公开(公告)号：EP2837031A4

公开(公告)日：2015-11-18

申请号：EP13775490

申请日：2013-04-08

Applicant: KLA TENCOR CORP

Inventor： CHERN JEHN-HUAR ,  EHSANI ALI R ,  DELGADO GILDARDO ,  BROWN DAVID L ,  CHUANG YUNG-HO ALEX ,  FIELDEN JOHN

IPC: H01L27/146 ,  G01N21/95

CPC classification number: H01L31/0216 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/95676 ,  H01L27/1462 ,  H01L27/1464 ,  H01L27/14685 ,  H01L27/14806

Abstract: An image sensor for short-wavelength light and charged particles includes a semiconductor membrane, circuit elements formed on one surface of the semiconductor membrane, and a pure boron layer on the other surface of the semiconductor membrane. This image sensor has high efficiency and good stability even under continuous use at high flux for multiple years. The image sensor may be fabricated using CCD (charge coupled device) or CMOS (complementary metal oxide semiconductor) technology. The image sensor may be a two-dimensional area sensor, or a one-dimensional array sensor. The image sensor can be included in an electron-bombarded image sensor and/or in an inspection system.

公开(公告)号：EP3117495A4

公开(公告)日：2017-11-29

申请号：EP15809376

申请日：2015-06-18

Applicant: KLA-TENCOR CORP

Inventor： CHUANG YUNG-HO ALEX ,  LOIU JUSTIN DIANHUAN ,  LU XIAOXU ,  ARMSTRONG J JOSEPH ,  DENG YUJUN ,  FIELDEN JOHN

IPC: H01S3/00 ,  G03F7/20

CPC classification number: H01S3/10046 ,  G03F7/70025 ,  H01S3/005 ,  H01S3/0071 ,  H01S3/08004 ,  H01S3/08054 ,  H01S3/08059 ,  H01S3/083 ,  H01S3/10 ,  H01S3/10061 ,  H01S2301/20 ,  H01S2301/203 ,  H01S2301/206

Abstract: A repetition rate (pulse) multiplier includes one or more beam splitters and prisms forming one or more ring cavities with different optical path lengths that delay parts of the energy of each pulse. A series of input laser pulses circulate in the ring cavities and part of the energy of each pulse leaves the system after traversing the shorter cavity path, while another part of the energy leaves the system after traversing the longer cavity path, and/or a combination of both cavity paths. By proper choice of the ring cavity optical path length, the repetition rate of an output series of laser pulses can be made to be a multiple of the input repetition rate. The relative energies of the output pulses can be controlled by choosing the transmission and reflection coefficients of the beam splitters. Some embodiments generate a time-averaged output beam profile that is substantially flat in one dimension.

公开(公告)号：EP3120382A4

公开(公告)日：2017-10-25

申请号：EP15765881

申请日：2015-03-13

Applicant: KLA-TENCOR CORP

Inventor： CHUANG YUNG-HO ALEX ,  ZHANG JINGJING ,  FIELDEN JOHN

IPC: H01L27/146 ,  G01N21/88 ,  G01N21/95 ,  H01L21/66 ,  H01L27/148 ,  H01L31/107

CPC classification number: H01L27/14632 ,  G01N21/8806 ,  G01N21/9501 ,  G01N2201/061 ,  G01N2201/0638 ,  G01N2201/12 ,  H01L27/14609 ,  H01L27/1461 ,  H01L27/14612 ,  H01L27/1462 ,  H01L27/1464 ,  H01L27/14643 ,  H01L27/14645 ,  H01L27/14647 ,  H01L27/14681 ,  H01L27/14685 ,  H01L27/14687 ,  H01L27/14689 ,  H01L27/14698 ,  H01L27/14825 ,  H01L27/14831 ,  H01L27/14856 ,  H01L31/028 ,  H01L31/107 ,  H01L31/1804

公开(公告)号：EP2758990A4

公开(公告)日：2015-10-14

申请号：EP12833283

申请日：2012-09-20

Applicant: KLA TENCOR CORP

Inventor： LIU XUEFENG ,  CHUANG YUNG-HO ALEX ,  FIELDEN JOHN ,  TSAI BIN-MING BENJAMIN ,  ZHANG JINGJING

IPC: H01L21/66 ,  G03F7/20

CPC classification number: G06F17/5018 ,  G03F7/70625 ,  G06F17/10 ,  G06F17/5081 ,  G06F19/00 ,  G06F2217/12 ,  G06F2217/14 ,  G06F2217/16 ,  H01L22/12 ,  H01L22/20

Abstract: Systems and methods for process aware metrology are provided.

Abstract translation: 提供了流程感知度量的系统和方法。

公开(公告)号：EP2791961A4

公开(公告)日：2015-07-15

申请号：EP12857499

申请日：2012-12-11

Applicant: KLA TENCOR CORP

Inventor： CHUANG YUNG-HO ALEX ,  LIU XUEFENG ,  FIELDEN JOHN ,  BROWN DAVID L

IPC: H01J31/26 ,  G01N21/95 ,  H01L27/14

CPC classification number: G01N21/88 ,  G01N21/9501 ,  G01N2021/8822 ,  G01N2021/95676 ,  H01J31/26 ,  H01L27/14806 ,  H01L27/14818 ,  H01L27/14856

Abstract: A focusing EBCCD includes a control device positioned between a photocathode and a CCD. The control device has a plurality of holes therein, wherein the plurality of holes are formed perpendicular to a surface of the photocathode, and wherein a pattern of the plurality of holes is aligned with a pattern of pixels in the CCD. Each hole is surrounded by at least one first electrode, which is formed on a surface of the control device facing the photocathode. The control device may include a plurality of ridges between the holes. The control device may be separated from the photocathode by approximately half a shorter dimension of a CCD pixel or less. A plurality of first electrodes may be provided, wherein each first electrode surrounds a given hole and is separated from the given hole by a gap.