公开(公告)号：EP1896892A2

公开(公告)日：2008-03-12

申请号：EP05813140.0

申请日：2005-12-01

Applicant: Nova Measuring Instruments Limited

Inventor： LYUBCHIK, Yakov ,  SCHEINER, David ,  WINIK, Michael

IPC: G02B17/06 ,  G02B17/02 ,  G01N21/956 ,  G01N21/21 ,  H01L21/66 ,  G01B11/02

CPC classification number: G02B21/16 ,  G01J1/04 ,  G01J1/0411 ,  G01J1/0414 ,  G01J1/0429 ,  G01J1/044 ,  G01J1/0455 ,  G01J1/0462 ,  G01N21/956 ,  G02B17/06 ,  G02B17/061 ,  G02B21/04

Abstract: A catoptric arrangement (10) is presented. The catoptric arrangement comprises a first element (12) having a concave reflective surface and an optical axis (OA) and a second substantially flat and at least partially reflective element (14) spaced-apart from the first element along the optical axis. The second element is configured to allow light passage therethrough and is oriented with respect to the optical axis and the first element such that at a predetermined angle of incidence of an input light beam onto the second element, the input light beam is reflected onto the reflective surface of the first element and reflected therefrom to pass through the second element.

公开(公告)号：EP1228004B1

公开(公告)日：2004-12-15

申请号：EP00963828.9

申请日：2000-10-02

Applicant: TROJAN TECHNOLOGIES INC.

Inventor： FANG, Gang ,  HOUGHTON, John ,  LAWRYSHYN, Yuri ,  LEM, Joseph ,  VERDUN, Alex ,  SASGES, Michael

IPC: C02F1/32 ,  G01J1/04 ,  G01N21/33

CPC classification number: A61L2/28 ,  A61L2/10 ,  C02F1/325 ,  C02F2201/3227 ,  C02F2201/324 ,  C02F2201/326 ,  G01J1/0252 ,  G01J1/0271 ,  G01J1/04 ,  G01J1/044 ,  G01N21/15 ,  G01N2021/152 ,  G01N2021/157

Abstract: There is disclosed an optical radiation sensor system. The system includes a sensor device (140) and a cleaning device (115). The sensor device detects and responds to radiation from a radiation field (170) and includes a surface (155) that is movable with respect to the radiation field between a first position in which the surface is in the radiation field and a second position in which at least a portion of the surface is out of the radiation field. The cleaning device operates to remove fouling materials from at least a portion of the surface in the second position. The cleaning device may be a chemical cleaning device, a mechanical cleaning device or a combined chemical/mechanical device.

公开(公告)号：EP0886132A2

公开(公告)日：1998-12-23

申请号：EP98107791.0

申请日：1998-04-29

Applicant: Optrotherm Mess- und Sensortechnik GmbH

Inventor： Scheuer, Wolfgang

IPC: G01J5/62

CPC classification number: G01J1/44 ,  G01J1/044 ,  G01J5/62 ,  G01J2001/4242

Abstract: Die vorliegende Erfindung betrifft ein Verfahren und eine Vorrichtung zur digitalen Erfassung der Meßdaten von Strahlungsdetektoren, bei welchem ein Strahlungsdetektor intermittierend einer Bestrahlung ausgesetzt wird und ein entsprechendes, intermittierendes, elektrisches Signal abgibt, welches einen hohen Gleichspannungsanteil enthält und stark verrauscht ist. Die entsprechende Vorrichtung hat einen Detektor (1), einen Chopper (2), einen A/D-Wandler (3) und einen Mikroprozessor (6),. Um ein Verfahren und eine Vorrichtung dahingehend zu verbessern, daß sie vereinfacht und preiswerter durchführbar werden, wobei es außerdem von Vorteil wäre, wenn die Meßdaten nahezu in Echtzeit zur Verfügung stünden, um sie beispielsweise für eine Prozeßsteuerung oder Regelung verwenden zu können, wird hinsichtlich des Verfahrens erfindungsgemäß vorgeschlagen, daß der von dem Detektor abgegebene Wechselspannungsanteil des Signals im wesentlichen unmittelbar oder allenfalls durch eine lineare Verstärkung modifiziert auf den Eingang eines integrierten und durch einen Mikroprozessor gesteuerten Analog-Digital-Wandlers (A/D-Wandlers) mit bipolarem Analogeingang gegeben wird, wobei Beginn, Dauer und Vorzeichen der Signalintegration des A/D-Wandlers von dem Mikroprozessor gesteuert werden. Hinsichtlich der Vorrichtung wird vorgeschlagen, daß der Detektorausgang (4) wechselspannungsmäßig direkt mit dem Eingang (5) des A/D-Wandlers (3) verbunden ist und daß der A/D-Wandler (3) ein integrierender, von dem Mikroprozessor (6) gesteuerter A/D-Wandler (3) mit einem bipolaren Analogeingang (5) ist.

