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    31.
    发明专利
    未知

    公开(公告)号：NO20020140D0

    公开(公告)日：2002-01-11

    申请号：NO20020140

    申请日：2002-01-11

    Applicant: INPUT OUTPUT INC

    Inventor： YU DULI ,  YU LIANZHONG ,  GOLDBERG HOWARD D ,  SCHMIDT MARTIN A ,  RIED ROBERT P

    IPC: G02B26/10 ,  B81B3/00 ,  G02B7/182 ,  G02B26/08 ,  G06K7/10 ,  G02B

    Abstract: A micro machined mirror assembly is provided that includes a micro machined top cap, mirror, and bottom cap mounted onto a ceramic substrate. The micro machined mirror is resiliently supported by a pair of T-shaped hinges and includes travel stops that limit motion of the mirror in the z-direction. The top and bottom micro machined caps also include travel stops that limit motion of the mirror in the z-direction.

    ACCELEROMETER WITH RE-ENTRANT GROOVES
    32.
    发明专利
    ACCELEROMETER WITH RE-ENTRANT GROOVES 未知

    公开(公告)号：CA2410909A1

    公开(公告)日：2001-12-06

    申请号：CA2410909

    申请日：2001-05-29

    Applicant: INPUT OUTPUT INC

    Inventor： YU LIANZHONG ,  SCHMIDT MARTIN A ,  GOLDBERG HOWARD D ,  RIED ROBERT P ,  SELVAKUMAR ARJUN

    IPC: G01P15/08 ,  G01P15/125 ,  G01V1/18 ,  G01P15/00

    Abstract: An accelerometer (305) which comprises a measurement mass assembly having to p capacitor electrode (705), with one or more re-entrant openings or grooves (1405), a bottom capacitor electrode (805), with one or more re-entrant openings (1410), and/or a mass electrode pattern (910, 915), which also includes one or more re-entrant openings or grooves (1415, 1420). A re-entra nt opening or groove is an opening or groove formed in an element whereby the opening or groove is larger toward the center of the element than at the surface of the element. Re-entrant openings or grooves (1405, 1410, 1415, 1420) reduce fluid damping thereby reducing the amount of thermo-mechanical noise and permit increased sealing pressure of the accelerometer (305) there by lowering manufacturing costs and increasing production yields.

    ACCELEROMETER WITH RE-ENTRANT GROOVES
    35.
    发明公开
    ACCELEROMETER WITH RE-ENTRANT GROOVES 审中-公开
    BESCHLEUNIGUNGSMESSER MIT WIEDEREINTRETRILLEN

    公开(公告)号：EP1305639A4

    公开(公告)日：2004-03-24

    申请号：EP01939582

    申请日：2001-05-29

    Applicant: INPUT OUTPUT INC

    Inventor： RIED ROBERT P ,  SELVAKUMAR ARJUN ,  GOLDBERG HOWARD D ,  SCHMIDT MARTIN A ,  YU LIANZHONG

    IPC: G01P15/08 ,  G01P15/125 ,  G01V1/18 ,  G01P15/00 ,  G01P1/00

    CPC classification number: G01V1/181 ,  G01P15/0802 ,  G01P15/125

    Abstract: An accelerometer (305) which comprises a measurement mass assembly having top capacitor electrode (705), with one or more re-entrant openings or grooves (1405), a bottom capacitor electrode (805), with one or more re-entrant openings (1410), and/or a mass electrode pattern (910, 915), which also includes one or more re-entrant openings or grooves (1415, 1420). A re-entrant opening or groove is an opening or groove formed in an element whereby the opening or groove is larger toward the center of the element than at the surface of the element. Re-entrant openings or grooves (1405, 1410, 1415, 1420) reduce fluid damping thereby reducing the amount of thermo-mechanical noise and permit increased sealing pressure of the accelerometer (305) thereby lowering manufacturing costs and increasing production yields.

    Abstract translation: 包括具有顶部电容器电极（705），一个或多个凹入开口或凹槽（1405），底部电容器电极（805）的测量质量组件的加速度计（305），具有一个或多个凹入开口 和/或质量电极图案（910,915），其还包括一个或多个凹入开口或凹槽（1415,1420）。 凹入开口或凹槽是在元件中形成的开口或凹槽，由此开口或凹槽朝向元件的中心比在元件的表面处更大。 凹入开口或凹槽（1405,1410,1415,1420）减少流体阻尼，从而减少热机械噪声的量并允许加速度计（305）的增加的密封压力，从而降低制造成本并提高产量。

    ACCELEROMETER WITH FOLDED BEAMS
    36.
    发明专利
    ACCELEROMETER WITH FOLDED BEAMS 未知

    公开(公告)号：CA2413965C

    公开(公告)日：2011-01-11

    申请号：CA2413965

    申请日：2001-06-21

    Applicant: INPUT OUTPUT INC

    Inventor： SELVAKUMAR ARJUN ,  YU DULI ,  YU LIANZHONG ,  JONES BEN W

    IPC: G01P15/00 ,  B81B3/00 ,  B81C1/00 ,  G01P15/08 ,  G01P15/125 ,  G01V1/18

    Abstract: An accelerometer comprising a measuring mass (1405) for detecting acceleration, including a housing having a cavity, one or more spring mass assemblies (1400) positioned within the cavity, wherein each spring mass assembly (1400) includes a support structure (1410), including one or more resilient folded beams (1415a-1415d) coupled to the support structure (1410) and the measuring mass (1405) is coupled to the resilent folded beams (1415a-1415d), wherein one or more electrode patterns are coupled to the spring mass assembly (1400), wherein a top cap wafer, including a top capacitor electrode, is coupled to the measurement mass (1405), and a bottom cap wafer, including a bottom capacitor electrode, is also coupled to measurement mass (1405).

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