公开(公告)号：USRE34214E

公开(公告)日：1993-04-06

申请号：US288287

申请日：1988-12-21

Applicant: Kjell S. Carlsson ,  Nils R. D. Aslund

Inventor： Kjell S. Carlsson ,  Nils R. D. Aslund

IPC: H01J37/22 ,  G01N21/59 ,  G02B21/00 ,  G02B21/36 ,  G02B27/40 ,  G03B15/00 ,  G03B17/48

CPC classification number: G02B21/002 ,  G01N21/5911 ,  G02B21/0096 ,  G01N21/474 ,  G01N21/6456 ,  G01N2201/1087

Abstract: A method of microphotometering individual volume elements of a microscope specimen 10, comprising generating a luminous dot or cursor and progressively illuminating a plurality of part elements in the focal plane 11 of the microscope through the specimen. The mutual position between the specimen and the focal plane is then changed and a plurality of part elements in the focal plane are illuminated. Reflected and/or fluorescent light and transmitted light respectively created by the illumination is collected, detected and stored for generating a three-dimensional image of that part of the specimen composed of the volume elements. Illumination of multiples of part elements is implemented by deflecting the cursor and/or by moving the specimen. The change in the relative mutual position between the specimen and the focal plane of the microscope is effected either by displacing the specimen or the objective. Apparatus for carrying out the method include a specimen table 301, a microscope objective and light source 31-32-33. The table or the objective are arranged for stepwise movement along the main axis of the microscope synchronously with punctilinear light scanning of the specimen. The table is arranged for stepwise movement at right angles to the main axis and/or the light source is arranged for deflection over the focal plane 21 through the specimen.

公开(公告)号：US5009503A

公开(公告)日：1991-04-23

申请号：US479959

申请日：1990-02-14

Applicant: Martin J. Murphy, Jr. ,  Jack B. Stubbs ,  Thomas A. Leonard

Inventor： Martin J. Murphy, Jr. ,  Jack B. Stubbs ,  Thomas A. Leonard

IPC: C12M1/34 ,  G01N15/12 ,  G01N15/14 ,  G01N21/51

CPC classification number: G01N15/1468 ,  C12M23/16 ,  C12M41/36 ,  G01N15/12 ,  G01N21/51 ,  G01N2201/103 ,  G01N2201/1087

Abstract: A plurality of parallel spaced cylindrical capillary tubes contain single cells and/or cell colonies in a medium and gel-like agarose, and the tubes are carried by a frame-like holder supported by a motor driven X-Y translation stage of an automated microscope. The microscope also incorporates an electronic optical detector and an object lens located under the tube holder. The entire contents of each tube are internally illuminated by a precision light beam emitted from a helium-neon laser and reflected by a set of precisely positioned mirrors so that the beam extends axially through each tube when the tube extends across the vertical axis of the object lens. The contents of the tubes are sequentially scanned under the control of special softward within a personal computer, and the intensity of the light reflected outwardly from each cell or cell colony is sensed by the detector and recorded in the computer along with the axial location of the reflecting cell or cell colony. Preferably, the laser light is pure red, the optical detector is sensitive to the red light, and the object lens is focused on the wall of the tube to maximize the signal-to-noise ratio and to obtain full field detection across each tube.

Abstract translation: 多个平行间隔开的​​圆柱形毛细管在培养基和凝胶状琼脂糖中含有单个细胞和/或细胞集落，并且管由由自动显微镜的电机驱动的X-Y平移台支撑的框架状支架承载。 显微镜还包括位于管座下方的电子光学检测器和物镜。 每个管的整个内容物由从氦氖激光器发射并由一组精确定位的反射镜反射的精确光束内部照射，使得当管延伸穿过物体的垂直轴线时，光束轴向延伸穿过每个管 镜片。 在个人计算机内，在特别软的控制下顺序扫描管内容物，并且由每个细胞或细胞集落向外反射的光的强度由检测器检测并记录在计算机中以及 反映细胞或细胞集落。 优选地，激光是纯红色，光学检测器对红光敏感，并且物镜聚焦在管的壁上以最大化信噪比并且跨越每个管获得全场检测。

公开(公告)号：US4747684A

公开(公告)日：1988-05-31

申请号：US89893

申请日：1987-08-27

Applicant: Sidney Weiser

Inventor： Sidney Weiser

IPC: G01N21/55 ,  G01N21/01 ,  G01N21/47

CPC classification number: G01N21/55 ,  G01N2201/1045 ,  G01N2201/1087

Abstract: A specific small area of a crystal sample is scanned by a laser beam which rotates about an axis substantially perpendicular to the sample surface such that the intersection of the beam with a plane above and parallel to the surface describes a true spiral or a stepwise spiral pattern. The laser beam is reflected different amounts for different beam positions to produce a reflectance pattern indicative of crystallographic orientation.

