28
Applicant: FUSION SYSTEMS CORP
Inventor： MATTHEWS JOHN C , URY MICHAEL G , WOOD CHARLES H , GREENBLATT MARSHAL
IPC: F21S2/00 , G03F7/20 , H01J65/04 , H01L21/027 , H01L21/31
Abstract: A method and apparatus for performing deep UV photolithography which utilizes a microwave generated electrodeless light source for producing deep UV radiation. This results in faster semiconductor exposure times and less system downtime for changing failed bulbs as well as other advantages which are detailed herein.
-
-
-
Search Results
34
records
(took 0.023 seconds)
