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1.发明授权
公开(公告)号：EP0746101B1
公开(公告)日：2001-08-08
申请号：EP95830230.9
申请日：1995-05-31
Applicant: STMicroelectronics S.r.l. , CO.RI.M.ME. CONSORZIO PER LA RICERCA SULLA MICROELETTRONICA NEL MEZZOGIORNO
Inventor： Gola, Alberto , Leone, Via Terrazzano, 67 , Fucili, Giona , Milazzo, Patrizia
IPC: H03K19/003 , H03K17/082
CPC classification number: H03K17/082 , H03K19/00315
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2.发明授权Structure preventing a parasitic diode from being switched on in an epitaxial tub of integrated circuits 失效用于防止所述开关通过寄生二极管，其位于集成电路的外延桶结构
公开(公告)号：EP0577906B1
公开(公告)日：1998-09-23
申请号：EP92830338.7
申请日：1992-06-30
Applicant: STMicroelectronics S.r.l.
Inventor： Demicheli, Marco , Gola, Alberto
IPC: H01L27/02
CPC classification number: H01L27/0248
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3.发明公开Method for compensating the position offset of a capacitive inertial sensor, andcapacitive inertial sensor 审中-公开Verfahren zur Kompensation von Positionsfehlern eines kapazitiven inertialen传感器和卡帕扎特惯性传感器
公开(公告)号：EP1083431A1
公开(公告)日：2001-03-14
申请号：EP99830568.4
申请日：1999-09-10
Applicant: STMicroelectronics S.r.l.
Inventor： Vigna, Benedetto , Gola, Alberto , Zerbini, Sarah , Cini, Dario
IPC: G01P15/125 , G01P15/13 , G01C19/56
CPC classification number: G01C19/5712 , G01P15/125 , G01P15/131
Abstract: The inertial sensor (1') comprises a stator (2) and a rotor (4) made of semiconductor material and electrostatically coupled together, and a microactuator (24) also made of semiconductor material, coupled to the rotor (4) and controlled so as to move the rotor (4) itself and thus compensate the position offset thereof.
Rotor and stator are provided with interdigitated fingers and constitute capacitive elements. Manufacturing tolerances lead to a positional offset which results in a difference of the capacitances in the absence of acceleration. The actuator consists of interdigitated fingers which provide a force that rotates the rotor back to its nominal zero position. No interference exists between the capacitive elements of rotor and stator and the capacitive elements of the actuator.Abstract translation: 惯性传感器（1'）包括定子（2）和由半导体材料制成并静电耦合在一起的转子（4）和还由半导体材料制成的微致动器（24），其耦合到转子（4）并被控制 以便使转子（4）本身移动，从而补偿其位置偏移。 转子和定子上带有叉指并构成电容元件。 制造公差导致在没有加速度的情况下导致电容差的位置偏移。 致动器由叉指组成，其提供使转子回转到其标称零位置的力。 转子和定子的电容元件与致动器的电容元件之间不存在干扰。
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公开(公告)号：EP0760558B1
公开(公告)日：2000-02-02
申请号：EP95830370.3
申请日：1995-08-31
Applicant: STMicroelectronics S.r.l.
Inventor： Fucili, Giona , Papillo, Lorenzo , Pasquino, Andrea , Rossi, Annamaria , Gola, Alberto
IPC: H03K3/037 , H03K3/3562
CPC classification number: H03K3/0372 , H03K3/35625
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