公开(公告)号：EP1083431A1

公开(公告)日：2001-03-14

申请号：EP99830568.4

申请日：1999-09-10

Applicant: STMicroelectronics S.r.l.

Inventor： Vigna, Benedetto ,  Gola, Alberto ,  Zerbini, Sarah ,  Cini, Dario

IPC: G01P15/125 ,  G01P15/13 ,  G01C19/56

CPC classification number: G01C19/5712 ,  G01P15/125 ,  G01P15/131

Abstract: The inertial sensor (1') comprises a stator (2) and a rotor (4) made of semiconductor material and electrostatically coupled together, and a microactuator (24) also made of semiconductor material, coupled to the rotor (4) and controlled so as to move the rotor (4) itself and thus compensate the position offset thereof.
Rotor and stator are provided with interdigitated fingers and constitute capacitive elements. Manufacturing tolerances lead to a positional offset which results in a difference of the capacitances in the absence of acceleration. The actuator consists of interdigitated fingers which provide a force that rotates the rotor back to its nominal zero position. No interference exists between the capacitive elements of rotor and stator and the capacitive elements of the actuator.

Abstract translation: 惯性传感器（1'）包括定子（2）和由半导体材料制成并静电耦合在一起的转子（4）和还由半导体材料制成的微致动器（24），其耦合到转子（4）并被控制 以便使转子（4）本身移动，从而补偿其位置偏移。 转子和定子上带有叉指并构成电容元件。 制造公差导致在没有加速度的情况下导致电容差的位置偏移。 致动器由叉指组成，其提供使转子回转到其标称零位置的力。 转子和定子的电容元件与致动器的电容元件之间不存在干扰。

公开(公告)号：EP1083144A1

公开(公告)日：2001-03-14

申请号：EP99830565.0

申请日：1999-09-10

Applicant: STMicroelectronics S.r.l.

Inventor： Zerbini, Sarah ,  Sassolini, Simone ,  Vigna, Benedetto

IPC: B81B5/00 ,  B81B3/00 ,  G01P15/135 ,  G01P15/125 ,  G01P15/08 ,  G01C19/56

CPC classification number: B81B3/0072 ,  B81B2201/0235 ,  B81B2203/0109 ,  G01C19/5684 ,  G01P15/0888 ,  G01P15/125

Abstract: A microelectromechanical structure (40) includes a rotor element (22) having a barycentric axis (G) and suspended regions (25) arranged a distance with respect to the barycentric axis. The rotor element (22) is supported and biased via a suspension structure (30, 45, 49) having a single anchoring portion (49) extending along the barycentric axis (G). The single anchoring portion (49; 73; 92) is integral with a body (41) of semiconductor material on which electric connections (50a) are formed.

Abstract translation: 微机电结构（40）包括具有重心轴线（G）的转子元件（22）和相对于重心轴布置一定距离的悬挂区域（25）。 转子元件（22）通过具有沿着重心轴线（G）延伸的单个锚定部分（49）的悬挂结构（30,45,49）被支撑和偏置。 单个锚固部分（49; 73; 92）与其上形成有电连接（50a）的半导体材料的主体（41）成一体。

公开(公告)号：EP0977349A1

公开(公告)日：2000-02-02

申请号：EP98830464.8

申请日：1998-07-30

Applicant: STMicroelectronics S.r.l.

Inventor： Vigna, Benedetto ,  Zerbini, Sarah ,  Sassolini, Simone ,  Menescardi, Carlo

IPC: H02N1/00 ,  G11B21/02

CPC classification number: G11B21/02 ,  H02N1/006

Abstract: The microactuator (30) comprises a motor element (32) including a stator (38) and a rotor (40) capacitively coupled to the stator (38); an actuator element (34) having a circular structure; and a transmission structure (36) interposed between the motor element (32) and the actuator element (34) to transmit a rotary movement of the motor element (32) into a corresponding rotary movement of the actuator element (34). In particular, the transmission structure (36) comprises a pair of transmission arms (80, 81) identical to each other, arranged symmetrically with respect to a symmetry axis (A) of the microactuator (30). The transmission arms (80, 81) extend between two approximately diametrically opposed regions of the rotor (40) to diametrically opposed regions (84) of the actuator element (34).

Abstract translation: 微致动器（30）包括电容性耦合到所述定子（38）的电动机元件（32）包括定子（38）和转子（40）; 具有圆形结构的致动器元件（34）的; 和电动机元件（32）和致动器元件（34）之间的传输结构（36），以传递电机元件（32）的旋转运动转换成所述致动器元件（34）的相应的旋转运动。 特别地，传输结构（36）包括一对传输臂（80，81）相同的海誓山盟，相对于微致动器的对称轴（A）（30）对称地布置的。 传输臂（80,81）两个径向相对的致动器元件（34）的转子（40），以径向相对的区域（84）的大约区域之间延伸。