Abstract translation: 晶体样品的特定小区域被激光束扫描，激光束围绕基本上垂直于样品表面的轴线旋转，使得光束与平面在平面上方并且平行于表面的交叉描述了真正的螺旋或逐步螺旋图案 。 对于不同的光束位置，激光束被反射不同的量以产生指示晶体取向的反射率图案。

公开(公告)号：KR1020150044784A

公开(公告)日：2015-04-27

申请号：KR1020130131908

申请日：2013-11-01

Applicant: 유재상 ,  정종삼

Inventor： 유재상 ,  정종삼

IPC: A61B5/117 ,  G06K9/20

CPC classification number: A61B5/0062 ,  A61B5/489 ,  G01N2201/1087

Abstract: 혈관인식장치및 인식방법이개시된다. 본발명은서로다른두 파장의레이져다이오드광을피부에조사하고, 사람의일정영역피부에도달한상기서로다른두 파장의레이져다이오드광이피부에조사된후 반사되어포토다이오드로돌아가며, 근적외선광이피부속으로진행하여혈관이존재하는위치에서는헤모그로빈에의한흡수에의해광량이감소되었는지검출하고, 검출된근적외선광이일정광량이하로광이줄어들면레드레이져의광 출력을오프시키며, 혈관을벗어난위치에서근적외선광의광량이상기미리설정한일정관량이상으로증가하면레드레이져광 출력을온시킴으로써혈관의위치를검출할수 있고, 이를가시광선으로사람의육안으로구별가능하도록표시해줄 수있어육안으로보이지않는혈관을정확하게찾을수 있는것이다.

Abstract translation: 公开了一种血管识别装置和识别方法。 血管识别方法包括以下步骤：将两种不同波长的激光二极管光照射到皮肤上，以使两种不同波长的激光二极管光到达人皮肤的某一区域以辐射到皮肤上，然后返回到照片 二极管被反射; 通过血红蛋白在近红外光进入皮肤后存在血管位置的位置检测出光量减少; 通过使红色激光的输出熄灭来检测血管的位置，当检测到的近红外光减少到一定量的光或更少的光并转动红色激光的输出时，当近红外光的量 在血管的位置上增加到某一预定量的光或更多; 并用可见光进行显示，以与人眼区分，以准确找到隐形血管。

公开(公告)号：KR102231379B1

公开(公告)日：2021-03-25

申请号：KR1020190145447A

申请日：2019-11-13

Applicant: 주식회사 나노바이오라이프

Inventor： 김수경 ,  김인중

IPC: G01N21/84 ,  G01N33/543

CPC classification number: G01N21/8483 ,  G01N33/54386 ,  G01N2201/1087

Abstract: 본 발명은 진단키트를 위한 현장검사 리더기의 측정값 에러를 감소시켜 신뢰성 높은 정량화 데이터를 획득하는 현장검사 리더기 데이터의 처리 방법에 관한 것으로, 현장검사 리더기 데이터의 처리 방법은, 진단키트 내 멤브레인의 특정 영역을 레이저빔으로 스캔한 스캔 라인 신호 데이터에 기초하여 멤브레인 상의 테스트 신호 라인과 제어 신호 라인의 위치 에러를 수정하는 단계, 스캔 라인 신호 데이터의 테스트 신호 라인과 제어 신호 라인에 대한 관심 영역을 설정하는 단계, 및 관심 영역에서 각 스캔 라인 신호 데이터를 배열하고 분석하는 단계를 포함한다.

公开(公告)号：JPS60212716A

公开(公告)日：1985-10-25

申请号：JP4946985

申请日：1985-03-14

Applicant: Sutsure Kaaruson Kieru ,  Andaasu Baanaa Ririeborugu ,  Rarusu Rennaato Mairofu ,  Nirusu Robaato Asurundo

Inventor： KIERU SUTSURE KAARUSON

IPC: H01J37/22 ,  G01N21/59 ,  G02B21/00 ,  G02B21/36 ,  G02B27/40 ,  G03B15/00 ,  G03B17/48

CPC classification number: G02B21/002 ,  G01N21/474 ,  G01N21/5911 ,  G01N21/6456 ,  G01N2201/1087 ,  G02B21/0096

