公开(公告)号：FR2306522A1

公开(公告)日：1976-10-29

申请号：FR7609534

申请日：1976-04-01

Applicant: PHILIPS NV

IPC: H01J9/44 ,  H01J29/51 ,  H01J29/54 ,  H01J29/70 ,  H01J3/07

Abstract: An in-line CRT features a static convergence means. It has at most two permanent magnets in or around the tube neck before the deflection coils.

公开(公告)号：US08835868B2

公开(公告)日：2014-09-16

申请号：US14108844

申请日：2013-12-17

Applicant: NuFlare Technology, Inc.

Inventor： Takanao Touya ,  Munehiro Ogasawara

IPC: H01J3/07 ,  H01J37/141 ,  G21K5/04 ,  H01J37/317

CPC classification number: H01J37/3177 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/3007 ,  H01J2237/04922 ,  Y10S430/143

Abstract: A multi charged particle beam writing apparatus includes a stage to mount a target object thereon and to be movable, an emission unit to emit a charged particle beam, an aperture member, in which a plurality of openings are formed, to produce multiple beams by letting a region including the whole of a plurality of openings be irradiated with the charged particle beam and letting portions of the charged particle beam respectively pass through a corresponding opening of a plurality of openings, a reduction optical system to reduce the multiple beams, and a doublet lens, arranged at the subsequent stage of the reduction optical system, in which a magnification is 1 and directions of magnetic fluxes are opposite.

Abstract translation: 一种多带电粒子束写入装置，包括：载置目标物体并可移动的载台，发射带电粒子束的发射单元，形成有多个开口的孔径构件，通过放电产生多个波束 对包含整个多个开口的区域照射带电粒子束并使带电粒子束的部分分别穿过多个开口的对应开口，还原光学系统以减少多个光束，并且双峰 透镜，布置在还原光学系统的后续阶段，其中放大率为1，磁通量的方向相反。

公开(公告)号：US08772734B2

公开(公告)日：2014-07-08

申请号：US13727710

申请日：2012-12-27

Applicant: Canon Kabushiki Kaisha

Inventor： Toshiro Yamanaka

IPC: H01J3/07 ,  H01J37/147 ,  H01J3/26

CPC classification number: G21K5/04 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/09 ,  H01J37/3177 ,  H01J2237/026 ,  H01J2237/0435 ,  H01J2237/31794

Abstract: A lithograph apparatus that performs writing on a substrate with a plurality of charged particle beams. A blanking deflector array blanks the plurality of charged particle beams. An aperture array blocks n charged particle beam deflected by the blanking deflector array. A sealing mechanism seals an opening or at least one of the blanking deflector array and the aperture array with a shielding material that shields a charged particle beam. A moving mechanism moves the substrate so that the writing is performed with a blankable charged particle beam instead of an unblankable charged particle beam shielded by the shielding material.

Abstract translation: 在多个带电粒子束的基板上进行写入的平版印刷装置。 消隐偏转器阵列空白多个带电粒子束。 孔径阵列阻挡由消隐偏转器阵列偏转的带电粒子束。 密封机构利用遮蔽带电粒子束的屏蔽材料来密封消隐偏转器阵列和孔径阵列中的开口或至少一个。 移动机构移动基板，使得用可无遮挡的带电粒子束执行写入，而不是屏蔽材料屏蔽的不可白化的带电粒子束。

公开(公告)号：US06906453B2

公开(公告)日：2005-06-14

申请号：US10842899

申请日：2004-05-10

Applicant: Michael Mauck

Inventor： Michael Mauck

IPC: G21K1/00 ,  C23C14/54 ,  G21K1/093 ,  G21K5/04 ,  H01J3/07 ,  H01J37/04 ,  H01J37/147 ,  H01J37/153 ,  H01J37/21 ,  H01J37/30 ,  H01J37/317 ,  H01L21/027 ,  H05H7/06

CPC classification number: G01N23/04 ,  G21K1/093 ,  H01J37/147 ,  H01J37/3005 ,  H01J37/3007 ,  Y10S977/869 ,  Y10S977/881 ,  Y10S977/887 ,  Y10S977/89

Abstract: A system for joining at least two beams of charged particles that includes directing a first beam along a first axis into a field. A second beam is directed along a second axis into the field. The first and second beams are turned, by interaction between the field and the first and second beams, into a third beam directed along a third axis.

Abstract translation: 一种用于连接至少两束带电粒子的系统，包括将第一光束沿着第一轴线引导到场中。 沿着第二轴将第二光束引导到场中。 第一和第二光束通过场和第一和第二光束之间的相互作用转动成沿着第三轴指向的第三光束。

公开(公告)号：DE4230880A1

公开(公告)日：1994-03-17

申请号：DE4230880

申请日：1992-09-16

Applicant: PHILIPS PATENTVERWALTUNG

Inventor： BUCHMANN FRANZ DR RER NAT

IPC: H01J35/06 ,  H05B1/00 ,  H05G1/34 ,  H05G1/46 ,  H05G1/52 ,  H01J35/14 ,  H01J35/04 ,  H01J3/07

Abstract: The invention relates to an X-ray generator for supplying an X-ray tube (1) which has at least two electron sources (11, 12) for producing a focus spot of different size at the same point on the anode in each case. In this case, the resolution capability can be matched to the respective requirements by allocating in each case one control unit (21, 22) to each electron source, which control unit produces a current (which is dependent on a control signal at a control input of the control unit) between the associated electron source and the anode (10), by both control units acting while an X-ray photograph is being taken, and by the control signals, and hence the ratio between the mAs products supplied by the electron sources, being adjustable.