Abstract translation: 该方法涉及间歇暴露的辐射检测器（1）到上照射并产生相应的，间歇电信号，该电信号包含高DC电压电平以及高噪声电平。 提交的检测器的信号的AC部分直接供给，或，如果有必要，通过线性放大改性，以一个廷INTEGRA A / D转换器（3）具有双极模拟输入的输入端（5）。 所述A / D转换器是微处理器（6）控制。 微处理器控制的开始，持续时间和所述转换器的信号积分的极性。 微处理器优选用斩波器电路（2）没有确定性地雷间歇信号的频率同步。

公开(公告)号：EP0882218A1

公开(公告)日：1998-12-09

申请号：EP97907713.0

申请日：1997-02-21

Applicant: DIASENSE, INC.

Inventor： WACZYNSKI, Augustyn ,  HENDRICKSON, Mark, L. ,  HARTWICK, David, J.

IPC: G01J1 ,  G01J5

CPC classification number: G01J5/28 ,  G01J1/0266 ,  G01J1/04 ,  G01J1/044 ,  G01J1/44 ,  G01J3/0232 ,  G01J3/0289 ,  G01J5/30 ,  G01J2001/4242

Abstract: Disclosed is a radiation detector which includes at least one photoconductive detector (6) and a modulator (2), which modulates in an on-off manner radiation passing to the photoconductive detector (6) from a radiation source (4). A bias source (8) is connected to one terminal of the photoconductive detector (6). A first amplifier (17) is connected to the other terminal of the photoconductive detector (6), and a second amplifier (34) receives an output of the first amplifier (17). A first phase detector (36) detects the phase of modulation of the radiation source (4) by the modulator (2) and generates a reference signal relating thereto. A switch (34) in the second amplifier (24) changes, in response to the reference signal generated by the first phase detector (36), the second amplifier between an inverting state and a non-inverting state as the modulator (2) changes the phase of modulation of the radiation.

公开(公告)号：EP3171346A2

公开(公告)日：2017-05-24

申请号：EP16200297.6

申请日：2016-11-23

Applicant: Essence Security International Ltd.

Inventor： MERON, Sergey ,  NEKHANEVICH, Igal ,  KOREN, Reuben

IPC: G08B13/189 ,  F24F11/00 ,  G01J5/08 ,  G01J5/00 ,  G08B13/193

CPC classification number: G01J1/4228 ,  G01J1/029 ,  G01J1/0411 ,  G01J1/044 ,  G01J1/0448 ,  G01J5/0022 ,  G01J5/0025 ,  G01J5/0806 ,  G01J5/0843 ,  G01J5/089 ,  G01J2001/4233 ,  G02B3/08 ,  G08B13/193

Abstract: A sensing device comprising an electromagnetic sensor (104, 118) having a surface with a plurality of different electromagnetic radiation interception areas arranged one above the other, one or more controllable flaps (112) adapted to cover one or more of the different electromagnetic radiation interception areas preventing the electromagnetic sensor from intercepting electromagnetic radiation on the covered electromagnetic radiation interception areas, at least one control mechanism adapted to maneuver the controllable flaps so as to change the covered electromagnetic radiation interception areas and a plurality of lenses (114) located in front of the electromagnetic sensor, each having a different focal length (116). One of the lenses has a certain focal length and focuses electromagnetic radiation to at least one of the different electromagnetic radiation interception areas, and another of the lenses has a different focal length and focuses electromagnetic radiation to another electromagnetic radiation interception area.

