Method and Device For Mutual Contacting of Two Wafers
    41.
    发明申请
    Method and Device For Mutual Contacting of Two Wafers 有权
    两个晶片相互接触的方法和装置

    公开(公告)号:US20080171404A1

    公开(公告)日:2008-07-17

    申请号:US11572105

    申请日:2005-07-11

    Abstract: A method and a device for the mutual contacting of two wafer-type component composite configurations made of multiple identical components which are implemented coherently, in particular a semiconductor wafer (12) with a functional component wafer (14), to produce electronic assemblies on the wafer level, in which the component composite configurations are each situated on a receptacle unit (11; 13) and the contact pressure necessary for the contacting between contact metallizations of the component composite configurations to be connected to one another is generated in such a way that a vacuum is generated in a contact chamber which receives the component composite configurations and is delimited by the receptacle units, and the contacting of the contact metallizations is performed by a rear energy impingement of a component composite configuration.

    Abstract translation: 一种用于相互接触的两个晶片型部件复合结构相互接触的方法和装置,所述两个晶片型部件复合结构由相干地实现的多个相同部件,特别是具有功能部件晶片(14)的半导体晶片(12)制成,以在其上产生电子组件 晶片级,其中部件复合结构各自位于插座单元(11; 13)上,并且以相互连接的部件复合结构的接触金属化之间的接触所需的接触压力被产生,使得 在接收室中产生真空,该接触室接收组件复合结构,并由容器单元限定,并且接触金属化的接触通过组件复合构造的后能量冲击来执行。

    Method for producing a contact substrate and corresponding contact substrate
    42.
    发明授权
    Method for producing a contact substrate and corresponding contact substrate 有权
    接触基板和相应接触基板的制造方法

    公开(公告)号:US07049213B2

    公开(公告)日:2006-05-23

    申请号:US10333767

    申请日:2002-05-22

    Abstract: The invention relates to a method for producing a contact substrate (10) as well as to a contact substrate with through-plating between a connector arrangement (21) arranged at the top of a dielectric carrier substrate (12) and the underside of the carrier substrate, wherein the connector arrangement extends along an aperture margin (22) of a substrate recess (15), and the underside (11) of the carrier substrate (12) is supported by a backstop (23), wherein a formed solder material part (24) is placed in the substrate recess (15), and in a subsequent method-related step said formed solder material part (24) is deformed within the substrate recess so as to form a formed contact part (50), such that radial displacement of the material of the formed solder material part in the substrate recess results in a non-positive connection between an intrados surface (28) of the substrate recess and the connector arrangement (21), and that the formed contact part provides through-plating between the connector arrangement (21) and the underside (11) of the carrier substrate.

    Abstract translation: 本发明涉及一种用于制造接触衬底(10)的方法以及在布置在电介质载体衬底(12)的顶部处的连接器装置(21)和载体的下侧之间的具有穿镀的接触衬底 基板,其中所述连接器装置沿着基板凹部(15)的孔边缘(22)延伸,并且所述载体基板(12)的下侧(11)由止回件(23)支撑,其中形成的焊料材料部分 (24)被放置在基板凹部(15)中,并且在随后的方法相关步骤中,所形成的焊料材料部分(24)在基板凹部内变形,以形成形成的接触部分(50),使得径向 衬底凹陷中形成的焊料材料部分的材料的位移导致衬底凹槽的凹入表面(28)和连接器装置(21)之间的非正连接,并且形成的接触部分提供 在连接器装置(21)和载体基板的下侧(11)之间的电镀。

    Device for producing connections between two respective contact elements
by means of laser energy
    47.
    发明授权
    Device for producing connections between two respective contact elements by means of laser energy 失效
    用于通过激光能量在两个相应接触元件之间产生连接的装置

    公开(公告)号:US6072148A

    公开(公告)日:2000-06-06

    申请号:US987881

    申请日:1997-12-08

    Inventor: Ghassem Azdasht

    Abstract: A device for producing by means of laser energy a plurality of connectionsetween contact elements of respective contact element pairs has a holding arrangement for holding a plurality of optical fibers having respective optical fiber ends. A positioner is provided for positioning the holding arangement and the contact element pairs at a predetermined position relative to one another, at which a respective optical fiber end is associated with a pair of contact elements, the connection surfaces of the contact elements of said pair of contact elements being pressed onto one another by a pressure applied by said optical fiber. Said connecting device additionally comprises a device for compensating different distances between the optical fiber ends and the surfaces of the associated contact element pairs facing said optical fiber ends, in such a way that the connection surfaces of the contact elements are pressed onto one another.

    Abstract translation: 用于通过激光能量生产各个接触元件对的接触元件之间的多个连接的装置具有保持多个具有相应光纤端部的光纤的保持装置。 定位器被设置用于将保持装置和接触元件对定位在相对于彼此的预定位置处,在该位置处相应的光纤端与一对接触元件相关联,所述一对接触元件的连接表面 接触元件被所述光纤施加的压力压在彼此上。 所述连接装置还包括用于补偿光纤端部与面对所述光纤端部的相关联的接触元件对的表面之间的不同距离的装置,使得接触元件的连接表面被压在彼此上。

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