-
公开(公告)号：EP2141494A4
公开(公告)日：2012-10-24
申请号：EP08739702
申请日：2008-04-02
Applicant: HORIBA STEC CO LTD
Inventor： AOKI JUNJI , KITAURA HIROKAZU , SAID BOUMSELLEK
CPC classification number: H01J49/0009 , G01L21/30 , H01J41/02 , H01J41/10 , H01J49/0027
-
公开(公告)号：EP1895296A1
公开(公告)日：2008-03-05
申请号：EP06746538.5
申请日：2006-05-17
Applicant: ULVAC, INC.
Inventor： Nakajima, Toyoaki , Yoshizawa, Hideki
IPC: G01N27/62
Abstract: A mass spectrometer is provided which is mounted on a wall portion of a chamber and analyzes a gas to be analyzed existing in the chamber. The mass spectrometer includes: a measurement unit which is inserted into the chamber at the time of mounting the mass spectrometer to the chamber and measures each partial pressure of gaseous components in the gas to be analyzed with respect to mass-to-charge ratios; a control unit which is disposed outside of the wall portion at the time of mounting the mass spectrometer on the chamber and is used to manipulate the measurement unit; and a display unit which is disposed outside of the wall portion at the time of mounting the mass spectrometer on the chamber and displays the measurement result of the measurement unit. Here, the measurement unit, the control unit, and the display unit are disposed close to each other.
Abstract translation: 提供了一种质谱仪，其安装在室的壁部分上并分析存在于腔室中的待分析气体。 质谱仪包括：测量单元，其在将质谱仪安装到室时插入室中，并测量关于质荷比的待分析气体中的气体组分的每个分压; 控制单元，其在将所述质谱仪安装在所述室上时设置在所述壁部的外侧，并用于操纵所述测量单元; 以及显示单元，其在将质谱仪安装在室上时设置在壁部的外侧，并显示测量单元的测量结果。 这里，测量单元，控制单元和显示单元彼此靠近配置。
-
">33.发明授权Improvements in operating quadrupole mass spectrometers in the broadband "RF only" mode 失效在宽带“射频”模式下操作QUADRUPOLE质谱仪的改进
公开(公告)号：EP0117717B1
公开(公告)日：1989-05-31
申请号：EP84301140.4
申请日：1984-02-22
Applicant: VG INSTRUMENTS GROUP LIMITED
Inventor： Batey, Jonathan Hugh
IPC: H01J49/42
CPC classification number: H01J41/10 , H01J49/4215
-
公开(公告)号：KR1020100007930A
公开(公告)日：2010-01-22
申请号：KR1020097024728
申请日：2008-04-14
Applicant: 가부시키가이샤 아루박
CPC classification number: G01N27/62 , G01L21/30 , H01J41/10 , H01J49/0027
Abstract: A mass spectrometry unit comprising a mass spectrometry section for measuring the partial pressure by detecting the ion current value for every mass charge ratio of gas to be measured is further provided with a control section for previously holding the record of the mass charge ratio of a specific gas which causes decline of the function at a specific part of the mass spectrometry unit. When the ion current value of mass charge ratio of the specific gas detected at the mass spectrometry section reaches a predetermined value, the control section outputs a signal warning the functional decline at the specific part.