Abstract translation: 一种感测装置，包括具有表面的电磁传感器（104,118），所述表面具有一个彼此上下排列的多个不同的电磁辐射拦截区域，一个或多个可控制的翼片（112），适于覆盖一个或多个不同的电磁辐射截取 防止电磁传感器拦截被覆盖的电磁辐射拦截区域上的电磁辐射的区域，至少一个控制机构，其适于操纵可控制的翼片，以便改变被覆盖的电磁辐射拦截区域;以及多个透镜（114）位于 所述电磁传感器各自具有不同的焦距（116）。 其中一个透镜具有一定的焦距并将电磁辐射聚焦到不同的电磁辐射拦截区域中的至少一个，并且另一个透镜具有不同的焦距并将电磁辐射聚焦到另一个电磁辐射拦截区域。

公开(公告)号：EP3062073A2

公开(公告)日：2016-08-31

申请号：EP15194214.1

申请日：2015-11-12

Applicant: National Institute of Meteorological Sciences

Inventor： OH, Young Suk ,  GOO, Tae Young ,  SHIN, Jin Ho ,  LEE, Jong Ho ,  CHUNG, Kyu Sun ,  HEO, Bok Haeng

IPC: G01J1/04 ,  G01J1/26 ,  H01L39/00

CPC classification number: G01J3/0232 ,  G01J1/0437 ,  G01J1/044 ,  G01J1/26 ,  G01J3/0275 ,  G01W1/00

Abstract: The present invention relates to an apparatus for detecting photons according to an atmospheric condition, using a function of adjusting light quantity that can significantly improve reliability of an atmospheric condition analysis result by minimizing noise in a spectrum by maintaining the quantity of incident light uniform within a predetermined range regardless of atmospheric conditions and changes, and to a method of adjusting light quantity. The apparatus for detecting photons in accordance with atmospheric conditions using a function of adjusting light quantity includes: an apparatus case having a light inlet; a light quantity adjuster disposed under the light inlet and adjusting quantity of incident light such that a predetermined quantity of light travels inside; and a controller controlling operation of the light quantity adjuster in accordance with intensity of light detected by the light quantity adjuster.

Abstract translation: 本发明涉及到用于在大气条件下检测雅丁光子，使用调节光量也可显着通过在频谱最小化噪声提高的大气条件的分析结果的可靠性的功能由内的保持入射光均匀的量 预定范围不管大气条件和变化，以及调整光量的方法。 对于与使用调节光量的函数的大气条件雅舞蹈探测光子的装置，包括：具有光入口的装置的情况下; 光入口和调整入射光搜索的量下设置在光量调节器做光的预定量内行进; 以及控制器，控制操作在雅舞蹈的光量调节器与由光量调节器检测到的光的强度的。

公开(公告)号：EP2825862A1

公开(公告)日：2015-01-21

申请号：EP12871392.2

申请日：2012-03-16

Applicant: Her Majesty The Queen in right of Canada As Represented by The Minister of National Defence

Inventor： FORTIN, Jean ,  TREMBLAY, Grégoire

IPC: G01M11/02

CPC classification number: G01M11/0207 ,  F41A31/00 ,  F41H13/005 ,  F41H13/0056 ,  G01J1/0223 ,  G01J1/0271 ,  G01J1/0407 ,  G01J1/0411 ,  G01J1/044 ,  G01J1/0448 ,  G01J1/0477 ,  G01J1/4257 ,  G01J3/28 ,  G01J9/02 ,  G01J2001/4247 ,  G01S3/789 ,  G02B27/106 ,  G02B27/126

Abstract: A system and method for performing field measurement and testing of a plurality of widely spaced laser beams used in visual warning technology (VWT). VWT uses a combination of widely spaced laser beams, to warn civilians from approaching too close to military security areas. The widely spaced laser beams are displaced using rhomboidal prisms. Each rhomboidal prism receives a corresponding laser beam and displaces it toward a collecting lens. The lens focuses the displaced beams received thereon onto an imaging sensor for testing. Beam shutters may be used for selectively blocking one or more beams in order to test the beams separately and in different combinations.