公开(公告)号：JP2016014657A

公开(公告)日：2016-01-28

申请号：JP2015113703

申请日：2015-06-04

Applicant: サムコ株式会社

Inventor： 長谷川 清 ,  川村 裕士 ,  ピーター ウッド

IPC: G01N21/84 ,  G01B11/26 ,  G02B21/00 ,  G01B11/24

CPC classification number: G01J1/0238 ,  G01J1/4257 ,  G01N21/55 ,  G01N2021/8427 ,  G01N2201/025 ,  G01N2201/1087

Abstract: 【課題】試料からの反射光を確実に捉えることのできる光ビーム測定装置を提供する。 【解決手段】光ビーム測定装置1は、第1傾斜機構131と第2傾斜機構132とを有する光軸傾斜機構13を備える。光ビーム光源部112から照射される照射光の光軸A1について、第1傾斜機構131は第1傾斜軸T1を中心に光軸A1を傾斜させ、第2傾斜機構132は第2傾斜軸T2を中心に光軸A1を傾斜させる。光ビーム測定装置1は、半導体チップCからの反射光が傾いていても、光軸傾斜機構13の作用により半導体チップCからの反射光を捉えことができるため、確実に測定や検査を行うことができる。 【選択図】図1

Abstract translation: 要解决的问题：提供一种能够可靠地捕获从样品反射的光的光束测量装置。解决方案：光束测量装置1具有装备有第一倾斜机构131和第二倾斜机构132的光轴倾斜机构13 第一倾斜机构131相对于第一倾斜轴线T1倾斜从光束光源部112射出的光的光轴A1，第二倾斜机构132相对于第二倾斜轴T2倾斜光轴A1 。 由于如果反射光倾斜，光束测量装置1可以通过光轴倾斜机构13的作用来可靠地捕获从半导体芯片C反射的光，所以可以毫不费力地进行测量或检查。

公开(公告)号：JP2004153264A

公开(公告)日：2004-05-27

申请号：JP2003355452

申请日：2003-10-15

Applicant: Samsung Electronics Co Ltd ,  三星電子株式会社

Inventor： CHOI SUN-YONG ,  KIM KWANG SU ,  KIM JOO-WOO ,  CHOI JEONG-HYUN ,  PARK DONG-JIN ,  JUN CHUNG-SAM

IPC: G01N21/01 ,  G01N21/84 ,  G01N21/95 ,  G01N21/956 ,  H01L21/00 ,  H01L21/027 ,  H01L21/66

CPC classification number: H01L21/67253 ,  G01N21/9503 ,  G01N21/95607 ,  G01N2021/0162 ,  G01N2021/0187 ,  G01N2021/1736 ,  G01N2021/1772 ,  G01N2021/8411 ,  G01N2021/8896 ,  G01N2021/95615 ,  G01N2201/103 ,  G01N2201/1087

Abstract: PROBLEM TO BE SOLVED: To provide an integrated substrate inspection apparatus which is automated and carries out all of EBR/EEW inspection, pattern defect inspection, and reticle error inspection on a substrate.
SOLUTION: A first image acquiring section 110 acquires a first image of the edge of a substrate, while a second image acquiring section 120 acquires a second image on the patterns of the substrate. The first image is acquired from the substrate held on a first stage 160, while the second image is acquired from the substrate held on a second stage 170. A transfer robot 180 transfers the substrate from the first stage 160 to the second stage 170. An image processing section 140 carries out the EBR/EEW inspection on the substrate based on the first image, and carries out the pattern defect inspection and the reticle error inspection based on the second image. Since various inspection steps of the substrate are carried out with the integrated substrate inspection apparatus 100, the efficiency of the substrate inspection steps is enhanced, and reliability of the various substrate inspection steps is enhanced.
COPYRIGHT: (C)2004,JPO

公开(公告)号：KR101792787B1

公开(公告)日：2017-11-02

申请号：KR1020160051726

申请日：2016-04-27

Applicant: 한국기계연구원

Inventor： 김상복 ,  홍원석 ,  송동근 ,  민태진 ,  신완호

IPC: G01N21/88 ,  G01N21/17 ,  G01N15/00 ,  G02B15/20 ,  G01N1/14

CPC classification number: G01N21/8806 ,  G01N1/14 ,  G01N2015/0011 ,  G01N2021/177 ,  G01N2201/1087 ,  G02B15/20

