Abstract:
A surface emission type electron source including a first electrode having a planar form, a second electrode having a planar form facing the first electrode, an electron passage layer disposed between the first electrode and the second electrode, an insulator or semiconductor layer between the second electrode and the electron passage layer, and a power source part configured to apply a voltage to the second electrode and the first electrode. The electron passage layer includes plural quantum wires extending in a first direction from the first electrode to the second electrode. The quantum wires are made of silicon and spaced apart from each other at predetermined intervals, and electrons are emitted from a front surface of the second electrode. Protrusions protruding toward leading ends of the quantum wires are formed on a back surface of the second electrode at positions corresponding to the quantum wires.
Abstract:
An electron emitting device includes an amorphous electron supply layer, an insulating layer formed on the electron supply layer, and an electrode formed on the insulating layer. The electron emits device emitting electrons when an electric field is applied between the electron supply layer and the electrode. The electron emitting device includes a concave portion provided by notching the electrode and the insulating layer to expose the electron supply layer, and a carbon layer covering the electrode and the concave portion except for an inner portion of an exposed surface 4a of the electron supply layer and being in contact with an edge portion of the exposed surface of the electron supply layer.
Abstract:
An electron emitting element of the present invention includes an electron acceleration layer provided between an electrode substrate and a thin-film electrode, which electron acceleration layer includes (a) conductive fine particles and (b) insulating fine particles having an average particle diameter greater than that of the conductive fine particles. The electron emitting element satisfies the following relational expression: 0.3x+3.9≦y≦75, where x (nm) is an average particle diameter of the insulating fine particles, and y (nm) is a thickness of the thin-film electrode 3. Such a configuration allows modification of the thickness of the thin-film electrode with respect to the size of the insulating particles, thereby ensuring electrical conduction and allowing sufficient current to flow inside the element. As a result, stable emission of ballistic electrons from the thin-film electrode is possible.
Abstract:
A surface emission type electron source according to the present invention includes a first electrode having a planar form; a second electrode having a planar form facing the first electrode; an electron passage layer disposed between the first electrode and the second electrode; and a power source part configured to apply a voltage to the second electrode and the first electrode. The electron passage layer includes plural quantum wires extending in a first direction from the first electrode to the second electrode. The quantum wires are spaced apart from each other at predetermined intervals, and electrons are emitted from a front surface of the second electrode. The quantum wires are made of silicon, and each of the quantum wires has plural thin parts having small thicknesses formed at predetermined intervals along the first direction.
Abstract:
The electronic device includes a substrate, a first electrode formed over a surface of the substrate, a second electrode located on an opposite side of the first electrode from the substrate so as to face the first electrode, and a functional layer interposed between the first electrode and second electrode and formed by means of anodizing a first polycrystalline semiconductor layer in an electrolysis solution so as to contain a plurality of semiconductor nanocrystals. The electronic device further includes a second polycrystalline semiconductor layer interposed between the first electrode and the functional layer so as to be in close contact with the functional layer. The second polycrystalline semiconductor layer has an anodic oxidization rate in the electrolysis solution lower than that of the first polycrystalline semiconductor layer so as to function as a stop layer for exclusively anodizing the first polycrystalline semiconductor layer.
Abstract:
PROBLEM TO BE SOLVED: To provide a piezoelectric-film-type electron emitter of high durability improved in degradation of electron emission quantity caused by repeated use. SOLUTION: This electron emitter 120 includes a substrate 121, a lower electrode 122, an emitter layer 123, and an upper electrode 124. The upper electrode 124 has a plurality of openings 124a formed therein, and an emitter section 125 located on the top surface of the emitter layer 123 is exposed through the openings 124a to a reduced-pressure atmosphere. The electron emitter 120 is configured so that, when a pulse-like drive voltage Va is applied between the lower electrode 122 and the upper electrode 124, electrons are accumulated on the emitter section 125, and thereafter the electrons are emitted toward the reduced-pressure atmosphere. The emitter layer 123 contains a primary component (i.e., a ferroelectric composition) and an additional component. The additional component contains a transition metal oxide of a high oxidation number which serves as an oxidizing agent and is thereby converted into an oxide of a lower oxidation number. COPYRIGHT: (C)2007,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a surface emission type electron source and a drawing device that can perform pattern drawing using the electron beam in equimultiples collectively even when a drawing region is large. SOLUTION: A surface emission type electron source includes a planar first electrode, a planar second electrode provided in opposition to the first electrode, an electron passage layer provided between the first electrode and the second electrode, and a power supply section for applying voltage to the second electrode and the first electrode. In the electron passage layer, multiple quantum fine lines extending in a first direction heading for the second electrode from the first electrode are provided with a predetermined interval therebetween. Electrons are emitted from the surface of the second electrode. COPYRIGHT: (C)2009,JPO&INPIT