Abstract translation: 包含用于通过检测待测气体的每个质荷比的离子电流值来测量分压的质谱分析单元还设置有控制部分，用于预先保存特定的气体的质量比的记录 导致在质谱分析单元的特定部分功能下降的气体。 当在质谱分析部分检测到的比气体的质量充电比的离子电流值达到预定值时，控制部分输出警告特定部分功能衰减的信号。
-
公开(公告)号：JP5087079B2
公开(公告)日：2012-11-28
申请号：JP2009510815
申请日：2008-04-02
Applicant: 株式会社堀場エステック
Inventor： 潤次 青木 , 宏和 北浦 , ブームセレク サイード
IPC: G01N27/62
CPC classification number: H01J49/0009 , G01L21/30 , H01J41/02 , H01J41/10 , H01J49/0027
-
Patent Agency Ranking36.发明专利Partial pressure detection method of specific gas and quadrupole mass analyzer 有权特殊气体和四分之一质量分析仪的部分压力检测方法
公开(公告)号：JP2008209181A
公开(公告)日：2008-09-11
申请号：JP2007044969
申请日：2007-02-26
Applicant: Ulvac Japan Ltd , 株式会社アルバック
Inventor： NAKAJIMA TOYOAKI , KUROKAWA YUJIRO , YURI TSUTOMU
CPC classification number: H01J41/10 , G01L21/32 , H01J49/4215
Abstract: PROBLEM TO BE SOLVED: To provide a partial pressure detection method of a specific gas capable of correcting the partial pressure measured under a high-pressure atmosphere to a good value without using a total pressure measuring means. SOLUTION: The partial pressure of the specific gas in a gas to be measured is detected by measuring the ion current value corresponding to the mass charge ratio of the specific gas using a quadrupole mass analyzer 10. The measured value of a first ion current value corresponding to the mass charge ratio of the specific gas is corrected using the measured value of a second ion current value corresponding to the mass change ratio wherein the peak of an ion current value does not appears to calculate the actual partial pressure of the specific gas. COPYRIGHT: (C)2008,JPO&INPIT
Abstract translation: 解决的问题：提供一种能够在不使用总压力测量装置的情况下，将能够在高压气氛下测量的分压校正为良好值的特定气体的分压检测方法。 解决方案：通过使用四极质量分析器10测量与特定气体的质荷比相对应的离子电流值来检测待测气体中的比气体的分压。第一离子的测量值 使用与质量变化率对应的第二离子电流值的测定值来校正与特定气体的质量比例对应的电流值，其中离子电流值的峰值似乎不计算特定气体的实际分压 加油站。 版权所有（C）2008，JPO＆INPIT
-
公开(公告)号：KR1020080021665A
公开(公告)日：2008-03-07
申请号：KR1020077029219
申请日：2006-05-17
Applicant: 가부시키가이샤 아루박
IPC: G01N27/62
Abstract: This invention provides a mass analyzer that is mounted on the wall part of a chamber for analyzing an analyte gas present in the chamber. The mass analyzer comprises a measuring part, which, when the mass analyzer is mounted in the chamber, is inserted into the chamber for measuring the partial pressure for each mass charge ratio of the gas component in the analyte gas, an operating part, which, when the mass analyzer is mounted in the chamber, is located on the outer side of the wall part for operating the measuring part, and a display part which, when the mass analyzer is mounted in the chamber, is located on the outer side of the wall part for displaying the measurement results of the measuring part. The mass analyzer is characterized in that the measuring part, the operating part, and the display part are located closely to each other. ® KIPO & WIPO 2008
Abstract translation: 本发明提供了一种质量分析器，其安装在室的壁部分上，用于分析存在于室中的分析物气体。 质量分析器包括测量部件，当质量分析器安装在腔室中时，其被插入到腔室中，用于测量分析气体中的气体成分的每个质荷比的分压，操作部件， 当质量分析器安装在腔室中时，位于用于操作测量部件的壁部分的外侧上，以及显示部分，当质量分析器安装在腔室中时，显示部分位于 用于显示测量部件的测量结果的壁部分。 质量分析器的特征在于测量部分，操作部分和显示部分彼此紧密地定位。 ®KIPO＆WIPO 2008
-
-
-
公开(公告)号：JP2006329662A
公开(公告)日：2006-12-07
申请号：JP2005149626
申请日：2005-05-23
Applicant: Ulvac Japan Ltd , 株式会社アルバック
Inventor： NAKAJIMA TOYOAKI , YOSHIZAWA HIDEKI
IPC: G01N27/62
Abstract: PROBLEM TO BE SOLVED: To provide a mass spectrometer 1 capable of executing efficiently various inspections for a vacuum device.
SOLUTION: An operation part 30 and a display part 16 for a measured result are provided in an electric system part 14 connected to a measuring part 12 for measuring partial pressure in every mass charge ratio to control the measuring part 12. A display switching button 32 is provided in the operation part 30 to display switchingly the partial pressure in every of the plurality of kinds of mass charge ratios. The display part 16 displays also a ratio of the partial pressure of nitrogen gas having 28 of mass charge ratio to the partial pressure of oxygen gas having 32 of mass charge ratio.
COPYRIGHT: (C)2007,JPO&INPITAbstract translation: 要解决的问题：提供能够有效地执行真空装置的各种检查的质谱仪1。 解决方案：测量结果的操作部分30和显示部分16设置在连接到测量部分12的电气系统部分14中，用于测量每个质量充电比例中的分压，以控制测量部分12.显示器 切换按钮32设置在操作部30中，以切换显示多种质量充气比中的每一种的分压。 显示部16还显示了具有28质量比的氮气的分压与具有32质量比的氧气分压的比率。 版权所有（C）2007，JPO＆INPIT
-
-
-
-
-
-
-
-
-
Search Results
51
records
(took 0.018 seconds)