Abstract: 본발명은미세기포분석시스템및 방법에관한것으로, 특히미세기포생성기에서생성된미세기포를샘플채집부로통과시키고이 샘플채집부를통과하는미세기포에 LED로광을조사하여아포티컬시스템(afocal system)을통과시키고촬상부를통해미세기포샘플화상을취득하고처리하여서기포의사이즈(size) 및수 농도(number concentration)를산출하여디스플레이하는미세기포분석시스템및 방법에관한것이다. 본발명의미세기포분석시스템은미세기포생성기에서생성되는미세기포를유지한후 배출할수 있으며광을투과시키도록구성된샘플채집부; 상기미세기포생성기에서생성되는미세기포를상기샘플채집부로펌핑하도록구성된펌프; 상기샘플채집부에유지된미세기포를향해광을조사하도록구성된 LED; 상기 LED로부터조사된광을모으도록구성된집광렌즈; 상기집광렌즈및 샘플채집부를투과한광의무한유효초점길이를형성하도록구성된아포컬시스템; 상기아포컬시스템에서출사되는광으로부터미세기포샘플화상을취득하도록구성된촬상부; 및상기촬상부에서취득된미세기포샘플화상을분석하여미세기포의사이즈및 수농도를산출하여디스플레이하도록구성된미세기포분석부를포함한다.

Abstract translation: 本发明啊十四本地系统（无焦系统），更具体地，通过检查LED rogwang由微气泡发生器产生的微气泡的微气泡通过收集到的微气泡分析系统和方法上通道sikigoyi样品收集单元部分样品 并且通过成像单元获取并处理微小气泡样本图像，以计算并显示气泡的大小和数量集中。 本发明的微小气泡分析系统包括：样本收集单元，用于排出在微型气泡发生器中产生的微小气泡，然后释放光; 泵，其构造成将微泡发生器中产生的微泡泵送到样品收集单元; LED，其被配置为朝向保持在样本收集部分中的细小气泡照射光; 聚光透镜，配置为收集从LED发射的光; 一种无焦系统，其被配置为形成通过聚光透镜和样本收集单元传输的光的无限有效焦距; 成像单元，被配置为从所述无焦系统发射​​的光获取微泡标本图像; 微小气泡分析单元，被配置为分析由成像单元获取的微小气泡样本图像，并计算并显示微小气泡的大小和数量集中。

公开(公告)号：KR1020040038998A

公开(公告)日：2004-05-10

申请号：KR1020020066613

申请日：2002-10-30

Applicant: 삼성전자주식회사

Inventor： 전충삼 ,  최선용 ,  김광수 ,  김주우 ,  최정현 ,  박동진

IPC: H01L21/66

CPC classification number: H01L21/67253 ,  G01N21/9503 ,  G01N21/95607 ,  G01N2021/0162 ,  G01N2021/0187 ,  G01N2021/1736 ,  G01N2021/1772 ,  G01N2021/8411 ,  G01N2021/8896 ,  G01N2021/95615 ,  G01N2201/103 ,  G01N2201/1087

Abstract: PURPOSE: A substrate inspecting apparatus is provided to be capable of carrying out many kinds of inspecting processes. CONSTITUTION: A substrate inspecting apparatus(100) is provided with the first stage(160) for supporting a substrate, the first image capture part(110) for capturing the first image of the substrate edge portion, the second stage(170) for supporting the substrate transferred from the first stage, the second image capture part(120) for capturing the second image of the substrate, and a transfer part(180) for transferring the substrate from the first stage to the second stage. The substrate inspecting apparatus further includes a data processing part(144) connected with the first and second image capture part for inspecting the results of an EBR(Edge Bead Removal) process and an EEW(Edge Exposure of Wafer) process for the substrate by using the first image of the substrate and detecting the pattern defect generated on the substrate by using the second image of the substrate.

Abstract translation: 目的：提供一种能够进行多种检查过程的基板检查装置。 构成：衬底检查装置（100）具有用于支撑衬底的第一工作台（160），用于捕获衬底边缘部分的第一图像的第一图像捕获部分（110），用于支撑衬底边缘部分的第二工作台（170） 从第一阶段转移的基板，用于捕获基板的第二图像的第二图像捕获部分（120）和用于将基板从第一阶段转移到第二阶段的转移部分（180）。 基板检查装置还包括与第一和第二图像捕获部分连接的数据处理部分（144），用于通过使用用于检查基板的EBR（边缘珠去除）处理和EEW（晶片的边缘曝光）处理的结果来检查 衬底的第一图像，并且通过使用衬底的第二图像来检测在衬底上产生的图案缺陷。