Abstract translation: 一种用于执行视觉预警技术（VWT）中使用的多个宽间隔激光束的现场测量和测试的系统和方法。 VWT使用宽间隔激光束的组合，警告平民过于接近军事安全区域。 宽间隔的激光束使用菱形棱镜移动。 每个菱形棱镜接收相应的激光束并将其移向聚光透镜。 透镜将接收到的位移光束聚焦到成像传感器上进行测试。 光束快门可用于选择性地阻挡一个或多个光束，以分别以不同组合测试光束。

公开(公告)号：EP2160766A4

公开(公告)日：2014-06-11

申请号：EP08761717

申请日：2008-06-02

Applicant: TEKNILLINEN KORKEAKOULU

Inventor： IKONEN ERKKI

IPC: H01L31/0232 ,  G01J1/02 ,  G01J1/04 ,  G01J1/42 ,  H01L31/0216

CPC classification number: H01L31/02165 ,  G01J1/02 ,  G01J1/0271 ,  G01J1/04 ,  G01J1/0407 ,  G01J1/0411 ,  G01J1/044 ,  G01J1/4257 ,  H01L31/02325

Abstract: The invention relates to an absolute power measurement to be made with high internal and/or external quantum efficiency to be utilised in a detector comprising at least one film layer (301 ) on a substrate (118) so forming a structure to guide radiation (?), within a wave length in a wavelength range and means (202, 203) arranged to get at least part of said radiation (?) absorbed in the detector body (118) by a conversion of the energy of said radiation photons (?3) to energy of an electrical current (h+, e") in an operation temperature (T) of the detector. The invention relates also to a method, measuring arrangement and system to be used in accordance of said detector.

Abstract translation: 本发明涉及要在检测器中使用的高内部和/或外部量子效率进行的绝对功率测量，该检测器包括在衬底（118）上的至少一个膜层（301），从而形成引导辐射（λ）的结构。 ）在波长范围内的波长内，以及装置（202,203），其被布置成通过所述辐射光子（α3）的能量的转换来获得吸收在检测器主体（118）中的所述辐射（α）的至少一部分 ）检测器的工作温度（T）中的电流（h +，e“）的能量。本发明还涉及根据所述检测器使用的方法，测量装置和系统。

公开(公告)号：EP1549920A2

公开(公告)日：2005-07-06

申请号：EP03808674.0

申请日：2003-10-08

Applicant: Infineon Technologies AG ,  Aixuv GmbH

Inventor： DOMKE, Wolf-Dieter ,  JUSCHKIN, Larissa ,  KRAGLER, Karl ,  LEBERT, Rainer ,  MEISEN, Manfred

IPC: G01J1/42

CPC classification number: G21K5/04 ,  G01J1/044 ,  G01J1/429 ,  G03F7/70558 ,  G21K1/10

Abstract: The invention concerns an irradiation device for testing objects coated with light-sensitive paint, comprising a EUV radiation source, an optical system for filtering the radiation of the EUV radiation source, a chamber for receiving the object, as well as systems for intersecting the trajectory of the rays on the object. The invention also concerns a method for operating such a device. The invention aims at obtaining as quickly as possible an illumination at least partly simultaneous of several irradiation fields, with different doses, by using an inexpensive laboratory radiation source without resorting to complex optical systems. Therefor, the invention provides a device comprising a simplified and compact optical system, with closable diaphragm apertures located in front of the object to be irradiated and at least one control sensor placed on the trajectory of the rays and enabling the radiation dose to be measured.

公开(公告)号：EP0531504A4

公开(公告)日：1993-09-22

申请号：EP92909339

申请日：1992-02-19

Applicant: OSD ENVISION COMPANY

Inventor： FERGASON, JOHN, D. ,  FERGASON, JEFFREY, K.

IPC: A61F2/14 ,  A61F9/06 ,  G01J1/02 ,  G01J1/04 ,  G01J1/18 ,  G01J1/44 ,  G02F1/13 ,  G02F1/133 ,  G09G3/18 ,  G01J1/32 ,  H01J40/14

CPC classification number: G01J1/18 ,  A61F9/067 ,  G01J1/04 ,  G01J1/044 ,  G01J1/44 ,  G01J2001/0276 ,  G02F1/13306 ,  G02F1/13318