公开(公告)号：NO170310B

公开(公告)日：1992-06-22

申请号：NO860548

申请日：1986-02-14

Applicant: HUGHES AIRCRAFT CO

Inventor： HARVEY ROBIN J ,  GALLAGHER HAYDEN E

IPC: H01J3/02 ,  H01J3/04 ,  H01J17/38 ,  H01J3/07 ,  H01J17/44 ,  H01S3/09 ,  H01S3/097

Abstract: An electron beam controlled switch employing a radial geometry and a Wire-Ion Plasma-Electron gun (WIP E-gun) as an electron source is disclosed. The switch comprises an inner cylinder that serves as the WIP E-gun cathode, a cylindrical grid that serves as the WIP E-gun anode, an array of fine wire anodes disposed in the WIP E-gun ionization chamber, a foil support cylinder to support the foil windows which also serve as the switch anode, and an outer cylinder which also serves as the switch cathode. The WIP E-gun and ionization chamber is gas filled at low pressure, while the switch cavity is filled with a high pressure gas. A voltage pulse is applied to the wire anodes to ionize the gas in the ionization chamber. The ions are extracted through the chamber grid and accelerated through a high voltage to bombard the E-gun cathode. The electrons emitted from the ion bombardment are accelerated outwardly through the high voltage, penetrate through the foil windows and into the pressurized gas in the switch cavity. The high energy electrons ionize the gas between the switch anode and cathode, thereby turning "ON" the switch. In the absence of the electron beam, the switch gas deionizes and switch conduction is quickly extinguished.

公开(公告)号：CA1109114A

公开(公告)日：1981-09-15

申请号：CA315412

申请日：1978-10-31

Applicant: PHILIPS NV

Inventor： BRAMBRING JOERG ,  VAN DER VEN ROBERT F L M

IPC: H01J29/50 ,  H01J29/48 ,  H01J29/62 ,  H01J3/07

Abstract: A small haze around the spot on the display screen in the corners and at the edge of the display screen is obtained by causing the first grid to form a multipole lens in cooperation with the cathode, which lens mainly is a first quadrupole lens and in cooperation with the second grid also forms a multipole lens which is also a mainly second quadrupole lens and which is rotated 90.degree. with respect to the first quadrupole lens. Such a system of lenses in the first grid can be formed, for example, by giving the aperture in the first grid an elongate cross section both on the side of the cathode and on the side of the second grid, the long axis of said elongate cross-section on the side of the cathode extending substantially at right angles to the long axis of the elongate cross-section on the side of the second grid.

公开(公告)号：CA1108683A

公开(公告)日：1981-09-08

申请号：CA313898

申请日：1978-10-23

Applicant: RCA CORP

Inventor： HUGHES RICHARD H

IPC: H01J29/48 ,  H01J3/07

Abstract: RCA 72,430 ELECTRON GUN EXHIBITING REDUCED FLARE A bipotential type of electron gun comprising,in the order named, a cathode aligned with a plurality of apertured electrodes including a control grid, a screen grid, a first accelerating and focusing electrode, and a second accelerating and focusing electrode. The first accelerating and focusing electrode comprises a hollow member with aligned apertures at opposite ends thereof. The hollow member comprises a first axial portion of magnetic material adjacent to the screen grid and a second axial portion of nonmagnetic material adjacent to the second accelerating and focusing electrode. The electron gun is especially adapted for use in a cathode ray tube operated with a magnetic deflection yoke which includes a pair of toroidal type vertical deflection coils which generate a magnetic fringe field within the region of the first accelerating and focusing electrode.

公开(公告)号：DD145681A5

公开(公告)日：1980-12-24

申请号：DD21525979

申请日：1979-08-29

Applicant: RCA CORP

Inventor： BARKOW WILLIAM H

IPC: H01J29/76 ,  H04N9/28 ,  H01J3/07

Abstract: A deflection yoke of the self-converging type uses pincushion-shaped horizontal deflection fields and barrel-shaped vertical deflection fields for converging three in-line electron beams and includes a first pair of magnets disposed near the top and bottom of the beam exit end of the yoke. Each magnet is poled to produce a field having the same polarity as the vertical deflection field during the interval in which the electron beam is deflected towards the magnet. A second pair of magnets is disposed at the top and bottom of the inside of the flared inner surface of the yoke at a generally central position between the beam entrance and beam exit ends of the yoke, each of which is poled for producing a field of a polarity opposite to that of the vertical deflection field when deflecting the beam towards the respective magnet. The first and second magnet pairs coact to correct North-South pincushion distortion without substantial effect on the convergence. A third pair of magnets is disposed at the top and bottom of the inside flare of the yoke between the beam entrance end of the yoke and the second pair of magnets and is poled in the same direction as the first magnet pair. The third magnet pair reduces the sensitivity of the convergence to the position of the deflection yoke relative to the electron beams.

公开(公告)号：AR210486A1

公开(公告)日：1977-08-15

申请号：AR26230876

申请日：1976-02-19

Applicant: PHILIPS NV

IPC: H01J9/44 ,  H01J29/51 ,  H01J29/54 ,  H01J29/70 ,  H01J3/07

Abstract: An in-line CRT features a static convergence means. It has at most two permanent magnets in or around the tube neck before the deflection coils.